Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film
    31.
    发明授权
    Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film 有权
    用于薄膜气相沉积的烧结氧化硅,其制造方法和氧化硅蒸镀膜的制造方法

    公开(公告)号:US08066806B2

    公开(公告)日:2011-11-29

    申请号:US13040838

    申请日:2011-03-04

    IPC分类号: C01B33/113 C23C16/40

    摘要: A sintered silicon oxide for film vapor deposition having a density of 1.0 to 2.0 g/cm3, three-point flexural strength of at least 50 g/mm2, and a BET specific surface area of 0.1 to 20 m2/g is provided. When this sintered silicon oxide is used for evaporation source of a film, pin holes and other defects of the film caused by the problematic splash phenomenon can be reliably prevented and stable production of a reliable package material having excellent gas barrier property is been enabled. This invention also provides a method for producing such sintered silicon oxide, and this method can be used in a large scale production without requiring any special technology, and therefore, this method is capable of supplying the market with the sintered silicon oxide at reduced cost.

    摘要翻译: 提供密度为1.0〜2.0g / cm 3,三点弯曲强度为至少50g / mm 2,BET比表面积为0.1〜20m 2 / g的薄膜蒸镀烧结二氧化硅。 当该烧结氧化硅用于膜的蒸发源时,可以可靠地防止由有问题的溅射现象引起的针孔和其它缺陷,并且能够稳定地生产具有优异阻气性的可靠的封装材料。 本发明还提供了一种制造这种烧结氧化硅的方法,并且该方法可以大规模生产而不需要任何特殊技术,因此该方法能够以降低的成本为市场提供烧结氧化硅。

    Method for producing silicon oxide powder
    32.
    发明授权
    Method for producing silicon oxide powder 有权
    氧化硅粉末的制造方法

    公开(公告)号:US07794681B2

    公开(公告)日:2010-09-14

    申请号:US11790031

    申请日:2007-04-23

    CPC分类号: C01B33/113 C01B33/182

    摘要: An efficient method for producing a silicon oxide powder at a low cost is provided. This method comprises the steps of heating a powder mixture of a silicon dioxide powder and a metal silicon powder to a temperature of 1,100 to 1,450° C. in an inert gas or under reduced pressure to generate silicon monoxide gas, and precipitating the silicon monoxide gas on a surface of a substrate to produce the silicon oxide powder, and in this method, the silicon dioxide powder has an average particle diameter of up to 1 μm, and the metal silicon powder has an average particle diameter of 30 μm.

    摘要翻译: 提供了一种以低成本生产氧化硅粉末的有效方法。 该方法包括以惰性气体或减压的方式将二氧化硅粉末和金属硅粉末的粉末混合物加热至1100〜1450℃的温度,生成一氧化硅气体,使一氧化硅气体 在基板的表面上形成氧化硅粉末,在该方法中,二氧化硅粉末的平均粒径为1μm以下,金属硅粉的平均粒径为30μm。

    Apparatus for the continuous production of silicon oxide powder
    35.
    发明授权
    Apparatus for the continuous production of silicon oxide powder 有权
    用于连续生产氧化硅粉末的设备

    公开(公告)号:US07431899B2

    公开(公告)日:2008-10-07

    申请号:US10784259

    申请日:2004-02-24

    IPC分类号: C01B33/20

    摘要: A silicon oxide powder can be continuously prepared by feeding a raw material powder mixture containing silicon dioxide powder into a reaction chamber (2) at a temperature of 1,100-1,600° C., to produce a silicon oxide gas, transferring the silicon oxide gas to a deposition chamber (11) through a transfer conduit (10) maintained at a temperature of from higher than 1,000° C. to 1,300° C., causing silicon oxide to deposit on a substrate (13) which is disposed and cooled in the deposition chamber, scraping the silicon oxide deposit, and recovering the deposit in a recovery chamber (18). The method and apparatus is capable of continuous and stable production of amorphous silicon oxide powder of high purity.

    摘要翻译: 可以通过在1100〜1600℃的温度下将含有二氧化硅粉末的原料粉末混合物进料到反应室(2)中来连续制备氧化硅粉末,以产生氧化硅气体,将氧化硅气体转移到 沉积室(11),其通过保持在高于1,000℃至1300℃的温度的转移管道(10),使得氧化硅沉积在沉积物中的基底(13)上,所述基底(13)在沉积物中被设置和冷却 刮擦氧化硅沉积物,并将沉积物回收到回收室(18)中。 该方法和装置能够连续且稳定地生产高纯度的无定形氧化硅粉末。

    Method for producing silicon oxide powder
    37.
    发明申请
    Method for producing silicon oxide powder 有权
    氧化硅粉末的制造方法

    公开(公告)号:US20070248525A1

    公开(公告)日:2007-10-25

    申请号:US11790031

    申请日:2007-04-23

    IPC分类号: C01B33/12

    CPC分类号: C01B33/113 C01B33/182

    摘要: An efficient method for producing a silicon oxide powder at a low cost is provided. This method comprises the steps of heating a powder mixture of a silicon dioxide powder and a metal silicon powder to a temperature of 1,100 to 1,450° C. in an inert gas or under reduced pressure to generate silicon monoxide gas, and precipitating the silicon monoxide gas on a surface of a substrate to produce the silicon oxide powder, and in this method, the silicon dioxide powder has an average particle diameter of up to 1 μm, and the metal silicon powder has an average particle diameter of 30 μm.

    摘要翻译: 提供了一种以低成本生产氧化硅粉末的有效方法。 该方法包括以惰性气体或减压的方式将二氧化硅粉末和金属硅粉末的粉末混合物加热至1100〜1450℃的温度,生成一氧化硅气体,使一氧化硅气体 在基板的表面上形成氧化硅粉末,在该方法中,二氧化硅粉末的平均粒径达到1μm,金属硅粉的平均粒径为30μm。

    Preparation of fine &bgr;-silicon carbide powder
    39.
    发明授权
    Preparation of fine &bgr;-silicon carbide powder 失效
    精细β-碳化硅粉末的制备

    公开(公告)号:US06730283B2

    公开(公告)日:2004-05-04

    申请号:US10096849

    申请日:2002-03-14

    IPC分类号: C01B3136

    摘要: A fine &bgr;-silicon carbide powder is prepared by impregnating graphite with an organosilicon compound selected from crosslinkable silanes and siloxanes, causing the organosilicon compound to crosslink within the graphite, and heating at 1,300° C. or higher in an inert gas stream for reaction. Using only low-temperature heat treatment in air and high-temperature heat treatment in inert gas, the invention enables industrial, economical manufacture of fine silicon carbide powder in a stable manner.

    摘要翻译: 通过用选自可交联硅烷和硅氧烷的有机硅化合物浸渍石墨,使有机硅化合物在石墨内交联并在惰性气流中加热至1300℃以上进行反应来制备精细的β-碳化硅粉末。 在惰性气体中仅使用空气中的低温热处理和高温热处理,本发明能够以稳定的方式工业化,经济地制造细小的碳化硅粉末。