Abstract:
An exposure apparatus includes a projection optical system which has a plurality of optical elements, and directs light from an original to an object to be exposed; a first stage which holds the object to be exposed; a first vacuum chamber which contains the first stage; and a second vacuum chamber which is adjacent to the first vacuum chamber, contains a part of the plurality of optical elements, and communicates with the first vacuum chamber through a first opening. The pressure in the second vacuum chamber is higher than pressure in the first vacuum chamber.
Abstract:
A system for foreseeing deterioration in interrupting a performance of a vacuum interrupter, including a first measuring component for measuring potentials of electric lines connected to fixed and movable electrodes of the vacuum interrupter; a second measuring component for measuring a potential of an arc shield; a signal transmitting section for the transmission of potential signals resulting from the measurements in the first and second measuring component; a comparing section for making a comparison between the measured signal from the first measuring component and the measured signal from the second measuring component both transmitted through the signal transmitting section; and a judging section for judging that the fixed and movable electrodes have been deteriorated in their interrupting performance, on the basis of the result of the comparison made in the comparing section.
Abstract:
Described is a working gas pressure control apparatus for a Stirling engine including a pressure boost valve provided in a minimum cycle pressure line connected to a working space by a first unidirectional valve, a pressure reducing valve provided in a maximum cycle pressure line connected to the working space by a second unidirectional valve, an operating lever for controlling the opening and closing of the pressure boost and pressure reducing valves, a compressor connected by the pressure reducing and the pressure boost valve to the cycle pressure lines, an unloading valve arranged in a circuit short-circuiting suction and discharge lines of the compressor, and a control unit for opening the unloading valve when engine rpm falls to a value lower than a preset rpm for engine idling, when the pressure boost valve is open and when the engine is operating in the steady state, thereby minimizing compressor load.
Abstract:
Disclosed is an ultrasound diagnosis device for creating an ultrasound image with a high contrast-to-tissue ratio. Said device sends a transmission pulse to the subject, uses an ultrasound probe to receive echoes reflected from an ultrasound contrast agent injected into the subject, and forms an image. The transmission pulse is sent such that nonlinear interactions between the constituent frequency components of said transmission pulse, as a result of the acoustic nonlinearity of the subject, do not produce sum and difference components in the frequency sensitivity range of the ultrasonic probe as the transmission pulse propagates across the subject.
Abstract:
An exposure apparatus that includes a projection optical system, and exposes a substrate to light via the projection optical system and a liquid that is supplied between the projection optical system and the substrate. A plurality of recovery ports recover the liquid supplied between the projection optical system and the substrate, and are discretely arranged between vertices on each side of a polygon and at each of the vertices of the polygon. A chamber, connected to the plurality of recovery ports, receives the liquid. A pump attracts the liquid via the plurality of recovery ports and the chamber. A pressure difference between the pump and each of the recovery ports positioned at the vertices, among the plurality of recovery ports, is less than a pressure difference between the pump and each of the recovery ports positioned between the vertices, among the plurality of recovery ports.
Abstract:
Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.
Abstract:
Disclosed is an ultrasound diagnosis device for creating an ultrasound image with a high contrast-to-tissue ratio. Said device sends a transmission pulse to the subject, uses an ultrasound probe to receive echoes reflected from an ultrasound contrast agent injected into the subject, and forms an image. The transmission pulse is sent such that nonlinear interactions between the constituent frequency components of said transmission pulse, as a result of the acoustic nonlinearity of the subject, do not produce sum and difference components in the frequency sensitivity range of the ultrasonic probe as the transmission pulse propagates across the subject.
Abstract:
When an inertia phase of an upshift of the transmission is started during a lockup clutch engagement operation, a following command oil pressure to be used during a following lockup clutch engagement operation is learned on the basis of a slip rotation speed, which is a rotation speed difference between an input side rotation speed of the torque converter and an output side rotation speed of the torque converter, at or after a start point of the inertia phase.
Abstract:
The present invention provides an exposure apparatus including a projection optical system, and configured to expose a substrate to light via the projection optical system and a liquid, the apparatus including a plurality of recovery ports configured to recover the liquid supplied between the projection optical system and the substrate, a chamber connected to the plurality of recovery ports, and a pump configured to attract the liquid via the plurality of recovery ports and the chamber, wherein the plurality of recovery ports are discretely arranged between vertices on each side of a polygon and at each of vertices of the polygon, and a pressure difference between the pump and each of the recovery ports positioned at the vertices among the plurality of recovery ports is less than a pressure difference between the pump and each of the recovery ports positioned between the vertices among the plurality of recovery ports.
Abstract:
Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.