公开(公告)号：US06753526B2

公开(公告)日：2004-06-22

申请号：US10103403

申请日：2002-03-20

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J500

CPC classification number: H01L27/14618 ,  B81B7/0038 ,  G01J5/04 ,  G01J5/045 ,  G01J5/20 ,  H01L27/14632 ,  H01L27/14649 ,  H01L27/14687 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: The present invention relates to a method of manufacturing radiation detectors, in which these detectors each comprise a set of microdetectors, for example microbolometers, situated under a window that is transparent to said radiation. According to the invention, said detectors are manufactured collectively on a substrate (1), and said method comprises notably the following steps: the construction of several layers, of which, for each of said detectors, at least one layer (4) is transparent to said radiation and serves as a window, and the partial elimination of said layers principally under said transparent layer(4), such that said microdetectors (2) are placed, for each of said detectors, in one or more cavities, which are then placed under vacuum or under low pressure. The invention also relates to various radiation detectors, of which the walls form hermetically sealed cavities each containing one or more microdetectors (2).

Abstract translation: 本发明涉及一种制造辐射探测器的方法，其中这些检测器各自包括一组位于对所述辐射透明的窗口下方的微检测器，例如微电热计。 根据本发明，所述检测器集体地制造在基板（1）上，并且所述方法显着地包括以下步骤：构造几层，其中对于每个所述检测器，至少一层（4）是透明的 到所述辐射并且用作窗口，并且主要在所述透明层（4）下部分消除所述层，使得对于每个所述检测器将所述微检测器（2）放置在一个或多个空腔中，然后将其放置 在真空或低压下，本发明还涉及各种辐射检测器，其中壁形成密封腔，每个包含一个或多个微检测器（2）。

公开(公告)号：US06744049B2

公开(公告)日：2004-06-01

申请号：US09805091

申请日：2001-03-13

Applicant: John L. Galloway

Inventor： John L. Galloway

IPC: G01J500

CPC classification number: H04N5/33

Abstract: Arrays of pyroelectric elements are used in surveillance systems by focusing the radiation from a scene on to them and examining the output from the array. If an object is moved into the scene and left stationary, it will hinder the subsequent operation of the system by masking part of the scene from the field of view of the array; this fault condition may be detected by the following procedure. At intervals arrangements are made to move the image of the scene to and from across the array using a suitable transducer and the outputs from the array are examined. The outputs from the array when the scene is in its normal condition and the image is moved across the array comprise a set of signals corresponding to a reference image, which may be compared with the corresponding outputs from the array when the image is moved across the array on a subsequent occasion. Change between the reference image signals and subsequent image signals are interpreted in terms of the introduction to, or removal of, objects from the scene.

Abstract translation: 热电元件阵列用于监视系统，将场景中的辐射聚焦到它们上并检查阵列的输出。 如果一个物体被移动到场景中并且保持静止，则它将通过从阵列的视野屏蔽场景的一部分来阻碍系统的后续操作; 可以通过以下步骤检测该故障状况。 在间隔的情况下，使用合适的换能器将场景的图像移动到阵列上并从阵列移动，并且检查来自阵列的输出。 当场景处于其正常状态并且图像在阵列上移动时，来自阵列的输出包括对应于参考图像的一组信号，当参考图像被移动时可以与阵列的相应输出进行比较 阵列在随后的场合。 参考图像信号和后续图像信号之间的变化根据对场景的介绍或去除而进行解释。

公开(公告)号：US06713762B2

公开(公告)日：2004-03-30

申请号：US09906441

申请日：2001-07-16

Applicant: James D. Parsons

Inventor： James D. Parsons

IPC: G01J500

CPC classification number: H01L31/0256 ,  H01L31/0312 ,  H01L31/036 ,  H01L31/09

Abstract: Single crystal SiC at least 200 micrometers thick is employed to detect electromagnetic radiation having a wavelength less than about 10 micrometers via an acoustic absorption mechanism. Applications include IR radiation sensing, contactless temperature sensing and an IR controlled varistor.

Abstract translation: 使用至少200微米厚的单晶SiC通过声吸收机制检测波长小于约10微米的电磁辐射。 应用包括红外辐射感测，非接触式温度感测和红外控制压敏电阻。

公开(公告)号：US06710344B2

公开(公告)日：2004-03-23

申请号：US10301418

申请日：2002-11-21

Applicant: Naoki Oda

Inventor： Naoki Oda

IPC: G01J500

CPC classification number: G01J5/02 ,  G01J5/023 ,  G01J5/20

Abstract: A thermal infrared detector has a substrate having a readout circuit and a plurality of pixels patterned on the substrate at a pitch p, which is in the range of from 15 to 50 micrometers. Each of the pixels has a photo-sensitive bolometer thin film area that is spaced from the substrate, and supported by two beams which contain interconnections between the photosensitive area and the readout circuit. The length of each of the beams is determined by the patterning accuracy of a stepper used to produce the thermal infrared detector, based on a beam length index calculated by dividing the length of each beam by one-quarter of the peripheral length of the pixel. The beam length index may be approximated by an expression using the pixel pitch, the thermal conductivity of the interconnection material, etc. as parameters in an equation representing temperature resolution.

