公开(公告)号：US08240204B2

公开(公告)日：2012-08-14

申请号：US12407424

申请日：2009-03-19

申请人： Masahiro Kanai ,  Asami Kobayashi ,  Naoki Yoshida

发明人： Masahiro Kanai ,  Asami Kobayashi ,  Naoki Yoshida

IPC分类号： G01P9/00 ,  G01C19/00

CPC分类号： G01C19/56 ,  G01P15/097

摘要： A synchronous detection circuit includes: an offset compensation circuit which generates an offset compensation voltage to compensate an offset voltage superposed on a direct current voltage signal; and a temperature compensation circuit which generates a temperature compensation voltage to compensate variation of a direct current reference voltage that depends on a temperature in a signal path of a sensing circuit. In the circuit, the synchronous detection circuit synchronously detects an alternating current signal, the offset compensation voltage and the temperature compensation voltage are respectively superposed on the alternating current signal which is input into the synchronous detection circuit, and the synchronous detection circuit synchronously detects the alternating current signal on which the offset compensation voltage and the temperature compensation voltage have been superposed.

摘要翻译： 一种同步检测电路包括：偏移补偿电路，产生偏移补偿电压以补偿叠加在直流电压信号上的偏移电压; 以及温度补偿电路，其生成温度补偿电压，以补偿依赖于感测电路的信号路径中的温度的直流参考电压的变化。 在该电路中，同步检测电路同步检测交流信号，偏移补偿电压和温度补偿电压分别叠加在输入到同步检测电路的交流信号上，同步检测电路同步检测交替 偏移补偿电压和温度补偿电压叠加的电流信号。

公开(公告)号：US07868623B2

公开(公告)日：2011-01-11

申请号：US12155383

申请日：2008-06-03

申请人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

发明人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

IPC分类号： G01R31/02 ,  G01P15/10

CPC分类号： G01P15/08 ,  G01C19/56 ,  G01C19/5649 ,  G01D3/02 ,  G01D18/00 ,  H03F3/45475 ,  H03F2200/261 ,  H03F2203/45138 ,  H03F2203/45526 ,  H03F2203/45616

摘要： A detection circuit includes a detection terminal to which an alternating current signal from a physical quantity transducer is input, a detection current/voltage conversion amplifier circuit that converts the alternating current signal input through the detection terminal into a voltage signal, an evaluation terminal that supplies an evaluation voltage signal to the detection current/voltage conversion amplifier circuit, an input resistor that has a given resistance ratio with respect to a feedback resistor; and a switch circuit of the detection circuit provided in a signal path that connects the evaluation terminal and an input node of the detection current/voltage conversion amplifier circuit.

摘要翻译： 检测电路包括：输入来自物理量换能器的交流信号的检测端子;将通过检测端子输入的交流信号转换为电压信号的检测电流/电压转换放大电路;供给 对检测电流/电压转换放大器电路的评估电压信号，相对于反馈电阻具有给定电阻比的输入电阻; 以及检测电路的开关电路，设置在连接评估终端和检测电流/电压转换放大器电路的输入节点的信号路径中。

公开(公告)号：US07849746B2

公开(公告)日：2010-12-14

申请号：US11984977

申请日：2007-11-26

申请人： Masahiro Kanai ,  Naoki Yoshida ,  Eitaro Otsuka

发明人： Masahiro Kanai ,  Naoki Yoshida ,  Eitaro Otsuka

IPC分类号： G01N29/036 ,  H03L1/00 ,  G01H13/00 ,  G01P1/04

CPC分类号： G01P15/097 ,  G01C19/56 ,  G01C19/5649 ,  H03B5/364 ,  H03B2200/0094

摘要： A driver device that forms an oscillation loop with a vibrator and causes the vibrator to produce driving vibrations includes a current-voltage converter that is provided in the oscillation loop and converts a current that flows through the vibrator into a voltage, and a GCA as a comparator that is provided in the oscillation loop and outputs a signal corresponding to a comparison result between an output from the current-voltage converter and a given voltage. The GCA outputs a first high-level voltage or a low-level voltage during oscillation startup, and outputs a second high-level voltage or the low-level voltage in a steady oscillation state. The first high-level voltage is a voltage higher in potential than the second high-level voltage.

