公开(公告)号：US20060232361A1

公开(公告)日：2006-10-19

申请号：US11109596

申请日：2005-04-18

Applicant: Kun Wang ,  Paul Bradley ,  Richard Ruby

Inventor： Kun Wang ,  Paul Bradley ,  Richard Ruby

IPC: H03H9/72 ,  H03H9/56

CPC classification number: H03H9/587 ,  H03H3/02 ,  H03H7/1708 ,  H03H9/0095 ,  H03H9/0571 ,  H03H9/583 ,  H03H9/584 ,  H03H9/706 ,  H03H2003/0428 ,  Y10T29/49002

Abstract: An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.

Abstract translation: 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器，第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器，第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。

公开(公告)号：US20060197411A1

公开(公告)日：2006-09-07

申请号：US11073345

申请日：2005-03-04

Applicant: Storrs Hoen ,  Mark Unkrich ,  William Trutna ,  John Larson ,  Richard Ruby ,  Graham Flower ,  Annette Grot

Inventor： Storrs Hoen ,  Mark Unkrich ,  William Trutna ,  John Larson ,  Richard Ruby ,  Graham Flower ,  Annette Grot

IPC: H01L41/04

CPC classification number: G01P15/097 ,  G01L1/165

Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

Abstract translation: 一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量（TEV）的装置和方法。 膜 - 体声波谐振器（FBAR）包括形成在FBAR晶片和表面中的声反射器。 第一电极形成在声反射体的表面上并具有表面。 在第一电极的表面上形成压电层并具有表面。 第二电极形成在压电层的表面上。 运动板相对于第二电极的表面以预定距离悬挂在空间中，并且电容耦合到FBAR。

公开(公告)号：US20050093656A1

公开(公告)日：2005-05-05

申请号：US10699481

申请日：2003-10-30

Applicant: John Larson ,  Richard Ruby

Inventor： John Larson ,  Richard Ruby

IPC: H03H9/17 ,  H03H9/13 ,  H03H9/60 ,  H03H9/56

CPC classification number: H03H9/605 ,  H01L2224/48091 ,  H01L2224/49175 ,  H03H9/132 ,  H03H9/584 ,  H03H9/587 ,  Y10T29/42 ,  H01L2924/00014

Abstract: One embodiment of the acoustically-coupled transformer includes a stacked bulk acoustic resonator (SBAR) having a stacked pair of film bulk acoustic resonators (FBARs) with an acoustic decoupler between them. Each FBAR has opposed planar electrodes with piezoelectric material between them. The transformer additionally has first terminals electrically connected to the electrodes of one FBAR and second terminals electrically connected to the electrodes of the other FBAR. Another embodiment includes first and second stacked bulk acoustic resonators (SBARs), each as described above, a first electrical circuit connecting one FBARs of the first SBAR to one FBAR of the second SBAR, and a second electrical circuit connecting the other FBAR of the first SBAR to the other FBAR of the second SBAR. The transformer provides impedance transformation, can linking single-ended circuitry with balanced circuitry or vice versa and electrically isolates primary and secondary. Some embodiments are additionally electrically balanced.

Abstract translation: 声耦合变压器的一个实施例包括具有堆叠的一对膜体声波谐振器（FBAR）的层叠体声波谐振器（SBAR），它们之间具有声耦合器。 每个FBAR都具有与它们之间的压电材料的平面电极。 变压器还具有电连接到一个FBAR的电极的第一端子和电连接到另一个FBAR的电极的第二端子。 另一个实施例包括如上所述的第一和第二层叠体声波谐振器（SBAR），将第一SBAR的一个FBAR与第二SBAR的一个FBAR连接的第一电路和连接第一SBAR的另一个FBAR的第二电路 SBAR到第二个SBAR的另一个FBAR。 变压器提供阻抗变换，可以将单端电路与平衡电路相连，反之亦然，电隔离一次和二次。 一些实施例另外电平衡。

