公开(公告)号：US08770030B2

公开(公告)日：2014-07-08

申请号：US13089513

申请日：2011-04-19

Applicant: James D. Huffman ,  Gary A. Kneezel

Inventor： James D. Huffman ,  Gary A. Kneezel

IPC: G01N29/04

CPC classification number: G01N29/245 ,  G01N2291/0427

Abstract: An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate.

Abstract translation: 超声波发射器和接收器包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。

公开(公告)号：US08759990B2

公开(公告)日：2014-06-24

申请号：US13089507

申请日：2011-04-19

Applicant: James D. Huffman ,  Gary A. Kneezel

Inventor： James D. Huffman ,  Gary A. Kneezel

IPC: F02B63/04

CPC classification number: H02N2/186 ,  H01L41/1138

Abstract: An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.

Abstract translation: 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上，第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 柔性构件被配置成通过相对于能量收集装置在外部产生的激励而被设置成振荡。

公开(公告)号：US08652765B2

公开(公告)日：2014-02-18

申请号：US13170734

申请日：2011-06-28

Applicant: Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

Inventor： Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

IPC: G03F1/00

CPC classification number: B41J2/1603 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2002/14467 ,  B41J2202/03 ,  B81B2201/058 ,  B81C1/0038 ,  G03F7/038 ,  G03F7/0751 ,  G03F7/11

Abstract: A method for making a microfluidic device, the method includes providing at least one inorganic layer on a substrate; applying an alkoxysilane material containing a primary or secondary amine on the at least one inorganic layer; baking the applied alkoxysilane material at a temperature greater than 130 degrees C.; applying an epoxy material to form an epoxy layer, wherein the applied alkoxysilane material is disposed at an interface between the epoxy layer and the at least one inorganic layer; and patterning the epoxy layer to provide a wall for defining a location for a fluid in the microfluidic device.

Abstract translation: 一种制造微流体装置的方法，所述方法包括在基底上提供至少一个无机层; 在至少一个无机层上涂覆含有伯胺或仲胺的烷氧基硅烷材料; 在高于130℃的温度下烘烤涂覆的烷氧基硅烷材料; 施加环氧树脂材料以形成环氧树脂层，其中施加的烷氧基硅烷材料设置在环氧树脂层和至少一个无机层之间的界面处; 并且图案化环氧树脂层以提供用于限定微流体装置中的流体的位置的壁。

公开(公告)号：US20120268531A1

公开(公告)日：2012-10-25

申请号：US13089632

申请日：2011-04-19

Applicant: James A. Katerberg ,  James D. Huffman

Inventor： James A. Katerberg ,  James D. Huffman

IPC: B41J2/04

CPC classification number: B41J2/14 ,  B41J2002/14346 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: A method of ejecting a liquid includes providing a liquid dispenser including a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A diverter member is positioned on a wall of the liquid dispensing channel that includes the outlet opening. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A second portion of the MEMS transducing member extends into a portion of the liquid dispensing channel that is adjacent to the outlet opening and is free to move relative to the outlet opening. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane separates the MEMS transducing member from the liquid dispensing channel. A second portion of the compliant membrane is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel.

Abstract translation: 喷射液体的方法包括提供包括基底的液体分配器。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定了液体供应通道和液体返回通道。 分流器构件定位在包括出口开口的液体分配通道的壁上。 分流器构件包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到包括出口开口的液体分配通道的壁。 MEMS转换构件的第二部分延伸到液体分配通道的与出口开口相邻并且相对于出口开口自由移动的部分。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分将MEMS转换构件与液体分配通道分开。 柔性膜的第二部分被锚固到包括出口开口的液体分配通道的壁上。 从液体供应通道通过液体分配通道通过液体返回通道提供连续的液体流并返回到液体供应。 分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。

