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55 条记录 (耗时 0.064 秒)

    Methods and systems for determining a property of an insulating film
    45.
    发明授权
    Methods and systems for determining a property of an insulating film 有权
    用于确定绝缘膜性能的方法和系统

    公开(公告)号：US07358748B1

    公开(公告)日：2008-04-15

    申请号：US11291075

    申请日：2005-11-30

    申请人： Thomas G. Miller ,  Gregory S. Horner ,  Amin Samsavar ,  Zhiwei Xu ,  Patrick Stevens

    发明人： Thomas G. Miller ,  Gregory S. Horner ,  Amin Samsavar ,  Zhiwei Xu ,  Patrick Stevens

    IPC分类号： G01R27/08 ,  G01R27/26 ,  G01R31/302 ,  G01N27/60

    CPC分类号： H01L22/12 ,  G01R31/2831 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to current leakage and film thickness.

    摘要翻译： 提供一种用于确定绝缘膜的性质的方法。 该方法可以包括获得膜的电荷密度测量，膜相对于衬底的体电压电位的表面电压电势以及膜的电压衰减速率。 该方法还可以包括使用电荷密度，表面电压电位和电压衰减速率确定膜的性质。 提供一种确定绝缘膜厚度的方法。 该方法可以包括在膜上沉积电荷，测量膜相对于衬底的体电压电位的表面电压电位，以及测量膜的电压衰减速率。 该方法还可以包括使用电压衰减速率和与电流泄漏和膜厚度有关的理论模型来确定膜的厚度。

    Methods for imperfect insulating film electrical thickness/capacitance measurement
    47.
    发明授权
    Methods for imperfect insulating film electrical thickness/capacitance measurement 失效
    绝缘膜电气厚度/电容测量不完美的方法

    公开(公告)号：US07075318B1

    公开(公告)日：2006-07-11

    申请号：US10754332

    申请日：2004-01-09

    申请人： Xiafang (Michelle) Zhang ,  Zhiwei (Steve) Xu ,  Jianou Shi ,  Bao Vu ,  Thomas G. Miller ,  Gregory S. Horner

    发明人： Xiafang (Michelle) Zhang ,  Zhiwei (Steve) Xu ,  Jianou Shi ,  Bao Vu ,  Thomas G. Miller ,  Gregory S. Horner

    IPC分类号： G01R31/302 ,  G01R27/26

    CPC分类号： G01R31/2648 ,  G01R27/26 ,  G01R31/312

    摘要： Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.

    摘要翻译： 提供了确定绝缘膜的电参数的方法。 一种方法包括测量泄漏绝缘膜的表面电位，而不会导致绝缘膜上的泄漏并且从表面电位确定电参数。 另一种方法包括在绝缘膜上施加电场。 由电场引起的绝缘膜上的泄漏可忽略不计。 该方法还包括测量样品的表面电位并确定衬底的电位。 此外，该方法包括从表面电位和衬底电位确定绝缘膜两端的纯电压。 该方法还包括从纯电压确定电参数。 电气参数可以是绝缘膜的电容或电气厚度。

    High energy x-y neutron detector and radiographic/tomographic device
    49.
    再颁专利
    High energy x-y neutron detector and radiographic/tomographic device 失效

    公开(公告)号：USRE36201E

    公开(公告)日：1999-04-27

    申请号：US842512

    申请日：1997-04-23

    申请人： Thomas G. Miller

    发明人： Thomas G. Miller

    IPC分类号： G01N23/09 ,  G01T3/06 ,  G01V5/00 ,  G01N23/222

    CPC分类号： G01N23/09 ,  G01T3/06 ,  G01V5/0016 ,  G01V5/005

    摘要： An improved fast neutron x-y detector and radiographic/tomographic device utilizing a white neutron probe (4). The invention includes a multiple scattering filter (44), radiographic and tomographic imaging of the number densities of atoms in small volume increments through a sample 32 and the atomic, chemical and physical structure of a sample, (32), and neural net analysis techniques, where the neural net is trained through use of simulated volume increments. The invention detects fast neutrons over a two dimensional plane, measures the energy of the neutrons, and discriminates against gamma rays. In a preferred embodiment, the detector face is constructed by stacking separate bundles (6) of scintillating fiber optic strands (20) one on top of the other. The first x-y coordinate is determined by which bundle (6) the neutron strikes. The other x-y coordinate is calculated by measuring the difference in time of flight for the scintillation photon to travel to the opposite ends of the fiber optic strand 20. In another embodiment, the detector is constructed of discrete scintillator sections (48) connected to fiber optic strands (52) by couplers (50) functioning as lens. The fiber optic strands (52) are connected to a multi-anode photomultiplier (100) tube (56). The x-y coordinate of a neutron interaction is determined by the row and column of the affected scintillation section (48). Neutron energy for both detectors is calculated by measuring the flight time of a neutron from a point source (2) to the detector face.