LATERAL METAL INSULATOR METAL (MIM) CAPACITOR WITH HIGH-Q AND REDUCED AREA
    37.
    发明申请
    LATERAL METAL INSULATOR METAL (MIM) CAPACITOR WITH HIGH-Q AND REDUCED AREA 审中-公开
    具有高Q和减少区域的横向金属绝缘体金属(MIM)电容器

    公开(公告)号:US20150200245A1

    公开(公告)日:2015-07-16

    申请号:US14153917

    申请日:2014-01-13

    CPC classification number: H01L28/88 H01L23/5223 H01L2924/0002 H01L2924/00

    Abstract: A lateral metal insulator metal (MIM) capacitor includes a first conductive plate, and a dielectric layer on a sidewall(s) and a first surface of the first conductive plate adjacent to the sidewall(s). The capacitor also includes a second conductive plate on a portion of the dielectric layer that is on the sidewall(s) and on a portion of the dielectric layer that covers a portion of the first surface of the first conductive plate. A sidewall capacitance is also greater than a surface capacitance of the capacitor.

    Abstract translation: 横向金属绝缘体金属(MIM)电容器包括第一导电板和侧壁上的介电层以及邻近侧壁的第一导电板的第一表面。 所述电容器还包括位于所述侧壁上以及所述电介质层的覆盖所述第一导电板的所述第一表面的一部分的所述介电层的一部分上的第二导电板。 侧壁电容也大于电容器的表面电容。

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