High-throughput HDP-CVD processes for advanced gapfill applications

    公开(公告)号:US20060154494A1

    公开(公告)日:2006-07-13

    申请号:US11031926

    申请日:2005-01-08

    申请人: Bo Qi Young Lee

    发明人: Bo Qi Young Lee

    IPC分类号: H01L21/469

    摘要: Methods are provided of depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A silicon-containing gas, an oxygen-containing gas, and a fluent gas are flowed into the substrate processing chamber. The fluent gas has an average molecular weight less than 5 amu. A first high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a first portion of the silicon oxide film over the substrate and within the gap with a first deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a first deposition/sputter ratio. A second high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a second portion of the silicon oxide film over the substrate and within the gap with a second deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a second deposition/sputter ratio. The second deposition/sputter ratio is less than the first deposition/sputter ratio. Each of the first and second deposition/sputter ratios is defined as a ratio of a sum of a net deposition rate and a blanket sputtering rate to the blanket sputtering rate.

    Anode for lithium metal polymer secondary battery comprising surface patterned anodic current collector and method of preparing the same
    43.
    发明申请
    Anode for lithium metal polymer secondary battery comprising surface patterned anodic current collector and method of preparing the same 失效
    包含表面图案化阳极集电器的锂金属聚合物二次电池用阳极及其制备方法

    公开(公告)号:US20060110661A1

    公开(公告)日:2006-05-25

    申请号:US11231238

    申请日:2005-09-19

    IPC分类号: H01M4/70 H01M4/80

    摘要: There are provided an anode for a lithium metal polymer secondary battery comprising an anodic current collector having a surface on which a plurality of recesses having a predetermined shape are formed and a method of preparing the same. The plurality of recesses are formed on a surface of the anodic current collector using a physical method or a chemical method. In a lithium metal polymer secondary battery employing the anode, oxidation/reduction of lithium and the formation of dendrite occur only in the recesses formed by surface patterning of the anodic current collector. Thus, expanding and shrinking of a battery due to a change in the thickness of the lithium anode can be prevented and cycling stability and the lifespan of a battery can be improved.

    摘要翻译: 提供了一种用于锂金属聚合物二次电池的阳极,其包括具有其上形成有多个具有预定形状的凹部的表面的阳极集电器及其制备方法。 使用物理方法或化学方法在阳极集电体的表面上形成多个凹部。 在使用阳极的锂金属聚合物二次电池中,锂的氧化/还原和枝晶的形成仅发生在通过阳极集电体的表面图案形成的凹部中。 因此,可以防止由于锂阳极的厚度变化引起的电池的膨胀和收缩,并且可以提高电池的循环稳定性和寿命。

    Electroactive solid-state actuator and method of manufacturing the same
    44.
    发明申请
    Electroactive solid-state actuator and method of manufacturing the same 失效
    电活性固态致动器及其制造方法

    公开(公告)号:US20060086596A1

    公开(公告)日:2006-04-27

    申请号:US11080294

    申请日:2005-03-15

    IPC分类号: H01H57/00

    CPC分类号: F03G7/00 Y10S310/80 Y10T29/42

    摘要: The present invention provides an electroactive solid-state actuator, including a solid polymer electrolyte film having first and second main surfaces facing each other, and first and second conductive polymer layers infiltrated into the first and second main surfaces of the solid polymer electrolyte film. Further, a method of manufacturing the electroactive solid-state actuator is provided, the method including preparing a solid polymer film having first and second main surfaces facing each other, infiltrating a monomer of a conductive polymer into the first and second main surfaces of the solid polymer film, followed by polymerization, to form first and second conductive polymer layers, and immersing the solid polymer film into an ionic liquid or liquid electrolyte to be converted to an electrically conductive polymer.

    摘要翻译: 本发明提供了一种电活性固态致动器,其包括具有彼此面对的第一和第二主表面的固体聚合物电解质膜以及浸入固体聚合物电解质膜的第一和第二主表面中的第一和第二导电聚合物层。 此外,提供了一种制造电活性固态致动器的方法,该方法包括制备具有彼此相对的第一和第二主表面的固体聚合物膜,将导电聚合物的单体浸入固体的第一和第二主表面 聚合物膜,然后聚合,以形成第一和第二导电聚合物层,并将固体聚合物膜浸入离子液体或液体电解质中以转化为导电聚合物。

    Notification of control information in wireless communication system
    45.
    发明申请
    Notification of control information in wireless communication system 有权
    在无线通信系统中通知控制信息

    公开(公告)号:US20050286483A1

    公开(公告)日:2005-12-29

    申请号:US11150317

    申请日:2005-06-10

    CPC分类号: H04W72/005 H04W48/12

    摘要: The present invention relates to notifying updated control information of a point-to-multipoint service in a wireless communications system. An indication about whether control channel information has been updated is transmitted and received during a time interval where data of the point-to multipoint service is not transmitted between a network and a mobile terminal. Furthermore, and indication about whether the control channel information has been updated is transmitted and received via a physical channel, to which a traffic channel is mapped. This allows the mobile terminal, which receives data of a specific point-to-multipoint service discontinuously, to effectively recognize whether the control channel information has been updated.

