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1.发明授权Methods for imperfect insulating film electrical thickness/capacitance measurement 失效绝缘膜电气厚度/电容测量不完美的方法公开(公告)号：US07075318B1
公开(公告)日：2006-07-11
申请号：US10754332
申请日：2004-01-09
申请人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Bao Vu , Thomas G. Miller , Gregory S. Horner
发明人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Bao Vu , Thomas G. Miller , Gregory S. Horner
IPC分类号： G01R31/302 , G01R27/26
CPC分类号： G01R31/2648 , G01R27/26 , G01R31/312
摘要： Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.
摘要翻译： 提供了确定绝缘膜的电参数的方法。 一种方法包括测量泄漏绝缘膜的表面电位，而不会导致绝缘膜上的泄漏并且从表面电位确定电参数。 另一种方法包括在绝缘膜上施加电场。 由电场引起的绝缘膜上的泄漏可忽略不计。 该方法还包括测量样品的表面电位并确定衬底的电位。 此外，该方法包括从表面电位和衬底电位确定绝缘膜两端的纯电压。 该方法还包括从纯电压确定电参数。 电气参数可以是绝缘膜的电容或电气厚度。
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2.发明授权Methods for imperfect insulating film electrical thickness/capacitance measurement 失效绝缘膜电气厚度/电容测量不完美的方法公开(公告)号：US07397254B1
公开(公告)日：2008-07-08
申请号：US11277053
申请日：2006-03-21
申请人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Quoc-Bao Vu , Thomas G. Miller , Gregory S. Horner
发明人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Quoc-Bao Vu , Thomas G. Miller , Gregory S. Horner
IPC分类号： G01R31/302
CPC分类号： G01R31/2648 , G01R27/26 , G01R31/312
摘要： Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.
摘要翻译： 提供了确定绝缘膜的电参数的方法。 一种方法包括测量泄漏绝缘膜的表面电位，而不会导致绝缘膜上的泄漏并且从表面电位确定电参数。 另一种方法包括在绝缘膜上施加电场。 由电场引起的绝缘膜上的泄漏可忽略不计。 该方法还包括测量样品的表面电位并确定衬底的电位。 此外，该方法包括从表面电位和衬底电位确定绝缘膜两端的纯电压。 该方法还包括从纯电压确定电参数。 电气参数可以是绝缘膜的电容或电气厚度。
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3.发明授权Systems and methods for using non-contact voltage sensors and corona discharge guns 失效使用非接触式电压传感器和电晕放电枪的系统和方法公开(公告)号：US06909291B1
公开(公告)日：2005-06-21
申请号：US10606066
申请日：2003-06-24
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译： 提供了一种用于校准非接触式电压传感器的功能的方法和系统。 该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。 反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。 提供包括第一电极和一个或多个导电棒的电晕枪。 在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。 另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。
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4.发明授权Systems and methods for using non-contact voltage sensors and corona discharge guns 有权使用非接触式电压传感器和电晕放电枪的系统和方法公开(公告)号：US07110238B1
公开(公告)日：2006-09-19
申请号：US11154991
申请日：2005-06-16
IPC分类号： H01H47/00
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译： 提供了一种用于校准非接触式电压传感器的功能的方法和系统。 该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。 反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。 提供包括第一电极和一个或多个导电棒的电晕枪。 在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。 另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。
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5.发明授权Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating films 有权用于测量电气厚度和确定绝缘膜氮含量的非接触式方法公开(公告)号：US07103484B1
公开(公告)日：2006-09-05
申请号：US10698222
申请日：2003-10-31
CPC分类号： G01N27/205 , G01R31/305 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Non-contact methods for determining a parameter of an insulating film are provided. One method includes measuring at least two surface voltages of the insulating film. The surface voltages are measured after different charge depositions. Measuring the surface voltages is performed in two or more sequences. The method also includes determining individual parameters for the two or more sequences from the surface voltages and the charge depositions. In addition, the method includes determining the parameter of the insulating film as an average of the individual parameters. The parameter is substantially independent of leakage in the insulating film. Another method includes determining a characteristic of nitrogen in an insulating film using two parameters of the insulating film selected from equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film. The characteristic may be a nitrogen dose, a nitrogen percentage, or a presence of nitrogen in the insulating film.
摘要翻译： 提供了用于确定绝缘膜的参数的非接触方法。 一种方法包括测量绝缘膜的至少两个表面电压。 在不同的电荷沉积之后测量表面电压。 以两个或更多个顺序进行表面电压的测量。 该方法还包括从表面电压和电荷沉积确定两个或多个序列的各个参数。 此外，该方法包括将绝缘膜的参数确定为各个参数的平均值。 该参数基本上与绝缘膜中的泄漏无关。 另一种方法包括使用选自等效氧化物厚度，光学厚度和通过绝缘膜的泄漏的测量的绝缘膜的两个参数来确定绝缘膜中的氮的特性。 该特性可以是绝缘膜中的氮剂量，氮百分比或氮的存在。
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