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公开(公告)号：US09510107B2
公开(公告)日：2016-11-29
申请号：US14198657
申请日：2014-03-06
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Marina Fekry Megally Bastarous
CPC classification number: H04R19/04 , B81B2201/0257 , B81C1/00182 , H01L2224/16145 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R2201/003 , H01L2924/00014
Abstract: A sensor structure may include a first suspended structure and a second suspended structure disposed from the first suspended structure to form a volume. The first suspended structure and the second suspended structure may be arranged relative to each other such that a received pressure wave entering the volume between the first suspended structure and the second suspended structure generates a displacement of the first suspended structure to a first direction and a displacement of the second suspended structure to a second direction different from the first direction and the displacement may generate a measurable signal.
Abstract translation: 传感器结构可以包括第一悬挂结构和从第一悬挂结构设置以形成体积的第二悬挂结构。 第一悬挂结构和第二悬挂结构可以相对于彼此布置，使得进入第一悬挂结构和第二悬置结构之间的体积的接收压力波产生第一悬挂结构朝向第一方向的位移和位移 的第二悬挂结构的第二方向与第一方向不同，并且位移可以产生可测量的信号。
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公开(公告)号：US20160340173A1
公开(公告)日：2016-11-24
申请号：US14717556
申请日：2015-05-20
Applicant: Infineon Technologies AG
Inventor： Wolfgang Klein , Martin Wurzer , Stefan Barzen , Alfons Dehe
CPC classification number: B81B3/007 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81B2203/0315 , B81B2203/0353 , B81C1/00658 , H04R19/005 , H04R19/04 , H04R31/006 , H04R2201/003
Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a first electrode, a second electrode fixed to an anchor at a perimeter of the second electrode, and a mechanical support separate from the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode. The mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical structure and the perimeter of the second electrode.
Abstract translation: 根据实施例，微机电系统（MEMS）换能器包括第一电极，固定到第二电极的周边处的锚固件的第二电极以及与第二电极的周边处的锚固件分离的机械支撑件，并机械连接 到第一电极和第二电极。 机械支撑件固定到第二电极的一部分，使得在操作期间，第二电极的最大偏转发生在机械结构和第二电极的周边之间。
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公开(公告)号：US20150276529A1
公开(公告)日：2015-10-01
申请号：US14231068
申请日：2014-03-31
Applicant: INFINEON TECHNOLOGIES AG
Inventor： Andreas Wiesbauer , Alfons Dehe
CPC classification number: G01L9/0073 , B81B3/0021 , B81B2201/0264 , G01L9/0042 , G01L9/0052 , G01L9/0072 , G01L9/0082 , G01L9/08 , G01L9/085 , H04R1/08 , H04R2201/003
Abstract: According to various embodiments, a dynamic pressure sensor includes a substrate, a reference volume formed in the substrate, a deflectable membrane sealing the reference volume, a deflection sensing element coupled to the membrane and configured to measure a deflection of the membrane, and a ventilation hole configured to equalize an absolute pressure inside the reference volume with an absolute ambient pressure outside the reference volume.
Abstract translation: 根据各种实施例，动态压力传感器包括衬底，形成在衬底中的参考体积，密封参考体积的可偏转膜，耦合到膜并被配置成测量膜偏转的偏转感测元件，以及通气 孔被配置为使参考体积内的绝对压力与参考体积外的绝对环境压力相等。
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公开(公告)号：US20150256940A1
公开(公告)日：2015-09-10
申请号：US14198657
申请日：2014-03-06
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Marina Fekry Megally Bastarous
IPC: H04R23/00
CPC classification number: H04R19/04 , B81B2201/0257 , B81C1/00182 , H01L2224/16145 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R2201/003 , H01L2924/00014
Abstract: A sensor structure, is disclosed. The sensor structure may include a first suspended structure and a second suspended structure disposed from the first suspended structure to form a volume. The first suspended structure and the second suspended structure may be arranged relative to each other such that a received pressure wave entering the volume between the first suspended structure and the second suspended structure generates a displacement of the first suspended structure to a first direction and a displacement of the second suspended structure to a second direction different from the first direction and the displacement may generate a measurable signal.
