公开(公告)号：US12033865B2

公开(公告)日：2024-07-09

申请号：US18198337

申请日：2023-05-17

Applicant: Applied Materials, Inc.

Inventor： Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: H01L21/321 ,  B24B37/04 ,  B24B37/32 ,  B24B41/06 ,  B24B37/10 ,  H01L21/304 ,  H01L21/306

CPC classification number: H01L21/3212 ,  B24B37/04 ,  B24B37/32 ,  B24B41/06 ,  B24B37/10 ,  H01L21/304 ,  H01L21/30625

Abstract: A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.

公开(公告)号：US20240173816A1

公开(公告)日：2024-05-30

申请号：US18436499

申请日：2024-02-08

Applicant: Applied Materials, Inc.

Inventor： Steven M. Zuniga ,  Jay Gurusamy ,  Andrew J. Nagengast

IPC: B24B37/30 ,  B24B37/04 ,  B24B49/12 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683

CPC classification number: B24B37/30 ,  B24B37/042 ,  B24B49/12 ,  H01L21/31053 ,  H01L21/3212 ,  H01L21/67253 ,  H01L21/6838 ,  H01L22/26

Abstract: A carrier head includes a housing, a support assembly having a support plate flexibly connected to the housing so as to be vertically movable, a plurality of fluid-impermeable barriers projecting from a bottom of the support plate to define a plurality of recesses that are open at bottom sides thereof, and pneumatic control lines. A volume between the support plate and the housing includes one or more independently pressurizable first chambers to apply pressure on a top surface of the support plate in one or more first zones. The barriers divide a volume between the support plate and the substrate into a plurality of second chambers. The pneumatic control lines are coupled to the plurality of recesses to provide a plurality of independently pressurizable second zones.

公开(公告)号：US20240075584A1

公开(公告)日：2024-03-07

申请号：US18239929

申请日：2023-08-30

Applicant: Applied Materials, Inc.

Inventor： Andrew J. Nagengast ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Kuen-Hsiang Chen ,  Eric Lau

IPC: B24B37/32

CPC classification number: B24B37/32

Abstract: A retaining ring for a carrier head of a chemical mechanical polishing system includes an annular outer portion having an annular outer surface and a plurality of flanges projecting radially inward from the annular outer portion. Adjacent flanges are separated by a gap and inner ends of the plurality of flanges provide an inner surface to contact a substrate held in the carrier head. The plurality of flanges are canted relative to radial direction.

公开(公告)号：US20230381915A1

公开(公告)日：2023-11-30

申请号：US17968608

申请日：2022-10-18

Applicant: Applied Materials, Inc.

Inventor： Steven M. Zuniga ,  Jeonghoon Oh ,  Andrew J. Nagengast

IPC: B24B37/04

CPC classification number: B24B37/042

Abstract: A method of polishing includes bringing a substrate into contact with a polishing pad and generating relative motion between the substrate and the polishing pad, retaining the substrate on the polishing pad with a retainer, and during polishing of the substrate alternating between reducing a diameter of an inner surface of the retainer to clamp the substrate and increasing the diameter of the inner surface of the retainer to release the substrate from clamping while continuing to retain the substrate.

公开(公告)号：US20230290645A1

公开(公告)日：2023-09-14

申请号：US18198337

申请日：2023-05-17

Applicant: Applied Materials, Inc.

Inventor： Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: H01L21/321 ,  B24B37/04 ,  B24B41/06 ,  B24B37/32

CPC classification number: H01L21/3212 ,  B24B37/04 ,  B24B41/06 ,  B24B37/32 ,  H01L21/30625

Abstract: A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.

公开(公告)号：US11724357B2

公开(公告)日：2023-08-15

申请号：US17985778

申请日：2022-11-11

Applicant: Applied Materials, Inc.

Inventor： Steven M. Zuniga ,  Jay Gurusamy ,  Andrew J. Nagengast

IPC: B24B37/10 ,  B24B37/32 ,  B24B41/06

CPC classification number: B24B37/32 ,  B24B37/10 ,  B24B41/067

Abstract: A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments. An inner surface of the collet retaining ring is configured to engage a substrate, and the collect retaining ring and outer ring are configured such that vertical motion of the outer ring controls motion of the collet retaining ring between a clamping and unclamping position.

公开(公告)号：US20230019815A1

公开(公告)日：2023-01-19

申请号：US17945932

申请日：2022-09-15

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US11453099B2

公开(公告)日：2022-09-27

申请号：US16708287

申请日：2019-12-09

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US20210402558A1

公开(公告)日：2021-12-30

申请号：US17359410

申请日：2021-06-25

Applicant: Applied Materials, Inc.

Inventor： Steven M. Zuniga ,  Jay Gurusamy ,  Andrew J. Nagengast ,  Vladimir Galburt

IPC: B24B37/30 ,  B24B37/005 ,  B24B37/10

Abstract: A carrier head for a polishing system includes a housing, a flexible membrane, a first plurality of pressure supply lines, a second plurality of pressure supply lines, and a valve assembly. The flexible membrane defines a multiplicity of independently pressurizable chambers. The valve assembly has a multiplicity of valves with each respective valve of the multiplicity of valves coupled to a respective pressure chamber from the multiplicity of independently pressurizable chambers. Each respective valve is configured to selectively couple the respective pressure chamber to one pressure supply line from a pair of pressure supply lines that include a pressure supply line from the first plurality of pressure supply lines and a pressure supply line from the second plurality of pressure supply lines.

公开(公告)号：US20160346897A1

公开(公告)日：2016-12-01

申请号：US14992763

申请日：2016-01-11

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/306

CPC classification number: B24B37/32 ,  H01L21/68721

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

Abstract translation: 保持环的一些实施方式具有内表面，该内表面具有由多个平面小面形成的第一部分和沿着边界邻接第一部分的第二部分，并且包括从外部向下倾斜的截头圆锥形表面。保持环的一些实施方式 具有锯齿状或蛇形内表面，和/或具有不同表面性质或不同倾斜角的交替区域的内表面。