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    METHODS AND APPARATUS FOR OPERATING AN ELECTRONIC DEVICE MANUFACTURING SYSTEM
    42.
    发明申请
    METHODS AND APPARATUS FOR OPERATING AN ELECTRONIC DEVICE MANUFACTURING SYSTEM 审中-公开
    用于操作电子设备制造系统的方法和装置

    公开(公告)号：US20090222128A1

    公开(公告)日：2009-09-03

    申请号：US12365894

    申请日：2009-02-04

    Applicant: Daniel O. Clark ,  Phil Chandler ,  Shaun W. Crawford ,  Jay J. Jung ,  Youssef A. Loldj ,  Maxime Cayer

    Inventor： Daniel O. Clark ,  Phil Chandler ,  Shaun W. Crawford ,  Jay J. Jung ,  Youssef A. Loldj ,  Maxime Cayer

    IPC: G05B19/18

    CPC classification number: G05B19/418 ,  G05B2219/31229 ,  Y02P90/02 ,  Y02P90/14

    Abstract: Methods and apparatus for efficiently operating an electronic device manufacturing system are provided. In one aspect, an electronic device manufacturing system is provided, including: a process tool; a process tool controller linked to the process tool, wherein the process tool controller is adapted to control the process tool; a first sub-fab auxiliary system linked to the process tool controller; wherein the first sub-fab auxiliary system is adapted to operate in a first operating mode and a second operating mode; and wherein the process tool controller is adapted to cause the first sub-fab auxiliary system to change from the first operating mode to the second operating mode.

    Abstract translation: 提供了有效操作电子设备制造系统的方法和设备。 一方面，提供了一种电子设备制造系统，包括：处理工具; 与处理工具链接的过程工具控制器，其中所述过程工具控制器适于控制所述过程工具; 与处理工具控制器相连的第一子制造辅助系统; 其中所述第一子制造辅助系统适于在第一操作模式和第二操作模式中操作; 并且其中所述处理工具控制器适于使所述第一子制造辅助系统从所述第一操作模式改变到所述第二操作模式。

    Oxygen enhanced CDA modification to a CDO integrated scrubber
    44.
    发明授权
    Oxygen enhanced CDA modification to a CDO integrated scrubber 失效
    氧增强CDO整合洗涤器的CDA修改

    公开(公告)号：US06527828B2

    公开(公告)日：2003-03-04

    申请号：US09811716

    申请日：2001-03-19

    Applicant: Belynda G. Flippo ,  Keith Karrup ,  Robbert Vermeulen ,  Daniel O. Clark

    Inventor： Belynda G. Flippo ,  Keith Karrup ,  Robbert Vermeulen ,  Daniel O. Clark

    IPC: B01D5000

    CPC classification number: B01D53/229 ,  F23G7/065 ,  F23G2209/142 ,  F23L7/007 ,  Y02E20/344

    Abstract: A method and system for retrofitting an integrated scrubber to provide maximum oxygen content in a controlled decomposition oxidation (CDO) abatement process including a thermal/wet integrated scrubber, and a compressed air supply for supplying air to an oxygen separation device that separates the air into a nitrogen-enriched component and an oxygen-enriched component. The oxygen separation device includes a module, such as a vessel containing ceramic-materials arranged in an adsorbent bed or coated on a substrate. The present invention uses a ceramic oxide material through which only oxygen can diffuse. The composition of the ceramic oxide adsorbent material is such that a significant number of oxygen vacancies exist in the material. By placing either a voltage potential or a pressure gradient across the membrane, oxygen is selectively diffused in and through the oxide material to separate the air supply into an oxygen component for introduction into the integrated scrubber.

    Abstract translation: 一种用于改进集成洗涤器以在受控分解氧化（CDO）消除过程中提供最大氧含量的方法和系统，其包括热/湿综合洗涤器，以及用于向分离空气的氧分离装置供应空气的压缩空气供应 富氮组分和富氧组分。 氧分离装置包括模块，例如容纳布置在吸附床中或涂覆在基底上的陶瓷材料的容器。 本发明使用仅氧气可以扩散的陶瓷氧化物材料。 陶瓷氧化物吸附剂材料的组成使得材料中存在大量的氧空位。 通过在膜上放置电压电位或压力梯度，氧被选择性地扩散到氧化物材料中并通过氧化物材料，以将空气供应分离成氧气成分以引入到综合洗涤器中。

    Chemical-mechanical polishing pad providing polishing unformity
    46.
    发明授权
    Chemical-mechanical polishing pad providing polishing unformity 失效
    化学机械抛光垫提供抛光不整合

    公开(公告)号：US5533923A

    公开(公告)日：1996-07-09

    申请号：US419573

    申请日：1995-04-10

    Applicant: Shamouil Shamouilian ,  Daniel O. Clark

    Inventor： Shamouil Shamouilian ,  Daniel O. Clark

    IPC: B24B37/26 ,  B24B1/00 ,  B23D11/00

    CPC classification number: B24B37/26

    Abstract: In accordance with the present invention, a polishing pad useful for polishing a semiconductor-comprising substrate is disclosed. The polishing pad is constructed to include conduits which pass through at least a portion of and preferably through the entire thickness of the polishing pad. The conduits, preferably tubulars, are constructed from a first material which is different from a second material used as a support matrix. The conduits are positioned within the support matrix such that the longitudinal centerline of the conduit forms an angle ranging from about 60.degree. to about 120.degree. with the working surface of the polishing pad. In the most preferred embodiment of the present invention, the conduits pass all the way through the thickness of the polishing pad and are sized to permit the flow of polishing slurry, reactive etchant material, heat transfer medium, and/or lubricant from a supply device through the conduits to the working surface of the polishing pad (at least a portion of which is in contact or near contact with the article to be polished).

    Abstract translation: 根据本发明，公开了一种用于抛光含半导体衬底的抛光垫。 抛光垫被构造成包括穿过抛光垫的至少一部分并且优选穿过抛光垫的整个厚度的导管。 导管（优选管状）由与用作支撑基体的第二材料不同的第一材料构成。 导管定位在支撑基体内，使得导管的纵向中心线与抛光垫的工作表面形成约60°至约120°的角度。 在本发明的最优选实施例中，导管一直通过抛光垫的厚度，其尺寸设计成允许来自供给装置的抛光浆料，反应性蚀刻剂材料，传热介质和/或润滑剂的流动 通过导管移动到抛光垫的工作表面（其至少一部分与待抛光的物品接触或接近接触）。

    Elongated tubesheets for hollow fiber type battery cells
    48.
    发明授权
    Elongated tubesheets for hollow fiber type battery cells 失效
    中空纤维型电池的细长管板

    公开(公告)号：US4740338A

    公开(公告)日：1988-04-26

    申请号：US843545

    申请日：1986-03-25

    Applicant: Daniel O. Clark ,  Floris Y. Tsang ,  Paul A. Damrow

    Inventor： Daniel O. Clark ,  Floris Y. Tsang ,  Paul A. Damrow

    IPC: C03C3/064 ,  H01M10/39 ,  C04B35/64

    CPC classification number: C03C3/064 ,  H01M10/3909

    Abstract: Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.

    Abstract translation: 可以通过在中空纤维型电池单元中使用管板来实现电池制造的容易性，最大电池尺寸，纤维断裂，管板密封性，长期使用中的管板变形的耐受性，安全性等的几个优点， 细长的形状，具有与纤维“束”相比基本上更小的直径，并且其中通过它的纤维末端被紧密地包装。

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