公开(公告)号：US06738134B2

公开(公告)日：2004-05-18

申请号：US09963575

申请日：2001-09-27

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: G01N2188

CPC classification number: G01N21/8851 ,  G01N21/8806 ,  G01R31/045 ,  G01R31/308

Abstract: An inspection method and an inspection system of a terminal metal fitting which can securely judge the good or bad of the fastening condition of an electric wire by a crimping piece of the terminal metal fitting is provided. The inspection system 1 of the terminal metal fitting has an illuminating lamp 4, a CCD camera 5, a dark box 6, and a control unit 7. The CCD camera 5 is arranged at a position of the light thrown from the illuminating lamp 4 and reflected by crimping pieces 212a,212b of a pressure welding terminal 200 not entering the CCD camera 5. The dark box 6 covers the illuminating lamp 4, an object side 5a of the CCD camera 5, and the pressure welding terminal 200. The control unit 7 makes a binary processing on an image of a wire connecting portion 204 taken by the CCD camera 5. The control unit 7 is provided on each of the crimping pieces 212a,212b and judges the good or bad of the crimping condition on the basis of an area in black in an inspection area in the binary image of at least some part of the crimping piece.

Abstract translation: 提供一种终端金属配件的检查方法和检查系统，其可以通过端子金属配件的压接片可靠地判断电线的紧固状况的好坏。 端子金属配件的检查系统1具有照明灯4，CCD照相机5，暗盒6和控制单元7. CCD照相机5配置在从照明灯4投射的光的位置， 由没有进入CCD照相机5的压焊端子200的压接片212a，212b反射。暗盒6覆盖照明灯4，CCD照相机5的物体侧5a和压力焊接终端200.控制单元 7对由CCD照相机5拍摄的电线连接部分204的图像进行二进制处理。控制单元7设置在每个压接片212a，212b上，并基于以下方式判断卷曲状况的好坏： 卷边片的至少一部分的二值图像中的检查区域中的黑色区域。

公开(公告)号：US5598002A

公开(公告)日：1997-01-28

申请号：US632664

申请日：1996-03-28

Applicant: Hideo Todokoro ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

Inventor： Hideo Todokoro ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

IPC: H01J37/141 ,  H01J37/20 ,  H01J37/21 ,  H01L21/027 ,  G02B21/18

CPC classification number: H01J37/21 ,  H01J2237/216 ,  H01J2237/2482

Abstract: An electron beam apparatus focusses an electron beam onto a specimen by means of an objective magnetic lens. In order to detect changes in the height of the specimen, a laser light beam from a laser source is incident on the specimen and the reflected laser beam is detected by a light detector. Any change in the height of the specimen changes the path of the laser beam to the detector. Therefore, by monitoring the detector, the focussing of the electron beam on the specimen can be controlled by varying the current to an excitation coil of the objective magnetic lens or by moving the specimen via a mounting stage. At least one of the pole pieces of the objective lens is on the opposite side of the path of the laser beam to the source of the electron beam, so that the objective magnetic lens may be close to the specimen, permitting a short focal length. Thus, the laser beam may pass between the pole pieces. An optical microscope may also be provided to permit the specimen to be viewed. The viewing path of the optical microscope extends through an opening in one or both of the pole pieces of the objective magnetic lens.

Abstract translation: 电子束装置通过物镜磁性透镜将电子束聚焦在样本上。 为了检测样品的高度变化，来自激光源的激光束入射到样品上，并且通过光检测器检测反射的激光束。 样品高度的任何变化会改变激光束到检测器的路径。 因此，通过监视检测器，可以通过改变到物镜磁性透镜的激励线圈的电流或通过安装级移动样本来控制电子束在样本上的聚焦。 物镜的极片中的至少一个位于激光束到电子束源的路径的相对侧，使得物镜磁性透镜可能靠近样本，允许短焦距。 因此，激光束可以在极片之间通过。 还可以提供光学显微镜以允许观察样品。 光学显微镜的观察路径延伸穿过物镜磁性透镜的一个或两个极片中的开口。

公开(公告)号：US5570191A

公开(公告)日：1996-10-29

申请号：US321035

申请日：1994-10-06

Applicant: Hitoshi Uesugi ,  Tsutomu Maki ,  Kazuyoshi Tomikawa ,  Tatsuya Maeda ,  Yoshimi Masuda

