公开(公告)号：US08308898B2

公开(公告)日：2012-11-13

申请号：US13246417

申请日：2011-09-27

申请人： Shigeru Kasai ,  Taro Ikeda ,  Yuki Osada

发明人： Shigeru Kasai ,  Taro Ikeda ,  Yuki Osada

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J7/24 ,  H05B31/26 ,  H03H7/38

CPC分类号： H05B6/80 ,  H01J37/32192 ,  H01J37/32256 ,  H05B6/705 ,  H05H1/46 ,  H05H2001/463

摘要： A tuner for matching impedance includes: a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug and including a drive part for applying a driving force; a drive transmission part for transmitting the driving force to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part, and wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.

摘要翻译： 用于匹配阻抗的调谐器包括：主体，其具有管状外导体和同轴地设置在外导体中的管状内导体，主体形成微波传输路径的一部分; 设置在所述外部导体和所述内部导体之间的环状介电块，所述块可沿着所述内部导体的纵向方向移动; 以及驱动机构，用于移动所述塞子并且包括用于施加驱动力的驱动部件; 驱动传递部，用于将驱动力传递到所述塞子; 驱动引导部，用于引导所述塞子的运动; 以及用于将所述块塞保持在所述驱动传递部分的保持部分，并且其中所述驱动传递部分，所述驱动引导部分和所述保持部分被容纳在所述内部导体中。

公开(公告)号：US20120137780A1

公开(公告)日：2012-06-07

申请号：US13390606

申请日：2010-08-09

申请人： Shigeru Kasai ,  Yasuhiro Sasaki ,  Hiroshi Sakai

发明人： Shigeru Kasai ,  Yasuhiro Sasaki ,  Hiroshi Sakai

IPC分类号： G01H11/00

CPC分类号： G11B33/08

摘要： A structure for attaching a vibration sensor to a storage device having a recording or reproducing head that records on or reproduces from a recording medium, includes: a first vibration sensor which is provided on a first outer surface of a base of the storage device, and detects vibration in a direction perpendicular to a surface of the recording medium; a second vibration sensor which is provided on a second outer surface of the base, the second surface orthogonal to the first outer surface, and detects vibration in an in-plane direction of the recording medium; an urging section which has a first end portion in contact with an upper surface of the first vibration sensor and a second end portion in contact with an upper surface of the second vibration sensor, and has a substantially L-shape; and a damping member affixed to the urging section.

摘要翻译： 一种用于将振动传感器附接到具有记录介质或从记录介质再现的记录或再现头的存储装置的结构，包括：第一振动传感器，设置在存储装置的基座的第一外表面上，以及 检测在垂直于记录介质表面的方向上的振动; 第二振动传感器，其设置在所述基座的第二外表面上，所述第二表面与所述第一外表面正交，并且检测所述记录介质的面内方向的振动; 具有与所述第一振动传感器的上表面接触的第一端部和与所述第二振动传感器的上表面接触的第二端部，并具有大致L形的推压部; 以及固定到所述推动部的阻尼构件。

公开(公告)号：US08041197B2

公开(公告)日：2011-10-18

申请号：US12120637

申请日：2008-05-14

申请人： Shigeru Kasai ,  Tomohiro Suzuki

发明人： Shigeru Kasai ,  Tomohiro Suzuki

IPC分类号： F26B19/00

CPC分类号： H01L21/324 ,  H01L21/2686 ,  H01L21/67115

摘要： A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.

摘要翻译： 用于加热目标物体W的加热装置设置有多个加热光源，其包括用于向物体施加波长在360nm至520nm范围内的加热光的LED元件。 因此，不管膜类型如何，仅在物体的浅表面（例如半导体晶片）的温度以均匀的温度分布在高速下被增加/减少。

公开(公告)号：US07768163B2

公开(公告)日：2010-08-03

申请号：US12272006

申请日：2008-11-17

申请人： Shigeru Kasai

发明人： Shigeru Kasai

IPC分类号： H02K7/08

CPC分类号： H02K5/1672 ,  H02K7/081

摘要： A motor may include a rotor provided with a rotation shaft, a stator, a frame fixed to the stator and provided with a bearing part that rotatably supports an output side of the rotation shaft, and an urging member mounted on the bearing part for urging the rotation shaft. The bearing part may include a bearing, formed with a protruded part protruded from a flat plate part of the frame. The urging member may include a bottom face part provided with a spring part for urging the rotation shaft, a pair of side plate parts bent from side edge parts of the bottom face part, and a pair of hook parts bent on inner sides from the pair of the side plate parts to be engaged with the protruded part. The urging member is mounted on the bearing part such that the hook parts are engaged with the protruded part.

