公开(公告)号：US20170322403A1

公开(公告)日：2017-11-09

申请号：US15614766

申请日：2017-06-06

申请人： The United States of America, as represented by the Secretary, Department of Health and Human Serv

发明人： Hari Shroff ,  Andrew York

IPC分类号： G02B21/00 ,  G01N21/64

CPC分类号： G02B21/0072 ,  G01N21/6458 ,  G01N2021/6478 ,  G01N2201/0633 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/365

摘要： Various embodiments for a multi-focal selective illumination microscopy (SIM) system for generating multi-focal patterns of a sample are disclosed. The multi-focal SIM system performs a focusing, scaling and summing operation on each generated multi-focal pattern in a sequence of multi-focal patterns that completely scan the sample to produce a high resolution composite image.

公开(公告)号：US09757216B2

公开(公告)日：2017-09-12

申请号：US15038642

申请日：2014-11-24

申请人： SIRONA DENTAL SYSTEMS GMBH

发明人： Lukas Wewer ,  Mark Weber ,  Georg Wiora

IPC分类号： G01C11/12 ,  A61C9/00 ,  G01B11/25 ,  G02B21/00 ,  A61B1/24 ,  G02B1/11 ,  G02B3/00 ,  G02B5/00 ,  G02B5/09 ,  H04N13/02

CPC分类号： A61C9/006 ,  A61B1/24 ,  G01B11/25 ,  G02B1/11 ,  G02B3/0006 ,  G02B5/003 ,  G02B5/09 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/008 ,  H04N13/204

摘要： The invention relates to an optical measuring system (1) and to a method for measuring an object (9) in a three-dimensional manner. The measuring system (1) has at least one lens array (5), a first convex lens (6) arranged downstream, a second convex lens (8) which is arranged further downstream and which faces an object (9) to be measured, and additionally a means (7) which absorbs incident light or deflects incident light out of the illuminating beam path and which is arranged upstream of the second convex lens (8) or on the second convex lens (8) on a second convex lens (8) face facing the first convex lens (6) in the region of the optical axis (10).

公开(公告)号：US20170090172A1

公开(公告)日：2017-03-30

申请号：US15269848

申请日：2016-09-19

申请人： Kenneth Carlisle Johnson

发明人： Kenneth Carlisle Johnson

IPC分类号： G02B21/00 ,  G02B27/00 ,  G02B3/08

CPC分类号： G02B21/0016 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/008

摘要： An actinic, through-pellicle EUV mask inspection or metrology system acquires image information by scanning an array of focused illumination spots across a photomask and detecting the mask reflectance signal from each spot in synchronization with the scan motion. The radiation from each spot is detected by a detector comprising four quadrant sensors to provide information on the angular reflectance distribution, which is sensitive to the reflectance phase. The focal spots are generated from achromatic EUV microlenses (phase-Fresnel, Schupmann doublets), enabling the use of a high-bandwidth, high-power, laser-produced-plasma EUV source for high-throughput operation. The microlens foci are projected through illumination optics (EUV mirrors) onto the focal spots at the mask, and the microlenses nullify the illumination optics' geometric aberrations for substantially aberration-free point imaging. Aberration-correcting micro-optics may also be used for the collection optics between the mask and the detector array.

公开(公告)号：US09341833B2

公开(公告)日：2016-05-17

申请号：US13991123

申请日：2011-09-13

申请人： Joerg Schaffer ,  Tim Plohnke

发明人： Joerg Schaffer ,  Tim Plohnke

IPC分类号： G02B21/06 ,  G02B21/00

CPC分类号： G02B21/06 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/0076

摘要： A device for increasing the depth discrimination of optical imaging systems includes elements for structuring illumination light in an illumination beam of the optical imaging system by application of a grating-like pattern in a conjugate object plane of the optical imaging system. The device further elements for varying the position of the grating-like patterns along an optical axis of the illuminating beam, and elements that vary the position of an image of the grating-like pattern on a specimen in an object plane. The invention may include a grating changer connected to an electronic control system or to a control program of the optical imaging system for automatically changing the grating-like pattern to at least one further grating-like pattern and/or for removing the grating like pattern from the illuminating beam path.

