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公开(公告)号：US09525121B2
公开(公告)日：2016-12-20
申请号：US13436400
申请日：2012-03-30
IPC分类号： H01L41/00 , H01L41/08 , H01L41/09 , H01L41/316 , H01L41/332 , H02N1/08
CPC分类号： B06B1/0292 , H01L41/0815 , H01L41/0973 , H01L41/316 , H01L41/332 , H02N1/006 , H02N1/08 , Y10T29/42
摘要： An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
摘要翻译： 机电换能器包括第一电极; 设置在所述第一电极上的氧化硅膜; 以及振动膜，其包括设置在氧化硅膜上的氮化硅膜，其间具有空间，并且设置在氮化硅膜上以与第一电极相对的第二电极。
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公开(公告)号：US08760035B2
公开(公告)日：2014-06-24
申请号：US13436336
申请日：2012-03-30
IPC分类号： H01L41/047
CPC分类号： H04R1/00 , B06B1/0292 , B81B2201/0271 , B81B2203/04 , B81C1/00626 , H04R2201/003
摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。
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公开(公告)号：US20130071964A1
公开(公告)日：2013-03-21
申请号：US13610219
申请日：2012-09-11
申请人： Ayako Kato , Kazutoshi Torashima
发明人： Ayako Kato , Kazutoshi Torashima
IPC分类号： H01L21/02
CPC分类号： B06B1/0292 , B81B3/0075 , B81B2201/0221 , B81B2203/0127 , B81B2203/0315 , B81B2203/0392 , H04R19/005 , H04R31/00
摘要： Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer is formed on a first substrate, a barrier wall is formed by removing a part of the first insulating layer, and a second insulating layer is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate on the barrier wall, and a vibration film that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion.
摘要翻译： 提供一种制造机电换能器的方法，其具有由绝缘层的平坦度的变化引起的击穿强度的变化减小。 在制造机电换能器的方法中，在第一基板上形成第一绝缘层，通过去除第一绝缘层的一部分形成阻挡壁，在第一基板的区域上形成第二绝缘层， 第一绝缘层的部分已被去除。 接下来，通过在阻挡壁上接合第二基板形成间隙，并且通过间隙形成与第二绝缘层相对的振动膜。 在形成阻挡壁时，与第一基板垂直的方向上的间隙侧的高度比中心部的高度低。
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公开(公告)号：US20120256520A1
公开(公告)日：2012-10-11
申请号：US13436400
申请日：2012-03-30
CPC分类号： B06B1/0292 , H01L41/0815 , H01L41/0973 , H01L41/316 , H01L41/332 , H02N1/006 , H02N1/08 , Y10T29/42
摘要： An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
摘要翻译： 机电换能器包括第一电极; 设置在所述第一电极上的氧化硅膜; 以及振动膜，其包括设置在氧化硅膜上的氮化硅膜，其间具有空间，并且设置在氮化硅膜上以与第一电极相对的第二电极。
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公开(公告)号：US20120256519A1
公开(公告)日：2012-10-11
申请号：US13436336
申请日：2012-03-30
CPC分类号： H04R1/00 , B06B1/0292 , B81B2201/0271 , B81B2203/04 , B81C1/00626 , H04R2201/003
摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。
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公开(公告)号：US20120256518A1
公开(公告)日：2012-10-11
申请号：US13434405
申请日：2012-03-29
CPC分类号： B06B1/0292
摘要： A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.
摘要翻译： 制造机电换能器的方法包括在第一电极上形成绝缘膜，在绝缘膜上形成牺牲层，在牺牲层上形成第一膜，在第一膜上形成第二电极，在第一膜上形成蚀刻孔 第一膜并通过蚀刻孔除去牺牲层，并在第二电极上形成第二膜，并密封蚀刻孔。 在一个操作中进行形成第二膜并密封蚀刻孔。
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公开(公告)号：US20120091543A1
公开(公告)日：2012-04-19
申请号：US13248440
申请日：2011-09-29
CPC分类号： B81C1/00158 , B06B1/0292
摘要： An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate.
摘要翻译： 机电换能器包括多个元件，每个元件包括至少一个蜂窝结构，所述蜂窝结构包括：半导体衬底，半导体膜片和用于支撑隔膜的支撑部分，使得在衬底的一个表面和膜片之间形成间隙 。 元件在包括隔膜的半导体膜的分离位置彼此分离。 每个元件包括穿过包括支撑部分和半导体衬底的第一绝缘层的通孔中：连接到包括隔膜的半导体膜的导体; 以及用于使导体与半导体衬底绝缘的第二绝缘层。
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