公开(公告)号：US20050033542A1

公开(公告)日：2005-02-10

申请号：US10899101

申请日：2004-07-27

申请人： Toru Morikawa ,  Kazuhide Watanabe ,  Shinya Miyaji

发明人： Toru Morikawa ,  Kazuhide Watanabe ,  Shinya Miyaji

IPC分类号： G06F11/36 ,  G06F13/00 ,  G06F19/00

CPC分类号： G06F11/3636 ,  G06F11/3652

摘要： A debugger apparatus according to the present embodiment comprises a host, CPU, a plurality of E-memory units (emulation memory units) for storing instructions, and an execution supervision unit. The host traces the instructions to be stored in the E-memory units and transfers the tracing result in the form of an instruction sequence. The execution supervision unit is connected to the CPU, E-memory units, and host. The execution supervision unit individually writes the instruction sequences transferred from the host in the plurality of E-memory units, reads an instruction sequence from one of the plurality of E-memory units in accordance with an instruction address of the CPU to thereby transfer the instruction sequence to the CPU, and outputs an instruction rewriting order to the host when the instruction address of the CPU is irrelevant.

摘要翻译： 根据本实施例的调试器装置包括主机，CPU，用于存储指令的多个E存储器单元（仿真存储器单元）和执行监视单元。 主机跟踪要存储在E-memory单元中的指令，并以指令序列的形式传送跟踪结果。 执行监视单元连接到CPU，电子存储单元和主机。 执行监视单元将从主机传送的指令序列分别写入多个E存储单元中，根据CPU的指令地址从多个E存储器单元之一读取指令序列，从而传送指令 到CPU的序列，并且当CPU的指令地址不相关时，向主机输出指令重写顺序。

公开(公告)号：US06159301A

公开(公告)日：2000-12-12

申请号：US213463

申请日：1998-12-17

申请人： Kiyoshi Sato ,  Mikio Shimizu ,  Toshihiko Hanamachi ,  Shinya Miyaji

发明人： Kiyoshi Sato ,  Mikio Shimizu ,  Toshihiko Hanamachi ,  Shinya Miyaji

IPC分类号： C23C16/44 ,  C23C16/458 ,  C23C16/46 ,  H01L21/00 ,  H01L21/205 ,  H01L21/683 ,  H01L21/687 ,  C23C16/00

CPC分类号： H01L21/68757 ,  C23C16/4581 ,  C23C16/4583 ,  C23C16/4586 ,  H01L21/67103 ,  H01L21/68785

摘要： A substrate-holding apparatus for holding a semiconductor substrate in a semiconductor processor is characterized in that the apparatus includes a mount block made of, e.g., aluminum nitrate with a high-frequency electrode embedded therein and a heating block made of, e.g., an aluminum alloy with a heating body embedded therein. The mount block is tightly attached to the heating block by engaging the bottom surface of the mount block with the top surface of the heating block, for example, by using a latching mechanism.

摘要翻译： 用于将半导体基板保持在半导体处理器中的基板保持装置的特征在于，该装置包括由例如其中嵌入有高频电极的硝酸铝制成的安装块和由例如铝制成的加热块 合金，其中嵌入有加热体。 通过例如通过使用闭锁机构将安装块与加热块的顶表面接合，从而将安装块紧密地附接到加热块。

公开(公告)号：US5991868A

公开(公告)日：1999-11-23

申请号：US246179

申请日：1994-05-19

申请人： Hiroshi Kamiyama ,  Masato Suzuki ,  Shinya Miyaji

发明人： Hiroshi Kamiyama ,  Masato Suzuki ,  Shinya Miyaji

IPC分类号： G06F7/00 ,  G06F9/302 ,  G06F9/32 ,  G06F9/30

CPC分类号： G06F9/30014 ,  G06F9/30058 ,  G06F9/30094

摘要： In a data processing apparatus, a decoding unit decodes instructions. A calculator operates N-bit data in accordance with the decoded results. A flag storage unit stores a plurality of flag groups which are changed in correspondence to data having different widths, based on the operated results. Selectors select a predetermined flag group in accordance with the direction of a conditional branch instruction. A branch judging unit judges whether a branch is taken or not by referring to the selected flag group.

摘要翻译： 在数据处理装置中，解码单元解码指令。 计算器根据解码结果来操作N位数据。 标志存储单元基于所操作的结果存储对应于具有不同宽度的数据而改变的多个标志组。 选择器根据条件分支指令的方向选择预定的标志组。 分支判断单元通过参照所选择的标志组判断是否采用分支。

公开(公告)号：US09238593B2

公开(公告)日：2016-01-19

申请号：US13809290

申请日：2011-07-13

申请人： Akira Nakamura ,  Kohei Suzuki ,  Shinya Miyaji ,  Shinji Saito

发明人： Akira Nakamura ,  Kohei Suzuki ,  Shinya Miyaji ,  Shinji Saito

IPC分类号： B32B3/24 ,  C04B35/583 ,  C04B35/20 ,  C04B35/645 ,  G01R1/067 ,  G01R3/00

CPC分类号： C04B35/583 ,  C04B35/20 ,  C04B35/645 ,  C04B35/6455 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3418 ,  C04B2235/3445 ,  C04B2235/386 ,  C04B2235/5292 ,  C04B2235/656 ,  C04B2235/767 ,  C04B2235/77 ,  C04B2235/787 ,  C04B2235/80 ,  C04B2235/96 ,  C04B2235/9607 ,  G01R1/06722 ,  G01R3/00 ,  Y10T428/24273

摘要： There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.

