公开(公告)号：US5917281A

公开(公告)日：1999-06-29

申请号：US954961

申请日：1997-10-21

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J1/32 ,  H01J43/06 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J43/18

CPC分类号： H01J43/06 ,  H01J43/22

摘要： According to the photomultiplier tube, the dynode unit 10 is constructed from a plurality of stages of dynodes 11 laminated one on another for multiplying incident electrons in a cascade manner through each of a plurality of channels. The anode unit 13 has a plurality of anodes 24 which define a plurality of electron passage gaps 14 each for transmitting the electrons emitted from the dynode unit 10 at a corresponding channel. The inverting dynode plate 15 is provided with a plurality of electron incident strips 17 each for receiving electrons having passed through a corresponding electron passage gap 14 in the anode unit 13, multiplying the electrons, and guiding the electrons back to the corresponding anode 24. The electron incident strip 17 is designed to have: the main surface 18a confronting the electron passage gap 14; and the rising surface 18c rising toward the anode unit 13 from the edge 18b of the main surface 18a which is located at a position confronting the electron passage gap 14 in the anode unit 13.

摘要翻译： 根据光电倍增管，倍增电极单元10由层叠在多个阶段的倍增电极11构成，用于通过多个通道中的每一个以级联方式对入射电子进行倍增。 阳极单元13具有多个阳极24，其限定多个电子通道间隙14，每个电子通道间隙14用于在相应的通道处传输从倍增极单元10发射的电子。 反相倍增极板15设置有多个电子入射条17，每个电子入射条17用于接收通过阳极单元13中的相应电子通道间隙14的电子，乘以电子，并将电子引导回相应的阳极24。 电子入射条17被设计为具有面对电子通道间隙14的主表面18a; 并且上升面18c从主面18a的位于与阳极单元13的电子通过间隙14相对的位置的边缘18b向阳极单元13上升。

公开(公告)号：US08673167B2

公开(公告)日：2014-03-18

申请号：US13361079

申请日：2012-01-30

申请人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Araki

发明人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Araki

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

CPC分类号： H01L23/481 ,  B23K26/382 ,  B23K26/384 ,  B23K26/40 ,  B23K26/55 ,  B23K2103/50 ,  B81B2203/0353 ,  B81B2203/0384 ,  B81C1/00087 ,  B81C2201/0143 ,  H01L21/30608 ,  H01L21/76898 ,  H01L2924/0002 ,  H01L2924/00012 ,  H01L2924/00

摘要： A laser processing method for forming a hole in a sheet-like object to be processed made of silicon comprises a depression forming step of forming a depression in a part corresponding to the hole on a laser light entrance surface side of the object, the depression opening to the laser light entrance surface; a modified region forming step of forming a modified region along a part corresponding to the hole in the object by converging a laser light at the object after the depression forming step; and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the hole in the object; wherein the modified region forming step exposes the modified region or a fracture extending from the modified region to an inner face of the depression.

摘要翻译： 在由硅制成的待加工的片状物体中形成孔的激光加工方法包括凹陷形成步骤，在与物体的激光入射面侧的孔对应的部分形成凹部，凹部开口 到激光入射面; 改变区域形成步骤，通过在所述凹陷形成步骤之后会聚所述物体上的激光，沿着与所述物体中的所述孔相对应的部分形成改质区域; 以及在改质区域形成工序后对物体进行各向异性蚀刻的蚀刻工序，以沿着改质区域选择性地进行蚀刻，并在物体上形成孔; 其中所述改性区域形成步骤将所述改性区域或从所述改质区域延伸的断裂暴露于所述凹陷的内表面。

公开(公告)号：US20120125893A1

公开(公告)日：2012-05-24

申请号：US13388597

申请日：2011-07-19

申请人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Araki

发明人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Araki

IPC分类号： B44C1/22 ,  H01L21/306

CPC分类号： H01L23/147 ,  B23K26/0006 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/56 ,  H01L21/30608 ,  H01L21/486 ,  H01L21/76898 ,  H01L23/49827

摘要： In a method comprising a modified region forming step of converging a laser light at a sheet-like object to be processed made of silicon so as to form a plurality of modified spots within the object along a modified region forming line tilted in a first lateral direction with respect to a thickness direction of the object and the plurality of modified spots construct a modified region, and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the object with a space extending obliquely with respect to the thickness direction, the modified region forming step forms the plurality of modified spots such that the modified spots adjacent to each other at least partly overlap each other when seen in the first lateral direction.