摘要翻译： 用振动器形成振荡回路并使振动器产生驱动振动的驱动器装置包括设置在振荡回路中的电流 - 电压转换器，并将流过振动器的电流转换为电压，将GCA转换为 比较器，其设置在振荡回路中，并输出与电流 - 电压转换器的输出与给定电压之间的比较结果相对应的信号。 GCA在振荡启动期间输出第一高电平或低电平，并在稳定振荡状态下输出第二高电平或低电平电压。 第一高电平电压是电位高于第二高电平的电压。

公开(公告)号：US07808334B2

公开(公告)日：2010-10-05

申请号：US12177607

申请日：2008-07-22

申请人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

发明人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

IPC分类号： H03L5/00 ,  H03B5/36 ,  G01P15/09

CPC分类号： G01F1/8431 ,  G01F1/8422

摘要： An oscillation driver circuit that drives a physical quantity transducer includes a one-input/two-output comparator. The one-input/two-output comparator includes a shared differential section that compares a voltage signal input from a drive current/voltage conversion amplifier circuit with a given voltage, a first output section that receives a signal output from the differential section, variably adjusts a voltage amplitude of the received signal, and outputs the resulting signal, and a second output section that receives the signal output from the differential section, and outputs a synchronous detection reference signal of which the voltage amplitude is fixed.

摘要翻译： 驱动物理量传感器的振荡驱动器电路包括一个输入/双输出比较器。 单输入/双输出比较器包括共用差分部分，其将从驱动电流/电压转换放大器电路输入的电压信号与给定电压进行比较，接收从差分部分输出的信号的第一输出部分可变地调整 接收信号的电压振幅，并输出结果信号;以及第二输出部，其接收从差分部输出的信号，并输出电压幅度固定的同步检波基准信号。

公开(公告)号：US07587989B2

公开(公告)日：2009-09-15

申请号：US10755300

申请日：2004-01-13

申请人： Yukito Aota ,  Masahiro Kanai

发明人： Yukito Aota ,  Masahiro Kanai

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H05B31/26

CPC分类号： H01J37/32532 ,  C23C16/515

摘要： In a plasma processing method, on a back side of a cathode electrode is provided at least one conductor plate d.c. potentially insulated from the cathode electrode and an opposing electrode, and the cathode electrode and the conductor plate are enclosed with a shielding wall such that a ratio of an inter-electrode coupling capacitance provided by the cathode electrode and the opposing electrode to a coupling capacitance provided by the cathode electrode and a bottom surface of the shielding wall on the back side of the conductor plate is not less than a predetermined value. Thereby, a high-quality, high-speed plasma processing is realized.

摘要翻译： 在等离子体处理方法中，在阴极电极的背面设置有至少一个导体板d.c. 可能与阴极电极和对置电极绝缘，并且阴极电极和导体板被屏蔽壁包围，使得由阴极电极和相对电极提供的电极间耦合电容与提供的耦合电容的比率 通过阴极电极和导体板背侧的屏蔽壁的底面不小于预定值。 由此，实现了高质量的高速等离子体处理。

公开(公告)号：US20090084500A1

公开(公告)日：2009-04-02

申请号：US12326238

申请日：2008-12-02

申请人： Tadashi Sawayama ,  Yasushi Fujioka ,  Masahiro Kanai ,  Shotaro Okabe ,  Yuzo Kohda ,  Tadashi Hori ,  Koichiro Moriyama ,  Hiroyuki Ozaki ,  Yukito Aota ,  Atsushi Koike ,  Mitsuyuki Niwa ,  Yasuyoshi Takai ,  Hidetoshi Tsuzuki

发明人： Tadashi Sawayama ,  Yasushi Fujioka ,  Masahiro Kanai ,  Shotaro Okabe ,  Yuzo Kohda ,  Tadashi Hori ,  Koichiro Moriyama ,  Hiroyuki Ozaki ,  Yukito Aota ,  Atsushi Koike ,  Mitsuyuki Niwa ,  Yasuyoshi Takai ,  Hidetoshi Tsuzuki

IPC分类号： C23F1/08 ,  C23C16/00 ,  C23C14/34

CPC分类号： H01L21/67017 ,  C23C16/24 ,  C23C16/4412 ,  C23C16/545 ,  H01J37/3244 ,  H01J37/32834 ,  H01J37/32844 ,  Y02C20/30 ,  Y02P70/605

摘要： There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

摘要翻译： 公开了一种处理衬底或膜的处理装置的废气处理过程，其包括在处理基板或膜之后，将未反应的气体和/或副产物引入陷阱装置， 由包含钨，钼和铼中的至少一种作为主要成分的高熔点金属材料构成的长丝; 以及处理陷阱装置内的未反应气体和/或副产物。 这使得可以防止排气电导降低，延长加工设备的维护周期，并且提供高质量的产品（经处理的基板或膜）。

公开(公告)号：US20090013785A1

公开(公告)日：2009-01-15

申请号：US12155383

申请日：2008-06-03

申请人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

发明人： Naoki Yoshida ,  Masahiro Kanai ,  Eitaro Otsuka

IPC分类号： G01P15/00

CPC分类号： G01P15/08 ,  G01C19/56 ,  G01C19/5649 ,  G01D3/02 ,  G01D18/00 ,  H03F3/45475 ,  H03F2200/261 ,  H03F2203/45138 ,  H03F2203/45526 ,  H03F2203/45616

摘要： A detection circuit includes a detection terminal to which an alternating current signal from a physical quantity transducer is input, a detection current/voltage conversion amplifier circuit that converts the alternating current signal input through the detection terminal into a voltage signal, an evaluation terminal that supplies an evaluation voltage signal to the detection current/voltage conversion amplifier circuit, an input resistor that has a given resistance ratio with respect to a feedback resistor; and a switch circuit of the detection circuit provided in a signal path that connects the evaluation terminal and an input node of the detection current/voltage conversion amplifier circuit.