摘要翻译： 用于增加光学成像系统的深度鉴别的装置包括用于通过在光学成像系统的共轭物体平面中施加格子状图案来在光学成像系统的照明光束中构造照明光的元件。 所述装置还具有用于沿着照明光束的光轴改变格栅状图案的位置的元件，以及改变对象平面中的样本上的格子状图案的图像的位置的元件。 本发明可以包括连接到电子控制系统或光学成像系统的控制程序的光栅更换器，用于将光栅样图案自动地改变为至少一个另外的格栅状图案和/或用于从 照明光束路径。

公开(公告)号：US20150215547A1

公开(公告)日：2015-07-30

申请号：US14605902

申请日：2015-01-26

申请人： Matthew Stefan Muller

发明人： Matthew Stefan Muller

IPC分类号： H04N5/265 ,  H04N5/74

CPC分类号： H04N5/265 ,  G01J3/2803 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/008 ,  H04N5/2354 ,  H04N5/74

摘要： The present invention relates to a method of obtaining multiple images with a spatially varying periodic fringe pattern produced by a digital light projector that is spatially and temporally synchronized to the rolling shutter exposure of a two-dimensional pixel array detector. Two or more images obtained with phase-shifted spatial fringe patterns are combined to form a composite image with the spatial fringes and other unwanted scattered light removed.

摘要翻译： 本发明涉及一种利用由二维像素阵列检测器的卷帘快门曝光进行空间和时间同步的数字光投影仪产生的具有空间变化的周期性条纹图案来获得多个图像的方法。 用相移空间条纹图案获得的两个或更多个图像被组合以形成具有空间条纹和其它不想要的散射光去除的合成图像。

公开(公告)号：US20150085346A1

公开(公告)日：2015-03-26

申请号：US14368932

申请日：2012-01-05

申请人： Balazs Rozsa ,  Gergely Katona ,  Mate Veress ,  Pal Maak ,  Gergely Szalay ,  Attila Kaszas ,  Balazs Chiovini ,  Peter Matyas

发明人： Balazs Rozsa ,  Gergely Katona ,  Mate Veress ,  Pal Maak ,  Gergely Szalay ,  Attila Kaszas ,  Balazs Chiovini ,  Peter Matyas

IPC分类号： G02F1/33 ,  G02B21/00

CPC分类号： G02F1/332 ,  G02B21/004 ,  G02B26/101 ,  G02F1/33 ,  G02F2001/291 ,  G02F2201/16

摘要： The invention relates to a method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterised by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12′) of the first pair of deflectors (10) and in the deflectors (22, 22′) of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.

摘要翻译： 本发明涉及一种用扫描仪系统（100）沿连续扫描轨迹进行扫描的方法，扫描仪系统（100）包括第一对声光偏转器（10），用于偏转连续透镜系统（200）产生的电磁波束的焦点， 在xz平面中限定光轴（z），以及第二对声光偏转器（20），用于偏转基本上垂直于xz平面的yz平面中的焦斑，其特征在于随时间改变声频扫描 连续地在第一对偏转器（10）的偏转器（12,12'）和第二对偏转器（20）的偏转器（22,22'）中，以使焦斑沿着 扫描轨迹。

公开(公告)号：US20150015891A1

公开(公告)日：2015-01-15

申请号：US14500088

申请日：2014-09-29

申请人： Daniel Feldkhun

发明人： Daniel Feldkhun

IPC分类号： G01B9/02 ,  G01B11/24

CPC分类号： G01B9/02041 ,  G01B9/02082 ,  G01B11/2441 ,  G01B11/25 ,  G01B21/045 ,  G02B21/004 ,  G02B27/0025 ,  G02B27/48

摘要： Methods and systems are provided for suppressing speckle and/or diffraction artifacts in coherent structured illumination sensing systems. A coherent radiation pattern forms an interference pattern at an illumination image plane and illuminates an object. Radiation scattered or otherwise emitted by the object is detected to produce a signal, which is integrated in time. Coherent artifact suppression is attained by using a spatial modulator, such as an acousto-optic device, to vary a phase gradient at the illumination image plane during the signal integration time. Various embodiments are provided for purposes including without limitation: preserving the depth of field of the coherent illumination; using the same acousto-optic device for pattern generation and coherent artifact suppression; electronically controlling the effective spatial coherence of the illumination system; and reducing errors due to coherent artifacts in a laser-based three dimensional imaging system.

摘要翻译： 提供了用于抑制相干结构照明感测系统中斑点和/或衍射伪像的方法和系统。 相干辐射图形在照明像平面处形成干涉图案并照亮物体。 检测被物体散射或以其他方式发射的辐射，以产生一个在时间上集成的信号。 通过使用诸如声光装置的空间调制器在信号积分时间期间改变照明图像平面处的相位梯度来实现相干伪影抑制。 提供各种实施例用于包括但不限于：保持相干照明的景深的目的; 使用相同的声光装置进行图案生成和相干伪影抑制; 电子控制照明系统的有效空间相干性; 并且减少由于基于激光的三维成像系统中的相干伪影引起的误差。