摘要翻译： 在包括修改区域形成步骤的方法中，所述修改区域形成步骤将激光会聚在由硅制成的待加工的片状物体上，以沿着沿第一横向方向倾斜的改质区域形成线在物体内形成多个改质点 相对于物体的厚度方向，并且所述多个改质点构成改质区域，以及在所述改质区域形成工序之后对所述物体进行各向异性蚀刻的蚀刻工序，以沿着所述改质区域选择性地进行蚀刻，并形成所述物体 具有相对于厚度方向倾斜延伸的空间，所述改质区域形成步骤形成所述多个改质点，使得当在所述第一横向方向上观察时，彼此相邻的所述改性斑点彼此至少部分重叠。

公开(公告)号：US08115386B2

公开(公告)日：2012-02-14

申请号：US12709682

申请日：2010-02-22

申请人： Hideki Shimoi ,  Hitoshi Kishita ,  Tsuyoshi Kodama ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hitoshi Kishita ,  Tsuyoshi Kodama ,  Hiroyuki Kyushima

IPC分类号： H01J43/18

CPC分类号： H01J43/243

摘要： Electrons are prevented from being made incident onto an insulation part of a casing between dynodes to improve a withstand voltage. The photomultiplier tube 1 is a photomultiplier tube which is provided with substrates 20, 40 arranged so as to oppose each other, with the respective opposing surfaces 20a, 40a made with an insulating material, a substrate 30 constituting a casing together with the substrates 20, 40, dynodes 31a to 31j arrayed on an opposing surface 40a on the substrate 40 so as to be spaced away sequentially from a first end side to a second end side, a photocathode 22 installed so as to be spaced away from the dynode 31a to the first end side, and an anode part 32 installed so as to be spaced away from the dynode 31j to the second end side, in which the opposing surface 20a of the substrate 20 is formed so as to cover the dynodes 31a to 31j, and a plurality of conductive layers 21a to 21j set equal in potential to dynodes 31a to 31j which are electrically independent from each other are installed at sites opposing individually the dynodes 31a to 31j on the opposing surface 20a.

摘要翻译： 防止电子入射到倍增极之间的壳体的绝缘部分上以提高耐受电压。 光电倍增管1是光电倍增管，其配置有彼此相对配置的基板20,40，由绝缘材料制成的相应的相对表面20a，40a，与基板20一起构成壳体的基板30， 如图40所示，倍增极31a至31j排列在基板40上的相对表面40a上，以便从第一端侧至第二端侧依次间隔开，安装成与倍增极31a间隔开的光电阴极22 第一端侧和阳极部32，其被安装成与倍增极31j间隔开至第二端侧，其中形成基板20的相对表面20a以覆盖倍增极31a至31j，并且 在彼此电独立的倍增极31a至31j的电位相等的多个导电层21a至21j安装在相对表面20a上的与倍增极31a至31j单独的位置处。

公开(公告)号：US07928657B2

公开(公告)日：2011-04-19

申请号：US11921934

申请日：2006-06-01

申请人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Hiroyuki Sugiyama ,  Hitoshi Kishita ,  Suenori Kimura ,  Yuji Masuda ,  Takayuki Ohmura

发明人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Hiroyuki Sugiyama ,  Hitoshi Kishita ,  Suenori Kimura ,  Yuji Masuda ,  Takayuki Ohmura

