公开(公告)号：US20160282880A1

公开(公告)日：2016-09-29

申请号：US14778398

申请日：2014-03-17

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Atsushi HIDAKA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06 ,  G01F1/50

CPC classification number: G05D7/0635 ,  G01F1/42 ,  G01F1/50 ,  G01F15/005 ,  Y10T137/7761

Abstract: A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.

Abstract translation: 配备有流量监视器的流量控制装置包括设置在上游侧的建立型流量监视器单元，设置在建立型流量监视器单元的下游侧的流量控制单元，连接构建型流量监视单元的信号传输电路， 向下流型监视单元和流量控制单元，并且将流量控制单元的累积流量监视单元的监视流量发送到流量控制单元，并且设定流量值调整机构，设置在流量控制单元中， 流量控制单元的流量基于来自累积型流量监视器单元的监视流量。

公开(公告)号：US20160084700A1

公开(公告)日：2016-03-24

申请号：US14889388

申请日：2014-04-25

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Michio YAMAJI ,  Tadayuki YAKUSHIJIN

IPC: G01J1/04 ,  G02B27/02 ,  G02B1/02 ,  G01J1/42

CPC classification number: G01J1/0403 ,  G01J1/0407 ,  G01J1/42 ,  G01J3/0205 ,  G01J5/0014 ,  G01J5/0875 ,  G01N21/0303 ,  G01N21/05 ,  G01N21/33 ,  G02B1/02 ,  G02B7/007 ,  G02B27/022 ,  G02B27/028

Abstract: A fastening structure of a brittle-fracturable panel material includes a first fastening flange, a second fastening flange, and a light transmission window panel made of a brittle-fracturable panel material, wherein the light transmission window panel is nipped between the first fastening flange and the second fastening flange, and both fastening flanges are air-tightly fitted and fastened.

Abstract translation: 脆性断裂面板材料的紧固结构包括第一紧固凸缘，第二紧固凸缘和由脆性断裂面板材料制成的透光窗面板，其中透光窗面板夹在第一紧固凸缘和 第二紧固凸缘和两个紧固凸缘都是气密的并紧固的。

公开(公告)号：US20160061704A1

公开(公告)日：2016-03-03

申请号：US14888841

申请日：2014-04-30

Applicant: TOKUSHIMA UNIVERSITY ,  FUJIKIN INCORPORATED

Inventor： Yoshihiro DEGUCHI ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Michio YAMAJI ,  Tadayuki YAKUSHIJIN

IPC: G01N9/00 ,  G01N21/59 ,  G01N21/85

CPC classification number: G01N9/00 ,  G01N9/24 ,  G01N21/05 ,  G01N21/33 ,  G01N21/59 ,  G01N21/85 ,  G01N2201/08

Abstract: This invention is related to an optical-analysis-type raw material fluid density detector including a detector main body and a light oscillation unit and a light detection unit that are provided on the upper surface or the under surface of the detector main body, in which the detector main body has at least one recess formed in the upper surface and the under surface, a fluid flow path connecting a fluid inlet of the detector main body to the recess, a fluid flow path connecting the recesses to each other, and a fluid flow path connecting the recess to a fluid outlet of the detector main body; the light oscillation unit is disposed in the recess that is closest to the inlet; and light detection units are disposed in the remaining recesses.

Abstract translation: 本发明涉及一种光学分析型原料流体密度检测器，其包括设在检测器主体的上表面或下表面上的检测器主体和光振荡单元以及光检测单元，其中 检测器主体具有形成在上表面和下表面中的至少一个凹部，将检测器主体的流体入口连接到凹部的流体流动路径，将凹部彼此连接的流体流路，以及流体 将所述凹部连接到所述检测器主体的流体出口的流路; 光振动单元设置在最靠近入口的凹部中; 并且光检测单元设置在剩余的凹部中。

公开(公告)号：US20240160230A1

公开(公告)日：2024-05-16

申请号：US18418644

申请日：2024-01-22

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Keisuke IDEGUCHI ,  Shinya OGAWA ,  Katsuyuki SUGITA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Hiroyuki ITO

