Technique of suppressing influence of contamination of exposure atmosphere
    31.
    发明申请
    Technique of suppressing influence of contamination of exposure atmosphere 有权
    抑制曝露气氛污染影响的技术

    公开(公告)号:US20050069433A1

    公开(公告)日:2005-03-31

    申请号:US10949184

    申请日:2004-09-24

    Inventor: Tatsuya Hayashi

    CPC classification number: G03F7/70808 G03F7/70916 G03F7/70933

    Abstract: An exposure apparatus includes a projection optical system which has a plurality of optical elements, and directs light from an original to an object to be exposed; a first stage which holds the object to be exposed; a first vacuum chamber which contains the first stage; and a second vacuum chamber which is adjacent to the first vacuum chamber, contains a part of the plurality of optical elements, and communicates with the first vacuum chamber through a first opening. The pressure in the second vacuum chamber is higher than pressure in the first vacuum chamber.

    Abstract translation: 曝光装置包括投影光学系统,其具有多个光学元件,并将光从原件引导到待曝光的物体; 第一个阶段,它保持被曝光的对象; 包含第一级的第一真空室; 并且与第一真空室相邻的第二真空室包含多个光学元件的一部分,并且通过第一开口与第一真空室连通。 第二真空室中的压力高于第一真空室中的压力。

    System for foreseeing deterioration in interrupting performance of
vacuum interrupter
    32.
    发明授权
    System for foreseeing deterioration in interrupting performance of vacuum interrupter 失效
    用于预测真空断路器中断性能恶化的系统

    公开(公告)号:US4937698A

    公开(公告)日:1990-06-26

    申请号:US267269

    申请日:1988-11-04

    CPC classification number: H01H33/668 G01R31/3275 H01H9/168

    Abstract: A system for foreseeing deterioration in interrupting a performance of a vacuum interrupter, including a first measuring component for measuring potentials of electric lines connected to fixed and movable electrodes of the vacuum interrupter; a second measuring component for measuring a potential of an arc shield; a signal transmitting section for the transmission of potential signals resulting from the measurements in the first and second measuring component; a comparing section for making a comparison between the measured signal from the first measuring component and the measured signal from the second measuring component both transmitted through the signal transmitting section; and a judging section for judging that the fixed and movable electrodes have been deteriorated in their interrupting performance, on the basis of the result of the comparison made in the comparing section.

    Abstract translation: 一种用于预测中断真空断路器的性能的劣化的系统,包括用于测量连接到真空断路器的固定和可移动电极的电线的电位的第一测量部件; 用于测量电弧屏蔽电位的第二测量部件; 信号发送部分,用于传输由第一和第二测量部件中的测量产生的电位信号; 比较部分,用于比较来自第一测量部件的测量信号和通过信号发送部分发送的来自第二测量部件的测量信号; 以及判断部,根据比较部的比较结果,判断固定电极和可动电极的中断性能劣化。

    Apparatus for controlling working gas pressure in stirling engines
    33.
    发明授权
    Apparatus for controlling working gas pressure in stirling engines 失效
    用于控制斯特林发动机工作气体压力的装置

    公开(公告)号:US4706457A

    公开(公告)日:1987-11-17

    申请号:US878351

    申请日:1986-06-25

    CPC classification number: F02G1/05 F02G2243/00

    Abstract: Described is a working gas pressure control apparatus for a Stirling engine including a pressure boost valve provided in a minimum cycle pressure line connected to a working space by a first unidirectional valve, a pressure reducing valve provided in a maximum cycle pressure line connected to the working space by a second unidirectional valve, an operating lever for controlling the opening and closing of the pressure boost and pressure reducing valves, a compressor connected by the pressure reducing and the pressure boost valve to the cycle pressure lines, an unloading valve arranged in a circuit short-circuiting suction and discharge lines of the compressor, and a control unit for opening the unloading valve when engine rpm falls to a value lower than a preset rpm for engine idling, when the pressure boost valve is open and when the engine is operating in the steady state, thereby minimizing compressor load.

