Electrostatically atomizing device
    31.
    发明申请
    Electrostatically atomizing device 有权
    静电雾化装置

    公开(公告)号:US20070119993A1

    公开(公告)日:2007-05-31

    申请号:US10583913

    申请日:2004-12-13

    IPC分类号: B05B5/00

    CPC分类号: B05B5/057 B05B5/0255 B05B5/16

    摘要: Water is fed from a tank to a capillary carrier having an emitter end from which an ionized water particle is emitted by a voltage being applied across the emitter end and an opposed electrode. A cation exchanger is provided to remove minerals such as Ca2+ and Mg2+ from the water being fed through the capillary carrier or from the water to be fed to the carrier from the tank, thereby avoiding the ions from precipitating at the emitter end as CaCO3 or MgO in reaction with C02 in the surrounding air, and therefore assure reliable electrostatic atomization over a long period of time.

    摘要翻译: 水从罐进料到具有发射端的毛细管载体,通过施加在发射极端和相对电极上的电压,从其发射电离水颗粒。 提供了一种阳离子交换器,用于从供给毛细管载体的水中或从供给到载体的水中除去诸如Ca 2+和Mg 2+之类的矿物质, 从而避免离子在发射极端作为CaCO 3或MgO与周围空气中的CO 2 2反应而沉淀,因此确保了可靠的静电雾化 很长一段时间。

    Substrate processing apparatus for semiconductor devices
    33.
    发明授权
    Substrate processing apparatus for semiconductor devices 有权
    用于半导体器件的衬底处理装置

    公开(公告)号:US09460945B2

    公开(公告)日:2016-10-04

    申请号:US11976949

    申请日:2007-10-30

    CPC分类号: H01L21/67109 H01L21/67757

    摘要: A substrate processing apparatus comprises a processing chamber for processing a substrate, a substrate supporting tool for supporting and carrying the substrate into the processing chamber, a standby chamber formed below the processing chamber for holding the substrate supporting tool in standby, a gas supply unit provided on the side of the standby chamber for supplying inert gas or gas containing oxygen into the standby chamber, a gas exhaust unit provided on the side of the standby chamber and opposite to the gas supply unit, for exhausting the inert gas or gas containing oxygen from the standby chamber, a first gas exhaust path connected to the gas exhaust unit for exhausting the inert gas or gas containing oxygen within the gas exhaust unit, a second gas exhaust path connected to the side of the gas exhaust unit for exhausting the gas containing oxygen within the exhaust gas unit, and a gate valve for opening and closing the second gas exhaust path.

    摘要翻译: 一种基板处理装置,包括:用于处理基板的处理室,用于将基板支撑并承载到处理室中的基板支撑工具;形成在处理室下面的备用室,用于将基板支撑工具保持在备用状态;气体供给单元, 在备用室的一侧用于向备用室供给惰性气体或含氧的气体,设置在备用室侧并与气体供给单元相对的排气单元,用于将惰性气体或含氧气体排出 所述备用室,连接到所述排气单元的用于排出所述气体排出单元内的含有氧的惰性气体或气体的第一排气路径,连接到所述排气单元侧以排出含氧气体的第二气体排出路径 在排气单元内,以及用于打开和关闭第二排气通道的闸阀。

    Shot-blasting Machine
    34.
    发明申请
    Shot-blasting Machine 有权
    喷丸机

    公开(公告)号:US20090047878A1

    公开(公告)日:2009-02-19

    申请号:US11887736

    申请日:2006-04-06

    IPC分类号: B24C3/26

    CPC分类号: B24C3/30 B24C3/04 B24C9/00

    摘要: A loader arrangement 7 of a shot-blasting machine includes a bucket loader 29 having a tip opening that can be opened and closed by means of a lid 35. The loader arrangement 7 also includes a swivel arm 32, which is vertically and pivotally attached to a frame 4 via a linkage 31, for vertically swiveling the bucket loader 29, and a chain block 34 for swiveling the arm 32. Once the bucket loader 29 has reached the upper position above a rotary drum 5 by means of the swivel arm 32, a guide means 30, which is attached to the arm 32, allows the bucket loader 29 to approach the drum 5 through its top opening by driving a hydraulic cylinder 33, while the tip of the bucket loader 29 is opposed to the bottom wall of the drum 5. Once the tip of the bucket loader 29 is close to the bottom wall or the inner peripheral wall of the drum 5, the lid 35 is opened to drop the work pieces in the bucket loader 29 into the drum 5. Because the work pieces thus tumble from the low level relative to the bottom wall or the inner peripheral wall of the drum 5, the impact of the work pieces being dropped can be inhibited, and thus damage to the work pieces and the noise of the sounds of hitting can be reduced.