公开(公告)号：US20100096745A1

公开(公告)日：2010-04-22

申请号：US12254536

申请日：2008-10-20

Applicant: Richard Ruby ,  James P. Roland ,  Frank S. Geefay

Inventor： Richard Ruby ,  James P. Roland ,  Frank S. Geefay

IPC: H01L23/12 ,  H01L21/00

CPC classification number: H03H9/0547 ,  B81B2201/0271 ,  B81C1/00333 ,  B81C2203/0118 ,  B81C2203/032 ,  H01L21/187 ,  H01L23/10 ,  H01L2924/0002 ,  H03H9/1014 ,  H01L2924/00

Abstract: A method of packaging electronics comprises providing a first wafer and providing a second wafer. The method also comprises depositing a polymer material over a surface of the first wafer; and selectively removing a portion of the polymer from the first wafer to create a void in the polymer. The method also comprises placing the first wafer over the second wafer and in contact with the polymer; and curing the polymer to bond the first wafer to the second wafer. A bonded wafer structure is also described.

Abstract translation: 包装电子器件的方法包括提供第一晶片并提供第二晶片。 该方法还包括在第一晶片的表面上沉积聚合物材料; 并且从第一晶片选择性地去除聚合物的一部分以在聚合物中产生空隙。 该方法还包括将第一晶片放置在第二晶片上并与聚合物接触; 并固化聚合物以将第一晶片结合到第二晶片。 还描述了接合晶片结构。

公开(公告)号：US20070210748A1

公开(公告)日：2007-09-13

申请号：US11371761

申请日：2006-03-09

Applicant: Mark Unkrich ,  Michael Frank ,  Richard Ruby

Inventor： Mark Unkrich ,  Michael Frank ,  Richard Ruby

IPC: H02J7/00

CPC classification number: H02J7/022

Abstract: An integrated power supply, an integrated battery charger and a portable electronic device with an integrated power supply are described.

Abstract translation: 描述了集成电源，集成电池充电器和具有集成电源的便携式电子设备。

公开(公告)号：US07187255B2

公开(公告)日：2007-03-06

申请号：US10974078

申请日：2004-10-26

Applicant: Kun Wang ,  Michael Louis Frank ,  Richard Ruby

Inventor： Kun Wang ,  Michael Louis Frank ,  Richard Ruby

IPC: H03H9/54

CPC classification number: H03H9/0095

Abstract: A filter and method of manufacturing a filter having a lattice arrangement that efficiently utilizes substrate space. An embodiment of the invention is directed to a filter having a plurality of resonators disposed on a substrate, each resonator comprising a first electrode and a second electrode disposed vertically adjacent such that an acoustic cavity of a piezoelectric material is formed between each first electrode and each second electrode of each resonator, the first and second electrodes of each resonator electrically isolated from each other via the piezoelectric material. In this manner, the filter is realized without having to use any vias. Additionally, the resonators may be of a shape that allows each to be disposed close together such that some sides of each of the resonators are parallel to each other. Thus, substrate space can be preserved even further.

Abstract translation: 一种制造具有有效利用衬底空间的晶格布置的滤光器的滤光器和方法。 本发明的实施例涉及一种具有设置在基板上的多个谐振器的滤波器，每个谐振器包括第一电极和垂直相邻设置的第二电极，使得在每个第一电极和每个第一电极之间形成压电材料的声腔 每个谐振器的第二电极，每个谐振器的第一和第二电极经由压电材料彼此电隔离。 以这种方式，实现过滤器而不必使用任何通孔。 此外，谐振器可以是允许每个谐振器彼此靠近放置的形状，使得每个谐振器的一些侧面彼此平行。 因此，可以进一步保持基板空间。

公开(公告)号：US20070004079A1

公开(公告)日：2007-01-04

申请号：US11173367

申请日：2005-06-30

Applicant: Frank Geefay ,  Richard Ruby

Inventor： Frank Geefay ,  Richard Ruby

IPC: H01L21/00 ,  H01L21/4763 ,  H01L21/44

CPC classification number: H03H9/105 ,  H01L21/76898 ,  H03H9/10

Abstract: A device package includes a device substrate and a cap mounted on the device substrate. The device substrate includes a contact pad. The cap defines a via with a slightly sloped sidewall through the cap, a contactor extending from an interior surface of the cap, a contactor pad over the contactor, a via pad on the interior surface of the cap over the via and coupled to the contactor pad, and a via contact over the exterior surface of the cap and in the via coupled to the via pad. The contactor is offset from the via. When the cap is mounted on the device substrate, the contactor pad on the contactor is pressed and cold welded onto the contact pad on the device substrate.