摘要翻译： 电动机可以包括设置有旋转轴的转子，定子，固定到定子上的框架，并且设置有可旋转地支撑旋转轴的输出侧的轴承部分，以及安装在轴承部分上用于推动 旋转轴。 轴承部件可以包括形成有从框架的平板部突出的突出部的轴承。 推动构件可以包括设置有用于推动旋转轴的弹簧部分的底面部分，从底面部分的侧边缘部分弯曲的一对侧板部分和从该对的内侧弯曲的一对钩部 的侧板部件与突出部分接合。 推动构件安装在轴承部分上，使得钩部与突出部接合。

公开(公告)号：US07675207B2

公开(公告)日：2010-03-09

申请号：US12271996

申请日：2008-11-17

申请人： Shigeru Kasai

发明人： Shigeru Kasai

IPC分类号： H02K7/06

CPC分类号： H02K7/116 ,  F16C35/10 ,  H02K5/1672 ,  H02K37/24 ,  Y10T74/19684 ,  Y10T74/2186

摘要： A motor device may include a motor main body provided with a stator part and a rotation shaft, an output shaft provided with a lead screw part, a motor frame provided with an opposite-to-output side support part that supports the stator part and an opposite-to-output side of the output shaft, and which is provided with an output side support part which supports an output side of the output shaft, and a gear part for transmitting a driving force of the rotation shaft to the output shaft. The opposite-to-output side support part rotatably supports the rotation shaft and further rotatably supports the opposite-to-output side of the output shaft.

摘要翻译： 电动机装置可以包括设置有定子部分和旋转轴的电动机主体，设置有丝杠部分的输出轴，设置有支撑定子部分的相对输出侧支撑部分的电动机框架和 输出轴的相对输出侧，并且设置有支撑输出轴的输出侧的输出侧支撑部和用于将旋转轴的驱动力传递到输出轴的齿轮部。 相对输出侧支撑部可旋转地支撑旋转轴并进一步可旋转地支撑输出轴的相对输出侧。

公开(公告)号：US20100038833A1

公开(公告)日：2010-02-18

申请号：US12440034

申请日：2007-08-31

申请人： Shigeru Kasai ,  Hiroyuki Miyashita ,  Masatake Yoneda ,  Tomohiro Suzuki ,  Sumi Tanaka ,  Masamichi Nomura ,  Miwa Shimizu

发明人： Shigeru Kasai ,  Hiroyuki Miyashita ,  Masatake Yoneda ,  Tomohiro Suzuki ,  Sumi Tanaka ,  Masamichi Nomura ,  Miwa Shimizu

IPC分类号： H01L21/26 ,  C21D1/74

CPC分类号： H01L21/67115 ,  H01L21/67109 ,  H01L31/1864 ,  Y02E10/50 ,  Y02P70/521

摘要： Provided is an annealing apparatus, which is free from a problem of reduced light energy efficiency resulted by the reduction of light emission amount due to a heat generation and capable of maintaining stable performance. The apparatus includes: a processing chamber 1 for accommodating a wafer W; heating sources 17a and 17b including LEDs 33 and facing the surface of the wafer W to irradiate light on the wafer W; light-transmitting members 18a and 18b arranged in alignment with the heating sources 17a and 17b to transmit the light emitted from the LEDs 33; cooling members 4a and 4b supporting the light-transmitting members 18a and 18b at opposite side to the processing chamber 1 to make direct contact with the heating sources 17a and 17b and made of a material of high thermal conductivity; and a cooling mechanism for cooling the cooling members 4a and 4b with a coolant.

摘要翻译： 提供一种退火装置，其不会由于发热而导致的发光量的降低而导致光能效率降低的问题，并且能够保持稳定的性能。 该装置包括：用于容纳晶片W的处理室1; 加热源17a和17b包括LED33并面向晶片W的表面以将光照射在晶片W上; 与发热源17a和17b对准布置的透光部件18a和18b，以透射从LED33发出的光; 在与处理室1相反的一侧支撑透光部件18a和18b的冷却部件4a和4b与加热源17a和17b直接接触并由导热性高的材料制成; 以及用冷却剂冷却冷却部件4a，4b的冷却机构。

公开(公告)号：US20080309239A1

公开(公告)日：2008-12-18

申请号：US12044625

申请日：2008-03-07

申请人： Shigeru Kasai ,  Yuki Osada

发明人： Shigeru Kasai ,  Yuki Osada

IPC分类号： H01J25/50

CPC分类号： H05B6/666 ,  H01J37/32192 ,  H01J37/32201 ,  H05B6/806 ,  H05B2206/043

摘要： A microwave generation device includes: a magnetron having a cathode containing a filament and an anode containing a hollow resonator arranged to oppose to each other; a filament current measuring unit; and an application voltage measuring unit for measuring voltage applied to the filament. Based on the current and the voltage obtained by the current measuring unit and the voltage measuring unit, a resistance value calculation unit obtains a resistance value of the filament. A temperature calculation unit calculates the filament temperature from the resistance value and the resistance-temperature dependent characteristic. A filament power source is controlled by a power control unit so that the filament temperature is within a predetermined temperature range.