公开(公告)号：US20120268513A1

公开(公告)日：2012-10-25

申请号：US13089542

申请日：2011-04-19

Applicant: James D. Huffman ,  Christopher N. Delametter ,  David P. Trauernicht

Inventor： James D. Huffman ,  Christopher N. Delametter ,  David P. Trauernicht

IPC: B41J29/38 ,  B41J2/045

CPC classification number: B41J2/14427 ,  B41J2/14201 ,  B41J2/14282 ,  B41J2/14314

Abstract: A method of ejecting a drop of fluid includes providing a fluid ejector. The fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. The substrate includes a cavity and a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member, A second portion of the compliant membrane being anchored to the substrate. Walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. A quantity of fluid is supplied to the chamber through the fluidic feed. An electrical pulse is applied to the MEMS transducing member to eject a drop of fluid through the nozzle.

Abstract translation: 喷射液滴的方法包括提供流体喷射器。 流体喷射器包括基板，MEMS转换构件，柔性膜，壁和喷嘴。 衬底包括空腔和流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS转导构件。柔性膜的第二部分被锚固到基底上。 壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 通过流体进料将一定量的流体供应到腔室。 电脉冲被施加到MEMS转换构件以通过喷嘴喷射一滴液体。

公开(公告)号：US20120069099A1

公开(公告)日：2012-03-22

申请号：US12883215

申请日：2010-09-16

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: B41J2/045 ,  H01L41/047

CPC classification number: H01L41/0933 ,  B41J2/03 ,  B41J2/14201 ,  B41J2/14282 ,  B41J2002/031 ,  B41J2002/033 ,  H01L41/094 ,  H01L41/0973

Abstract: A transducer including a dielectric material; a metal layer configured in a predetermined pattern having at least two electrodes; and a piezoelectric layer disposed underlying, between and overlying at least a portion of the metal layer and a portion of which abuts the dielectric material.

Abstract translation: 包括电介质材料的换能器; 配置成具有至少两个电极的预定图案的金属层; 以及压电层，其设置在金属层的至少一部分之上并且覆盖其中的一部分，并且其一部分邻接电介质材料。

公开(公告)号：US08093688B2

公开(公告)日：2012-01-10

申请号：US12575629

申请日：2009-10-08

Applicant: David A. Rothenbury ,  James D. Huffman

Inventor： David A. Rothenbury ,  James D. Huffman

IPC: H01L29/06

CPC classification number: B81C1/00095 ,  B81B2201/042 ,  B81B2207/07

Abstract: Device comprising an ohmic via contact, and method of fabricating thereof. A preferred embodiment comprises forming a metal layer over a substrate, forming a conductive barrier layer over the metal layer, depositing an insulating layer over the conductive barrier layer, creating an opening in the insulating layer to expose the conductive barrier layer, and forming a via contact in the opening. The conductive barrier layer protects the metal layer by preventing the formation of an oxide layer, which could reduce conductivity.

Abstract translation: 包含欧姆通孔接点的装置及其制造方法。 优选实施例包括在衬底上形成金属层，在金属层上形成导电阻挡层，在导电阻挡层上沉积绝缘层，在绝缘层中形成露出导电阻挡层的开口，以及形成通孔 接触在开幕。 导电阻挡层通过防止形成可能降低导电性的氧化物层来保护金属层。

公开(公告)号：US07973999B2

公开(公告)日：2011-07-05

申请号：US12366809

申请日：2009-02-06

Applicant: Jianbai Wang ,  James D. Huffman ,  Paulo Pinheiro

Inventor： Jianbai Wang ,  James D. Huffman ,  Paulo Pinheiro

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G09G3/346 ,  G09G2300/0408 ,  G09G2310/0289 ,  G09G2310/061

Abstract: In accordance with particular embodiments, a system for displaying modulated light includes a spatial light modulator comprising a plurality of micromirrors having a pixel pitch less than 17 micrometers. The system also includes an intermediate voltage generator operable to generate a negative voltage and a positive voltage. The system further includes at least two level shifters coupled to the intermediate voltage generator. The system additionally includes a reset driver coupled to the at least two level shifters and to at least a subset of the plurality of micromirrors. The reset driver is operable to drive the subset of the micromirrors. The spatial light modulator, the intermediate voltage generator, the at least two level shifters, and the reset driver are all incorporated on a common substrate.

