Method and apparatus for inspecting defects of circuit patterns
    32.
    发明申请
    Method and apparatus for inspecting defects of circuit patterns 有权
    检查电路图形缺陷的方法和装置

    公开(公告)号:US20070047800A1

    公开(公告)日:2007-03-01

    申请号:US11488734

    申请日:2006-07-19

    IPC分类号: G06K9/00

    摘要: The present invention relates to a defect inspection apparatus for inspecting defects in patterns formed on a semiconductor device, on the GUI of which for the confirmation of the inspection results an area is provided for displaying any one of or facing each other the features amount of defects, and the image during inspection or the reacquired image, and on the GUI of which a means is provided for setting the classification class and importance of the defects, and based on the classification class and the importance of the defects information set by this setting means, the classification conditions or the defect judging conditions are automatically or manually set so that the inspection conditions may be set easily.

    摘要翻译: 本发明涉及一种用于检查形成在半导体器件上的图案中的缺陷的缺陷检查装置,在其GUI上,为了确认检查结果,提供了用于显示任何一个或相互面对的特征量的缺陷 ,以及在检查期间的图像或重新获取的图像,并且在GUI上提供用于设置缺陷的分类等级和重要性的装置,并且基于分类等级和由该设置装置设置的缺陷信息的重要性 ,分类条件或缺陷判断条件自动或手动设定,以便容易地设定检查条件。

    Charge transfer device provided with charge detection circuit of a
floating gate system
    36.
    发明授权
    Charge transfer device provided with charge detection circuit of a floating gate system 失效
    电荷转移装置配有浮动栅极系统的电荷检测电路

    公开(公告)号:US4800579A

    公开(公告)日:1989-01-24

    申请号:US31456

    申请日:1987-03-30

    CPC分类号: G11C19/285 G11C19/282

    摘要: This device comprises transfer electrodes and read electrodes. The read electrode operates in accordance with two modes. Where it operates based on the charge detection mode, a charge below the read electrode is read out in accordance with the floating gate system, so that a charge detection signal is produced. On the other hand, where it operates based on the charge transfer mode, the read electrode performs a function equivalent to the transfer electrode. This device further comprises selector means, thus permitting the read electrode to select either of two modes to operate in a selected mode.

    摘要翻译: 该装置包括转移电极和读取电极。 读取电极根据两种模式工作。 在基于充电检测模式操作的地方,根据浮动栅极系统读出读取电极下面的电荷,从而产生电荷检测信号。 另一方面,在基于电荷转移模式操作的情况下,读取电极执行与转印电极相当的功能。 该装置还包括选择器装置,从而允许读取电极选择两种模式中的任何一种以选择的模式操作。

    Inspection method and device therefor
    37.
    发明授权
    Inspection method and device therefor 有权
    检验方法及装置

    公开(公告)号:US09311697B2

    公开(公告)日:2016-04-12

    申请号:US13639103

    申请日:2011-04-01

    IPC分类号: G06K9/00 G06T7/00 H01L21/66

    摘要: Disclosed is a method of inspecting an object to be inspected in a semiconductor manufacturing process, for resolving the problem to increase defect detection sensitivity. An image capture means is used to image capture a designated area of the object to be inspected; a defect is detected in the captured image; a circuit pattern is recognized from the captured image; a characteristic value is computed, relating to an image tone and shape, from the detected defect; a characteristic value is computed, relating to the image tone and shape, from the recognized circuit pattern; either a specified defect or circuit pattern is filtered and extracted from the detected defect and the recognized circuit pattern; a mapping characteristic value is determined from the characteristic value of either the filtered and extracted specified defect or circuit pattern; and the distribution of the determined characteristic values is displayed onscreen in a map format.

    摘要翻译: 公开了一种在半导体制造过程中检查被检查物体的方法,用于解决问题以增加缺陷检测灵敏度。 图像捕捉装置用于对要检查的对象的指定区域进行图像捕获; 在捕获的图像中检测到缺陷; 从捕获的图像识别电路图案; 从检测到的缺陷中计算与图像色调和形状相关的特征值; 根据识别的电路图案计算与图像色调和形状相关的特征值; 从检测到的缺陷和识别的电路图案中滤出并提取指定的缺陷或电路图案; 根据滤波和提取的指定缺陷或电路图案的特征值确定映射特征值; 并且以映射格式在屏幕上显示所确定的特征值的分布。

    METHOD FOR MEASUREMENT OF VIBRATION PROPERTY OF STRUCTURE, AND VIBRATION PROPERTY MEASUREMENT DEVICE
    38.
    发明申请
    METHOD FOR MEASUREMENT OF VIBRATION PROPERTY OF STRUCTURE, AND VIBRATION PROPERTY MEASUREMENT DEVICE 有权
    测量结构振动性能的方法和振动性能测量装置

    公开(公告)号:US20130090868A1

    公开(公告)日:2013-04-11

    申请号:US13704439

    申请日:2011-06-15

    IPC分类号: G01N29/36

    摘要: A method for measuring a vibration property of a structure by applying an impulse input to the structure, which comprises: step (A) of pulse-irradiating the surface of the structure or a part adjacent to the surface with a laser beam to apply an impulse input to the structure and measuring a response output from the structure to which the impulse input has been applied; step (B) of determining the relationship between the laser intensity of the laser beam and the impulse input induced by the laser beam by a rigid pendulum method and determining an impulse input F corresponding to the laser intensity of the laser beam, with which the structure has been pulse-irradiated, based on the relationship; and step (C) of measuring the vibrational amplitude value of frequency response of the structure from the response output measured in step (A) and the impulse input F measured in step (B).

