摘要:
Provided is an Al alloy film for semiconductor devices, which has excellent heat resistance and is suppressed in the generation of hillocks even in cases where the Al alloy film is exposed to high temperatures, and which has low electrical resistivity as a film. The present invention relates to an Al alloy film for semiconductor devices, which is characterized by satisfying all of the features (a)-(c) described below after being subjected to a heat treatment wherein the Al alloy film is held at 500° C. for 30 minutes and by having a film thickness from 500 nm to 5 μm. (a) The maximum grain diameter of the Al matrix is 800 nm or less. (b) The hillock density is less than 1×109 pieces/m2. (c) The electrical resistivity is 10 μΩcm or less.
摘要:
An interconnection structure, containing a substrate and, in the following order from a side of the substrate: (I) a semiconductor layer; (II) a multilayer structure including (II-a) a first layer containing at least one type of an element selected from the group consisting of nitrogen, carbon and fluorine and (II-b) an Al—Si diffusion layer containing Al and Si; and (III) an Al film of pure Al or an Al alloy, wherein the at least one of element selected from the group consisting of nitrogen, carbon, and fluorine in the first layer is bonded with Si contained in the semiconductor layer.
摘要:
A soil for metal analysis having a high water content of 40% or more is dried up to 20% or less in water content within a short period of time.A filter paper 5 is laid over an inner bottom surface plate 2 of a nutsche 1. Powder of a super absorbent polymer 6 is uniformly spread (filled) on an upper surface thereof. Further, another filter paper 7 is laid thereon. A soil sample with a high water content is packed on an upper surface thereof, thereupon carrying out predrying to approximately 30% in water content. After that, the predried soil sample is added with ethanol, stirred and received in a receiving pan 38. The receiving pan 38 is arranged in a drying chamber 37. Water is supplied by a syringe 43 to a reaction vessel 42 having been filled with calcium oxide or barium oxide, thereby reacting calcium oxide or barium oxide with water. The receiving pan 38 is heated by a reaction heat generated at that moment, thereupon carrying out postdrying to make the water content 20% or less.
摘要:
Provided is a direct contact technology by which a barrier metal layer between an Al alloy interconnection composed of pure Al or an Al alloy and a semiconductor layer can be eliminated and the Al alloy interconnection can be directly and surely connected to the semiconductor layer within a wide process margin. In an interconnection structure, the semiconductor layer, and the Al alloy film composed of the pure Al or the Al alloy are provided on the substrate in this order from the substrate side. A multilayer structure of an (N, C, F) layer containing at least one type of an element selected from among a group composed of nitrogen, carbon and fluorine, and an Al—Si diffusion layer containing Al and Si is included in this order from the substrate side, between the semiconductor layer and the Al alloy film. At least the one type of the element, i.e., nitrogen, carbon or fluorine contained in the (N, C, F) layer is bonded with Si contained in the semiconductor layer.
摘要:
A soil for metal analysis having a high water content of 40% or more is dried up to 20% or less in water content within a short period of time.A filter paper 5 is laid over an inner bottom surface plate 2 of a nutsche 1. Powder of a super absorbent polymer 6 is uniformly spread (filled) on an upper surface thereof. Further, another filter paper 7 is laid thereon. A soil sample with a high water content is packed on an upper surface thereof, thereupon carrying out predrying to approximately 30% in water content. After that, the predried soil sample is added with ethanol, stirred and received in a receiving pan 38. The receiving pan 38 is arranged in a drying chamber 37. Water is supplied by a syringe 43 to a reaction vessel 42 having been filled with calcium oxide or barium oxide, thereby reacting calcium oxide or barium oxide with water. The receiving pan 38 is heated by a reaction heat generated at that moment, thereupon carrying out postdrying to make the water content 20% or less.
摘要:
An alcoholic beverage that as it has fluidity at −15° to −2° C., can be drunk easily and appropriately and that through coexistence of fine ice pieces and bubbles, induces novel pleasant sensation of coolness and coldness and feeling of swallow, appropriate sensation of alcohol, and excellent flavor. There is provided an alcoholic beverage characterized in that it is produced by mixing an alcoholic beverage base mix containing alcohol and at least one type of water-soluble substance with ice pieces in a proportion of 20:80 to 80:20, and conducting aeration, agitation and cooling so that the volume fraction of contained gas is in the range of 1 to 150% and that the mixture temperature is lower than −1° C., thereby obtaining a gas-containing matter having an alcohol concentration of ≧1.0 vol. % and being fluid at −15° to −2° C. wherein fine ice pieces of 0.06 to 0.8 mm major axis length are present in an amount of at least 80 wt. % based on the total weight so that remaining of at least part of the fine ice pieces is sensed.
摘要:
A method of forming a diamond film includes synthesizing a diamond film on a surface of a substrate, where the surface of the substrate has trenches. The trenches inhibit delamination of the diamond film.
摘要:
Highly oxidative water containing ozone and/or OH radicals dissolved in a large amount is prepared by dissolving an oxygen rich gas at high pressure in water and then the pressure is lowered to form fine bubbles in water from the dissolved oxygen rich gas and the fine bubbles are exposed to pulse discharge. Method of and apparatus capable of forming highly oxidative water containing ozone or OH radicals at high concentration exhibiting an oxidizing performance at a level sufficient to practical use with excellent power efficiency and productivity by discharge in water.
摘要:
A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.
摘要:
A semiconductor accelerometer includes a mass portion formed at a center of a silicon plate, a frame portion formed around the circumference of the silicon plate so as to surround the mass portion and a diaphragm portion formed in the silicon plate between the mass portion and the frame portion so as to bridge the mass portion with the frame portion, one of major surfaces of the silicon plate serving as a common continuous major surface for the mass portion, frame portion and diaphragm portion. Piezoresistance elements are formed on the common continuous major surface at the diaphraqm portion and an additional Au film is formed on the common continuous major surface at the mass portion. The additional Au film constitutes in combination with the mass portion a weight which responds to an acceleration acting thereon. The mass of the additional Au film is selected in such a manner that the center of gravity of the weight is located within an area in the mass portion having a depth corresponding to the thickness of the diaphragm portion.