    摘要翻译: 喷丸机的装载装​​置7包括铲斗装载机29,铲斗装载机29具有能够通过盖35打开和关闭的顶端开口。装载机装置7还包括一个旋转臂32,该旋转臂32垂直和枢转地连接到 通过连杆31的框架4,用于垂直地旋转铲斗装载机29,以及用于使臂32旋转的链条34.一旦铲斗装载机29通过旋转臂32到达旋转滚筒5上方的上部位置, 附接到臂32的引导装置30允许铲斗装载机29通过驱动液压缸33通过其顶部开口接近滚筒5,同时铲斗装载机29的末端与底盘 一旦铲斗装载机29的末端靠近滚筒5的底壁或内周壁,则打开盖35,将铲斗装载器29中的工件放入滚筒5中。由于工作 因此从相对于瓶颈的低水平下降 可以抑制工件的落下冲击,从而可以减少对工件的损坏和打击声的噪音。

    Method and apparatus for surface treatment of a long piece of material
    36.
    发明授权
    Method and apparatus for surface treatment of a long piece of material 失效
    用于表面处理长材料的方法和装置

    公开(公告)号:US07037180B2

    公开(公告)日:2006-05-02

    申请号:US11080819

    申请日:2005-03-16

    IPC分类号: B24B1/00

    摘要: An inline-ready method of finishing the surface of a long material (W) capable of preventing any environmental problem from occurring and the mechanical properties of the long material from deteriorating, comprising the steps of holding the long material (W) by two or more elastic endless belts (1) with a specified force, rotating the elastic endless belts (1) in the same direction as or in the reverse direction to the moving direction of the long material by moving the long material (W) and increasing or decreasing the rotating speed of the elastic endless belts (1) more than or less than the moving speed of the long material, and loading powder and granular grinding material (S) between the elastic endless belts (1), characterized in that the grinding material (S) is moved relative to the long material (W) to rub the grinding material (S) against the long material (W) so as to finish the surface of the long material (W).

    摘要翻译: 一种能够防止任何环境问题发生的长材料(W)的表面和长材料的机械性能劣化的在线就绪方法,包括以下步骤:将长材料(W)保持两个或更多个 通过移动长材料(W)使弹性环形带(1)沿与长材料的移动方向相反的方向或相反方向旋转弹性环形带(1)并增加或减少 所述弹性环形带(1)的旋转速度大于或小于所述长材料的移动速度,并且在所述弹性环形带(1)之间装载粉末和颗粒磨料(S),其特征在于,所述研磨材料(S )相对于长材料(W)移动以将研磨材料(S)抵靠长材料(W)摩擦,以便完成长材料(W)的表面。

    Substrate processing apparatus
    39.
    发明授权
    Substrate processing apparatus 有权
    基板加工装置

    公开(公告)号:US08398771B2

    公开(公告)日:2013-03-19

    申请号:US12498639

    申请日:2009-07-07

    摘要: A substrate processing apparatus in accordance with the present invention includes a process chamber configured to accommodate a substrate, a gas supply line configured to supply a gas to an inside of the process chamber, and an exhaust line configured to exhaust the inside of the process chamber. The gas supply line of the substrate processing apparatus includes a preheating unit preheating the gas supplied from a gas source, a metal pipeline having an angled section wherein the metal pipe line connects the preheating unit and the inside of the process chamber to supply the gas preheated by the preheating unit into the process chamber, and a heat dissipation member covering the angled section to dissipate heat from the angled section.

    摘要翻译: 根据本发明的基板处理装置包括被配置为容纳基板的处理室,被配置为向处理室的内部供应气体的气体供给管线和被构造成排出处理室内部的排气管线 。 基板处理装置的气体供给管线包括:预热单元,用于对从气体源供应的气体进行预热;金属管道,其具有成角度的部分,金属管线将预热单元与处理室的内部连接,以供应预热的气体 通过预热单元进入处理室,以及散热构件,其覆盖成角度的部分以从倾斜的部分散发热量。

    Method and apparatus for surface treatment of a long piece of material
    40.
    发明授权
    Method and apparatus for surface treatment of a long piece of material 有权
    用于表面处理长材料的方法和装置

    公开(公告)号:US07422512B2

    公开(公告)日:2008-09-09

    申请号:US11362047

    申请日:2006-02-27

    IPC分类号: B24B1/00

    摘要: An inline-ready method of finishing the surface of a long material (W) capable of preventing any environmental problem from occurring and the mechanical properties of the long material from deteriorating, comprising the steps of holding the long material (W) by two or more elastic endless belts (1) with a specified force, rotating the elastic endless belts (1) in the same direction as or in the reverse direction to the moving direction of the long material by moving the long material (W) and increasing or decreasing the rotating speed of the elastic endless belts (1) more than or less than the moving speed of the long material, and loading powder and granular grinding material (S) between the elastic endless belts (1), characterized in that the grinding material (S) is moved relative to the long material (W) to rub the grinding material (S) against the long material (W) so as to finish the surface of the long material (W).

    摘要翻译: 一种能够防止任何环境问题发生的长材料(W)的表面和长材料的机械性能劣化的在线就绪方法,包括以下步骤:将长材料(W)保持两个或更多个 通过移动长材料(W)使弹性环形带(1)沿与长材料的移动方向相反的方向或相反方向旋转弹性环形带(1)并增加或减少 所述弹性环形带(1)的旋转速度大于或小于所述长材料的移动速度,并且在所述弹性环形带(1)之间装载粉末和颗粒磨料(S),其特征在于,所述研磨材料(S )相对于长材料(W)移动以将研磨材料(S)抵靠长材料(W)摩擦,以便完成长材料(W)的表面。