IPC分类号： H01J40/00 ,  H01J40/16

CPC分类号： H01J43/06

摘要： The present invention relates to a photomultiplier having a fine configuration capable of realizing stable detection accuracy. The photomultiplier has a housing whose inside is maintained vacuum, and a photocathode, an electron-multiplier section, and an anode are disposed in the housing. In particular, one or more control electrodes disposed in an internal space of the housing which surrounds the electron-multiplier section and the anode are electrically connected via one or more connection parts extending from an electron emission terminal of the electron-multiplier section. In this configuration, due to a voltage, instead of the applying between an electron entrance terminal and the electron emission terminal of the electron-multiplier section, being applied between the electron entrance terminal and the control electrodes, an electric potential gradient which is increased gradually from the photocathode side toward the anode side is formed in the electron-multiplier section, and a sufficient electric potential difference is provided between the electron emission terminal of the electron-multiplier section and the anode, which makes it possible to obtain stable detection accuracy.

摘要翻译： 本发明涉及具有能够实现稳定的检测精度的精细结构的光电倍增管。 光电倍增管具有内部保持真空的壳体，并且光电阴极，电子倍增器部分和阳极设置在壳体中。 特别地，设置在外壳的内部空间中的一个或多个控制电极，其围绕电子倍增器部分和阳极通过从电子倍增器部分的电子发射端延伸的一个或多个连接部分电连接。 在该结构中，由于电压而不是在电子入射端子和电子倍增器部分的电子发射端子之间施加，而被施加在电子入射端子和控制电极之间，逐渐增加的电位梯度 在电子倍增部形成从光电阴极侧朝向阳极侧，在电子倍增部的电子发射端与阳极之间设置充分的电位差，能够得到稳定的检测精度。

公开(公告)号：US07838810B2

公开(公告)日：2010-11-23

申请号：US12224378

申请日：2007-02-27

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J31/50 ,  H01J40/14

CPC分类号： H01J43/28

摘要： A vacuum vessel is configured by hermetically joining a faceplate to one end of a side tube and a stem to the other end via a tubular member. A photocathode, a focusing electrode, dynodes, a drawing electrode, and anodes are arranged within the vacuum vessel. At the center of the stem an air discharging tube is connected. The air discharging tube includes an outer side tube and an inner side tube, which are disposed coaxially and connected to each other at the stem side. The outer side tube has high adhesiveness with the stem and the inner side tube is thin and has small stress when being cut, thereby enabling the joint with the vacuum vessel not to be damaged when the air discharging tube is sealed.

摘要翻译： 真空容器通过经由管状构件将面板与侧管的一端气密地接合到另一端而构成。 在真空容器内设置光电阴极，聚焦电极，倍增极，牵伸电极和阳极。 在阀杆的中心连接一个排气管。 排气管包括同轴并且在杆侧彼此连接的外侧管和内侧管。 外侧管与杆的密合性高，内侧管较薄，切断时的应力小，能够在排气管密封的情况下使真空容器的接头不被损坏。

公开(公告)号：US20090200940A1

公开(公告)日：2009-08-13

申请号：US12225412

申请日：2007-03-07

申请人： Hideki Shimoi ,  Kazuhiro Hara ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Kazuhiro Hara ,  Hiroyuki Kyushima

IPC分类号： H01J43/20

CPC分类号： H01J43/20

摘要： A vacuum vessel (18) is configured by hermetically joining a faceplate (13) with one end of a side tube (15) and hermetically joining a stem (50) with another end via a ring-shaped side tube (37). Within the vacuum vessel (18), a focus electrode (17), dynodes (Dy1-Dy9), an anode (25), and a dynode (Dy10) are arranged from the side of a photocathode (14) provided to the faceplate (13). The dynode (Dy10) is supported on spacers (33) and a positioning protrusion (31) provided on the stem (50). The anode (25) is placed on support members (21). The focus electrode (17), the dynodes (Dy1-Dy9), and the anode (25) are stacked with inter-layer members (23) interposed therebetween, the inter-layer members (23) being located coaxially with the support members (21), to ensure high anti-vibration performance. Because the anode (25) and the dynode (Dy10) have no insulating body therebetween, light emission is suppressed and noises can be reduced.