公开(公告)号：US08773760B2

公开(公告)日：2014-07-08

申请号：US13266165

申请日：2010-04-23

申请人： Arthur F. Gmitro ,  Andrew R. Rouse ,  Anthony A. Tanbakuchi

发明人： Arthur F. Gmitro ,  Andrew R. Rouse ,  Anthony A. Tanbakuchi

IPC分类号： G02B21/06

CPC分类号： G02B21/0032 ,  G02B21/0028 ,  G02B21/004 ,  G02B21/0044 ,  G02B21/0076

摘要： The embodiments of this invention use a multi-point scanning geometry. This design maintains the high frame rate of the slit-scan system and still allows both grayscale and multi-spectral imaging. In a confocal configuration, the multi-point scanning system's confocal performance is close to that of a single point scan system and is expected to yield improved depth imaging when compared to a slit-scan system, faster imaging than a point scan system, and the capability for multi-spectral imaging not readily achievable in a Nipkow disk based confocal system.

摘要翻译： 本发明的实施例使用多点扫描几何形状。 该设计保持狭缝扫描系统的高帧速率，并且仍允许灰度和多光谱成像。 在共焦配置中，多点扫描系统的共聚焦性能接近于单点扫描系统，并且与狭缝扫描系统相比，与点扫描系统相比成像速度更快，预计可以产生改善的深度成像，并且 在Nipkow磁盘共焦系统中，多光谱成像的能力不容易实现。

公开(公告)号：US20130250407A1

公开(公告)日：2013-09-26

申请号：US13991123

申请日：2011-09-13

申请人： Joerg Schaffer ,  Tim Plohnke

发明人： Joerg Schaffer ,  Tim Plohnke

IPC分类号： G02B21/06

CPC分类号： G02B21/06 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/0076

摘要： The invention relates to a device for increasing the depth discrimination of optical imaging systems. Such a device comprises means for structuring illumination light in an illumination beam of the optical imaging system by means of a grating-like pattern in a conjugated object plane of the optical imaging system. The device further comprises means for varying the position of the grating-like patterns along an optical axis of the illuminating beam, and means for varying the position of an image of the grating-like pattern on a specimen in an object plane.Such a device is characterized by a grating changer connected to an electronic control system or to a control program of the optical imaging system for automatically changing the grating-like pattern to at least one further grating-like pattern and/or for removing the grating-like pattern from the illuminating beam path.

摘要翻译： 本发明涉及用于增加光学成像系统的深度辨别的装置。 这种装置包括用于通过光学成像系统的共轭物体平面中的格子状图案在光学成像系统的照明光束中构造照明光的装置。 该装置还包括用于沿着照明光束的光轴改变格子状图案的位置的装置，以及用于改变物体平面中的样本上的格子状图案的图像的位置的装置。 这种装置的特征在于连接到电子控制系统或光学成像系统的控制程序的光栅更换器，用于将光栅样图案自动地改变为至少一个另外的格栅状图案和/或用于去除光栅 - 来自照明光束路径的类似图案。

公开(公告)号：US20120156636A1

公开(公告)日：2012-06-21

申请号：US13320576

申请日：2010-05-17

申请人： Karl Stock ,  Michael Zint ,  Rainer Graser ,  Raimund Hibst

发明人： Karl Stock ,  Michael Zint ,  Rainer Graser ,  Raimund Hibst

IPC分类号： A61B6/14

CPC分类号： G01B11/24 ,  A61B5/0068 ,  A61B5/0088 ,  A61B5/1075 ,  A61B2562/0233 ,  A61C9/006 ,  G01B2210/50 ,  G02B21/004 ,  G02B21/0064

摘要： Method for measuring the shape of a section of a semi-transparent object such as one section of a tooth, using a light source for generating light with a broadband spectrum in a device for generating a multifocal illumination pattern, a lens with a large chromatic aberration for imaging foci of the illumination pattern onto the object, and a detection device for determining the wavelength spectra of the foci confocally imaged onto the object via the lens, wherein a spectral peak position of each focus is determined from the respective wavelength spectrum, from which position the extent of the object in the direction of the imaging beam (Z coordinate) is calculated.

摘要翻译： 用于在用于产生多焦点照明图案的装置中使用用于产生具有宽带光谱的光的光源来测量诸如牙齿的一个部分的半透明物体的部分的形状的方法，具有大的色差的透镜 用于将所述照明图案的焦点成像到所述物体上;以及检测装置，用于确定通过所述透镜共同成像到所述物体上的所述焦点的波长谱的检测装置，其中，从相应的波长谱确定每个焦点的光谱峰值位置， 计算物体在成像光束方向上的程度（Z坐标）。