摘要:
Methods are provided of depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A silicon-containing gas, an oxygen-containing gas, and a fluent gas are flowed into the substrate processing chamber. The fluent gas has an average molecular weight less than 5 amu. A first high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a first portion of the silicon oxide film over the substrate and within the gap with a first deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a first deposition/sputter ratio. A second high-density plasma is formed from the silicon-containing gas, the oxygen-containing gas, and the fluent gas to deposit a second portion of the silicon oxide film over the substrate and within the gap with a second deposition process that has simultaneous deposition and sputtering components having relative contributions defined by a second deposition/sputter ratio. The second deposition/sputter ratio is less than the first deposition/sputter ratio. Each of the first and second deposition/sputter ratios is defined as a ratio of a sum of a net deposition rate and a blanket sputtering rate to the blanket sputtering rate.
摘要:
A printed circuit board (PCB) having a three-dimensional spiral inductor, which includes a plurality of insulating layers and conductor layers. The PCB comprises a plurality of coil conductor patterns made of conductive material and shaped into strips, which is provided on the plurality of conductor layers, respectively, such that the plurality of coil conductor patterns are parallel to each other and positioned on the same plane perpendicular to the conductor layers, and in which each of the plurality of coil conductor patterns is longer than an adjacent inner coil conductor pattern.
摘要:
There are provided an anode for a lithium metal polymer secondary battery comprising an anodic current collector having a surface on which a plurality of recesses having a predetermined shape are formed and a method of preparing the same. The plurality of recesses are formed on a surface of the anodic current collector using a physical method or a chemical method. In a lithium metal polymer secondary battery employing the anode, oxidation/reduction of lithium and the formation of dendrite occur only in the recesses formed by surface patterning of the anodic current collector. Thus, expanding and shrinking of a battery due to a change in the thickness of the lithium anode can be prevented and cycling stability and the lifespan of a battery can be improved.
摘要:
The present invention provides an electroactive solid-state actuator, including a solid polymer electrolyte film having first and second main surfaces facing each other, and first and second conductive polymer layers infiltrated into the first and second main surfaces of the solid polymer electrolyte film. Further, a method of manufacturing the electroactive solid-state actuator is provided, the method including preparing a solid polymer film having first and second main surfaces facing each other, infiltrating a monomer of a conductive polymer into the first and second main surfaces of the solid polymer film, followed by polymerization, to form first and second conductive polymer layers, and immersing the solid polymer film into an ionic liquid or liquid electrolyte to be converted to an electrically conductive polymer.
摘要:
The present invention relates to notifying updated control information of a point-to-multipoint service in a wireless communications system. An indication about whether control channel information has been updated is transmitted and received during a time interval where data of the point-to multipoint service is not transmitted between a network and a mobile terminal. Furthermore, and indication about whether the control channel information has been updated is transmitted and received via a physical channel, to which a traffic channel is mapped. This allows the mobile terminal, which receives data of a specific point-to-multipoint service discontinuously, to effectively recognize whether the control channel information has been updated.
摘要:
The present invention provides a flat fluorescent lamp. The flat fluorescent lamp comprises a single plate. Consequently, the flat fluorescent lamp is structurally safe, brightness of the flat fluorescent lamp is high, and efficiency of the flat fluorescent lamp is also high without the provision of other additional optical components. The present invention also provides a method of manufacturing such a flat fluorescent lamp.
摘要:
The present invention relates to a method for indicating the validity of a channel configuration. Configuration information for establishing the reception of a physical channel carrying point-to-multipoint services is sent via a point-to-multipoint control channel to a mobile terminal. Validity information is sent together with the configuration information for indicating to the mobile terminal when or how long the configuration information is valid. The configuration information may be valid during a current modification period, after a given activation time, or up to a given activation time. Thus, a mobile terminal can avoid using an invalid physical channel configuration.
摘要:
The present invention relates to nucleoside derivatives represented by general formulas I and II, their synthetic methods and their pharmacologically acceptable salts thereof, and compositions containing such compounds. Methods for treating hyperproliferative disorders by administering the compounds are also included.
摘要:
A touched-position detection device detects a touched position by measuring a propagation time of a SAW (Surface Acoustic Wave) signal generated on a touch panel. The touched-position detection device using the SAW signal includes: a touch panel; a controller for controlling signal generation and a signal generation time; an impulse signal generator for generating an impulse signal; a SAW generator for converting the impulse signal generated from the impulse signal generator into a SAW signal on the touch panel; a SAW sensor for detecting the SAW signal received via the touch panel's surface; a signal analyzer for classifying the SAW signal detected by the SAW sensor into a DW (Direct Surface Wave) signal and an RW (Reflected Surface Wave) signal according to the SAW signal intensity so as to identify the SAW signal, and measuring arrival times of the DW and RW signals upon receiving arrival times of the DW and RW signals and the signal control time of the controller; and a position calculator for calculating the touched positions x and y on the touch panel upon receiving the arrival times from the signal analyzer.
摘要:
The invention relates to a landfill structure and a method for operating the same and, more particularly, to a landfill structure using a concept of multi-layered reactors, a method for making efficient use of landfill gas generated from the landfill, a method for early stabilizing the landfill and a method for reducing environmental contaminants generated from the landfill.