Abstract translation: 器件封装包括器件衬底和安装在器件衬底上的帽。 器件衬底包括接触焊盘。 所述盖限定了通过所述盖具有稍微倾斜的侧壁的通孔，从所述盖的内表面延伸的接触器，所述接触器上的接触器垫，所述盖的内表面上的通孔垫在所述通孔上并且联接到所述接触器 垫，以及在盖的外表面上的通孔接触件和连接到通孔垫的通孔中。 接触器偏离通孔。 当盖安装在设备基板上时，接触器上的接触器垫被压制并冷焊在设备基板上的接触垫上。

公开(公告)号：US20060158284A1

公开(公告)日：2006-07-20

申请号：US11373451

申请日：2006-03-09

Applicant: Richard Ruby ,  John Larson

Inventor： Richard Ruby ,  John Larson

IPC: H04R17/00

CPC classification number: H03H9/605 ,  H03H9/587 ,  H03H9/60 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.

Abstract translation: 公开了一种包括垂直分离的声谐振器的装置。 该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。 由于谐振器在另一个上方垂直分离，所以实现谐振器所需的总面积减小，从而实现了芯片尺寸和成本的节省。 垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。

公开(公告)号：US20060103492A1

公开(公告)日：2006-05-18

申请号：US10990201

申请日：2004-11-15

Applicant: Hongjun Feng ,  R. Fazzio ,  Richard Ruby ,  Paul Bradley

Inventor： Hongjun Feng ,  R. Fazzio ,  Richard Ruby ,  Paul Bradley

IPC: H03H9/54

CPC classification number: H03H9/02118 ,  H03H9/173 ,  H03H9/177

Abstract: A resonator structure (FBAR) made of electrodes sandwich a piezoelectric material. The intersection of the two conducting electrodes defines the active area of the acoustic resonator. The active area is divided into two concentric areas; a perimeter or frame, and a central region. An annulus is added to one of the two conducting electrodes to improve the electrical performance (in terms of Q).

Abstract translation: 由电极制成的谐振器结构（FBAR）夹着压电材料。 两个导电电极的交点定义了声谐振器的有效面积。 活动区域分为两个同心区域; 周边或框架，以及中央区域。 在两个导电电极中的一个上添加环，以改善电性能（以Q为单位）。

公开(公告)号：US20050181572A1

公开(公告)日：2005-08-18

申请号：US10778618

申请日：2004-02-13

Applicant: Tracy Verhoeven ,  Richard Ruby

Inventor： Tracy Verhoeven ,  Richard Ruby

IPC: H01L21/20 ,  H01L21/30 ,  H01L21/46 ,  H03H3/02 ,  H03H9/05 ,  H03H9/17

CPC classification number: H03H9/0542 ,  H03H3/02 ,  H03H9/173 ,  H03H2003/021

Abstract: A method for acoustically isolating an acoustic resonator comprises: providing a substrate; forming a porous region in the substrate; forming the acoustic resonator on the porous region; and removing the porous region from the substrate. The removing forms a cavity that separates a portion of the acoustic resonator from the substrate. By using the techniques described herein, it is possible to form an acoustic resonator on a substrate and to form a cavity between the acoustic resonator and the substrate without depositing sacrificial material.

Abstract translation: 用于声学隔离声谐振器的方法包括：提供衬底; 在所述基板中形成多孔区域; 在所述多孔区域上形成所述声共振器; 以及从所述基底去除所述多孔区域。 去除形成将声谐振器的一部分与基板分离的空腔。 通过使用本文描述的技术，可以在衬底上形成声谐振器并在声谐振器和衬底之间形成空腔，而不沉积牺牲材料。