Lithographic alignment system and device manufacturing method
    31.
    发明申请
    Lithographic alignment system and device manufacturing method 失效
    光刻对准系统和器件制造方法

    公开(公告)号:US20050110965A1

    公开(公告)日:2005-05-26

    申请号:US10792909

    申请日:2004-03-05

    IPC分类号: G03F9/00 G03F7/20 H01L21/027

    摘要: A lithographic apparatus equipped with an improved alignment system, is presented herein. In one embodiment, the apparatus comprises a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device that configures the projection beam according to a desired pattern, a substrate holder for holding a substrate, projection system for projecting the patterned beam onto a target portion of the substrate, and an alignment system. The alignment system comprises a radiation source for illuminating at least one mark which is usable for alignment on a substrate and an imaging system for imaging light which has interacted with the at least one mark to generate alignment information.

    摘要翻译: 本文介绍了一种配有改进对准系统的光刻设备。 在一个实施例中,该装置包括用于提供投影辐射束的辐射系统,用于支撑根据期望图案配置投影光束的图案形成装置的支撑结构,用于保持基板的基板保持器, 图案化的光束到基板的目标部分上,以及对准系统。 对准系统包括用于照亮可用于在基板上对准的至少一个标记的辐射源和用于对与至少一个标记相互作用的光进行成像的成像系统以产生对准信息。

    Light module
    32.
    发明授权
    Light module 有权
    灯模块

    公开(公告)号:US08531111B2

    公开(公告)日:2013-09-10

    申请号:US13320987

    申请日:2010-05-05

    IPC分类号: H05B37/02

    摘要: The invention relates to a light module for electrical and thermal attachment to an energy infrastructure having at least one power supply, each power supply comprising two electrodes, said light module comprising a light source to emit light, wherein the light source is a heat source when emitting light, two electrical contacts to contact the electrodes of the at least one power supply and thereby establishing the electrical attachment between the light module and the energy infrastructure, a control system arranged between the light source and the electrical contacts to control a power supplied to the light source, wherein the light module comprises a measurement system to measure a thermal resistance of the thermal attachment between the light module and the energy infrastructure when establishing the electrical attachment, and wherein the control system is configured to reduce the power supplied to the light source when the thermal resistance is above a predetermined value to protect the light module from overheating. The invention also relates to a method for protecting a light module from overheating.

    摘要翻译: 本发明涉及一种用于电气和热连接到具有至少一个电源的能量基础设施的光模块,每个电源包括两个电极,所述光模块包括用于发光的光源,其中光源是热源, 发射光,两个电触点,以接触所述至少一个电源的电极,从而建立所述光模块和所述能量基础设施之间的电连接;布置在所述光源和所述电触点之间的控制系统,以控制提供给 光源,其中所述光模块包括测量系统,以在建立所述电连接时测量所述光模块和所述能量基础设施之间的热附件的热阻,并且其中所述控制系统被配置为减少供应到所述光的功率 当热阻高于预定值至蛋白质时 反光模块过热。 本发明还涉及一种用于保护光模块免于过热的方法。

    Illumination device
    34.
    发明授权
    Illumination device 有权
    照明装置

    公开(公告)号:US08414138B2

    公开(公告)日:2013-04-09

    申请号:US13126196

    申请日:2009-11-03

    IPC分类号: F21V9/00

    摘要: The invention relates to an illumination device (1), comprising: at least one LED (3) having an emission maximum in a first wavelength range; at least one LED (2) having an emission maximum in a second wavelength range; and a wavelength converting material (5) arranged to receive light of at least said first light wavelength range and having an emission maximum in a third wavelength range which is between said first wavelength range and said second wavelength range. The illumination device according to the invention may provide white light of acceptable overall color rendering while producing particularly high saturation of selected colors.