Inventor： Hitoshi Uesugi ,  Tsutomu Maki ,  Kazuyoshi Tomikawa ,  Tatsuya Maeda ,  Yoshimi Masuda

IPC: G01J3/02 ,  G01J3/50 ,  H01R13/03 ,  H01R43/00 ,  H01R43/20 ,  G01J3/46

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/50 ,  G01J3/513

Abstract: Connector housings having plural kinds of terminals (plated with different materials, e.g.) are mounted at predetermined locations, positioned and secured by a drive means. A sensor probe which receives a light, of a color detection device, is transferred successively to the locations opposite to the terminals. A color sensor senses a level of a specific color component of the light received by the sensor probe. The sensed level is compared with a predetermined reference level and it can be determined based upon whether the sensed level is higher than the reference level, the kind of the terminals in the connector housings.

Abstract translation: 具有多种端子（例如电镀不同材料）的连接器壳体安装在预定位置，由驱动装置定位和固定。 接收颜色检测装置的光的传感器探头被连续传送到与端子相对的位置。 颜色传感器感测由传感器探针接收的光的特定颜色分量的水平。 将感测到的电平与预定的参考电平进行比较，并且可以基于感测电平是否高于参考电平来确定连接器壳体中的端子的种类。

公开(公告)号：US08666165B2

公开(公告)日：2014-03-04

申请号：US12249014

申请日：2008-10-10

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: G06K9/00

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

公开(公告)号：US08199962B2

公开(公告)日：2012-06-12

申请号：US12196383

申请日：2008-08-22

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: H04R9/06

CPC classification number: H04R7/02

Abstract: A loudspeaker diaphragm having a small overall height dimension, in which a dome portion has a sufficient rigidity and which is capable of realizing a stable loudspeaker operation, wherein the loudspeaker diaphragm can realize a desirable sound reproduction without noise, or the like, with a frequency response that is flat over a wide range. In the loudspeaker diaphragm of the present invention, the dome portion includes a concave dome portion formed at a center thereof, a convex dome portion along an outer periphery of the concave dome portion, a plurality of depressed ribs each extending in a radial direction across a boundary between the concave dome portion and the convex dome portion, a voice coil attachment portion along an outer periphery of the convex dome portion, and a plurality of protruding ribs extending in the radial direction across a boundary between the convex dome portion and the voice coil attachment portion, wherein each protruding rib is spaced apart in a circumferential direction from two adjacent depressed ribs.

Abstract translation: 具有小的整体高度尺寸的扬声器隔膜，其中圆顶部分具有足够的刚度并且能够实现稳定的扬声器操作，其中扬声器隔膜可以实现具有频率的无噪声等的期望的声音再现 反应平坦，范围广泛。 在本发明的扬声器隔膜中，圆顶部包括形成在其中心的凹形圆顶部，沿着凹形圆顶部的外周的凸形圆顶部，多个凹凸肋， 凹圆顶部分和凸形圆顶部分之间的边界，沿着凸出的圆顶部分的外周的音圈安装部分和沿径向延伸穿过凸起的圆顶部分和音圈之间的边界的多个突出的肋 附接部分，其中每个突出肋沿圆周方向与两个相邻的凹陷肋间隔开。

公开(公告)号：US20090121134A1

公开(公告)日：2009-05-14

申请号：US12349751

申请日：2009-01-07

Applicant: Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/282

Abstract: A system for controlling a tool-to-tool disparity between a plurality of scanning electron microscopes includes a measuring unit for measuring a tool-to-tool disparity between plural scanning electron microscopes based on information extracted from secondary electron images which are captured by imaging a reference pattern formed on a wafer, a tool state monitoring unit for monitoring tool states of each of the plural scanning electron microscopes, and an output unit for displaying on a screen a relationship between the tool-to-tool disparity between the plural scanning electron microscopes and tool states of each of the plural scanning electron microscopes monitored by the tool state monitoring unit. The tool state monitoring unit monitors the tool states of each of the plural scanning electron microscopes while imaging the reference pattern formed on the wafer by using each of the plural scanning electron microscopes.

