公开(公告)号：US20090073457A1

公开(公告)日：2009-03-19

申请号：US12153227

申请日：2008-05-15

申请人： Toshihiko Nakata ,  Masahiro Watanabe

发明人： Toshihiko Nakata ,  Masahiro Watanabe

IPC分类号： G01B11/02

CPC分类号： G01B9/02081 ,  G01B9/02018 ,  G01B2290/30 ,  G01B2290/70

摘要： In measuring the displacement of an object using the phase-shifting light interference, since three beam splitters were used for generating the four phase-shifting optical paths, an interferometer was increased in size, whereby the application objects were limited. Also, to solve an essential problem that if there is a disturbance such as a temperature distribution, a humidity distribution, an air pressure distribution, a density distribution or an air flow change on the phase-shifting optical paths, a measurement error occurs, the four phase-shifting optical paths are produced spatially in parallel by combining a four division prism with a photonic crystal λ/4 element and a photonic crystal polarizing element arranged like an array, constructing a small light interference displacement sensor in the invention, whereby the application objects are expanded, and the microscopic displacement or surface roughness of the object can be measured at a resolution of sub nanometer or less and with high reproducibility without influence of the disturbance.

摘要翻译： 在使用相移光干涉来测量物体的位移时，由于使用三个分束器来产生四个移相光路，因此干涉仪的尺寸增加，由此施加物体受到限制。 此外，为了解决如果在移相光路上存在诸如温度分布，湿度分布，空气压力分布，密度分布或气流变化等干扰的测量误差，则发生测量误差， 通过组合四分割棱镜与光子晶体λ/ 4元件和排列成阵列的光子晶体偏振元件在本发明中构成小型光干涉位移传感器，四个相移光路被空间地产生，由此应用 物体被扩大，并且物体的微观位移或表面粗糙度可以以亚纳米或更小的分辨率测量，并且具有高重现性而不受干扰的影响。

公开(公告)号：US20080223122A1

公开(公告)日：2008-09-18

申请号：US12023158

申请日：2008-01-31

申请人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

发明人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

IPC分类号： G01B5/28

CPC分类号： G01Q70/04 ,  G01Q10/06

摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.

摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。

公开(公告)号：US20080223117A1

公开(公告)日：2008-09-18

申请号：US11411022

申请日：2006-04-26

申请人： Masahiro Watanabe ,  Toshihiko Nakata ,  Shuichi Baba

发明人： Masahiro Watanabe ,  Toshihiko Nakata ,  Shuichi Baba

IPC分类号： G01B5/28

CPC分类号： G01Q60/34

摘要： The present invention provides a method of using an accurate three-dimensional shape without damaging a sample by making a probe contact the sample only at a measuring point, lifting and retracting the probe when moving to the next measuring point and making the probe approach the sample after moving to the next measuring point, wherein high frequency/minute amplitude cantilever excitation and vibration detection are performed and further horizontal direction excitation or vertical/horizontal double direction excitation are performed to improve the sensitivity of contacting force detection on a slope of steep inclination. The method uses unit for inclining the probe in accordance with the inclination of a measurement target and a structure capable of absorbing or adjusting the orientation of the light detecting the condition of contact between the probe and sample after reflection on the cantilever, which varies a great deal depending on the inclination of the probe.

摘要翻译： 本发明提供了一种使用准确的三维形状而不损害样品的方法，该方法是使探针仅在测量点接触样品，当移动到下一个测量点时提升和缩回探针并使探针接近样品 在移动到下一个测量点之后，执行高频/分钟幅度的悬臂激励和振动检测，并且执行进一步的水平方向激励或垂直/水平双向激励，以提高在陡倾斜度上的接触力检测的灵敏度。 该方法使用用于根据测量对象的倾斜度和能够吸收或调节探测器和样品之间的接触条件的光的方向来倾斜测量头的单元，其反射在悬臂上，其变化很大 取决于探头的倾斜度。

