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    Differential pressure transmitter
    8.
    发明授权
    Differential pressure transmitter 失效
    差压变送器

    公开(公告)号：US5012677A

    公开(公告)日：1991-05-07

    申请号：US275580

    申请日：1988-11-23

    申请人： Satoshi Shimada ,  Yasushi Shimizu ,  Seiichi Ugai

    发明人： Satoshi Shimada ,  Yasushi Shimizu ,  Seiichi Ugai

    IPC分类号： G01L13/06 ,  G01L9/00 ,  G01L13/02 ,  G01L19/00

    CPC分类号： G01L19/147 ,  G01L13/025 ,  G01L19/0092 ,  G01L19/0645 ,  G01L19/148

    摘要： A differential pressure transmitter is an improvement over the drawbacks of conventional apparatuses and provides a differential pressure transmitter which compensates for adverse effects of a static pressure by using a static pressure detecting piezoresistive gauge. The transmitter includes a highly sensitive static pressure sensor with high outputs, and a composite sensor with small crosstalk between the static pressure sensor and a differential pressure sensor. The differential pressure transmitter is constructed of semiconductor sensor substrate and a fixed mount on which the sensor substrate is securely mounted; whereby the differential pressure of a fluid is detected by utilizing the difference in Young's modulus between the sensor substrate and the mount. The sensor substrate is processed on one side or on both sides to make a part of the sensor substrate thinner than the surrounding parts and thereby cause a peak stress due to a static pressure load to occur at the thin part, and a change in resistance of a semiconductor piezoresistive gauge formed at that thin portion is detected.

    摘要翻译： 差压变送器是对常规设备的缺点的改进，并且提供了一种通过使用静压检测压阻式压力补偿静压的不利影响的差压变送器。 变送器包括具有高输出的高灵敏度静压传感器，以及静压传感器和压差传感器之间具有小串扰的复合传感器。 差压变送器由半导体传感器基板和传感器基板固定在其上的固定支架构成; 由此通过利用传感器基板和安装座之间的杨氏模量的差异来检测流体的压差。 传感器基板在一侧或两侧进行处理，使得传感器基板的一部分比周围部分薄，从而在薄部分产生由于静压力引起的峰值应力，并且电阻变化 检测在该薄部分处形成的半导体压阻计。

    Multi-functional sensor
    9.
    发明授权
    Multi-functional sensor 失效
    多功能传感器

    公开(公告)号：US4986127A

    公开(公告)日：1991-01-22

    申请号：US333246

    申请日：1989-04-05

    申请人： Satoshi Shimada ,  Seiichi Ugai ,  Akira Sase ,  Yasushi Shimizu

    发明人： Satoshi Shimada ,  Seiichi Ugai ,  Akira Sase ,  Yasushi Shimizu

    IPC分类号： G01L9/04 ,  G01F1/38 ,  G01K7/16 ,  G01L9/00 ,  G01L13/02 ,  G01L27/00 ,  H01L29/84

    CPC分类号： G01L19/147 ,  G01F1/383 ,  G01L13/026 ,  G01L19/003 ,  G01L19/0645 ,  G01L9/0054 ,  G01L9/045

    摘要： Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a crystalline plane (110), a differential pressure sensor having p-doped piezoresistor elements formed in the principal plane of the diaphragm at a thin wall portion of the E-shaped sectional diaphragm, each element being arranged along a crystal axis , a static pressure sensor having p-doped piezoresistor elements formed in the principal plane at an outer peripheral thick wall portion of the E-shaped sectional diaphragm, each element being arranged along the crystal axis , and a temperature sensor having a p-doped piezoresistor element formed in the principal plane at the outer peripheral thick wall portion of the E-shaped sectional diaphragm, the element being arranged along the crystal axis . In the multi-functional sensor thus constructed, deviation of the output signal from the differential pressure sensor due to the influence of the temperature and static pressure can be removed easily to obtain the correct signal.

    摘要翻译： 多功能传感器包括由硼硅酸盐制成的支撑基座，具有固定到基部的E形截面的隔膜，隔膜由单晶硅制成，其主面被定向为晶面（110），差动 压电传感器，其具有在E形截面光阑的薄壁部分处形成在膜片的主平面中的p掺杂的压电电阻元件，每个元件沿着晶轴<111>布置，静压传感器具有p掺杂的压电电阻 在E形截面光阑的外周厚壁部分的主平面上形成的元件，每个元件沿着晶轴<111>布置，并且具有在主平面上形成的p掺杂的压电电阻元件的温度传感器 E形截面膜片的外周厚壁部分，该元件沿着晶轴<100>排列。 在这样构成的多功能传感器中，由于温度和静压的影响，输出信号与差压传感器的偏差可以容易地消除，从而获得正确的信号。

    Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
    10.
    发明授权
    Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor 失效
    集成多传感器和静压差压变送器和工厂系统采用集成式多传感器

    公开(公告)号：US5259248A

    公开(公告)日：1993-11-09

    申请号：US672113

    申请日：1991-03-19

    申请人： Seiichi Ugai ,  Satoshi Shimada ,  Tomoyuki Tobita ,  Akira Sase

    发明人： Seiichi Ugai ,  Satoshi Shimada ,  Tomoyuki Tobita ,  Akira Sase

    IPC分类号： G01L9/00 ,  G01L9/06 ,  G01L19/00 ,  G01L13/02

    CPC分类号： G01L19/0092 ,  G01L9/0054 ,  G01L9/065

    摘要： In an integrated multisensor used in a differential and static pressure transmitter, a pair of static pressure gages are formed on a static pressure detecting diaphragm and another pair of static pressure gages are formed at positions on a fixed portion which are near to the center of a differential pressure detecting diaphragm. The second term generated by a differential pressure appearing in a static pressure sensor is a function of a distance. Therefore, equal influence is exerted on each static pressure gage. Accordingly, by constructing a static pressure sensor so as to form a bridge circuit, a static pressure value free of the influence of a differential pressure can be detected, thereby making it possible to determine an accurate differential and static pressure.

    摘要翻译： 在用于差压静态压力变送器的集成多传感器中，静压检测膜上形成一对静压计，另一对静压计则形成在靠近中心的固定部位 差压检测膜片。 通过出现在静压传感器中的差压产生的第二项是距离的函数。 因此，对每个静压力表施加相等的影响。 因此，通过构造静压传感器以形成桥接电路，可以检测到不受压差影响的静压值，从而可以确定精确的差动静压。