Doubly-clamped bean quartz micro-resonator
    44.
    发明授权
    Doubly-clamped bean quartz micro-resonator 有权
    双夹紧豆石英微谐振器

    公开(公告)号:US09061886B1

    公开(公告)日:2015-06-23

    申请号:US13840160

    申请日:2013-03-15

    Abstract: A resonator includes a base substrate with anchor pads, and a quartz resonator device including a resonant microbridge with an electrode, a first flexure beam connected to an end of the microbridge, a second flexure beam connected to a second end of the microbridge, a first and second spring connected between the first flexure beam and first and second anchor mounts, respectively, a third and fourth spring connected between the second flexure beam and third and fourth anchor mounts, respectively, the anchor mounts connected to anchor pads on the base substrate. A single crystal quartz includes the microbridge, the flexure beams, the springs, and the anchor mounts. The flexure beams and the springs prevent buildup of stress in the microbridge.

    Abstract translation: 谐振器包括具有锚定垫的基底衬底和包括具有电极的谐振微桥的石英谐振器装置,连接到微桥的端部的第一挠曲梁,连接到微桥的第二端的第二挠曲梁,第一 以及第二弹簧,分别连接在第一弯曲梁和第一和第二锚定安装件之间,第三和第四弹簧分别连接在第二弯曲梁和第三和第四锚固装置之间,锚固装置分别连接到基底基板上的锚定垫。 单晶石英包括微桥,挠曲梁,弹簧和锚固安装座。 弯曲梁和弹簧防止在微桥中产生应力。

Patent Agency Ranking