    Abstract translation: 描述了一种用于斯特林发动机的工作气体压力控制装置,其包括设置在通过第一单向阀连接到工作空间的最小循环压力线的增压阀,设置在连接到工作的最大循环压力线的减压阀 通过第二单向阀的空间,用于控制升压和减压阀的打开和关闭的操作杆,通过减压阀和增压阀连接到循环压力管线的压缩机,布置在回路中的卸载阀 压缩机的短路吸入排出管路和当发动机转速下降到低于用于发动机怠速的预设转速的值时打开卸载阀的控制单元,当增压阀打开时和当发动机运转时 稳定状态,从而使压缩机负载最小化。

    Ultrasound diagnosis device
    34.
    发明授权
    Ultrasound diagnosis device 有权
    超声诊断装置

    公开(公告)号:US09370338B2

    公开(公告)日:2016-06-21

    申请号:US13701838

    申请日:2011-05-25

    Abstract: Disclosed is an ultrasound diagnosis device for creating an ultrasound image with a high contrast-to-tissue ratio. Said device sends a transmission pulse to the subject, uses an ultrasound probe to receive echoes reflected from an ultrasound contrast agent injected into the subject, and forms an image. The transmission pulse is sent such that nonlinear interactions between the constituent frequency components of said transmission pulse, as a result of the acoustic nonlinearity of the subject, do not produce sum and difference components in the frequency sensitivity range of the ultrasonic probe as the transmission pulse propagates across the subject.

    Abstract translation: 公开了一种用于创建具有高对比度至组织比的超声图像的超声诊断装置。 所述装置向对象发送传输脉冲,使用超声波探头接收从注射到对象中的超声造影剂反射的回波并形成图像。 发送发送脉冲,使得作为对象的声学非线性的结果,所述发送脉冲的构成频率分量之间的非线性相互作用不会在超声波探头的频率灵敏度范围内产生和和差分量作为发送脉冲 传播主题。

    Exposure apparatus, and method of manufacturing a device
    35.
    发明授权
    Exposure apparatus, and method of manufacturing a device 有权
    曝光装置及其制造方法

    公开(公告)号:US09164395B2

    公开(公告)日:2015-10-20

    申请号:US13314537

    申请日:2011-12-08

    CPC classification number: G03F7/70341 G03F7/2041

    Abstract: An exposure apparatus that includes a projection optical system, and exposes a substrate to light via the projection optical system and a liquid that is supplied between the projection optical system and the substrate. A plurality of recovery ports recover the liquid supplied between the projection optical system and the substrate, and are discretely arranged between vertices on each side of a polygon and at each of the vertices of the polygon. A chamber, connected to the plurality of recovery ports, receives the liquid. A pump attracts the liquid via the plurality of recovery ports and the chamber. A pressure difference between the pump and each of the recovery ports positioned at the vertices, among the plurality of recovery ports, is less than a pressure difference between the pump and each of the recovery ports positioned between the vertices, among the plurality of recovery ports.

    Abstract translation: 一种曝光装置,其包括投影光学系统,并且经由所述投影光学系统将基板暴露于光,以及供应在所述投影光学系统和所述基板之间的液体。 多个回收端口回收在投影光学系统和基板之间供应的液体,并且离散地布置在多边形的每一侧的顶点和多边形的每个顶点之间。 连接到多个回收端口的室接收液体。 泵通过多个回收口和腔室吸引液体。 在多个恢复端口中,定位在顶点处的泵和恢复端口中的每个恢复端口之间的压力差小于泵和定位在顶点之间的每个恢复端口之间的压力差,在多个恢复端口 。

    Integrated gas panel apparatus
    36.
    发明授权
    Integrated gas panel apparatus 有权
    集成气体装置

    公开(公告)号:US08820360B2

    公开(公告)日:2014-09-02

    申请号:US13479016

    申请日:2012-05-23

    Abstract: Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.