IPC: G05D7/06 ,  G01F1/36 ,  G01F15/00 ,  G01L13/06 ,  G01L19/08

CPC classification number: G05D7/0635 ,  G01F1/363 ,  G01F15/005 ,  G01L13/06 ,  G01L19/08 ,  Y10T137/7761

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

公开(公告)号：US20230324008A1

公开(公告)日：2023-10-12

申请号：US18044184

申请日：2021-10-05

Applicant: FUJIKIN INCORPORATED

Inventor： Takatoshi NAKATANI ,  Atsushi HIDAKA ,  Kazuyuki MORISAKI ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: F17C9/02 ,  F17C13/02

CPC classification number: F17C9/02 ,  F17C13/025 ,  F17C2250/043 ,  F17C2227/0302

Abstract: A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.

公开(公告)号：US20220390269A1

公开(公告)日：2022-12-08

申请号：US17755966

申请日：2020-11-26

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Kaoru HIRATA

IPC: G01F25/10 ,  G01F1/36 ,  G05D7/06

Abstract: The abnormality detection method of the flow rate control device 10 is performed in the gas supply system 100 including the flow rate control device 10 having the restriction part 12, the control valve 14, the flow rate control pressure sensor 16 for measuring the upstream pressure P1, and the control circuit 19, the inflow pressure sensor 20 for measuring the supply pressure P0, and the upstream on-off valve 2 provided upstream of the inflow pressure sensor, and includes a step of closing the upstream on-off valve in a state in which the gas flows at the controlled flow rate at the downstream of the restriction part by controlling the opening degree of the control valve based on the output of the flow rate control pressure sensor, a step of measuring the drop in the supply pressure P0 on the upstream side of the control valve after closing the upstream on-off valve while keeping the control valve open, and a step of detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.

公开(公告)号：US20220170849A1

公开(公告)日：2022-06-02

申请号：US17598636

申请日：2020-03-31

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kazuteru TANAKA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/33 ,  G01N21/27 ,  G01N21/05 ,  G01N21/59

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.

公开(公告)号：US20220034794A1

公开(公告)日：2022-02-03

申请号：US17279018

申请日：2019-09-17

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kazuteru TANAKA ,  Keiji HIRAO ,  Tadayuki YAKUSHIJIN ,  Kouji NISHINO ,  Michio YAMAJI ,  Nobukazu IKEDA

IPC: G01N21/33

Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

公开(公告)号：US20220003662A1

公开(公告)日：2022-01-06

申请号：US17279179

申请日：2019-09-18

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Hidekazu ISHII ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/27 ,  G01N21/17 ,  G01N21/3504 ,  G01N21/85

Abstract: A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured. The concentration measurement method includes: a step of flowing a gas whose molecular structure varies with the temperature as the fluid to be measured in the measurement cell; a step of making light of a wavelength absorbable by the fluid to be measured to be incident from the light source to the measurement cell; a step of measuring the intensity of light emitted from the measurement cell by the photodetector; and a step of calculating the concentration of the fluid to be measured based on the temperature and the output of the photodetector measured by the temperature sensor.

公开(公告)号：US20210157341A1

公开(公告)日：2021-05-27

申请号：US17047552

申请日：2019-04-19

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Shinya OGAWA ,  Katsuyuki SUGITA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06

Abstract: A flow rate control method performed using a flow rate control device 100 comprising a first control valve 6 provided in a flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising steps of: (a) closing the opening of the first control valve from a state in which, while controlling the opening of the first control valve based on an output of the pressure sensor so as to be the first flow rate, maintaining the opening of the second control valve in an open state, and flowing a fluid at the first flow rate; and (b) based on the output of the pressure sensor, the pressure remaining downstream of the first control valve is controlled by adjusting the opening of the second control valve, and flowing the fluid at the second flow rate downstream of the second control valve.