    摘要翻译: 本发明涉及在无线通信系统中通知点对多点业务的更新控制信息。 在网络和移动终端之间不发送点对多点服务的数据的时间间隔期间,发送和接收关于控制信道信息是否被更新的指示。 此外,通过物理信道来发送和接收关于控制信道信息是否被更新的指示,物理信道被映射到业务信道。 这允许不连续地接收特定点对多点服务的数据的移动终端有效地识别控制信道信息是否已被更新。

    Transmission of control information in wireless communication system
    47.
    发明申请
    Transmission of control information in wireless communication system 有权
    无线通信系统中控制信息的传输

    公开(公告)号:US20050249140A1

    公开(公告)日:2005-11-10

    申请号:US11109185

    申请日:2005-04-18

    摘要: The present invention relates to a method for indicating the validity of a channel configuration. Configuration information for establishing the reception of a physical channel carrying point-to-multipoint services is sent via a point-to-multipoint control channel to a mobile terminal. Validity information is sent together with the configuration information for indicating to the mobile terminal when or how long the configuration information is valid. The configuration information may be valid during a current modification period, after a given activation time, or up to a given activation time. Thus, a mobile terminal can avoid using an invalid physical channel configuration.

    摘要翻译: 本发明涉及一种用于指示信道配置的有效性的方法。 用于建立携带点对多点业务的物理信道的接收的配置信息经由点对多点控制信道被发送到移动终端。 将有效信息与用于指示的配置信息一起发送到移动终端,配置信息有效或多长时间有效。 配置信息可以在当前修改周期内,在给定的激活时间之后或者直到给定的激活时间有效。 因此,移动终端可以避免使用无效的物理信道配置。

    Apparatus for detecting touched-position using surface acoustic wave
    49.
    发明申请
    Apparatus for detecting touched-position using surface acoustic wave 审中-公开
    使用表面声波检测触摸位置的装置

    公开(公告)号:US20050212775A1

    公开(公告)日:2005-09-29

    申请号:US10852430

    申请日:2004-05-25

    申请人: Young Lee

    发明人: Young Lee

    IPC分类号: G06F3/03 G09G5/00

    CPC分类号: G06F3/0436

    摘要: A touched-position detection device detects a touched position by measuring a propagation time of a SAW (Surface Acoustic Wave) signal generated on a touch panel. The touched-position detection device using the SAW signal includes: a touch panel; a controller for controlling signal generation and a signal generation time; an impulse signal generator for generating an impulse signal; a SAW generator for converting the impulse signal generated from the impulse signal generator into a SAW signal on the touch panel; a SAW sensor for detecting the SAW signal received via the touch panel's surface; a signal analyzer for classifying the SAW signal detected by the SAW sensor into a DW (Direct Surface Wave) signal and an RW (Reflected Surface Wave) signal according to the SAW signal intensity so as to identify the SAW signal, and measuring arrival times of the DW and RW signals upon receiving arrival times of the DW and RW signals and the signal control time of the controller; and a position calculator for calculating the touched positions x and y on the touch panel upon receiving the arrival times from the signal analyzer.

    摘要翻译: 触摸位置检测装置通过测量在触摸面板上产生的SAW(表面声波)信号的传播时间来检测触摸位置。 使用SAW信号的触摸位置检测装置包括:触摸面板; 用于控制信号产生和信号产生时间的控制器; 用于产生脉冲信号的脉冲信号发生器; SAW发生器,用于将从脉冲信号发生器产生的脉冲信号转换成触摸面板上的SAW信号; 用于检测经由触摸面板的表面接收的SAW信号的SAW传感器; 信号分析器,用于根据SAW信号强度将由SAW传感器检测的SAW信号分类为DW(直接表面波)信号和RW(反射表面波)信号),以识别SAW信号,并且测量到 DW和RW信号在DW和RW信号的到达时间和控制器的信号控制时间之间; 以及位置计算器,用于在从信号分析器接收到到达时间时计算触摸面板上的触摸位置x和y。