公开(公告)号：US07417721B2

公开(公告)日：2008-08-26

申请号：US10536715

申请日：2003-11-27

申请人： Sachio Uto ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

发明人： Sachio Uto ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

IPC分类号： G01N21/00

CPC分类号： G01N21/00 ,  G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148

摘要： A defects inspecting apparatus having: a scanning stage for running into a predetermined direction while mounting an inspection target substrate thereon; an illumination optic system for irradiating an illumination light beam upon a surface of the inspection target substrate at a predetermined angle inclined thereto; a detection optic system including, an upper-directed photo-detector for receiving upper-directed reflected/scattered lights emitting upwards from the inspection target substrate, thereby converting them into an upper-directed image signal, and a side-directed photo-detector for receiving side-directed reflected/scattered lights emitting for the inspection target substrate into an inclined direction, so as to flatly intersects the illumination light beam, and thereby converting into a side-directed image signal; and a signal processing system-for detecting defects upon basis of the upper-directed image signal and the side-directed image signal.

摘要翻译： 一种缺陷检查装置，具有：在其上安装检查对象基板的同时沿预定方向行进的扫描台; 照明光学系统，用于以与其倾斜的预定角度将照明光束照射在检查对象基板的表面上; 检测光学系统，包括：用于接收从检查对象基板向上发射的上方反射/散射光的上位光检测器，从而将其转换为高定向图像信号;以及侧向光检测器， 将检测对象基板发射的侧向反射/散射光倾斜到倾斜方向，以与照明光束平坦地相交，从而转换为侧向图像信号; 以及信号处理系统 - 用于基于上限图像信号和侧向图像信号来检测缺陷。

公开(公告)号：US20060219900A1

公开(公告)日：2006-10-05

申请号：US11439618

申请日：2006-05-23

申请人： Masahiro Watanabe ,  Toshihiko Nakata

发明人： Masahiro Watanabe ,  Toshihiko Nakata

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01Q10/06 ,  G01Q10/02 ,  G01Q20/02 ,  G01Q60/32 ,  Y10S977/852

摘要： In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate three-dimensional shape information of the sample without damaging the sample, the speed of approach to each measurement location is increased by controlling the approach of the sample and probe by the provision of a high-sensitivity proximity sensor of the optical type. Also, additional information relating to the distribution of material quality on the sample can be obtained without lowering the scanning speed by: applying a voltage to the probe, or measuring the response on vibrating the probe, or detecting the local optical intensity of the sample surface concurrently with obtaining sample height data and concurrently with the contact period with the sample, whilst ensuring that the probe is not dragged over the sample, by bringing the probe into contact with the sample intermittently.

摘要翻译： 为了提供一种扫描探针显微镜，能够与样品的局部特性相关的高通量分布信息同时测量而不损害样品的准确的三维形状信息，因此，每个测量位置的接近速度通过 通过提供光学类型的高灵敏度接近传感器来控制样品和探针的接近。 此外，通过以下方式可以获得关于样品的材料质量分布的附加信息，而不降低扫描速度：向探针施加电压，或测量振动探针时的响应，或检测样品表面的局部光强度 同时获得样品高度数据，同时与样品的接触期，同时确保探针未被拖动到样品上，通过使探针间断地与样品接触。

公开(公告)号：US06877365B2

公开(公告)日：2005-04-12

申请号：US10340517

申请日：2003-01-09

申请人： Masahiro Watanabe ,  Toshihiko Nakata

发明人： Masahiro Watanabe ,  Toshihiko Nakata

IPC分类号： G01B21/16 ,  G01B21/30 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/24 ,  G01Q60/32 ,  H01L21/66 ,  G01B5/28 ,  H01J3/14

CPC分类号： G01Q10/06 ,  G01Q10/02 ,  G01Q20/02 ,  G01Q60/32 ,  Y10S977/852

摘要： In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate three-dimensional shape information of the sample without damaging the sample, the speed of approach to each measurement location is increased by controlling the approach of the sample and probe by the provision of a high-sensitivity proximity sensor of the optical type. Also, additional information relating to the distribution of material quality on the sample can be obtained without lowering the scanning speed by: applying a voltage to the probe, or measuring the response on vibrating the probe, or detecting the local optical intensity of the sample surface concurrently with obtaining sample height data and concurrently with the contact period with the sample, whilst ensuring that the probe is not dragged over the sample, by bringing the probe into contact with the sample intermittently.

