SYSTEMS AND METHODS FOR IMPROVING MEASUREMENT OF LIGHT TRANSMITTANCE THROUGH INK DEPOSITED ON A SUBSTRATE
    31.
    发明申请
    SYSTEMS AND METHODS FOR IMPROVING MEASUREMENT OF LIGHT TRANSMITTANCE THROUGH INK DEPOSITED ON A SUBSTRATE 审中-公开
    用于改善通过在基底上沉积的墨水的光传输测量的系统和方法

    公开(公告)号:US20090185186A1

    公开(公告)日:2009-07-23

    申请号:US12329587

    申请日:2008-12-06

    IPC分类号: G01N21/00

    摘要: Systems, methods and apparatus for manufacturing color filters for flat panel displays are provided that include an inkjet printing system integrated with a light transmittance measurement system. The inkjet printing system includes a stage for supporting and moving a substrate past inkjet print heads adapted to deposit ink in pixel wells on the substrate. The light transmittance measurement system includes a sensor and a light source disposed on opposite sides of the substrate and adapted to determine the thickness of the ink deposited on the substrate. The light source is adapted to move with the sensor to allow different pixel wells containing deposited ink to be measured, and the stage includes at least one optical path to allow light from the light source to pass through the deposited ink to the sensor.

    摘要翻译: 提供了一种用于制造用于平板显示器的滤色器的系统,方法和装置,其包括与透光率测量系统集成的喷墨打印系统。 喷墨打印系统包括用于支撑和移动基板的台架,该台架适用于在基板上的像素孔中沉积墨水的喷墨打印头。 透光率测量系统包括设置在基板的相对侧上的传感器和光源,并且适于确定沉积在基板上的墨水的厚度。 光源适于与传感器一起移动以允许测量包含沉积的墨的不同像素孔,并且该台包括至少一个光路,以允许来自光源的光通过沉积的墨通过传感器。

    Methods and apparatus for purging a substrate during inkjet printing
    33.
    发明申请
    Methods and apparatus for purging a substrate during inkjet printing 审中-公开
    在喷墨打印期间吹扫基材的方法和装置

    公开(公告)号:US20080024548A1

    公开(公告)日:2008-01-31

    申请号:US11494254

    申请日:2006-07-26

    IPC分类号: B41J2/165

    CPC分类号: B41J2/16552 B41J29/17

    摘要: The invention provides an inkjet printing apparatus that includes at least one inkjet print head adapted to dispense fluids onto a substrate and at least one delivery aperture adapted to direct a gas toward the substrate. The apparatus may also include at least one recovery aperture adapted to draw materials away from the substrate and evaporate liquids from the surface of the substrate.

    摘要翻译: 本发明提供了一种喷墨打印设备,其包括适于将流体分配到基底上的至少一个喷墨打印头和适于将气体引向基底的至少一个输送孔。 该装置还可以包括至少一个适于将材料从衬底拉出并从衬底的表面蒸发液体的回收孔。

    INKJET DELIVERY MODULE
    34.
    发明申请
    INKJET DELIVERY MODULE 审中-公开
    INKJET传送模块

    公开(公告)号:US20070070132A1

    公开(公告)日:2007-03-29

    申请号:US11535475

    申请日:2006-09-26

    IPC分类号: B41J2/175

    CPC分类号: B41J2/175

    摘要: A cabinet for housing an ink supply is provided for use with an inkjet printing system. The cabinet, ink supply, and related structures are set apart from inkjet print heads in the inkjet printing system. Accordingly, the cabinet provides a location to store and supply quantities of ink and may make service and replacement of parts and/or consumables simpler and more accessible. The cabinet also houses components used to process and/or supply ink to inkjet print heads such as solvent, fluid delivery mechanisms (e.g., pumps, gas pressure devices, etc.), tubes, sensors, filters, exhaust, and drainage.

    摘要翻译: 提供用于容纳墨水供应的机壳,用于与喷墨打印系统一起使用。 橱柜,墨水供应和相关结构与喷墨打印系统中的喷墨打印头分开。 因此,机柜提供存储和供应数量的墨水的位置,并且可以使零件和/或消耗品的维修和更换更简单和更易于使用。 机柜还容纳用于处理和/或向喷墨打印头供应墨水的部件,例如溶剂,流体输送机构(例如泵,气体压力装置等),管,传感器,过滤器,排气和排放。

    Methods and apparatus for inkjet print head cleaning
    35.
    发明申请
    Methods and apparatus for inkjet print head cleaning 审中-公开
    喷墨打印头清洁方法和设备

    公开(公告)号:US20070068560A1

    公开(公告)日:2007-03-29

    申请号:US11238631

    申请日:2005-09-29

    IPC分类号: B08B7/00 B08B3/00 B41J2/165

    CPC分类号: B41J2/16535 B41J2/16526

    摘要: Methods and apparatus for cleaning a nozzle plate of an inkjet print head are provided. A first method includes positioning a cleaning medium proximate the inkjet print head, determining a pressure for a pressure roller to apply against the cleaning medium, contacting the cleaning medium with the pressure roller with the determined pressure, and moving the cleaning medium relative to the inkjet print head so as to clean the inkjet print head. The method also includes purging ink from the inkjet print head prior to the pressure roller contacting the cleaning medium and pre-jetting ink from the inkjet print head after moving the cleaning medium. Numerous other aspects are provided.