    摘要翻译: 本发明涉及一种照明装置(1),包括:在第一波长范围内具有发射最大值的至少一个LED(3); 在第二波长范围内具有发射最大值的至少一个LED(2) 以及波长转换材料(5),布置成接收至少所述第一光波长范围的光,并且具有在所述第一波长范围和所述第二波长范围之间的第三波长范围内的发射最大值。 根据本发明的照明装置可以提供可接受的总体显色性的白光,同时产生特别高的选定颜色的饱和度。

    Light-emitting apparatus with shaped wavelength converter
    35.
    发明授权
    Light-emitting apparatus with shaped wavelength converter 有权
    具有成形波长转换器的发光装置

    公开(公告)号:US08410500B2

    公开(公告)日:2013-04-02

    申请号:US12519439

    申请日:2007-12-14

    IPC分类号: H01L33/00

    摘要: Proposed is a light-emitting apparatus 200,300,400, comprising a semiconductor light emitting device 220,320,420 and a transparent ceramic body 230,330,430 comprising a wavelength converting material positioned in light receiving relationship to the semiconductor device. The light-emitting apparatus is characterized in that the side surfaces 233,333,433 of the ceramic body 230,330,430 are at an oblique angle 234,334,434 relative its bottom surface 231,331,431. This is especially advantageous to unlock the wave-guide modes inside the body 230,330,430. Consequently the total flux emitted from the light-emitting apparatus 200,300,400 can be enhanced considerably. Alternatively, the brightness of the top surface 232,332,432 of the ceramic body 230,330,430 can be enhanced considerably.

    摘要翻译: 提出了一种发光装置200,300,400,其包括半导体发光器件220,320,420和透明陶瓷体230,330,430,其包括以与半导体器件的光接收关系定位的波长转换材料。 发光装置的特征在于,陶瓷体230,330,430的侧面233,333,433相对于其底面231,331,431呈倾斜角234,334,434。 这对于解锁身体230,330,430内的波导模式是特别有利的。 因此,可以显着地提高从发光装置200,300,400发射的总通量。 或者,可以显着地增强陶瓷体230,330,430的顶表面232,332,432的亮度。

    COLOR CONTROL OF LIGHTING SYSTEM
    36.
    发明申请
    COLOR CONTROL OF LIGHTING SYSTEM 审中-公开
    照明系统的颜色控制

    公开(公告)号:US20120169238A1

    公开(公告)日:2012-07-05

    申请号:US13392881

    申请日:2010-09-16

    申请人: Egbert Lenderink

    发明人: Egbert Lenderink

    IPC分类号: H05B37/02

    摘要: The present invention relates to a method for color control of a lighting system (10) comprising a first (1) and a second (2) light source configured to emit light of different primary colors. By means of the invention, it is possible to determine a color point (cp3) for mixed light emitted by the first (1) and the second (2) light sources having a minimal difference in perceived color output as compared to a target color point (cpr).

    摘要翻译: 本发明涉及一种用于照明系统(10)的颜色控制的方法,包括配置成发射不同原色光的第一(1)和第二(2)光源。 通过本发明,可以确定与目标色点相比,由感知色彩输出具有最小差异的第一(1)和第二(2)光源发射的混合光的色点(cp3) (cpr)。

    Light Source and Illumination Device Comprising at Least One Light-Emitting Element
    39.
    发明申请
    Light Source and Illumination Device Comprising at Least One Light-Emitting Element 失效
    光源和照明装置包含至少一个发光元件

    公开(公告)号:US20080198603A1

    公开(公告)日:2008-08-21

    申请号:US11719014

    申请日:2005-11-08

    IPC分类号: G02B27/00 F21V7/00

    摘要: A light source comprising a light engine (10), especially with at least one LED and/or at least one laser light emitting element, and further comprising a light guide (11) and an out-coupling structure (12) is proposed. By this, a flexible scheme to tailor the source size and radiation characteristic of an LED- or laser based system is provided. The size and the position of the out-coupling structure (12) can be chosen to be comparable to the size and position of the filament or arc of a conventional light source like an incandescent-, halogen- or gas discharge burner. The disclosed LED/laser light source is retrofit from an optical point of view so that it can replace a conventional light source like an incandescent-, halogen- or gas discharge bulb or burner in an illumination device.

    摘要翻译: 提出了一种包括光引擎(10)的光源,特别是与至少一个LED和/或至少一个激光发光元件,并且还包括光导(11)和输出耦合结构(12)。 因此,提供了一种灵活的方案来定制基于LED或基于激光的系统的源尺寸和辐射特性。 输出耦合结构(12)的尺寸和位置可以选择为与诸如白炽灯,卤素或气体放电燃烧器的常规光源的灯丝或弧的尺寸和位置相当。 所公开的LED /激光光源从光学角度进行改型,使得其可以在照明装置中替代诸如白炽灯,卤素或气体放电灯泡或燃烧器的常规光源。