公开(公告)号：US07911623B2

公开(公告)日：2011-03-22

申请号：US11890575

申请日：2007-08-07

申请人： Pinyen Lin ,  Peter M. Gulvin ,  Yao Rong Wang ,  Lalit Keshav Mestha

发明人： Pinyen Lin ,  Peter M. Gulvin ,  Yao Rong Wang ,  Lalit Keshav Mestha

IPC分类号： G01B9/02

CPC分类号： G02B26/001 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  G03G2215/00616

摘要： Disclosed is a microelectromechanically tunable Fabry-Perot device and method of manufacturing tunable Fabry-Perot device and method of manufacturing. The F-P device comprises a first and second substrate which has partially reflective planar surfaces, and the partially reflective planar surfaces are separated by a predetermined separation distance and aligned to provide a F-P cavity, where one or more piezoelectric members are adapted to displace the first and second substrates when an electric field is applied.

摘要翻译： 公开了一种微机电可调法布里 - 珀罗器件和制造可调谐法布里 - 珀罗器件的方法和制造方法。 FP器件包括第一和第二衬底，其具有部分反射的平面表面，并且部分反射的平面表面被隔开预定的间隔距离并对齐以提供FP腔，其中一个或多个压电元件适于使第一和 施加电场时的第二基板。

公开(公告)号：US07718458B2

公开(公告)日：2010-05-18

申请号：US11853469

申请日：2007-09-11

申请人： Peter M. Gulvin ,  Donald J. Drake

发明人： Peter M. Gulvin ,  Donald J. Drake

IPC分类号： H01L21/00 ,  H01L31/00 ,  H01G5/16

CPC分类号： B81B3/0086

摘要： A method and resulting device for reducing an electrical field at an isolation gap in a capacitive actuator includes providing a bottom electrode layer and forming a pattern in the bottom electrode layer having an isolation gap between center and outer electrode components of the patterned electrode. A spacing material is deposited in the isolation gap, the spacing material having a greater height than a remainder of the patterned electrode, and a sacrificial material is deposited conformably on a surface of the patterned electrode and spacing material. The method also includes applying a deformable electrode to a surface of the sacrificial material, whereby removal of the sacrificial and spacing materials results in a greater spacing between the deformable electrode and the electrode layer at a region of the isolation gap than over a remainder of the spacing between the patterned electrode layer and deformable surface.

摘要翻译： 用于减小电容式致动器中的隔离间隙处的电场的方法和所得装置包括提供底部电极层并在底部电极层中形成图案，该图案在图案化电极的中心和外部电极组件之间具有隔离间隙。 间隔材料沉积在隔离间隙中，间隔材料具有比图案化电极的其余部分更大的高度，并且将牺牲材料顺应地沉积在图案化电极和间隔材料的表面上。 该方法还包括将可变形电极施加到牺牲材料的表面，由此去除牺牲和间隔材料导致在隔离间隙的区域处的可变形电极和电极层之间的间隔比在其余部分 图案化电极层和可变形表面之间的间距。

公开(公告)号：US06828887B2

公开(公告)日：2004-12-07

申请号：US10063762

申请日：2002-05-10

申请人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

发明人： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC分类号： H01H5122

CPC分类号： G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

摘要： A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

摘要翻译： 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。

公开(公告)号：US06661070B2

公开(公告)日：2003-12-09

申请号：US10193804

申请日：2002-07-11

申请人： Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

发明人： Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

IPC分类号： H01L2982

CPC分类号： B81C1/00666 ,  B81B2203/058 ,  B81C2201/014 ,  B81C2201/0164 ,  B81C2201/056 ,  G02B26/0833

摘要： The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.

公开(公告)号：US06508947B2

公开(公告)日：2003-01-21

申请号：US09768688

申请日：2001-01-24

申请人： Peter M. Gulvin ,  Elliott A. Eklund

发明人： Peter M. Gulvin ,  Elliott A. Eklund

IPC分类号： H01L2100

CPC分类号： B81B3/007 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B81B2201/052 ,  B81B2203/0127 ,  F04B43/043 ,  H04R7/08

摘要： A method for fabricating a membrane having a corrugated, multi-layer structure, comprising the steps of: providing a substrate having an insulator layer on the top surface of the substrate, a conductive layer on the insulator layer, a sacrificial layer on said conductive layer, and a second conductive layer; patterning a series of holes the second conductive layer to allow release etchant to have access to a second sacrificial layer; depositing the second sacrificial layer onto said second conductive layer so that the series of holes are filled with the second sacrificial layer; patterning the second sacrificial layer with a radial and/or concentric grid pattern so that a third conductive layer when deposited will form the support structure and top portion of the corrugated structure; depositing the third conductive layer so that the grid pattern is filled in and is in contact with the second conductive layer; removing the first and second sacrificial layer by immersing the device in a release etchant.