摘要翻译： 检测电路包括：输入来自物理量换能器的交流信号的检测端子;将通过检测端子输入的交流信号转换为电压信号的检测电流/电压转换放大电路;供给 对检测电流/电压转换放大器电路的评估电压信号，相对于反馈电阻具有给定电阻比的输入电阻; 以及检测电路的开关电路，设置在连接评估终端和检测电流/电压转换放大器电路的输入节点的信号路径中。

公开(公告)号：US07324146B2

公开(公告)日：2008-01-29

申请号：US10763126

申请日：2004-01-22

申请人： Masahiro Kanai

发明人： Masahiro Kanai

IPC分类号： H04N3/14 ,  H04N5/335 ,  H01L27/00

CPC分类号： G01V8/20

摘要： An image processing device and method are provided. In a method of reading an image signal from a solid-state image-pickup element where a plurality of unit pixels including a transistor for detecting a light signal and a photo diode are arranged in a matrix, shift data applied to a line for reading out an image signal, which outputs a signal for selecting a line for reading out an image signal, is output to a shift register connected to a line for reading out an image signal, when the number of lines between line for reading out an image signal and line for clearing an image signal are equal to or less than the number of lines in the matrix and the condition for picking an image up is changed.

摘要翻译： 提供了图像处理装置和方法。 在从固态图像拾取元件读取图像信号的方法中，其中包括用于检测光信号的晶体管和光电二极管的多个单位像素被布置在矩阵中，施加到用于读出的行的移位数据 输出用于选择用于读出图像信号的线的信号的图像信号，当用于读出图像信号的线和用于读出图像信号的行之间的行数被输出到连接到用于读出图像信号的线的移位寄存器 用于清除图像信号的行等于或小于矩阵中的行数，并且用于选择图像上升的条件被改变。

公开(公告)号：US20070169890A1

公开(公告)日：2007-07-26

申请号：US11694889

申请日：2007-03-30

申请人： TAKESHI SHISHIDO ,  Shotaro Okabe ,  Masahiro Kanai ,  Yuzo Koda ,  Yasuyoshi Takai ,  Tadashi Hori ,  Koichiro Moriyama ,  Hidetoshi Tsuzuki ,  Hiroyuki Ozaki

发明人： TAKESHI SHISHIDO ,  Shotaro Okabe ,  Masahiro Kanai ,  Yuzo Koda ,  Yasuyoshi Takai ,  Tadashi Hori ,  Koichiro Moriyama ,  Hidetoshi Tsuzuki ,  Hiroyuki Ozaki

IPC分类号： H01L21/306 ,  C23C16/00

CPC分类号： H01J37/32844 ,  C23C14/564 ,  C23C16/4412 ,  Y02C20/30 ,  Y02P70/605

摘要： A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are caused to chemically react without allowing plasma in the processing space to reach the chemical-reaction inducing means, thereby improving the processing ability of the chemical-reaction inducing means to process the unreacted gas or byproduct.

摘要翻译： 化学反应诱发装置设置在连接用于对衬底或膜进行等离子体处理的处理空间到排气装置的排气管线中，并且至少从处理空间排出的未反应气体或副产物发生化学反应 不允许处理空间中的等离子体到达化学反应诱导装置，从而提高化学反应诱导装置处理未反应气体或副产物的处理能力。

公开(公告)号：US07126203B2

公开(公告)日：2006-10-24

申请号：US11101448

申请日：2005-04-08

申请人： Masahiro Kanai

发明人： Masahiro Kanai

IPC分类号： H01L29/00

CPC分类号： H01L27/11568 ,  H01L27/0629 ,  H01L27/0805 ,  H01L27/105 ,  H01L27/11573 ,  H01L28/60 ,  H01L29/42324 ,  H01L29/7881

摘要： A semiconductor device having an isolation region formed in a semiconductor substrate and a capacitance device formed above that isolation region. The capacitance device has a first capacitor conductive layer disposed above the isolation region and a second capacitor conductive layer in the shape of a side wall formed along one side surface of the first capacitor conductive layer. The second capacitor conductive layer is disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed.

摘要翻译： 具有形成在半导体衬底中的隔离区域和形成在该隔离区域上方的电容器件的半导体器件。 电容元件具有配置在隔离区域上方的第一电容器导电层和沿着第一电容器导电层的一个侧面形成的侧壁形状的第二电容器导电层。 第二电容器导电层被设置为面对第一电容器导电层，其中插入有第一电容器绝缘层。