Abstract translation: 热红外检测器具有基板，其具有读出电路和在基板上以间距p图案化的多个像素，其在15至50微米的范围内。 每个像素具有与基板间隔开的感光测辐射热计薄膜区域，并且由两个光束支撑，该光束包含感光区域和读出电路之间的互连。 基于通过将每个光束的长度除以像素的周长的四分之一计算的光束长度索引，每个光束的长度由用于产生热红外检测器的步进器的图案化精度确定。 光束长度索引可以通过使用像素间距，互连材料的热导率等的表达式近似，作为表示温度分辨率的等式的参数。

公开(公告)号：US06667479B2

公开(公告)日：2003-12-23

申请号：US09872436

申请日：2001-06-01

Applicant: Michael Ray

Inventor： Michael Ray

IPC: G01J500

CPC classification number: G01J5/20

Abstract: A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity (36) there between, and a substantially planar lower-level thermal isolation leg structure (20) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiation reflection structure is supported by an extension of the leg (18A).

Abstract translation: 微辐射热计单元电池（10）包括基本上平面的上层入射辐射吸收和检测结构（24），与上层入射辐射吸收和检测结构间隔开的基本平坦的中间级辐射反射结构（26） 在其间限定一个光学谐振腔（36），并且与中间级辐射反射结构间隔开并电耦合到上层入射辐射吸收和检测结构的基本平坦的下级隔热腿结构（20）和 到底层读出电路。 较低级别的热隔离腿结构通过穿过中间级辐射反射结构中的孔（48）的腿（44）电耦合到上层入射辐射吸收和检测结构，腿也起 结构支撑构件。 低级隔热支腿结构通过另一支腿（18）电耦合到读出电路，该支脚终止于设置在下面的读出集成电路（12）上的电触点（16）上，中间级辐射反射结构 由腿部（18A）的延伸支撑。

公开(公告)号：US06586745B2

公开(公告)日：2003-07-01

申请号：US09884754

申请日：2001-06-19

Applicant: Ralph H. Hill, Jr. ,  James R. Keys, Jr.

Inventor： Ralph H. Hill, Jr. ,  James R. Keys, Jr.

IPC: G01J500

CPC classification number: F41G7/226 ,  F41G7/2293

Abstract: An ultraviolet target designator and methodology that utilizes ultraviolet radiation from a laser designator to remotely designate targets for various applications. In one embodiment, the ultraviolet laser designator is used to remotely designate a target for insects to fly to so as to collect environmental information. In another embodiment, the ultraviolet laser operates in the solar blind region to remotely designate a target. When used in conjunction with a solar blind camera, the targeting can be performed without detection by infrared or visible detection devices.

公开(公告)号：US06488407B1

公开(公告)日：2002-12-03

申请号：US09527243

申请日：2000-03-17

Applicant: Masayuki Kitamura ,  Eisuke Morisaki ,  Nobuaki Takahashi ,  Takashi Shigeoka

Inventor： Masayuki Kitamura ,  Eisuke Morisaki ,  Nobuaki Takahashi ,  Takashi Shigeoka

IPC: G01J500

CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0887 ,  G01J5/0896 ,  G01J2005/0051 ,  G01J2005/0077

Abstract: The present invention intends to improve the accuracy of temperature measurement when measuring the temperature of a semiconductor wafer by a radiation thermometer on the basis of the idea of virtual blackbody simulated by multiple reflection of light. A system includes a wafer (W), a circular reflector 1 of a radius R disposed opposite to the wafer (W), and a probe (2) disposed in a through hole formed in the reflector (1). The probe (2) is a through hole. The radiation intensity of radiation passed the through hole is determined by image data provided by a CCD camera disposed behind the back surface of the reflector (1). An error in measured radiation intensity of radiation falling the probe (2) due to light that enters a space between the wafer (W) and the reflector (1) and a space between the reflector (1) and the probe (2) and light leaks from the same spaces is corrected, the emissivity of the wafer (W) is calculated and the temperature of the wafer (W) is determined.

