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公开(公告)号:US12205909B2
公开(公告)日:2025-01-21
申请号:US18138752
申请日:2023-04-25
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Da-Jun Lin , Bin-Siang Tsai , Fu-Yu Tsai
IPC: H01L23/00
Abstract: A method for fabricating a semiconductor device includes the steps of first forming an aluminum (Al) pad on a substrate, forming a passivation layer on the substrate and an opening exposing the Al pad, forming a cobalt (Co) layer in the opening and on the Al pad, bonding a wire onto the Co layer, and then performing a thermal treatment process to form a Co—Pd alloy on the Al pad.
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公开(公告)号:US20250017121A1
公开(公告)日:2025-01-09
申请号:US18449716
申请日:2023-08-15
Applicant: United Microelectronics Corp.
Inventor: Wen-Jen Wang , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive memory structure including a substrate, a dielectric layer, a conductive plug, a resistive memory device, a spacer, and a protective layer is provided. The dielectric layer is located on the substrate. The conductive plug is located in the dielectric layer. The conductive plug has a protrusion portion located outside the dielectric layer. The resistive memory device is located on the conductive plug. The resistive memory device includes a first electrode, a variable resistance layer, and a second electrode. The first electrode is located on the conductive plug. The variable resistance layer is located on the first electrode. The second electrode is located on the variable resistance layer. The spacer is located on a sidewall of the resistive memory device. The protective layer is located on a sidewall of the protrusion portion and between the first electrode and the dielectric layer.
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公开(公告)号:US20250015186A1
公开(公告)日:2025-01-09
申请号:US18227299
申请日:2023-07-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chun Lee , Chih-Yi Wang , Wei-Che Chen , Ya-Ting Hu , Yao-Jhan Wang , Kun-Szu Tseng , Feng-Yun Cheng , Shyan-Liang Chou
Abstract: The invention provides a semiconductor structure, which comprises a middle/high voltage device region and a low voltage device region, a plurality of fin structures disposed in the low voltage device region, and a protruding part located at a boundary Between the middle/high voltage device region and the low voltage device region. A top surface of the protruding part is flat, and the top surface of the protruding part is aligned with a flat top surface of the middle/high voltage device region.
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公开(公告)号:US20250014948A1
公开(公告)日:2025-01-09
申请号:US18885734
申请日:2024-09-15
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Fu-Jung Chuang , Po-Jen Chuang , Yu-Ren Wang , Chi-Mao Hsu , Chia-Ming Kuo , Guan-Wei Huang , Chun-Hsien Lin
IPC: H01L21/8238 , H01L21/762 , H01L27/092
Abstract: A semiconductor device includes a fin-shaped structure on a substrate, a single diffusion break (SDB) structure in the fin-shaped structure to divide the first fin-shaped structure into a first portion and a second portion, and more than two gate structures on the SDB structure. Preferably, the more than two gate structures include a first gate structure, a second gate structure, a third gate structure, and a fourth gate structure disposed on the SDB structure.
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公开(公告)号:US12191391B2
公开(公告)日:2025-01-07
申请号:US18244892
申请日:2023-09-11
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Shou-Wan Huang , Chun-Hsien Lin
IPC: H01L29/78 , H01L27/06 , H01L27/088 , H01L29/06 , H01L29/66
Abstract: A semiconductor device includes a substrate having a first region and a second region, a first fin-shaped structure extending along a first direction on the first region, a double diffusion break (DDB) structure extending along a second direction to divide the first fin-shaped structure into a first portion and a second portion, and a first gate structure and a second gate structure extending along the second direction on the DDB structure.
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公开(公告)号:US12190926B2
公开(公告)日:2025-01-07
申请号:US18108025
申请日:2023-02-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Jia-Rong Wu , Yi-Ting Wu
Abstract: A layout pattern of a magnetoresistive random access memory (MRAM) includes a substrate having a first cell region, a second cell region, a third cell region, and a fourth cell region, a first gate pattern extending from the first cell region to the third cell region along a first direction, a first diffusion region extending from the first cell region to the second cell region along a second direction, a first metal pattern adjacent to one side of the first gate pattern and overlapping the first diffusion region, a source line pattern extending from the first cell region to the second cell region along the second direction, and a first spin orbit torque (SOT) pattern extending along the first direction and overlapping the first metal pattern and the source line pattern.
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公开(公告)号:US20250008849A1
公开(公告)日:2025-01-02
申请号:US18221385
申请日:2023-07-12
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yen-Min Ting , Chuan-Fu Wang , Yu-Huan Yeh
Abstract: A resistive switching device includes a substrate, a first dielectric layer on the substrate, a conductive via in the first dielectric layer, a bottom electrode on the conductive via and the first dielectric layer, a resistive switching layer on the bottom electrode, a spacer covering a sidewall of the resistive switching layer and a sidewall of the bottom electrode, and a top electrode capping the spacer and the resistive switching layer.
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公开(公告)号:US20250008743A1
公开(公告)日:2025-01-02
申请号:US18885727
申请日:2024-09-15
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kun-Ju Li , Tai-Cheng Hou , Hsin-Jung Liu , Fu-Yu Tsai , Bin-Siang Tsai , Chau-Chung Hou , Yu-Lung Shih , Ang Chan , Chih-Yueh Li , Chun-Tsen Lu
Abstract: A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ, a passivation layer on the first ULK dielectric layer, and a second ULK dielectric layer on the passivation layer. Preferably, the first ULK dielectric layer includes a first thickness, the passivation layer between the first MTJ and the second MTJ includes a second thickness, the passivation layer on top of the first MTJ includes a third thickness, and the first thickness is greater than the second thickness
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公开(公告)号:US12183809B2
公开(公告)日:2024-12-31
申请号:US17673819
申请日:2022-02-17
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wei-Lun Huang , Chia-Ling Wang , Chia-Wen Lu , Ta-Wei Chiu , Ping-Hung Chiang
IPC: H01L29/66 , H01L21/8234 , H01L29/40 , H01L29/423
Abstract: A manufacturing method of a semiconductor device includes the following steps. A first recess and a second recess are formed in a first region and a second region of a semiconductor substrate, respectively. A bottom surface of the first recess is lower than a bottom surface of the second recess in a vertical direction. A first gate oxide layer and a second gate oxide layer are formed concurrently. At least a portion of the first gate oxide layer is formed in the first recess, and at least a portion of the second gate oxide layer is formed in the second recess. A removing process is performed for removing a part of the second gate oxide layer. A thickness of the second gate oxide layer is less than a thickness of the first gate oxide layer after the removing process.
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50.
公开(公告)号:US12183626B2
公开(公告)日:2024-12-31
申请号:US17883647
申请日:2022-08-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yi-How Chou , Tzu-Hao Fu , Tsung-Yin Hsieh , Chih-Sheng Chang , Shih-Chun Tsai , Kun-Chen Ho , Yang-Chou Lin
IPC: H01L21/768 , H01L23/522 , H01L23/532
Abstract: A metal interconnect structure includes a first metal interconnection in an inter-metal dielectric (IMD) layer on a substrate, a second metal interconnection on the first metal interconnection, and a cap layer between the first metal interconnection and the second metal interconnection. Preferably, a top surface of the first metal interconnection is even with a top surface of the IMD layer and the cap layer is made of conductive material.
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