    摘要翻译: 提供了用于清洁喷墨打印头的喷嘴板的方法和装置。 第一种方法包括将清洁介质定位在喷墨打印头附近,确定压力辊施加在清洁介质上的压力,使清洁介质与压力辊以确定的压力接触,并且相对于喷墨打印机移动清洁介质 打印头以清洁喷墨打印头。 该方法还包括在加压辊接触清洁介质之前从喷墨打印头清洗墨水,并在移动清洁介质之后从喷墨打印头预喷墨。 提供了许多其他方面。

    Low temperature process for passivation applications
    36.
    发明授权
    Low temperature process for passivation applications 有权
    钝化应用的低温工艺

    公开(公告)号:US07086918B2

    公开(公告)日:2006-08-08

    申请号:US10317774

    申请日:2002-12-11

    IPC分类号: H01J9/00 H01J9/24

    CPC分类号: H01L51/5253

    摘要: An organic electroluminescent device comprising an anode layer on a substrate, an organic layer on the anode layer, and a cathode layer on the organic layer. In one embodiment, the cathode layer is subjected to H2 plasma prior to deposition of a protective layer over the cathode. In another embodiment, the organic electroluminescent device is encapsulated with an inner encapsulation layer on the cathode layer, and an outer encapsulation layer on the inner encapsulation layer. The inner layer is optimized for adhesion to the cathode layer.

    摘要翻译: 一种有机电致发光器件,包括在衬底上的阳极层,阳极层上的有机层和有机层上的阴极层。 在一个实施例中,在阴极上沉积保护层之前,将阴极层经受H 2 O 3等离子体。 在另一个实施方案中,有机电致发光器件被封装在阴极层上的内部封装层和内部封装层上的外部封装层。 内层被优化用于与阴极层的粘附。

    Method and apparatus for in-situ film stack processing
    38.
    发明申请
    Method and apparatus for in-situ film stack processing 失效
    用于原位膜堆叠处理的方法和装置

    公开(公告)号:US20050224181A1

    公开(公告)日:2005-10-13

    申请号:US10821723

    申请日:2004-04-08

    摘要: Embodiments of a cluster tool, processing chamber and method for processing a film stack are provided. In one embodiment, a method for in-situ etching of silicon and metal layers of a film stack is provided that includes the steps of etching an upper metal layer of the film stack in a processing chamber to expose a portion of an underlying silicon layer, and etching a trench in the silicon layer without removing the substrate from the processing chamber. The invention is particularly useful for thin film transistor fabrication for flat panel displays.

    摘要翻译: 提供了一种用于处理薄膜叠层的集群工具,处理室和方法的实施例。 在一个实施例中,提供了一种用于原位蚀刻膜堆叠的硅和金属层的方法,其包括以下步骤:在处理室中蚀刻膜堆叠的上金属层以暴露下层硅层的一部分, 并且在硅层中蚀刻沟槽而不从处理室移除衬底。 本发明对于平板显示器的薄膜晶体管制造特别有用。

    Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition
    39.
    发明授权
    Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition 有权
    用于大面积等离子体增强化学气相沉积的气体分配板组件

    公开(公告)号:US06942753B2

    公开(公告)日:2005-09-13

    申请号:US10417592

    申请日:2003-04-16

    CPC分类号: C23C16/45565 C23C16/5096

    摘要: Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having a plurality of gas passages passing between an upstream side and a downstream side of the diffuser plate. At least one of the gas passages includes a first hole and a second hole coupled by an orifice hole. The first hole extends from the upstream side of the diffuser plate while the second hole extends from the downstream side. The orifice hole has a diameter less than the respective diameters of the first and second holes.

    摘要翻译: 提供了用于在处理室中分配气体的气体分配板的实施例。 在一个实施例中,气体分配板包括具有通过扩散板的上游侧和下游侧之间的多个气体通道的扩散板。 至少一个气体通道包括第一孔和通过孔口联接的第二孔。 第一孔从扩散板的上游侧延伸,而第二孔从下游侧延伸。 孔口的直径小于第一孔和第二孔的直径。