Abstract translation: 公开了传感器结构。 传感器结构可以包括第一悬挂结构和从第一悬挂结构设置以形成体积的第二悬挂结构。 第一悬挂结构和第二悬挂结构可以相对于彼此布置，使得进入第一悬挂结构和第二悬置结构之间的体积的接收压力波产生第一悬挂结构朝向第一方向的位移和位移 的第二悬挂结构的第二方向与第一方向不同，并且位移可以产生可测量的信号。
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公开(公告)号：US20150251285A1
公开(公告)日：2015-09-10
申请号：US14198646
申请日：2014-03-06
Applicant: INFINEON TECHNOLOGIES AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
IPC: B23Q3/18
CPC classification number: B23Q3/18 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H04R7/18 , H04R17/00 , H04R19/005 , H04R31/003 , H04R2201/003 , H04R2307/207 , H04R2499/11
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
Abstract translation: 一种用于将膜固定到包括载体的载体的结构; 悬挂式结构; 以及具有圆形凹形的保持结构，其被构造成将悬挂结构固定到托架上，并且其中保持结构的锥形侧物理连接到悬挂结构。 还公开了一种在载体上形成保持结构以支撑悬挂结构的方法。 该方法可以包括：在载体上形成保持结构; 在所述保持结构上形成悬挂结构; 使保持结构成形为具有凹形; 并且将所述保持结构布置成使得所述保持结构的锥形侧物理地连接到所述悬挂结构。
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Patent Agency Ranking
46.发明授权公开(公告)号：US09024396B2
公开(公告)日：2015-05-05
申请号：US13941318
申请日：2013-07-12
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe
CPC classification number: B81B3/0021 , B81B3/0094 , B81B7/0016 , B81B2201/0257 , B81B2203/0127 , H01L2224/48137 , H01L2224/8592 , H01L2924/15151 , H01L2924/16152
Abstract: A device includes a support structure, a sound port disposed in the support structure, and a MEMS structure including a membrane acoustically coupled to the sound port. The membrane separates a first space contacting a first side of the membrane from a second space contacting an opposite second side of the membrane. The device further includes an adjustable ventilation path disposed in the support structure and extending from the sound port to the second space.
Abstract translation: 一种装置包括支撑结构，设置在支撑结构中的声音端口，以及包括声耦合到声音端口的膜的MEMS结构。 膜将与膜的第一侧接触的第一空间与接触膜的相对的第二侧的第二空间分离。 该装置还包括设置在支撑结构中并从声音端口延伸到第二空间的可调整的通风路径。
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47.发明授权MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer 有权具有聚合物层的MEMS器件，具有聚合物层的MEMS器件的系统，制备具有聚合物层的MEMS器件的方法公开(公告)号：US09006845B2
公开(公告)日：2015-04-14
申请号：US13743300
申请日：2013-01-16
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe
CPC classification number: B81C1/00325 , B81B3/0072 , B81B2201/0257 , B81C1/00158 , B81C1/00182 , B81C2201/013 , B81C2201/0159 , B81C2201/0198
Abstract: A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first polymer layer and a MEMS structure supported by the MEMS substrate. The MEMS device further includes a first opening disposed in the MEMS substrate and a second opening disposed in the first polymer layer.
Abstract translation: 示出了MEMS器件，制造MEMS器件的方法和MEMS器件的系统。 在一个实施例中，MEMS器件包括第一聚合物层，设置在第一聚合物层上的MEMS衬底和由MEMS衬底支撑的MEMS结构。 MEMS器件还包括设置在MEMS衬底中的第一开口和设置在第一聚合物层中的第二开口。
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48.发明申请MEMS Microphone with Low Pressure Region Between Diaphragm and Counter Electrode 有权MEMS麦克风在隔膜与对电极之间的低压区域公开(公告)号：US20150001647A1
公开(公告)日：2015-01-01
申请号：US13931584
申请日：2013-06-28
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Andreas Froemel
CPC classification number: H04R19/04 , B81B3/0021 , B81B3/0078 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H04R7/02 , H04R7/08 , H04R19/005 , H04R23/006 , H04R31/00 , H04R2201/003 , H04R2410/03
Abstract: A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.
Abstract translation: MEMS麦克风包括第一隔膜元件，对电极元件和第一隔膜元件与对电极元件之间的低压区域。 低压区域的压力小于环境压力。
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公开(公告)号：US11275059B2
公开(公告)日：2022-03-15
申请号：US16699993
申请日：2019-12-02
Applicant: Infineon Technologies AG
Inventor： Stefan Kolb , Alfons Dehe , Jochen Huber , Franz Jost , Horst Theuss , Juergen Woellenstein
Abstract: An apparatus for in-situ calibration of a photoacoustic sensor is provided. The apparatus includes a calibration unit that includes at least one processor configured to calculate calibration information. A light emitter of the photoacoustic sensor is configured to emit an electromagnetic spectrum and the photoacoustic sensor is configured to provide at least two measurement signals based on at least two electromagnetic spectra. The calibration unit is configured to compare the at least two measurement signals to obtain the calibration information and apply the calibration information to the photoacoustic sensor to perform the in-situ calibration.
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公开(公告)号：US11053117B2
公开(公告)日：2021-07-06
申请号：US16821145
申请日：2020-03-17
Applicant: Infineon Technologies AG
Inventor： Marc Fueldner , Stefan Barzen , Alfons Dehe , Gunar Lorenz
Abstract: In accordance with one exemplary embodiment, a production method for a double-membrane MEMS component comprises the following steps: providing a layer arrangement on a carrier substrate, wherein the layer arrangement has a first and second membrane structure spaced apart from one another and a counterelectrode structure arranged therebetween, wherein a sacrificial material is arranged in an intermediate region between the counterelectrode structure and the first and second membrane structures respectively spaced apart therefrom, and wherein the first membrane structure has an opening structure to the intermediate region with the sacrificial material and partly removing the sacrificial material from the intermediate region in order to obtain a mechanical connection structure comprising the sacrificial material between the first and second membrane structures, which mechanical connection structure is mechanically coupled between the first and second membrane structures and is mechanically decoupled from the counterelectrode structure.
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