    摘要翻译: 一种用于通过向该结构施加脉冲输入来测量结构的振动特性的方法,该方法包括:用激光束脉冲照射该结构表面或与该表面相邻的部分的步骤(A),以施加脉冲 输入到结构并测量已经施加脉冲输入的结构的响应输出; 步骤(B)通过刚性摆法确定激光束的激光强度与激光束的脉冲输入之间的关系,并确定与激光束的激光强度相对应的脉冲输入F,其结构 已经脉冲照射,基于关系; 以及从步骤(A)中测量的响应输出和步骤(B)中测量的脉冲输入F测量结构的频率响应的振动振幅值的步骤(C)。

    Bottle beverage
    39.
    发明申请
    Bottle beverage 审中-公开
    瓶装饮料

    公开(公告)号:US20070141219A1

    公开(公告)日:2007-06-21

    申请号:US10583556

    申请日:2004-09-10

    IPC分类号: A23F3/00

    摘要: A packaged beverage with a green tea extract mixed therein, comprising the following ingredients (A), (B) and (C): (A) from 0.01 to 1.0 wt % of non-polymer catechins, (B) oxalic acid or a salt thereof, and (C) caffeine, wherein a content weight ratio [(B)/(A)] of said oxalic acid or salt thereof (B) to said non-polymer catechins (A) is from 0.00005 to 0.1, and a content weight ratio [(A)/(C)] of said non-polymer catechins (A) to said caffeine (C) is from 5 to 10000. The packaged beverage contains catechins at high concentration, is reduced in bitterness and astringency and is suited for long-term drinking, is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and further, remains stable in its color tone even when filled in a clear container and stored at high temperatures.

    摘要翻译: 一种混合有绿茶提取物的包装饮料,包含以下成分(A),(B)和(C):(A)0.01-1.0重量%的非聚合物儿茶素类,(B)草酸或盐 和(C)所述草酸或其盐(B)与所述非聚合型儿茶素类(A)的含量重量比[(B)/(A)]为0.00005〜0.1的咖啡因, 所述非聚合物儿茶素类(A)与所述咖啡因(C)的重量比[(A)/(C)]为5〜10000。包装饮料中含有高浓度的儿茶素类,降低了苦味和涩味, 对于长期饮用,具有优异的苦味和涩味的稳定性,以及其在喉咙下方的感觉,并且即使在填充在透明容器中并在高温下储存时,其色调也保持稳定。

    Purified product of green tea extract and packaged beverage of high-catechin content with the purified product mixed therein
    40.
    发明申请
    Purified product of green tea extract and packaged beverage of high-catechin content with the purified product mixed therein 审中-公开
    将纯化产物混合在一起的绿茶提取物和高儿茶素含量的包装饮料的纯化产物

    公开(公告)号:US20060141119A1

    公开(公告)日:2006-06-29

    申请号:US11311251

    申请日:2005-12-20

    IPC分类号: A23F3/00

    CPC分类号: A23F3/163

    摘要: The present invention relates to a packaged beverage of high catechin content, wherein (a) it contains from 55 to 90 wt % of non-polymer catechins based on a solid content of the purified product of green tea extract, and (b) when the purified product of green tea is formed into an aqueous solution containing the non-polymer catechins at a concentration of 1 wt %, the aqueous solution has a b* value of from 39 to 10 as measured by a calorimeter and a total light transmittance (τt) of from 83% to 95% as measured by a turbidometer, and wherein the content of the non-polymer catechin in which the purified product of the green tea is incorporated is from 0.06 to 1.0 wt %. The packaged beverage of the present invention contains non-polymer catechins at a high concentration, has a good flavor and taste, remains free from the formation and settling of precipitates over a long period of time, and is suited for long-term drinking.

    摘要翻译: 本发明涉及高儿茶素含量的包装饮料,其中(a)基于绿茶提取物的纯化产物的固体含量含有55至90重量%的非聚合物儿茶素类,和(b)当 将绿茶的纯化产物形成含有浓度为1重量%的非聚合物儿茶素类的水溶液,通过量热计测得的水溶液的ab *值为39〜10,总透光率(拉伸) 为83%〜95%,其中掺入绿茶纯化物的非聚合型儿茶素含量为0.06〜1.0重量%。 本发明的包装饮料含有高浓度的非聚合型儿茶素类,具有良好的风味和味道,长时间保持无析出物的形成和沉降,适用于长期饮用。