摘要翻译： 真空容器（18）通过将面板（13）与侧管（15）的一端气密接合并通过环形侧管（37）与另一端气密地连接在一起的杆（50）构成。 在真空容器（18）内，从设置在面板（18）的光电阴极（14）的一侧配置聚焦电极（17），倍增极（Dy1-Dy9），阳极（25）和倍增极（Dy10） 13）。 倍增极（Dy10）被支撑在间隔件（33）和设置在杆（50）上的定位突起（31）上。 阳极（25）放置在支撑构件（21）上。 聚焦电极（17），倍增电极（Dy1-Dy9）和阳极（25）被层叠，层间部件（23）插入其间，层间部件（23）与支撑部件 21），以确保高抗振性能。 由于阳极（25）和倍增极（Dy10）之间没有绝缘体，所以抑制了发光，并且可以降低噪声。

公开(公告)号：US07189956B2

公开(公告)日：2007-03-13

申请号：US11189006

申请日：2005-07-26

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J21/20 ,  H01J43/04

CPC分类号： H01J43/28

摘要： In a photomultiplier, a ring-like side tube is not interposed between a side tube and a stem in the radial direction, and the side tube is joined to the ring-like side tube in a state of being directly capped onto a portion of the stem that protrudes out from an open end face at the upper side of the ring-like side tube. The enlargement of the photomultiplier in the radial direction due to overlapping of the side tube and the ring-like side tube can thereby be restricted and a high density, a high degree of integration, etc., can be realized in mounting the photomultiplier.

摘要翻译： 在光电倍增管中，环状侧管在径向上不夹在侧管和杆之间，侧管与环状侧管接合，直接被盖在一部分 杆从环状侧管的上侧的开口端面突出。 由此，可以限制由于侧管和环状侧管的重叠而在径向方向上的光电倍增管的放大，并且在安装光电倍增管时可以实现高密度，高集成度等。

公开(公告)号：US07132639B2

公开(公告)日：2006-11-07

申请号：US11189135

申请日：2005-07-26

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J21/20 ,  H01J43/04

CPC分类号： H01J43/28

摘要： A holding member or a base member, through which stem pins are passed and one surface of which is held by the holding member, is joined to the stem pins and the holding member by fusion by the melting of the base member. Upon melting, a volume of the base member is made to escape into a base member seep portion, and a stem is arranged as a two-layer arrangement formed by the holding of the base member by the holding member. When the holding member is joined to the inner surface of the base member, the inner surface of the stem is improved in positional precision, flatness, and levelness, while when the holding member is joined to the outer surface of the base member, the outer surface of the stem is improved in positional precision, flatness, and levelness.

摘要翻译： 保持构件或基部构件通过杆销通过，其一个表面由保持构件保持，通过基座构件的熔化而熔化而连接到杆销和保持构件。 在熔化时，基体的体积被排出到基体部分渗出部分中，并且杆被布置为通过保持部件保持基体部件而形成的双层布置。 当保持构件接合到基部构件的内表面时，杆的内表面的位置精度，平坦度和水平度提高，而当保持构件接合到基部构件的外表面时，外部 杆的表面在位置精度，平整度和水平度方面得到改善。

公开(公告)号：US20060028134A1

公开(公告)日：2006-02-09

申请号：US11246528

申请日：2005-10-11

申请人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

发明人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

IPC分类号： H01J43/04

CPC分类号： H01J31/507 ,  H01J43/045 ,  H01J43/22

摘要： A dynode constituting an electron multiplier or a photomultiplier may be provided with eight rows of channels each defined by an outer frame and a partitioning part of the dynode. In each channel, a plurality of electron multiplying holes may be arranged. In specified positions of the outer frame and the partitioning part of the dynode, glass receiving parts wider than the outer frame and the partitioning part may be provided integrally with the dynode. Glass parts may be bonded to all the glass receiving parts. The glass parts may be bonded by applying glass to the glass receiving parts and hardening the glass and each may have a generally dome-like convex shape. Each dynode may be formed after the dome-like glass part may be bonded to the glass receiving part.