Method for Navigation and Positioning of Receiver and Receiver

    公开(公告)号:US20190324153A1

    公开(公告)日:2019-10-24

    申请号:US16221946

    申请日:2018-12-17

    IPC分类号: G01S19/41 G01S19/43

    摘要: The present application provides a method for navigation and positioning of a receiver, including: receiving basic broadcast messages and correction parameters of a plurality of satellites, and establishing a pseudorange observation equation and a carrier-phase observation equation corresponding to each of satellites respectively; correcting the pseudorange observation equation and the carrier-phase observation equation using the received correction parameters to obtain the corrected pseudorange observation equation and the corrected carrier-phase observation equation; constructing a first observation according to the corrected pseudorange observation equation and the corrected carrier-phase observation equation; constructing a second observation according to the corrected pseudorange observation equation and the corrected carrier-phase observation equation; and jointly solving the obtained first observations and second observations of the plurality of satellites to obtain anoperation result of user positioning.

    Vertical SOI bipolar junction transistor and manufacturing method thereof
    34.
    发明授权
    Vertical SOI bipolar junction transistor and manufacturing method thereof 失效
    垂直SOI双极结型晶体管及其制造方法

    公开(公告)号:US08629029B2

    公开(公告)日:2014-01-14

    申请号:US13055577

    申请日:2010-07-14

    IPC分类号: H01L21/331

    CPC分类号: H01L29/7317 H01L29/66265

    摘要: The present invention discloses a vertical SOI bipolar junction transistor and a manufacturing method thereof. The bipolar junction transistor includes an SOI substrate from down to up including a body region, a buried oxide layer and a top silicon film; an active region located in the top silicon film formed by STI process; a collector region located in the active region deep close to the buried oxide layer formed by ion implantation; a base region located in the active region deep close to the top silicon film formed by ion implantation; an emitter and a base electrode both located over the base region; a side-wall spacer located around the emitter and the base electrode. The present invention utilizing a simple double poly silicon technology not only can improve the performance of the transistor, but also can reduce the area of the active region in order to increase the integration density. Furthermore, the present invention utilizes side-wall spacer process to improve the compatibility of SOI BJT and SOI CMOS, which simplifies the SOI BiCMOS process and thus reduce the cost.

    摘要翻译: 本发明公开了一种垂直SOI双极结型晶体管及其制造方法。 双极结型晶体管包括从下到上的包括主体区域,掩埋氧化物层和顶部硅膜的SOI衬底; 位于由STI工艺形成的顶部硅膜中的有源区; 位于靠近由离子注入形成的掩埋氧化物层的有源区域的集电极区域; 位于靠近通过离子注入形成的顶部硅膜的深度的有源区域中的基极区域; 发射极和基极两者都位于基极区域之上; 位于发射极和基极周围的侧壁间隔物。 利用简单的双重多晶硅技术的本发明不仅可以改善晶体管的性能,而且可以减小有源区的面积,以增加集成密度。 此外,本发明利用侧壁间隔物工艺来改善SOI BJT和SOI CMOS的相容性,这简化了SOI BiCMOS工艺,从而降低了成本。

    Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber
    35.
    发明授权
    Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber 失效
    用于控制处理室中的多区加热器的温度的方法和装置

    公开(公告)号:US08552346B2

    公开(公告)日:2013-10-08

    申请号:US13113015

    申请日:2011-05-20

    IPC分类号: H05B3/06 F26B3/06

    摘要: Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.

    摘要翻译: 本文提供了用于控制处理室中的多区加热器的温度的方法和装置。 在一些实施例中,提供了一种控制设置在基板支撑件中的多区加热器的方法,其中多区加热器具有第一区域和第二区域。 在一些实施例中,该方法可以包括测量在第一时间由第一区域绘制的电流; 测量第一个区域在第一时间段所绘制的电压; 基于在第一时间由第一区域抽取的测量的电流和电压来计算第一区域的电阻; 基于第一区的电阻和温度之间的预定关系确定第一区的温度; 以及响应于所述温度测定来调节所述第一区域的温度。

    Discharge electrode array for thin-film solar cell deposition
    36.
    发明授权
    Discharge electrode array for thin-film solar cell deposition 有权
    用于薄膜太阳能电池沉积的放电电极阵列

    公开(公告)号:US08525417B2

    公开(公告)日:2013-09-03

    申请号:US13698747

    申请日:2010-10-21

    IPC分类号: H01J1/02

    摘要: A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

    摘要翻译: 提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。 放电电极阵列包括具有矩形端部的信号馈送部件,平坦的腰部对应于位于具有屏蔽罩的阴极板的中心区域上的仰卧矩形区域中的馈入端口,连接馈入 电源信号通过表面接触。 电极阵列至少包括一组阴极板和阳极板,两个阴极板共享或围绕一个阳极板。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电,并且可以有效地消除驻波和皮肤效应。 可以提高生产效率,降低成本。

