公开(公告)号：US07155964B2

公开(公告)日：2007-01-02

申请号：US11133802

申请日：2005-05-21

申请人： Lin Huang ,  Chanmin Su

发明人： Lin Huang ,  Chanmin Su

IPC分类号： G01R29/12

CPC分类号： G01Q20/04 ,  G01Q10/065 ,  G01Q30/06 ,  G01Q30/18 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/40 ,  G01Q60/48

摘要： The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

摘要翻译： 优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，包括在探针的扭转共振下振荡SPM的探针，并且通常同时测量电特性，例如电流，电容，阻抗 等等，在SPM的探针和由扭转共振模式控制的分离的样品之间。 优选地，在使用扭转共振反馈以维持SPM操作的设定点的同时执行测量步骤。

公开(公告)号：US07107825B2

公开(公告)日：2006-09-19

申请号：US10456136

申请日：2003-06-06

申请人： F. Levent Degertekin ,  Chanmin Su ,  Peter G. Neilson

发明人： F. Levent Degertekin ,  Chanmin Su ,  Peter G. Neilson

IPC分类号： G01B5/28

CPC分类号： G01Q30/14 ,  G01N29/0681 ,  G01N29/2456 ,  G01N29/346 ,  G01N2291/02827 ,  G01N2291/0427 ,  G01Q60/32 ,  G01S17/08 ,  Y10S977/872

摘要： An electromagnetic drive causes a cantilever of a probe-based instrument to deform flexurally by transmitting a high frequency AC signal through an electromagnetic actuator located in the vicinity of the cantilever. The AC signal preferably is an RF carrier signal having a frequency that is substantially higher than the resonant frequency of the cantilever. The carrier signal may, if desired, be modulated with a lower frequency modulation signal to induce the cantilever to oscillate, preferably at resonance. Alternatively, the carrier signal may be transmitted to the electromagnetic actuator without being modulated in order to deflect the cantilever quasi-statically. Cantilever response can then be monitored either directly in response to the imposition of the electromagnetically induced deformation of the cantilever in response to probe/sample interaction to obtain measurements regarding characteristics of the sample, the environment, and/or the cantilever.

摘要翻译： 电磁驱动器使基于探针的仪器的悬臂通过位于悬臂附近的电磁致动器传递高频交流信号而弯曲变形。 AC信号优选地是具有基本上高于悬臂的谐振频率的频率的RF载波信号。 如果需要，载波信号可以用较低频率的调制信号进行调制，以诱导悬臂振荡，优选地在谐振。 或者，可以将载波信号传送到电磁致动器而不被调制以便准静态偏转悬臂。 然后响应于响应于探针/样品相互作用的电磁诱导悬臂变形而直接监测悬臂​​响应，以获得关于样品，环境和/或悬臂的特性的测量。

公开(公告)号：US20160356809A1

公开(公告)日：2016-12-08

申请号：US15241029

申请日：2016-08-18

申请人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

发明人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

IPC分类号： G01Q30/04 ,  G01Q60/22

CPC分类号： G01Q30/04 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22

摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.

摘要翻译： 用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感 场相互作用。 通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。 测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。 仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。 纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。

公开(公告)号：US08322220B2

公开(公告)日：2012-12-04

申请号：US12119382

申请日：2008-05-12

申请人： Craig Prater ,  Chanmin Su

发明人： Craig Prater ,  Chanmin Su

IPC分类号： G01N29/06

CPC分类号： G01Q60/06 ,  G01N29/0681 ,  G01Q60/32

摘要： A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.

摘要翻译： 在样本上的多个位置成像子表面特征的方法和相应的装置包括在第一横向位置将超声波耦合到样本中。 然后该方法用原子力显微镜的尖端测量样品附近的超声波能量的振幅和相位。 接下来，该方法在第二横向位置将超声波耦合到样品中，并且对于第二横向位置重复测量步骤。 总体而言，本系统和方法实现了广泛范围样品的高分辨率子表面映射，包括硅晶片。 值得注意的是，当成像晶片时，背面污染被最小化。

公开(公告)号：US08161805B2

公开(公告)日：2012-04-24

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28 ,  G01Q90/00

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定接触的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。

公开(公告)号：US07748260B2

公开(公告)日：2010-07-06

申请号：US11457079

申请日：2006-07-12

申请人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

发明人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

IPC分类号： G01B5/28 ,  G01Q60/58

CPC分类号： G01Q10/045

摘要： A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

摘要翻译： 一种用于具有探针的测量仪器的驱动致动器，所述驱动致动器包括与所述探针具有导热关系的加热元件，使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针，其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂，以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。

公开(公告)号：US07596990B2

公开(公告)日：2009-10-06

申请号：US11106366

申请日：2005-04-14

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28 ,  G01N13/16

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.

