公开(公告)号：US11015933B2

公开(公告)日：2021-05-25

申请号：US16664041

申请日：2019-10-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US10520315B2

公开(公告)日：2019-12-31

申请号：US15639608

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US20180306580A1

公开(公告)日：2018-10-25

申请号：US15956446

申请日：2018-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  B81B2201/0242 ,  G01C19/574 ,  G01C19/5755

Abstract: A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.

公开(公告)号：US20150377624A1

公开(公告)日：2015-12-31

申请号：US14750840

申请日：2015-06-25

Applicant: STMICROELECTRONICS, S.R.L.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

Abstract translation: MEMS器件具有通过第一弹性元件弹性地携带悬挂质量的支撑区域。 调谐动态吸收器弹性耦合到悬挂质量并且被配置为在动态吸收体的固有振荡频率下抑制作用在悬浮质量上的正交力。 调谐动态吸收器由通过第二弹性元件联接到悬挂质量的阻尼物质形成。 在一个实施例中，悬挂质量和阻尼质量形成在相同的结构层中，例如半导体材料，并且阻尼块被悬挂质量包围。