Abstract translation: 用于控制多个扫描电子显微镜之间的工具对工具差异的系统包括：测量单元，用于基于通过成像获得的二次电子图像提取的信息来测量多个扫描电子显微镜之间的工具对工具差异 在晶片上形成的参考图案，用于监视多个扫描电子显微镜中的每一个的工具状态的工具状态监视单元和用于在屏幕上显示多个扫描电子显微镜之间的工具与工具之间的差异之间的关系的输出单元 以及由工具状态监视单元监视的多个扫描电子显微镜中的每一个的工具状态。 工具状态监视单元通过使用多个扫描电子显微镜中的每一个对成像在晶片上的参考图案进行成像，监视多个扫描电子显微镜中的每一个的工具状态。

公开(公告)号：US07476857B2

公开(公告)日：2009-01-13

申请号：US11583886

申请日：2006-10-20

Applicant: Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Mayuka Oosaki ,  Chie Shishido ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: H01J37/28 ,  H01J37/256 ,  G01N23/00

CPC classification number: H01J37/28 ,  H01J2237/282

Abstract: A system for controlling a tool-to-tool matching between a plurality of scanning electron microscopes for pattern dimension measurement includes a measuring unit for, at regular intervals, measuring a tool-to-tool disparity between canning electron microscopes based on secondary electron image data, and measuring indicators indicating states of the microscopes, a tool-to-tool-disparity causing factor analyzing unit for analyzing a relationship between the tool-to-tool disparity and the values of the indicators measured by the measuring unit to estimate a factor that has caused said tool-to-tool disparity, and an output unit for displaying and outputting the tool-to-tool disparity causing factor estimated by the tool-to-tool-disparity causing factor analyzing unit.

Abstract translation: 用于控制用于图案尺寸测量的多个扫描电子显微镜之间的工具对工具匹配的系统包括测量单元，用于以规则的间隔测量基于二次电子图像数据的罐装电子显微镜之间的工具对工具差异 以及指示显示器状态的测量指示器，工具对工具差异因素分析单元，用于分析工具与工具之间的差异与由测量单元测量的指标的值之间的关系，以估计因素 已经引起了工具对工具的差异，以及输出单元，用于显示和输出由工具对工具差异造成因子分析单元估计的工具对工具差异引起的因素。

公开(公告)号：US07446313B2

公开(公告)日：2008-11-04

申请号：US11357020

申请日：2006-02-21

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: H01J37/28

CPC classification number: H04N5/76 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2487 ,  H01J2237/2817 ,  H04N5/772 ,  H04N5/775 ,  H04N5/781 ,  H04N5/907 ,  H04N9/8205

Abstract: It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image Im(t2) obtained by retroceding from a sample image Im(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.

Abstract translation: 在扫描电子显微镜中便于执行再现测试的劳动，对执行自动观察过程所引起的问题进行基本分析，并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时，提取通过从存储有与出现错误的时间te相关联的样本图像Im（te）所取得的样本图像Im（t 2） 例如由输入输出装置预先设定和登记的总记录时间段t 2），从被记录装置中存储的样本图像中被重写，并将得到的样本图像存储在另一个记录装置中。

公开(公告)号：US07439505B2

公开(公告)日：2008-10-21

申请号：US11292002

申请日：2005-12-02

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

公开(公告)号：US07433542B2

公开(公告)日：2008-10-07

申请号：US11019109

申请日：2004-12-22

Applicant: Atsushi Takane ,  Tatsuya Maeda ,  Takashi Iizumi

Inventor： Atsushi Takane ,  Tatsuya Maeda ,  Takashi Iizumi

IPC: G06K9/36 ,  G06K9/00

CPC classification number: G01B15/04 ,  G03F7/70625 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2817

Abstract: The present invention is relates to a method for measuring average line width of line and space patterns in a simplified manner and at high speed without measuring at many positions. An average line width, an average space width, and an average pitch width are calculated from peak intervals of auto-correlation values of a differentiated image of the line and space patterns or peak patterns corresponding to line edges on projection data of the differentiated image.

Abstract translation: 本发明涉及一种用于以简单的方式和高速测量线和空间图形的平均线宽而不在许多位置测量的方法。 根据差分图像的投影数据上的线条和空间图案的不同图像的自相关值的峰值间隔或与线条边缘对应的峰值图案的峰值间隔，计算平均线宽，平均间隔宽度和平均间距宽度。