摘要翻译： 提供了一种陶瓷构件，该陶瓷构件是含有顽火和氮化硼作为组成的烧结体，其中氮化硼沿单一方向取向，使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。 在陶瓷构件中，取向度的指标不小于0.8。 在这样做时，可以提供一种具有自由加工性能，热膨胀系数接近于硅的陶瓷构件和高强度的陶瓷构件，以及使用该陶瓷构件形成的探针保持器，以及 陶瓷构件的制造方法。

公开(公告)号：US20130052451A1

公开(公告)日：2013-02-28

申请号：US13661390

申请日：2012-10-26

申请人： Takamichi Sano ,  Shinya Miyaji ,  Shinji Saito

发明人： Takamichi Sano ,  Shinya Miyaji ,  Shinji Saito

IPC分类号： C23C4/10 ,  B32B15/04 ,  C23C4/18

CPC分类号： C23C4/18 ,  C23C4/11 ,  C23C28/04 ,  Y10T428/24997

摘要： An insulation coating method for a metal base comprises a thermal spraying step, an impregnation step, and a beam irradiation step. In the thermal spraying step, a first insulation coating is formed by thermally spraying a first metal oxide to the surface of the metal base. In the impregnation step, pores formed in the surface of the first insulation coating are impregnated with a sol that contains, as a dispersoid, a metal oxide, a hydrate of a metal oxide, or a metal hydroxide. In the beam irradiation step, a second insulation coating that is composed of a second metal oxide is formed by irradiating the first insulation coating and the sol with a high energy beam after the impregnation step.

摘要翻译： 用于金属基底的绝缘涂覆方法包括热喷涂步骤，浸渍步骤和束照射步骤。 在热喷涂步骤中，通过将第一金属氧化物热喷涂到金属基底的表面上形成第一绝缘涂层。 在浸渍步骤中，在第一绝缘涂层的表面形成的孔被含有作为分散质的金属氧化物，金属氧化物的水合物或金属氢氧化物的溶胶浸渍。 在光束照射工序中，通过在浸渍工序后用高能量射束照射第一绝缘层和溶胶，形成由第二金属氧化物构成的第二绝缘膜。

公开(公告)号：US08378705B2

公开(公告)日：2013-02-19

申请号：US12735929

申请日：2009-02-26

申请人： Toshio Kazama ,  Hiroshi Nakayama ,  Shinya Miyaji ,  Kohei Suzuki

发明人： Toshio Kazama ,  Hiroshi Nakayama ,  Shinya Miyaji ,  Kohei Suzuki

IPC分类号： G01R31/00

CPC分类号： G01R1/07378 ,  G01R31/2889 ,  H05K3/4605 ,  H05K3/467 ,  H05K2201/068

摘要： A wiring substrate that allows wiring at a fine pitch and has a coefficient of thermal expansion close to the coefficient of thermal expansion of silicone, and a probe card that includes the wiring substrate are provided. To this end, there are provided a wiring substrate that includes a ceramic substrate having a coefficient of thermal expansion of 3×10−6 to 5×10−6/° C. and one or more thin-film wiring sheets stacked on one surface of the ceramic substrate, and a probe head on which a plurality of conductive proves are arranged in accordance with wiring on the thin-film wiring sheet, which holds individual probes while preventing the probes from coming off and allowing both ends of each probe to be exposed, and which is stacked on the wiring substrate while one end of each probe is brought into contact with the thin-film wiring sheet.

摘要翻译： 提供允许以细间距布线并且具有接近硅树脂的热膨胀系数的热膨胀系数的布线基板和包括布线基板的探针卡。 为此，提供一种布线基板，其包括具有3×10-6〜5×10-6 /℃的热膨胀系数的陶瓷基板和在一个面上堆叠的一个以上的薄膜布线片 的陶瓷基板，以及探针头，根据薄膜布线片上的布线布置有多个导电证明物，该探针头保持各个探针，同时防止探针脱落并且允许每个探针的两端为 暴露，并且在每个探针的一端与薄膜布线片接触的同时在布线基板上层叠。

公开(公告)号：US07265962B2

公开(公告)日：2007-09-04

申请号：US10814304

申请日：2004-04-01

申请人： Shinya Miyaji ,  Xinwei Chen ,  Shinji Saito

发明人： Shinya Miyaji ,  Xinwei Chen ,  Shinji Saito

IPC分类号： H01T23/00

CPC分类号： H01L21/6831

摘要： The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.