摘要翻译： 微波发生装置包括：具有包含灯丝的阴极的磁控管和包含彼此相对的中空谐振器的阳极; 灯丝电流测量单元; 以及用于测量施加到灯丝​​上的电压的施加电压测量单元。 基于由电流测量单元和电压测量单元获得的电流和电压，电阻值计算单元获得灯丝的电阻值。 温度计算单元根据电阻值和电阻温度依赖特性来计算灯丝温度。 灯丝电源由功率控制单元控制，使得灯丝温度在预定的温度范围内。

公开(公告)号：US20080280048A1

公开(公告)日：2008-11-13

申请号：US12078332

申请日：2008-03-28

申请人： Shigeru Kasai ,  Hiroyuki Miyashita

发明人： Shigeru Kasai ,  Hiroyuki Miyashita

IPC分类号： B05C11/00 ,  B05D3/02

CPC分类号： H01L21/67248 ,  H01L21/67115

摘要： This invention relates to a thermal processing method including: a placing step of placing an object to be processed onto a stage arranged in a processing container that can be vacuumed; and a heating step of heating the object to be processed to a predetermined temperature. The object to be processed is heated under a state in which a temperature distribution is maintained in such a manner that a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low, during at least a part of the heating step.

摘要翻译： 本发明涉及一种热处理方法，包括：放置步骤，将待处理物体放置在布置在可被抽真空的处理容器中的台上; 以及将被处理物体加热到规定温度的加热工序。 待加工对象在保持温度分布的状态下被加热，使得待处理物体的中心部分的温度高，而被加工物的周边部分的温度为 在加热步骤的至少一部分期间为低。

公开(公告)号：US07372350B2

公开(公告)日：2008-05-13

申请号：US11137453

申请日：2005-05-26

申请人： Yoshifumi Chida ,  Kei Chiba ,  Tatsumi Ide ,  Shigeru Kasai

发明人： Yoshifumi Chida ,  Kei Chiba ,  Tatsumi Ide ,  Shigeru Kasai

IPC分类号： H01H67/02

CPC分类号： H01H50/546

摘要： An electromagnetic relay is provided which is small in size and is capable of controlling two circuits of an ordinarily-open contact, which has a large current-carrying capacity and high interrupting capability, and which is excellent in resistance against shock and vibration. Movable contactors are held, through bow-shaped movable contactor springs, to two -shaped holding frames each being electrically separated and being mechanically connected via a card made of a highly heat-resistant resin in a card block. Thick-plate shaped movable contacts, which are attached to the movable contactors in a fixed manner, are electrically connected or disconnected to fixed contacts in a base block, in synchronization with operations of an armature of an electro-magnet block. In order to improve a current-carrying capability and interrupting capability, there are provided two pieces of ordinarily-open contacts which are connected in series to each other, and between which an interval is doubled, in each of two circuits.

摘要翻译： 提供了一种电磁继电器，其尺寸小，并且能够控制具有大的载流能力和高中断能力的通常开路触点的两个电路，并且具有优异的抗冲击和振动性。 可移动接触器通过弓形活动接触器弹簧固定到两个形状的保持框架各自电气分离，并通过卡片块中由高耐热树脂制成的卡片机械连接。 与电磁块的电枢的操作同步地，以固定的方式附接到活动接触器的厚板形可动触头与基座中的固定触点电连接或断开。 为了提高载流能力和中断能力，在两个电路中的每一个中提供两个彼此串联连接的通常开路的触点，并且间隔被加倍。

公开(公告)号：US07226524B2

公开(公告)日：2007-06-05

申请号：US10498672

申请日：2002-11-25

申请人： Shigeru Kasai ,  Nobuhiko Yamamoto ,  Hikaru Adachi ,  Yuki Osada

发明人： Shigeru Kasai ,  Nobuhiko Yamamoto ,  Hikaru Adachi ,  Yuki Osada

IPC分类号： C23C16/00 ,  H01L21/306 ,  C23F1/00

CPC分类号： H01J37/32256 ,  H01J37/32192 ,  H01J37/32568 ,  H01P5/103

摘要： A plasma processing apparatus includes an evacuatable processing vessel; a workpiece mount base for mounting thereon an object to be processed; a microwave transmitting plate provided in an opening of a ceiling of the processing vessel; a planar antenna member for supplying a microwave into the processing vessel via the microwave transmitting plate; a shield lid grounded to cover a top of the planar antenna member; a waveguide for guiding the microwave to the planar antenna member; a member elevating mechanism for relatively varying a vertical distance between the planar antenna member and the shield lid; a tuning rod insertable into the waveguide; a tuning rod driving mechanism for moving the tuning rod to adjust an insert amount thereof; and a matching control section for controlling an elevation amount of the planar antenna member and the insert amount of the tuning rod to obtain a matching adjustment.

摘要翻译： 等离子体处理装置包括可抽空处理容器; 用于在其上安装待处理物体的工件安装基座; 设置在处理容器的天花板的开口中的微波传输板; 平面天线构件，用于经由微波发射板向处理容器提供微波; 屏蔽盖，其接地以覆盖所述平面天线构件的顶部; 用于将微波引导到平面天线构件的波导; 用于相对改变平面天线构件和屏蔽盖之间的垂直距离的构件升降机构; 调谐杆可插入到波导中; 调节杆驱动机构，用于移动调音杆以调节其插入量; 以及匹配控制部分，用于控制平面天线部件的仰角量和调节杆的插入量以获得匹配调整。