公开(公告)号：US20060283246A1

公开(公告)日：2006-12-21

申请号：US11153664

申请日：2005-06-15

Applicant: Marc Weinberg ,  Jonathan Bernstein ,  Jeffrey Borenstein ,  Richard Elliott ,  Gregory Kirkos ,  Anthony Kourepenis

Inventor： Marc Weinberg ,  Jonathan Bernstein ,  Jeffrey Borenstein ,  Richard Elliott ,  Gregory Kirkos ,  Anthony Kourepenis

IPC: G01P15/08

CPC classification number: G01C19/5733 ,  G01P15/125

Abstract: A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

Abstract translation: 音叉陀螺仪设计，其中至少一个检测质量被支撑在基板上方。 至少一个驱动电极也被支撑在与基体相邻的衬底上。 通常，检测质量块和驱动电极包括交错的电极指。 在证明物质下方的基板上的感应板或屏蔽电极在证明质量的电极指的范围内完全延伸。

公开(公告)号：US06989921B2

公开(公告)日：2006-01-24

申请号：US09939422

申请日：2001-08-24

Applicant: Jonathan Bernstein ,  William P. Taylor ,  Gregory A. Kirkos ,  Marc Waelti

Inventor： Jonathan Bernstein ,  William P. Taylor ,  Gregory A. Kirkos ,  Marc Waelti

IPC: G02B26/00

CPC classification number: B81B3/0062 ,  B81B7/04 ,  B81B2201/045 ,  B81B2207/015 ,  B81C2203/0109 ,  B81C2203/035 ,  G02B26/0841 ,  G02B26/085

Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.

公开(公告)号：US20060011862A1

公开(公告)日：2006-01-19

申请号：US11182337

申请日：2005-07-14

Applicant: Jonathan Bernstein

Inventor： Jonathan Bernstein

IPC: G01J1/58 ,  G01N21/64

CPC classification number: B01L3/502715 ,  B01L3/502761 ,  B01L2200/0663 ,  B01L2300/0654 ,  B01L2300/0825 ,  B01L2300/0877 ,  B01L2400/086 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y30/00 ,  G01N21/05 ,  G01N21/6428 ,  G01N21/648 ,  G01N2021/0346 ,  G01N2021/6419 ,  G01N2021/6441

Abstract: The apparatus and methods described herein provide improved resolution, high-throughput, biomolecule identification by exciting sub-wavelength regions of biomolecules drawn through a microfluidic channel.

公开(公告)号：US20050024707A1

公开(公告)日：2005-02-03

申请号：US10631087

申请日：2003-07-31

Applicant: Jonathan Bernstein ,  Mehmet Dokmeci

Inventor： Jonathan Bernstein ,  Mehmet Dokmeci

IPC: G02B6/26 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  G02F1/23

CPC classification number: G02B6/357 ,  G02B6/266 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/3584 ,  G02B6/3594 ,  G02B26/0841 ,  Y10S359/904

Abstract: A novel spatial light modulator system has a high fill factor MEMS array of tilting mirrors used to attenuate wavelength channels in an optical network and an interface control circuit controlling the tilting mirror array via received control signals. The control signals include definitions of the wavelength channels and desired attenuation. This control circuit may or may not be on the same chip as the mirror array. Each mirror is supported by one or more flexures, located symmetrically or asymmetrically with respect to the mirror's center of gravity, providing single-axis or two-axis rotation. Stiffener ribs at mirror edges provide a flatter mirror. Landing electrodes held at the same potential as the mirror prevent stiction, while strain relief slots relieve stress on the mirror or flexures. Mirrors fabricated from polysilicon or metal are polished flat using a CMP technique. This SLM design is non-interferometric, therefore increased angular tilt provides increased attenuation.

Abstract translation: 一种新颖的空间光调制器系统具有用于衰减光网络中的波长信道的倾斜镜的高填充因子MEMS阵列和经由接收的控制信号控制倾斜镜阵列的接口控制电路。 控制信号包括波长信道的定义和期望的衰减。 该控制电路可以或可以不在与镜阵列相同的芯片上。 每个镜子由相对于镜子的重心对称或不对称的一个或多个弯曲部支撑，提供单轴或双轴旋转。 镜面边缘的加强筋提供更平坦的镜子。 保持在与镜子相同电位的着陆电极防止静电，而应力消除槽释放反射镜上的应力或弯曲。 使用CMP技术将由多晶硅或金属制成的反射镜抛光平面。 这种SLM设计是非干涉式的，因此增加的角度倾斜提供增加的衰减。

公开(公告)号：US06388789B1

公开(公告)日：2002-05-14

申请号：US09666018

申请日：2000-09-19

Applicant: Jonathan Bernstein

Inventor： Jonathan Bernstein

IPC: G02B2608

CPC classification number: G02B6/3572 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  Y10S359/90

Abstract: A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

Abstract translation: 公开了一种多轴磁致动装置，多轴磁致动装置的阵列以及制造多轴磁致动装置的方法。 此外，公开了一种光开关，其由多轴磁致动装置的阵列和适于接收诸如光纤的光波导的端口阵列组成。 本发明的多轴磁力驱动装置能够沿两个正交方向旋转运动。 在一个实施例中，多轴磁致动装置包括两个嵌套旋转构件，嵌套在外旋转构件内的内旋转构件，其又嵌套在基构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件，外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 内部扭转弯曲限定了内部旋转轴线，而外部扭转挠曲限定了外部旋转轴线。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 散装微加工技术使得部件能够由单片硅晶片形成，并且可以产生具有光滑表面的部件。 构件的光滑表面可以用作反射器。 在一个实施例中，内旋转构件用作反射器。