摘要翻译： 为了提供一种扫描探针显微镜，能够与样品的局部特性相关的高通量分布信息同时测量而不损害样品的准确的三维形状信息，因此，每个测量位置的接近速度通过 通过提供光学类型的高灵敏度接近传感器来控制样品和探针的接近。 此外，通过以下方式可以获得关于样品的材料质量分布的附加信息，而不降低扫描速度：向探针施加电压，或测量振动探针时的响应，或检测样品表面的局部光强度 同时获得样品高度数据，同时与样品的接触期，同时确保探针未被拖动到样品上，通过使探针间断地与样品接触。

公开(公告)号：US08860946B2

公开(公告)日：2014-10-14

申请号：US12153227

申请日：2008-05-15

申请人： Toshihiko Nakata ,  Masahiro Watanabe

发明人： Toshihiko Nakata ,  Masahiro Watanabe

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02018 ,  G01B2290/30 ,  G01B2290/70

摘要： In measuring the displacement of an object using the phase-shifting light interference, since three beam splitters were used for generating the four phase-shifting optical paths, an interferometer was increased in size, whereby the application objects were limited. Also, to solve an essential problem that if there is a disturbance such as a temperature distribution, a humidity distribution, an air pressure distribution, a density distribution or an air flow change on the phase-shifting optical paths, a measurement error occurs, the four phase-shifting optical paths are produced spatially in parallel by combining a four division prism with a photonic crystal λ/4 element and a photonic crystal polarizing element arranged like an array, constructing a small light interference displacement sensor in the invention, whereby the application objects are expanded, and the microscopic displacement or surface roughness of the object can be measured at a resolution of sub nanometer or less and with high reproducibility without influence of the disturbance.

摘要翻译： 在使用相移光干涉来测量物体的位移时，由于使用三个分束器来产生四个移相光路，因此干涉仪的尺寸增加，由此施加物体受到限制。 此外，为了解决如果在移相光路上存在诸如温度分布，湿度分布，空气压力分布，密度分布或气流变化等干扰的测量误差，则发生测量误差， 通过组合四分之一棱镜与光子晶体λ/ 4元件和排列成阵列的光子晶体偏振元件在本发明中构成小的光干涉位移传感器，四个相移光路被并行产生，由此应用 物体被扩大，并且物体的微观位移或表面粗糙度可以以亚纳米或更小的分辨率测量，并且具有高重现性而不受干扰的影响。

公开(公告)号：US08659761B2

公开(公告)日：2014-02-25

申请号：US13302948

申请日：2011-11-22

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Yasuhiro Yoshitake ,  Mineo Nomoto

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02003 ,  G01B9/02081 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70775

摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

摘要翻译： 在使用光干涉的位移测量装置中，探针光路在空间上与参考光路分离。 因此，当通过空气等的波动或机械振动产生温度或折射率分布时，光路差在两个光路之间波动，并且产生测量误差。 在该解决方案中，将探测光的光轴靠近参考光的光轴不受任何干扰影响的距离，用探测光照射样品，用参考光照射参考表面，反射光 允许光束彼此干涉，并且从所得到的干涉光中获得样品的位移，从而防止由于光程差的波动而产生测量误差。

公开(公告)号：US08407811B2

公开(公告)日：2013-03-26

申请号：US12712745

申请日：2010-02-25

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

IPC分类号： G01Q60/24

CPC分类号： G01Q60/22 ,  G01Q70/12

摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

摘要翻译： 在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元 增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息 分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

公开(公告)号：US20120327429A1

公开(公告)日：2012-12-27

申请号：US13605395

申请日：2012-09-06

申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

IPC分类号： G01B11/14

CPC分类号： G01Q20/02 ,  G01B9/02014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/02076 ,  G01B2290/45 ,  G01B2290/70 ,  G01S17/50

摘要： A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

摘要翻译： 位移测量方法，其装置和探针显微镜。 这使得能够以亚纳米级或更低的精度稳定地测量被测物体的位移量和移动距离，而不受诸如空气波动和机械振动之类的扰动的影响。 脉冲束被分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束在相对的方向上通过相同的延迟光路被发送到被测物体的一个脉冲周期的延迟，然后被测量对象反射。 通过对两束脉冲光束进行干涉而获得由测量对象的运动引起的光学相位变化。