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公开(公告)号：US20060162442A1
公开(公告)日：2006-07-27
申请号：US11210869
申请日：2005-08-25
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6845
摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow. Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。
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公开(公告)号：US06968283B2
公开(公告)日：2005-11-22
申请号：US10848166
申请日：2004-05-19
CPC分类号： G01F1/6965 , G01F1/696 , G01F1/699
摘要： A gas flow meter having a gas flow detection circuit for detecting a current flowing through a resistor installed in a gas passage and a voltage generated across the resistor and outputting a voltage signal representing a gas flow passing through the gas passage; a noise reduction circuit for reducing external noise; and a digital adjusting circuit for digitally adjusting a signal representing the detected gas flow and outputting the adjusted signal; wherein a voltage signal based on the signal adjusted by the digital adjusting circuit is output.
摘要翻译： 一种气体流量计，其具有用于检测流过安装在气体通道中的电阻器的电流的气体流量检测电路和跨过电阻器产生的电压，并输出表示通过气体通道的气流的电压信号; 用于减少外部噪声的降噪电路; 以及数字调节电路，用于数字调节表示检测到的气流的信号并输出调整后的信号; 其中输出基于由数字调节电路调节的信号的电压信号。
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公开(公告)号：US20050229694A1
公开(公告)日：2005-10-20
申请号：US11052754
申请日：2005-02-09
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。
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34.发明授权Gas flow rate measuring device having an integrated chip temperature sensor and adjustment processing circuit on common chip 有权气体流量测量装置具有集成芯片温度传感器和共同芯片上的调整处理电路公开(公告)号：US06769298B2
公开(公告)日：2004-08-03
申请号：US10124370
申请日：2002-04-18
IPC分类号： G01F168
CPC分类号： G01F1/696 , F02D41/187 , F02D2041/2072
摘要： A flow rate signal analog-digital conversion circuit 30, an adjustment processing circuit 40 and a chip temperature sensor circuit 60 are disposed a single semiconductor chip 100 to form an integrated circuit, and a chip temperature signal in a form of digital signal outputted from the chip temperature sensor circuit 60 is inputted into the adjustment processing circuit 40 in which correction reducing temperature dependent error in a series of signal processing circuits is performed. Thereby, a board temperature dependent error in a gas flow rate measuring device can be reduced in which adjustment is performed for digital signals.
摘要翻译： 流量信号模拟数字转换电路30，调整处理电路40和芯片温度传感器电路60设置在单个半导体芯片100上以形成集成电路，并且以从数字信号的形式输出的芯片温度信号 芯片温度传感器电路60被输入到执行一系列信号处理电路中的校正降低温度相关误差的调整处理电路40中。 因此，可以减少对数字信号进行调整的气体流量测量装置中的板温度相关误差。
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公开(公告)号：US06538866B1
公开(公告)日：2003-03-25
申请号：US09526737
申请日：2000-03-16
申请人： Keiji Hanzawa , Masahiro Matsumoto , Fumio Murabayashi , Tatsumi Yamauchi , Hiromichi Yamada , Kohei Sakurai , Atsushi Miyazaki
发明人： Keiji Hanzawa , Masahiro Matsumoto , Fumio Murabayashi , Tatsumi Yamauchi , Hiromichi Yamada , Kohei Sakurai , Atsushi Miyazaki
IPC分类号： H02H900
CPC分类号： H01L27/0251 , H02H9/04
摘要： A circuit for protecting a load from an overvoltage can be integrated together with the load on the same chip by an MOS transistor manufacture process. This overvoltage protecting circuit is composed of a surge protection circuit, an overvoltage detecting circuit and a switching circuit. The surge protection circuit including two MOS transistors operates so that a surge voltage applied to a power supply receiving terminal is clamped by virtue of the source-drain breakdown voltage of the two MOS transistors, thereby absorbing the surge energy. The overvoltage detecting circuit including two MOS transistors operates so that a DC voltage supplied from the surge protection circuit is monitored with the source-drain voltage of the two MOS transistors taken as a reference voltage, thereby detecting an overvoltage. An overvoltage detection output brings an MOS transistor of the switching circuit into a turned-off condition to protect the load.
摘要翻译： 可以通过MOS晶体管制造工艺将用于保护负载的过电压的电路与负载集成在同一芯片上。 该过电压保护电路由浪涌保护电路，过电压检测电路和开关电路构成。 包括两个MOS晶体管的浪涌保护电路工作，借助于两个MOS晶体管的源极 - 漏极击穿电压来钳位施加到电源接收端的浪涌电压，从而吸收浪涌能量。 包括两个MOS晶体管的过电压检测电路进行工作，从而以两个MOS晶体管的源极 - 漏极电压作为参考电压来监视从浪涌保护电路提供的直流电压，从而检测过电压。 过电压检测输出使开关电路的MOS晶体管成为关断状态，以保护负载。
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公开(公告)号：US06377056B1
公开(公告)日：2002-04-23
申请号：US09384289
申请日：1999-08-26
申请人： Keiji Hanzawa , Masahiro Matsumoto , Satoshi Shimada , Akihiko Saito , Yasuo Onose , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Masahiro Matsumoto , Satoshi Shimada , Akihiko Saito , Yasuo Onose , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01R2726
CPC分类号： G01P15/125 , G01D5/24 , G01L9/0073 , G01L9/12
摘要： Dynamic quantitative displacement is converted stably and straight into voltage (D.C. output) by using a high speed detection driving frequency without restricting a response of an operational amplifier. When a dynamic quantity detection electrostatic capacitance changes according to a dynamic quantity, electric charges stored in this element and in a reference electrostatic capacitance become unbalanced to produce a difference value, and an output of an operational amplifier changes according to the difference in electric charge quantity. However, the output becomes finally stable when the electric charges in the dynamic quantity detection electrostatic capacitance and in the reference electrostatic capacitance become equal. The output is proportional to a reciprocal of the dynamic quantity detection electrostatic capacitance and it is a D.C. voltage. Further, output without depending on integration feedback capacitance (feedback condenser) CF can be obtained.
摘要翻译： 通过使用高速检测驱动频率将动态定量位移稳定地转换成电压（直流输出），而不限制运算放大器的响应。 当动态量检测静电电容根据动态量而变化时，存储在该元件中的电荷和参考静电电容变得不均衡以产生差值，并且运算放大器的输出根据电荷量的差异而变化 。 然而，当动态量检测静电电容和参考静电电容中的电荷变得相等时，输出最终稳定。 输出与动态量检测静电电容的倒数成比例，为直流电压。 此外，可以获得不依赖积分反馈电容（反馈电容器）CF的输出。
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公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
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公开(公告)号：US20140167781A1
公开(公告)日：2014-06-19
申请号：US14235933
申请日：2011-08-03
CPC分类号： G01R1/18 , B81B3/0086 , G01D7/00
摘要： An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
摘要翻译： 本发明的目的是提供一种具有更高精度的传感器装置。 为了实现该目的，提供了一种传感器装置，包括：连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5，其在外部端子和内部电路之间具有电阻元件6和电容元件7，其中电容元件由彼此具有不同电导率的一对电极形成，并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。
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公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
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公开(公告)号：US08359919B2
公开(公告)日：2013-01-29
申请号：US12855347
申请日：2010-08-12
CPC分类号： G01N27/18
摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.
摘要翻译： 提供了一种高精度，机械坚固的热湿度传感器。 本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。 形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。 基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。
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