公开(公告)号：US20140022311A1

公开(公告)日：2014-01-23

申请号：US13555901

申请日：2012-07-23

申请人： Kock-Yee Law ,  Jun Ma ,  Hong Zhao ,  Peter M. Gulvin

发明人： Kock-Yee Law ,  Jun Ma ,  Hong Zhao ,  Peter M. Gulvin

IPC分类号： B41J2/05 ,  B41J2/16

CPC分类号： B41J2/1404 ,  B41J2/14064 ,  B41J2/1412

摘要： A thermal bubble jetting device including a substrate. A superoleophobic, textured surface is positioned on the substrate. The textured surface comprises one or more gaps configured for holding a gas. A receptacle is positioned in fluid communication with the textured surface. Both an inlet and nozzle are in fluid communication with the receptacle. The device includes a heater mechanism configured to expand a gas in the one or more gaps so as to sufficiently increase pressure in the receptacle to force liquid through the nozzle.

摘要翻译： 一种包括基板的热气泡喷射装置。 超疏油，有纹理的表面位于基底上。 纹理表面包括被配置用于保持气体的一个或多个间隙。 容器定位成与纹理表面流体连通。 入口和喷嘴均与容器流体连通。 该装置包括加热器机构，其构造成在一个或多个间隙中膨胀气体，以便充分增加容器中的压力以迫使液体通过喷嘴。

公开(公告)号：US20130032051A1

公开(公告)日：2013-02-07

申请号：US13195186

申请日：2011-08-01

申请人： James M. Casella ,  Peter M. Gulvin ,  Varun Sambhy ,  Kock-Yee Law ,  Hong Zhao

发明人： James M. Casella ,  Peter M. Gulvin ,  Varun Sambhy ,  Kock-Yee Law ,  Hong Zhao

IPC分类号： B41N1/00 ,  B05D3/10 ,  B23P17/04

CPC分类号： B41J2/162 ,  B41J2/1433 ,  B41J2/16 ,  B41J2/1606 ,  B41J2/1623 ,  B41J2/1639 ,  Y10T29/49126 ,  Y10T29/49401

摘要： A method and structure for an ink jet printhead aperture plate assembly which can be part of an ink jet printhead and an ink jet printer. The present teachings can include the use of a protective coverlay interposed between a press plate of a press and an anti-wetting coating on a polyimide layer which forms part of the aperture plate assembly. The coverlay can include a base material which has an elastic modulus which is at least a specified value. An embodiment of the present teachings can form an aperture plate assembly and an ink jet printhead having reduced dimpling and deformation around a nozzle opening in the aperture plate assembly.

摘要翻译： 用于喷墨打印头孔板组件的方法和结构，其可以是喷墨打印头和喷墨打印机的一部分。 本教导可以包括使用插入压力机的压板和形成孔板组件的一部分的聚酰亚胺层上的防湿涂层之间的保护性覆盖物。 覆盖物可以包括至少具有特定值的弹性模量的基材。 本教导的一个实施例可以形成孔板组件和喷墨打印头，其具有围绕孔板组件中的喷嘴开口周围的凹陷和变形。

公开(公告)号：US08083323B2

公开(公告)日：2011-12-27

申请号：US12240322

申请日：2008-09-29

申请人： Peter M. Gulvin ,  Andrew W. Hays

发明人： Peter M. Gulvin ,  Andrew W. Hays

IPC分类号： B41J2/05 ,  B41J2/04 ,  B41J29/393

CPC分类号： B41J2/14314 ,  B41J2/04528 ,  B41J2/04563 ,  B41J2/04578 ,  B41J2202/08

摘要： A chip used for dispensing a fluid such as ink provides ink-dispensing ejectors having an ink cavity over a supporting substrate, and further provides a heater for heating the ink in the cavity. The heater can be interposed between the substrate and the ink cavity to provide direct heating of ink as it is being dispensed. Various embodiments further comprise the use of the heater structure as a temperature probe to measure the temperature of the ink in the ink cavity. Other embodiments provides a chip having both a temperature probe and a heater as separate structures interposed between the ink cavity and the substrate. Further described is a temperature probe and/or heater which traverses a majority of a width of a substrate, and surrounds each drop ejector on at least two sides.