    Abstract translation: 提供一种具有优异的响应性,稳定气体浓度的集成气体面板装置,此外,可以保持常规的面板形状。 面板体至少包括用于形成主流道的主流道块体和用于形成分支流道的分支流道块体。 通过使主流路块体位于中心,分支流路块体在左右两侧配置成彼此相对。

    ULTRASOUND DIAGNOSIS DEVICE
    37.
    发明申请
    ULTRASOUND DIAGNOSIS DEVICE 有权
    超声诊断装置

    公开(公告)号:US20130144172A1

    公开(公告)日:2013-06-06

    申请号:US13701838

    申请日:2011-05-25

    Abstract: Disclosed is an ultrasound diagnosis device for creating an ultrasound image with a high contrast-to-tissue ratio. Said device sends a transmission pulse to the subject, uses an ultrasound probe to receive echoes reflected from an ultrasound contrast agent injected into the subject, and forms an image. The transmission pulse is sent such that nonlinear interactions between the constituent frequency components of said transmission pulse, as a result of the acoustic nonlinearity of the subject, do not produce sum and difference components in the frequency sensitivity range of the ultrasonic probe as the transmission pulse propagates across the subject.

    Abstract translation: 公开了一种用于创建具有高对比度至组织比的超声图像的超声诊断装置。 所述装置向对象发送传输脉冲,使用超声波探头接收从注射到对象中的超声造影剂反射的回波并形成图像。 发送发送脉冲,使得作为对象的声学非线性的结果,所述发送脉冲的构成频率分量之间的非线性相互作用不会在超声波探头的频率灵敏度范围内产生和和差分量作为发送脉冲 传播主题。

    EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE
    39.
    发明申请
    EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE 有权
    曝光装置和制造装置的方法

    公开(公告)号:US20120170007A1

    公开(公告)日:2012-07-05

    申请号:US13314537

    申请日:2011-12-08

    CPC classification number: G03F7/70341 G03F7/2041

    Abstract: The present invention provides an exposure apparatus including a projection optical system, and configured to expose a substrate to light via the projection optical system and a liquid, the apparatus including a plurality of recovery ports configured to recover the liquid supplied between the projection optical system and the substrate, a chamber connected to the plurality of recovery ports, and a pump configured to attract the liquid via the plurality of recovery ports and the chamber, wherein the plurality of recovery ports are discretely arranged between vertices on each side of a polygon and at each of vertices of the polygon, and a pressure difference between the pump and each of the recovery ports positioned at the vertices among the plurality of recovery ports is less than a pressure difference between the pump and each of the recovery ports positioned between the vertices among the plurality of recovery ports.

    Abstract translation: 本发明提供一种曝光装置,包括:投影光学系统,用于经由投影光学系统和液体将基板曝光,所述装置包括多个回收端口,所述多个回收端口被配置为回收在投影光学系统和 所述基板,连接到所述多个回收端口的室以及被配置为经由所述多个回收端口和所述室吸引所述液体的泵,其中所述多个回收端口离散地布置在多边形的每一侧的顶点和 所述多边形的顶点中的每一个以及位于所述多个恢复端口中的所述顶点处的所述泵与所述每个所述恢复端口之间的压力差小于所述泵与位于所述顶点之间的每个所述恢复端口之间的压力差, 多个恢复端口。

    Integrated gas panel apparatus
    40.
    发明授权
    Integrated gas panel apparatus 有权
    集成气体装置

    公开(公告)号:US08196609B2

    公开(公告)日:2012-06-12

    申请号:US12438348

    申请日:2007-08-21

    Abstract: Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.

    Abstract translation: 提供一种具有优异的响应性,稳定气体浓度的集成气体面板装置,此外,可以保持常规的面板形状。 面板体至少包括用于形成主流道的主流道块体和用于形成分支流道的分支流道块体。 通过使主流路块体位于中心,分支流路块体在左右两侧配置成彼此相对。

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