摘要翻译： 本发明提供一种静电卡盘，其包括基板，通过在基板的上表面上的热喷涂形成的电介质层，嵌入在电介质层中的内部电极，从基板的下表面延伸到内部的馈电端子部 电极和设置在馈电端子部分中的电极，其中馈电端子部分和基板通过机械接合彼此固定。

公开(公告)号：US20060150023A1

公开(公告)日：2006-07-06

申请号：US11297387

申请日：2005-12-09

申请人： Tomoya Hasebe ,  Shinya Miyaji ,  Kazuhide Watanabe

发明人： Tomoya Hasebe ,  Shinya Miyaji ,  Kazuhide Watanabe

IPC分类号： G06F11/00

CPC分类号： G01R31/31705 ,  G06F11/2242

摘要： To efficiently debug while reducing a debugging circuit in a system LSI made up of a plurality of CPUs. A debugging apparatus includes debug object selection means 109 for selecting the CPU to be debugged from CPUs 11 and 12 in accordance with a debug object selection request from a host PC 15 connected to a system LSI 17, event information output means 110 for outputting internal event information of one selected CPU to be debugged, detected event storage means 106 for temporarily storing a detected event set by the host PC 15, and event comparison means 105 for making a comparison between the internal event information output from the event information output means 110 and the detected event stored in the detected event storage means 106 to detect a match therebetween. The event comparison means 105 notifies the host PC 15 that an event match is detected.

摘要翻译： 在减少由多个CPU构成的系统LSI中的调试电路的同时有效调试。 调试装置包括调试对象选择装置109，用于根据来自连接到系统LSI 17的主机PC 15的调试对象选择请求从CPU11和12中选择要调试的CPU，调试对象选择装置109，用于输出内部事件的事件信息输出装置110 要被调试的一个所选择的CPU的信息，用于临时存储由主机15设置的检测到的事件的检测事件存储装置106以及用于进行从事件信息输出装置110输出的内部事件信息和 检测到的事件存储在检测事件存储装置106中以检测它们之间的匹配。 事件比较装置105通知主机PC 15检测到事件匹配。

公开(公告)号：US06205534B1

公开(公告)日：2001-03-20

申请号：US09401479

申请日：1999-09-22

申请人： Hiroshi Kamiyama ,  Masato Suzuki ,  Shinya Miyaji

发明人： Hiroshi Kamiyama ,  Masato Suzuki ,  Shinya Miyaji

IPC分类号： G06F930

CPC分类号： G06F9/30014 ,  G06F9/30058 ,  G06F9/30094

摘要： In a data processing apparatus, a decoding unit decodes instructions. A calculator operates N-bit data in accordance with the decoded results. A flag storage unit stores a plurality of flag groups which are changed in correspondence to data having different widths, based on the operated results. Selectors select a predetermined flag group in accordance with the direction of a conditional branch instruction. A branch judging unit judges whether a branch is taken or not by referring to the selected flag group.

摘要翻译： 在数据处理装置中，解码单元解码指令。 计算器根据解码结果来操作N位数据。 标志存储单元基于所操作的结果存储对应于具有不同宽度的数据而改变的多个标志组。 选择器根据条件分支指令的方向选择预定的标志组。 分支判断单元通过参照所选择的标志组判断是否采用分支。

公开(公告)号：US06180931B2

公开(公告)日：2001-01-30

申请号：US09346447

申请日：1999-07-01

申请人： Jun Futakuchiya ,  Takashi Masaki ,  Shinya Miyaji ,  Hidenori Ishiwata

发明人： Jun Futakuchiya ,  Takashi Masaki ,  Shinya Miyaji ,  Hidenori Ishiwata

IPC分类号： H05B344

CPC分类号： H01L21/67103 ,  H05B3/48

摘要： An upper metallic base is placed over a lower metallic base with a resistance heater element interposed between them so as to cause a plastic deformation to at least one of the opposing surfaces until the corresponding surfaces conform to an outer profile of the heater element, and the opposing surfaces of the lower and upper bases, and the resistance heater element are substantially entirely bonded to one another by a metallic bonding which may consist of brazing, soldering or diffusion bonding. Because the metallic bonding provides a favorable heat conduction, and can thereby improve the thermal efficiency and prevent local heating, a rapid temperature rise and uniform heating are made possible. Because the base consists of two parts, the material for the base can be selected from a wide range of materials including those capable of withstanding high temperatures and corrosive materials.

摘要翻译： 上金属底座放置在下金属底座上，电阻加热元件插在它们之间，以便对相对表面中的至少一个造成塑性变形，直到相应的表面符合加热器元件的外轮廓，并且 下部和上部基座的相对表面和电阻加热器元件通过可由钎焊，焊接或扩散接合构成的金属接合而彼此基本上完全结合。 由于金属接合提供有利的热传导，因此可以提高热效率并防止局部加热，可以实现快速的温度上升和均匀的加热。 由于底座由两部分组成，所以基材的材料可以从宽范围的材料中选出，包括耐高温和腐蚀性材料的材料。