摘要翻译： 用于分配诸如油墨的流体的芯片提供在支撑基底上具有油墨腔的油墨分配喷射器，并且还提供用于加热空腔中的油墨的加热器。 加热器可以介于基板和油墨腔之间，以便在油墨被分配时直接加热油墨。 各种实施例还包括使用加热器结构作为温度探针来测量墨腔中的墨的温度。 其它实施例提供了具有温度探针和加热器两者的芯片，其作为插入在墨腔和基底之间的分离结构。 进一步描述的是温度探测器和/或加热器，其遍及衬底的宽度的大部分，并且在至少两侧围绕每个液滴喷射器。

公开(公告)号：US07734131B2

公开(公告)日：2010-06-08

申请号：US11405774

申请日：2006-04-18

申请人： Pinyen Lin ,  Peter M. Gulvin ,  Yao Rong Wang ,  Lalit K Mestha

发明人： Pinyen Lin ,  Peter M. Gulvin ,  Yao Rong Wang ,  Lalit K Mestha

IPC分类号： G02B6/42

CPC分类号： G01J3/26 ,  G02B6/29358 ,  G02B6/29395 ,  G02B26/001

摘要： A tunable Fabry-Perot filter (8, 118, 218, 318, 418) includes substrates (10, 12) with parallel generally planar facing principal surfaces (14, 16) including spaced apart facing reflective surface regions (20, 22) that are at least partially reflective over a wavelength range and define an optical gap (Gopt) therebetween. At least one substrate of the pair of substrates is light transmissive over the selected wavelength range to enable optical coupling with the optical gap. Electrodes (24, 26) are disposed on the facing principal surfaces of the substrates. The electrodes on the facing principal surfaces of the substrates are define an electrode gap therebetween such that electrical biasing of the electrodes simultaneously modifies the optical and electrode gaps.

摘要翻译： 可调谐的法布里 - 珀罗滤光器（8,118,218,318,418）包括具有平行大致平面的主要表面（14,16）的衬底（10,12），该主表面包括间隔开的面对的反射表面区域（20,22） 在波长范围内至少部分反射并且在其间限定光学间隙（Gopt）。 一对基板中的至少一个基板在所选择的波长范围内是透光的，以使得能够与光学间隙进行光耦合。 电极（24,26）设置在基板的相对的主表面上。 衬底的相对主表面上的电极在其间限定电极间隙，使得电极的电偏置同时改变光学和电极间隙。

公开(公告)号：US07583418B2

公开(公告)日：2009-09-01

申请号：US11535400

申请日：2006-09-26

申请人： Lalit K. Mestha ,  Peter M. Gulvin ,  Pinyen Lin ,  Yao Rong Wang

发明人： Lalit K. Mestha ,  Peter M. Gulvin ,  Pinyen Lin ,  Yao Rong Wang

IPC分类号： H04N1/46 ,  G06K15/00 ,  G01D18/00 ,  G06K9/00

CPC分类号： H04N1/46 ,  G01J1/4223 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/50 ,  G01J3/51 ,  G01J3/513 ,  G01J3/52 ,  G01J3/524 ,  H04N1/6033

摘要： A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches and/or images placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed senor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches or images placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.

摘要翻译： 基于微机电系统（MEMS）的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器，例如CCD或CMOS光电探测器。 对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。 以这种方式，MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。 所公开的传感器与在感光带的光敏度范围外发出光的LED一起使用的实施例可用于测量放置在标记系统内的感光带上的调色片和/或图像的光谱信息。 用于发射任何波长的光的LED的所公开的传感器的其它实施例可用于测量由标记系统放置在非感光输出基板（例如中间带或纸）上的调色片或图像的光谱信息。