摘要翻译： 控制基于探针的悬臂式仪器是为了抵消由于探针样品相互作用而对探针施加的横向载荷。 探针优选地包括主动悬臂，例如所谓的双压电晶片悬臂。 优选地通过监测探针操作的横向力相关性质（例如悬臂自由端偏转角）来实现力抵抗，并且在反馈下向悬臂和一个或多个单独的致动器中的至少一个施加电压以保持该特性作为探针 样品间距减小。 探头可以进一步使用接触弯曲和扭转共振特性中的至少一个来确定接触点和释放点。 通过对尖端特征的了解，可以获得探针样品相互作用的定量机械数据。

公开(公告)号：US20070119241A1

公开(公告)日：2007-05-31

申请号：US11669034

申请日：2007-01-30

申请人： Chanmin Su ,  Robert Daniels

发明人： Chanmin Su ,  Robert Daniels

IPC分类号： G12B21/02 ,  G01N13/10

CPC分类号： G01Q10/06 ,  G01Q60/26 ,  G01Q60/32 ,  G01Q60/34 ,  G01Q60/38

摘要： A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

摘要翻译： 操作扫描探针显微镜的方法包括使用具有悬臂的探针，并以其扭转共振频率振动探针。 此外，该方法包括通过设置在探针或探针基座上的双重致动器显着提高扭转驱动效率。 第一和第二致动器可以由相应的第一和第二驱动信号驱动，第一和第二驱动信号相位相差180度。 最大化步骤包括改变第一和第二驱动信号的幅度中的至少一个以最大化扭转振荡。 可以通过调整相应的驱动信号的相位来同时，顺序地或独立地激励悬臂探头的扭转和弯曲振荡。 可以使用一对悬臂部件来通过在远端旋转具有相应末端部分的各个臂来形成纳米制造者。

公开(公告)号：US07168301B2

公开(公告)日：2007-01-30

申请号：US10937597

申请日：2004-09-09

申请人： Chanmin Su ,  Robert C. Daniels

发明人： Chanmin Su ,  Robert C. Daniels

IPC分类号： G01B5/28

CPC分类号： G01Q10/06 ,  G01Q60/26 ,  G01Q60/32 ,  G01Q60/34 ,  G01Q60/38

摘要： A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.

摘要翻译： 操作扫描探针显微镜的方法包括使用具有悬臂的探针，并以其扭转共振频率振动探针。 此外，该方法包括通过设置在探针或探针基座上的双重致动器显着提高扭转驱动效率。 第一和第二致动器可以由相应的第一和第二驱动信号驱动，第一和第二驱动信号相位相差180度。 最大化步骤包括改变第一和第二驱动信号的幅度中的至少一个以最大化扭转振荡。 可以通过调整相应的驱动信号的相位来同时，顺序地或独立地激励悬臂探头的扭转和弯曲振荡。 可以使用一对悬臂部件来通过在远端旋转具有相应末端部分的各个臂来形成纳米制造者。

公开(公告)号：US06945099B1

公开(公告)日：2005-09-20

申请号：US10189108

申请日：2002-07-02

申请人： Chanmin Su ,  Kenneth L. Babcock ,  Lin Huang

发明人： Chanmin Su ,  Kenneth L. Babcock ,  Lin Huang

IPC分类号： G01Q10/06 ,  G01Q60/26 ,  G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/26

摘要： An apparatus and method of operating a probe-based instrument in a torsional mode. The method includes providing a probe having a cantilever defining a longitudinal axis and supporting a tip. In operation, the method torsionally oscillates the probe generally about the longitudinal axis at a resonance. In addition, the method changes a separation distance between the tip and a surface of a sample so the tip interacts with the surface during data acquisition. By detecting a change in the torsional oscillation of the cantilever in response to the interaction between the tip and the surface, forces, including shear forces and shear force gradients, between the tip and the surface can be measured to determine sub-nanometer features.

摘要翻译： 在扭转模式下操作基于探针的仪器的装置和方法。 该方法包括提供具有限定纵向轴线并支撑尖端的悬臂的探针。 在操作中，该方法通常围绕纵轴在谐振下使探头振荡。 此外，该方法改变了尖端和样品表面之间的分离距离，使得尖端在数据采集期间与表面相互作用。 通过检测悬臂的扭转振动响应于尖端和表面之间的相互作用的变化，可以测量尖端和表面之间的力，包括剪切力和剪切力梯度，以确定亚纳米特征。