公开(公告)号：US20070285107A1

公开(公告)日：2007-12-13

申请号：US11710150

申请日：2007-02-22

Applicant: Eric Strid ,  Richard Campbell

Inventor： Eric Strid ,  Richard Campbell

IPC: G01R35/00

CPC classification number: G01R35/007

Abstract: A plurality of calibration structures facilitate calibration of a probing system that includes a differential signal probe having a linear array of probe tips.

Abstract translation: 多个校准结构促进了探测系统的校准，所述探测系统包括具有探针尖端的线性阵列的差分信号探针。

公开(公告)号：US07266889B2

公开(公告)日：2007-09-11

申请号：US11036739

申请日：2005-01-14

Applicant: Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

Inventor： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC: H01R43/16

CPC classification number: G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

Abstract: A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

Abstract translation: 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平整的整个表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

公开(公告)号：US20070200580A1

公开(公告)日：2007-08-30

申请号：US11796237

申请日：2007-04-26

Applicant: Leonard Hayden ,  John Martin ,  Mike Andrews

Inventor： Leonard Hayden ,  John Martin ,  Mike Andrews

IPC: G01R31/00

CPC classification number: G01R1/06772 ,  G01R1/07342 ,  Y10T29/49121 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/49208

Abstract: The present invention relates to a probe for testing of integrated circuits or other microelectronic devices.

Abstract translation: 本发明涉及一种用于集成电路或其他微电子器件测试的探针。

公开(公告)号：US20070159196A1

公开(公告)日：2007-07-12

申请号：US11714003

申请日：2007-03-05

Applicant: Leonard Hayden ,  Scott Rumbaugh ,  Mike Andrews

Inventor： Leonard Hayden ,  Scott Rumbaugh ,  Mike Andrews

IPC: G01R31/02

CPC classification number: G01R1/06766 ,  G01R1/06738 ,  G01R1/06772

Abstract: A direct current and a modulation signal are simultaneously applied to contact pads on a device under test, such as a laser diode, with a probe that reduces signal distortion and power dissipation by transmitting a modulated signal through an impedance matching resistor and transmitting of a direct current over a second signal path that avoids the impedance matching resistor.

公开(公告)号：US07138813B2

公开(公告)日：2006-11-21

申请号：US10626903

申请日：2003-07-25

Applicant: Clarence E. Cowan ,  Paul A. Tervo ,  John L. Dunklee

Inventor： Clarence E. Cowan ,  Paul A. Tervo ,  John L. Dunklee

IPC: G01R31/02 ,  G01R31/26 ,  G01R31/28

CPC classification number: G01R31/2874 ,  G01R1/18 ,  G01R31/2855 ,  G01R31/2862 ,  G01R31/2865 ,  G01R31/2879 ,  H01L35/00 ,  H01L35/32

Abstract: To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.

公开(公告)号：US20060208748A1

公开(公告)日：2006-09-21

申请号：US11406737

申请日：2006-04-18

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R31/02

CPC classification number: G01R1/067 ,  B82Y35/00 ,  G01R1/06705 ,  G01R1/06772 ,  G01R1/07342 ,  G01R1/18 ,  G01R19/0023 ,  G01R35/00 ,  H01R11/18

Abstract: A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

公开(公告)号：US07109731B2

公开(公告)日：2006-09-19

申请号：US11155986

申请日：2005-06-17

Applicant: K. Reed Gleason ,  Kenneth R. Smith ,  Mike Bayne

Inventor： K. Reed Gleason ,  Kenneth R. Smith ,  Mike Bayne

IPC: G01R31/06

CPC classification number: G01R1/06711 ,  G01R1/07342 ,  G01R1/0735

Abstract: A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.

公开(公告)号：US20060170439A1

公开(公告)日：2006-08-03

申请号：US11391895

申请日：2006-03-28

Applicant: K. Gleason ,  Tim Lesher ,  Mike Andrews ,  John Martin

Inventor： K. Gleason ,  Tim Lesher ,  Mike Andrews ,  John Martin

IPC: G01R31/02

CPC classification number: G01R1/07342 ,  G01R1/06738 ,  G01R1/06772

Abstract: A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.

公开(公告)号：US20060169897A1

公开(公告)日：2006-08-03

申请号：US11335014

申请日：2006-01-18

Applicant: Peter Andrews ,  David Hess

Inventor： Peter Andrews ,  David Hess

IPC: G21K7/00

CPC classification number: G21K7/00

Abstract: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.

Abstract translation: 一种包括用于有效地定位用于测试半导体晶片的探针的成像装置的系统。

公开(公告)号：US07057407B2

公开(公告)日：2006-06-06

申请号：US10954496

申请日：2004-09-29

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R31/06

CPC classification number: G01R1/067 ,  B82Y35/00 ,  G01R1/06705 ,  G01R1/06772 ,  G01R1/07342 ,  G01R1/18 ,  G01R19/0023 ,  G01R35/00 ,  H01R11/18

Abstract: A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.