    Surface feed-in electrodes for deposition of thin film solar cell and signal feed-in method thereof
    37.
    发明授权
    Surface feed-in electrodes for deposition of thin film solar cell and signal feed-in method thereof 有权
    用于沉积薄膜太阳能电池的表面馈入电极及其信号馈入方法

    公开(公告)号:US08438989B2

    公开(公告)日:2013-05-14

    申请号:US13698864

    申请日:2010-10-21

    IPC分类号: H01J1/00 H05H1/24

    摘要: The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RF/VHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

    摘要翻译: 本发明公开了一种与太阳能电池技术相关的用于薄膜太阳能电池沉积的表面馈入电极结构。 表面馈入电极结构使用具有平腰和半圆形馈入端的信号馈入部件,以通过表面接触连接信号馈入端口。 信号馈入端口位于阴极板背面中心的圆形圆形区域中,并馈入RF / VHF电源信号。 阳极板接地。 阴极板与屏蔽盖绝缘,屏蔽罩上设有通孔。 其效果包括通过使用电极板中心的表面馈入,可以克服单点或多点馈入配置的馈线损耗。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电,并且可以有效地消除驻波和皮肤效应。 可以提高生产效率,降低成本。

    SURFACE FEED-IN ELECTRODES FOR DEPOSITION OF THIN FILM SOLAR CELL AND SIGNAL FEED-IN METHOD THEREOF
    38.
    发明申请
    SURFACE FEED-IN ELECTRODES FOR DEPOSITION OF THIN FILM SOLAR CELL AND SIGNAL FEED-IN METHOD THEREOF 有权
    用于沉积薄膜太阳能电池的表面馈电电极及其信号输入方法

    公开(公告)号:US20130063028A1

    公开(公告)日:2013-03-14

    申请号:US13698864

    申请日:2010-10-21

    IPC分类号: H01J1/00 H05H1/24

    摘要: The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RF/VHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

    摘要翻译: 本发明公开了一种与太阳能电池技术相关的用于薄膜太阳能电池沉积的表面馈入电极结构。 表面馈入电极结构使用具有平腰和半圆形馈入端的信号馈入部件,以通过表面接触连接信号馈入端口。 信号馈入端口位于阴极板背面中心的圆形圆形区域中,并馈入RF / VHF电源信号。 阳极板接地。 阴极板与屏蔽盖绝缘,屏蔽罩上设有通孔。 其效果包括通过使用电极板中心的表面馈入,可以克服单点或多点馈入配置的馈线损耗。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电,并且可以有效地消除驻波和皮肤效应。 可以提高生产效率,降低成本。

    DISCHARGE ELECTRODE ARRAY FOR THIN-FILM SOLAR CELL DEPOSITION
    39.
    发明申请
    DISCHARGE ELECTRODE ARRAY FOR THIN-FILM SOLAR CELL DEPOSITION 有权
    放电电极阵列用于薄膜太阳能电池沉积

    公开(公告)号:US20130063018A1

    公开(公告)日:2013-03-14

    申请号:US13698747

    申请日:2010-10-21

    IPC分类号: H01J1/02

    摘要: A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

    摘要翻译: 提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。 放电电极阵列包括具有矩形端部的信号馈送部件,平坦的腰部对应于位于具有屏蔽盖的阴极板的中心区域上的仰卧矩形区域中的馈入端口,连接馈入 电源信号通过表面接触。 电极阵列至少包括一组阴极板和阳极板,两个阴极板共享或围绕一个阳极板。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电,并且可以有效地消除驻波和皮肤效应。 可以提高生产效率,降低成本。

    Movable jig for silicon-based thin film solar cell
    40.
    发明授权
    Movable jig for silicon-based thin film solar cell 有权
    硅基薄膜太阳能电池移动夹具

    公开(公告)号:US08291858B2

    公开(公告)日:2012-10-23

    申请号:US13389484

    申请日:2010-10-21

    IPC分类号: C23C16/59 H01L31/18

    摘要: A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased.

    摘要翻译: 一种用于硅基薄膜太阳能电池的可移动夹具包括平行电极板(203,208),支撑框架和信号馈入组件(201)。 支撑框架是可动框架,其侧框架(216)接地。 屏蔽装置设置在夹具或夹具阵列之间,以防止被干扰。 信号馈入组件是导体,其中间部分和头部形成梯形气缸,信号馈入组件的一个端面(201-1)是三角形的,并且可以与凹陷的三角形进给表面接触并连接 在电极板的阴极板(203)的后表面的中心区域中的入口(203-1),从而可以馈送射频/非常高频率的电源信号。通过 在电极板的中心的表面馈入可以减少由一点馈入或多点馈入的馈线距离引起的消耗,可以获得均匀电场的大面积稳定放电 ,可以提高生产效率,降低成本。