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公开(公告)号：US11787685B2
公开(公告)日：2023-10-17
申请号：US17126903
申请日：2020-12-18
Applicant: STMicroelectronics S.r.l.
Inventor： Luca Seghizzi , Nicolo′ Boni , Laura Oggioni , Roberto Carminati , Marta Carminati
CPC classification number: B81B3/0021 , B81C1/0069 , B81C2201/013 , B81C2201/0156
Abstract: For manufacturing an optical microelectromechanical device, a first wafer of semiconductor material having a first surface and a second surface is machined to form a suspended mirror structure, a fixed structure surrounding the suspended mirror structure, elastic supporting elements which extend between the fixed structure and the suspended mirror structure, and an actuation structure coupled to the suspended mirror structure. A second wafer is machined separately to form a chamber delimited by a bottom wall having a through opening. The second wafer is bonded to the first surface of the first wafer in such a way that the chamber overlies the actuation structure and the through opening is aligned to the suspended mirror structure. Furthermore, a third wafer is bonded to the second surface of the first wafer to form a composite wafer device. The composite wafer device is then diced to form an optical microelectromechanical device.
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公开(公告)号：US11600765B2
公开(公告)日：2023-03-07
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini , Marco Ferrera , Carla Maria Lazzari , Luca Seghizzi , Nicolo′ Boni , Roberto Carminati , Fabio Quaglia
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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公开(公告)号：US11448871B2
公开(公告)日：2022-09-20
申请号：US16539109
申请日：2019-08-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Roberto Carminati , Massimiliano Merli
Abstract: A micromechanical device includes a fixed structure, a mobile portion rotatable about a first rotation axis, and a first actuation structure arranged between the fixed structure and the mobile portion to enable rotation of the mobile portion about the first rotation axis. The mobile portion includes a supporting structure, a tiltable platform rotatable about a second rotation axis, transverse to the first rotation axis, and a second actuation structure coupled between the tiltable platform and the supporting structure. Stiffening elements are arranged between the supporting structure and the fixed structure. The micromechanical device may be used within a pico-projector.
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34.发明授权公开(公告)号：US11327295B2
公开(公告)日：2022-05-10
申请号：US16830920
申请日：2020-03-26
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli
Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.
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35.发明授权公开(公告)号：US10895740B2
公开(公告)日：2021-01-19
申请号：US16007951
申请日：2018-06-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Guido Chiaretti , Fabio Luigi Grilli , Roberto Carminati , Bruno Murari , Lorenzo Sarchi
Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.
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Patent Agency Ranking
公开(公告)号：US10288874B2
公开(公告)日：2019-05-14
申请号：US15293061
申请日：2016-10-13
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
IPC: G02B26/08 , H04N5/225 , G02B26/10 , H04N13/211 , H04N13/236 , H04N13/254 , G01B11/25 , G03B21/00
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
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37.发明授权公开(公告)号：US10225530B2
公开(公告)日：2019-03-05
申请号：US15805705
申请日：2017-11-07
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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公开(公告)号：US10048491B2
公开(公告)日：2018-08-14
申请号：US15266063
申请日：2016-09-15
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano Merli , Roberto Carminati , Marco Rossi
IPC: G02B26/08 , H01L41/09 , H03H9/02 , G01L1/18 , G01L1/16 , G01L5/00 , G02B26/10 , H04N5/225 , G06F3/042
Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
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39.发明申请公开(公告)号：US20180063492A1
公开(公告)日：2018-03-01
申请号：US15805705
申请日：2017-11-07
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati
CPC classification number: H04N9/3135 , B81B3/0045 , G02B7/1821 , G02B26/0858 , G02B26/101 , G02B26/105 , H04N9/3173
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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40.发明申请公开(公告)号：US20170285332A1
公开(公告)日：2017-10-05
申请号：US15266063
申请日：2016-09-15
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano Merli , Roberto Carminati , Marco Rossi
CPC classification number: G02B26/0858 , G01L1/16 , G01L1/18 , G01L5/00 , G02B26/085 , G02B26/101 , G02B26/105 , G06F3/0423 , H01L41/09 , H03H9/02275 , H04N5/225
Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
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