OPERATION OF CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING

    公开(公告)号:US20230381915A1

    公开(公告)日:2023-11-30

    申请号:US17968608

    申请日:2022-10-18

    CPC classification number: B24B37/042

    Abstract: A method of polishing includes bringing a substrate into contact with a polishing pad and generating relative motion between the substrate and the polishing pad, retaining the substrate on the polishing pad with a retainer, and during polishing of the substrate alternating between reducing a diameter of an inner surface of the retainer to clamp the substrate and increasing the diameter of the inner surface of the retainer to release the substrate from clamping while continuing to retain the substrate.

    Pivotable substrate retaining ring
    46.
    发明授权

    公开(公告)号:US11724357B2

    公开(公告)日:2023-08-15

    申请号:US17985778

    申请日:2022-11-11

    CPC classification number: B24B37/32 B24B37/10 B24B41/067

    Abstract: A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments. An inner surface of the collet retaining ring is configured to engage a substrate, and the collect retaining ring and outer ring are configured such that vertical motion of the outer ring controls motion of the collet retaining ring between a clamping and unclamping position.

    POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES

    公开(公告)号:US20210402558A1

    公开(公告)日:2021-12-30

    申请号:US17359410

    申请日:2021-06-25

    Abstract: A carrier head for a polishing system includes a housing, a flexible membrane, a first plurality of pressure supply lines, a second plurality of pressure supply lines, and a valve assembly. The flexible membrane defines a multiplicity of independently pressurizable chambers. The valve assembly has a multiplicity of valves with each respective valve of the multiplicity of valves coupled to a respective pressure chamber from the multiplicity of independently pressurizable chambers. Each respective valve is configured to selectively couple the respective pressure chamber to one pressure supply line from a pair of pressure supply lines that include a pressure supply line from the first plurality of pressure supply lines and a pressure supply line from the second plurality of pressure supply lines.

    Retaining Ring Having Inner Surfaces with Features
    50.
    发明申请
    Retaining Ring Having Inner Surfaces with Features 审中-公开
    具有内表面的保持环具有特征

    公开(公告)号:US20160346897A1

    公开(公告)日:2016-12-01

    申请号:US14992763

    申请日:2016-01-11

    CPC classification number: B24B37/32 H01L21/68721

    Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

    Abstract translation: 保持环的一些实施方式具有内表面,该内表面具有由多个平面小面形成的第一部分和沿着边界邻接第一部分的第二部分,并且包括从外部向下倾斜的截头圆锥形表面。保持环的一些实施方式 具有锯齿状或蛇形内表面,和/或具有不同表面性质或不同倾斜角的交替区域的内表面。

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