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229 条记录 (耗时 0.034 秒)

    Microelectromechanical system sensor assembly
    41.
    发明授权
    Microelectromechanical system sensor assembly 失效
    微机电系统传感器组件

    公开(公告)号：US06526823B2

    公开(公告)日：2003-03-04

    申请号：US09727017

    申请日：2000-11-29

    申请人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

    发明人： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

    IPC分类号： G01F168

    CPC分类号： G01F1/6845

    摘要： A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.

    摘要翻译： 传感器组件具有其中形成有微通道的基底，流体可以通过该通道流动。 至少一个传感器靠近微通道。 至少一个传感器或流体的温度可以指示流体的状态，例如流速和气泡和颗粒物质的存在。

    Thin film electret microphone
    42.
    发明授权
    Thin film electret microphone 失效
    薄膜驻极体麦克风

    公开(公告)号：US06243474B1

    公开(公告)日：2001-06-05

    申请号：US08844570

    申请日：1997-04-18

    申请人： Yu-Chong Tai ,  Tseng-Yang Hsu ,  Wen H. Hsieh

    发明人： Yu-Chong Tai ,  Tseng-Yang Hsu ,  Wen H. Hsieh

    IPC分类号： H04R2500

    CPC分类号： H04R19/016 ,  H04R25/604 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49226

    摘要： A small, inexpensive, high quality electret formed by micro-machining technology on a support surface, and further including a small, inexpensive, high quality, self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a microphone back plate, at least one of which includes an electret formed by micro-machining technology. When juxtaposed, the two units form a highly reliable, inexpensive microphone that can produce a signal without the need for external biasing, thereby reducing system volume and complexity. In the preferred embodiment, the electret material used is a thin film of spin-on polytetrafluoroethylene (PTFE). An electron gun preferably is used for charge implantation. The electret has a saturated charged density in the range of about 2×105 C/m2 to about 8×10−4 C/m2. Thermal annealing is used to stabilize the implanted charge. Two prototype micro-machined electret microphones have been fabricated and tested. An open circuit sensitivity of about 0.5 mV/Pa has been achieved for a hybrid microphone package.

    摘要翻译： 通过微加工技术在支撑表面上形成的小型，廉价，高质量的驻极体，并且还包括小型，廉价，高质量的自供电驻极体声音传感器，优选地以麦克风的形式通过微加工形成 技术。 每个麦克风被制造成两件式的单元，其包括麦克风膜单元和麦克风背板，其中至少一个包括由微加工技术形成的驻极体。 当并置时，两个单元形成高度可靠，廉价的麦克风，可以产生信号而不需要外部偏置，从而降低系统体积和复杂性。 在优选的实施方案中，使用的驻极体材料是旋涂聚四氟乙烯（PTFE）的薄膜。 电子枪优选用于电荷注入。 驻极体的饱和带电密度在约2×10 5 C / m 2至约8×10 -4 C / m 2的范围内。 热退火用于稳定植入电荷。 已经制造和测试了两个原型的微加工驻极体麦克风。 对于混合麦克风封装已经实现了约0.5mV / Pa的开路灵敏度。

    Flexible skin incorporating mems technology
    43.
    发明授权
    Flexible skin incorporating mems technology 失效
    灵活的皮肤融合了mems技术

    公开(公告)号：US6071819A

    公开(公告)日：2000-06-06

    申请号：US12756

    申请日：1998-01-23

    申请人： Yu-Chong Tai ,  Fukang Jiang ,  Chihming Ho

    发明人： Yu-Chong Tai ,  Fukang Jiang ,  Chihming Ho

    IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  H01L21/301 ,  H01L21/311

    CPC分类号： B81B7/0077 ,  B81C1/00246 ,  H01L24/24 ,  H01L2224/24137

    摘要： A flexible skin formed of silicon islands encapsulated in a polyimide film. The silicon islands preferably include a MEMS device and are connected together by a polyimide film (preferably about 1-100 .mu.m thick). To create the silicon islands, silicon wafers are etched to a desirable thickness (preferably about 10-500 .mu.m) by Si wet etching and then patterned from the back side by reactive ion etching (RIE).

    摘要翻译： 由聚硅氧烷膜封装的硅岛形成的柔性表皮。 硅岛优选包括MEMS器件，并通过聚酰亚胺膜（优选约1-100μm厚）连接在一起。 为了形成硅岛，通过Si湿式蚀刻将硅晶片蚀刻到期望的厚度（优选约10-500μm），然后通过反应离子蚀刻（RIE）从背面图案化。

    Microbellows actuator
    44.
    发明授权
    Microbellows actuator 失效
    微型致动器

    公开(公告)号：US6069392A

    公开(公告)日：2000-05-30

    申请号：US57381

    申请日：1998-04-08

    申请人： Yu-Chong Tai ,  Xing Yang

    发明人： Yu-Chong Tai ,  Xing Yang

    IPC分类号： B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

    CPC分类号： B81B3/007 ,  B81B2201/031

    摘要： A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

    摘要翻译： 与具有相似尺寸的单层平膜相比，微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量膜的强度的锚结构。 使用表征装置来测量微波膜的性能。 还公开了具有电阻加热器芯片的热气动致动器。

    INTRAOCULAR LENS WITH IMPROVED SHAPE RETENTION
    49.
    发明申请
    INTRAOCULAR LENS WITH IMPROVED SHAPE RETENTION 审中-公开
    具有改善形状保留的内窥镜

    公开(公告)号：US20160256266A1

    公开(公告)日：2016-09-08

    申请号：US15062549

    申请日：2016-03-07

    申请人： Craig Alan CABLE, III ,  Charles DeBoer ,  Yu-Chong Tai ,  Mark Humayun ,  Sean Caffey

    发明人： Craig Alan CABLE, III ,  Charles DeBoer ,  Yu-Chong Tai ,  Mark Humayun ,  Sean Caffey

    IPC分类号： A61F2/16

    CPC分类号： A61F2/1635 ,  A61F2002/1682 ,  A61F2002/169 ,  A61F2002/1699 ,  A61F2310/00011

    摘要： An accommodating intraocular lens has a central chamber with an optical axis extending through a vision-correcting optical zone and a peripheral region at least partially surrounding the optical zone but not interfering with light passing therethrough. At least one peripheral chamber surrounds the central chamber at least partially and functions as a storage reservoir for optical fluid, receiving excess fluid when the central chamber is compressed. Within each peripheral chamber (if there is more than one), a shape-retention member resists collapse of the peripheral chamber in response to external force.

    摘要翻译： 容纳人工晶状体具有中心室，其中光轴延伸通过视觉校正光学区域和至少部分地围绕光学区域但不干扰穿过其中的光的外围区域。 至少一个周边室至少部分地围绕中央室，并且用作光学流体的储存容器，当中心室被压缩时接收多余的流体。 在每个周边室内（如果存在多于一个），形状保持构件抵抗外力响应于外力而塌陷。