Abstract translation: 本发明旨在通过基于由多次反射光模拟的虚拟黑体的想法，通过辐射温度计测量半导体晶片的温度来提高温度测量的精度。 系统包括晶片（W），与晶片（W）相对设置的半径为R的圆形反射器1和设置在形成于反射器（1）中的通孔中的探针（2）。 探针（2）是通孔。 通过通孔的辐射的辐射强度由设置在反射器（1）的后表面后面的CCD照相机提供的图像数据确定。 由于进入晶片（W）和反射器（1）之间的空间的光以及反射器（1）和探针（2）之间的空间以及光线（2）引起的探测器（2）的测量辐射强度的误差 校正相同空间的泄漏，计算晶片的发射率（W），并确定晶片（W）的温度。

公开(公告)号：US06365899B1

公开(公告)日：2002-04-02

申请号：US09452387

申请日：1999-12-01

Applicant: Tetsuji Arai ,  Shinji Suzuki ,  Yoshiki Mimura

Inventor： Tetsuji Arai ,  Shinji Suzuki ,  Yoshiki Mimura

IPC: G01J500

CPC classification number: G01N21/255

Abstract: A process for determination of blackening of a lamp in which the blackening of a lamp can be determined without visual inspection in real time or during operation is achieved by the spectral radiant energy which is emitted by the lamp bulb being measured and evaluated based on the difference that exists between when blackening occurs as compared to when blackening does not occur. Therefore, blackening of a lamp can be determined by determining the change of the spectral radiant energy emitted by the bulb. Furthermore, in a lamp in which the bulb temperature changes, the spectral radiant energy emitted by the bulb can be measured at two different wavelengths and blackening of the lamp can be determined based on the change of the ratio relative to each other.

Abstract translation: 基于差异来测量和评估由灯泡发射的光谱辐射能量，可以实时地或在操作期间确定灯的黑化可以在没有目视检查的情况下确定灯的黑化的方法 当发生黑化时，与不发生黑化时相比存在。 因此，可以通过确定由灯泡发射的光谱辐射能的变化来确定灯的变黑。 此外，在灯泡温度变化的灯中，灯泡发出的光谱辐射能量可以在两个不同的波长下测量，并且可以基于相对于彼此的比率的变化来确定灯的黑化。

公开(公告)号：US06357910B1

公开(公告)日：2002-03-19

申请号：US09369951

申请日：1999-08-04

Applicant: Yaosheng Chen ,  Richard O. Claus ,  Yanjing Liu

Inventor： Yaosheng Chen ,  Richard O. Claus ,  Yanjing Liu

IPC: G01J500

CPC classification number: G01J5/041 ,  B82Y15/00 ,  B82Y30/00 ,  G01J5/601

Abstract: A pyrometer for measuring the temperature of an object with high accuracy and fast response time that uses both multi-wavelength pyrometry techniques and nanotechnology. Radiance from an object is transmitted through a fiber optic cable, is received by a thin-film multi-wavelength modulator, and is detected by an optical detector array. More specifically, the pyrometer includes means for conveying light; an optical lens; an optical fiber; means for optically modulating the wavelength of light; means for optically detecting the modulated light; means for transforming the optically detected wavelengths into electrical signals; and means for processing and recording the electrical signals. The means for optically modulating the wavelength includes at least one piezoelectric film deposited by an electrostatic self-assembly method. The pyrometer can be fabricated as either a contact-mode or non-contact mode device, both of which are suitable for use in hostile environments such as a boiler, gasifier, kiln and furnace.

Abstract translation: 用于使用多波长高温测量技术和纳米技术的高精度和快速响应时间测量物体的温度的高温计。 来自物体的辐射通过光纤传输，被薄膜多波长调制器接收，并由光学检测器阵列检测。 更具体地，高温计包括用于传送光的装置; 光学透镜; 光纤; 用于光学调制光的波长的装置; 用于光学检测调制光的装置; 用于将光学检测的波长变换为电信号的装置; 以及用于处理和记录电信号的装置。 用于光学调制波长的装置包括通过静电自组装方法沉积的至少一个压电膜。 高温计可以被制造为接触模式或非接触模式装置，两者均适用于恶劣环境，如锅炉，气化器，窑炉和炉。

公开(公告)号：US06357909B1

公开(公告)日：2002-03-19

申请号：US09297852

申请日：1999-05-06

Applicant: Minoru Watanabe

Inventor： Minoru Watanabe

IPC: G01J500

CPC classification number: G01J5/02 ,  G01J5/025 ,  G01J5/028 ,  G01J5/04 ,  G01J5/048 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0875 ,  G01J2005/068

Abstract: A radiation thermometer that avoids deterioration of measurement accuracy or loss of hygiene due to a dirty front end of a probe portion of the radiation thermometer, lowers running costs which are created if a probe cover is used, and reduces the labor of procuring the probe cover. To this end, the front end of the probe portion of the radiation thermometer has a waterproof structure so that the front end of the probe portion can be wiped with alcohol or the like.

Abstract translation: 辐射温度计避免由于辐射温度计的探头部分的脏前端引起的测量精度或卫生损失的降低，降低了如果使用探针盖产生的运行成本，并减少了采购探头盖的工作量 。 为此，辐射温度计的探头部分的前端具有防水结构，使得探针部分的前端可以用酒精等擦拭。