Abstract translation: 根据具体实施例，用于显示调制光的系统包括空间光调制器，其包括具有小于17微米的像素间距的多个微镜。 该系统还包括可操作以产生负电压和正电压的中间电压发生器。 该系统还包括耦合到中间电压发生器的至少两个电平移位器。 该系统还包括耦合到至少两个电平移位器和多个微镜的至少一个子集的复位驱动器。 复位驱动器可操作以驱动微镜子集。 空间光调制器，中间电压发生器，至少两个电平移位器和复位驱动器都被并入公共基板。

公开(公告)号：US07654677B2

公开(公告)日：2010-02-02

申请号：US11834583

申请日：2007-08-06

Applicant: Anthony DiCarlo ,  Patrick I. Oden ,  Richard L. Knipe ,  Rabah Mezenner ,  James D. Huffman

Inventor： Anthony DiCarlo ,  Patrick I. Oden ,  Richard L. Knipe ,  Rabah Mezenner ,  James D. Huffman

IPC: G02B26/08 ,  G02B28/00

CPC classification number: B81B3/0035 ,  G02B26/0841 ,  Y10T428/22

Abstract: A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of three operating layers 12, 13, 14. An addressing layer 12 is fabricated on the substrate. A hinge layer 13 is spaced above the addressing layer 12 by an air gap. A mirror layer 14 is spaced over the hinge layer 13 by a second air gap. The hinge layer 13 has a hinge 13a under and attached to the mirror 14a, the hinge 13a permitting the mirror 14a to tilt. The hinge layer 13 further has spring tips 13c under the mirror 14a, which are attached to the addressing layer 12. These spring tips 13c provide a stationary landing surface for the mirror 14a.

Abstract translation: 制造在半导体衬底11上的微镜阵列110.阵列110由三个工作层12,13,14组成。寻址层12被制造在衬底上。 铰链层13通过气隙在寻址层12上方间隔开。 镜层14通过第二气隙在铰链层13上间隔开。 铰链层13在反射镜14a的下方并具有铰链13a，铰链13a允许反射镜14a倾斜。 铰链层13还具有安装在寻址层12下方的反射镜14a下面的弹簧尖端13c。这些弹簧顶端13c为反射镜14a提供固定的着陆面。

公开(公告)号：US20090231932A1

公开(公告)日：2009-09-17

申请号：US12472913

申请日：2009-05-27

Applicant: James D. Huffman ,  James Norman Hall

Inventor： James D. Huffman ,  James Norman Hall

IPC: G11C7/00

CPC classification number: G11C11/412 ,  H01L27/1104 ,  H01L29/1045 ,  H01L29/42368 ,  H01L29/7835 ,  H01L2924/0002 ,  H04N5/7458 ,  H04N2005/7466 ,  H01L2924/00

Abstract: A method of operating a semiconductor device, a semiconductor device and a digital micromirror system are presented. In an embodiment, the semiconductor device comprises a grounded substrate, a memory array, and a reset driver. The memory array may be isolated from the grounded substrate with a buried layer. The set of voltages of the memory array may be shifted with respect to a reset voltage. The reset driver may drive the reset voltage and the reset driver may have at least one extended drain transistor in the grounded substrate.

Abstract translation: 提出了一种操作半导体器件，半导体器件和数字微镜系统的方法。 在一个实施例中，半导体器件包括接地衬底，存储器阵列和复位驱动器。 存储器阵列可以与具有掩埋层的接地衬底隔离。 存储器阵列的电压组可以相对于复位电压移动。 复位驱动器可以驱动复位电压，并且复位驱动器可以在接地的基板中具有至少一个延伸的漏极晶体管。