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60 条记录 (耗时 0.025 秒)

    Method of forming interlayer film
    41.
    发明授权
    Method of forming interlayer film 失效
    形成中间膜的方法

    公开(公告)号：US5888909A

    公开(公告)日：1999-03-30

    申请号：US896542

    申请日：1997-07-18

    申请人： Masaki Hara

    发明人： Masaki Hara

    IPC分类号： H01L21/3105 ,  H01L21/316 ,  H01L21/768 ,  H01L21/44

    CPC分类号： H01L21/31612 ,  H01L21/02164 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/0234 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/31051 ,  H01L21/76801 ,  H01L21/76819 ,  H01L21/76826 ,  H01L21/76832 ,  H01L21/76834

    摘要： A method of forming an interlayer film on a substrate with a plurality of wiring patterns is provided. The interlayer film is deposited on the substrate in a multi step process. A portion of the interlayer film is first deposited in a layer having relatively reduced fluidity so that the film is formed with an almost uniform thickness regardless of any pattern width present on a substrate. Thereafter, a second portion or layer of the intelayer film is deposited in a layer having relatively increased fluidity so that the second layer material fills up any troughs formed between wiring patterns. In a preferred embodiment, an undercoating film may be formed in advance which is then rendered hydrophobic so that the first portion of the interlayer film deposited thereon has reduced fluidity such that the first portion is uniformly deposited regardless of any pattern width. Thereafter, a second portion of the interlayer film may be deposited over the first portion of the film under conditions which provide relatively increased fluidity.

    摘要翻译： 提供了在具有多个布线图案的基板上形成中间膜的方法。 中间膜以多步工艺沉积在基板上。 首先将层间膜的一部分沉积在具有相对降低的流动性的层中，使得膜形成为具有几乎均匀的厚度，而与衬底上存在的任何图案宽度无关。 此后，智能膜的第二部分或层被沉积在具有相对增加的流动性的层中，使得第二层材料填充在布线图案之间形成的任何槽。 在优选的实施方案中，可以预先形成底涂膜，然后使其疏水，使得沉积在其上的层间膜的第一部分具有降低的流动性，使得第一部分均匀地沉积，而不管任何图案宽度。 此后，中间膜的第二部分可以在提供相对增加的流动性的条件下沉积在膜的第一部分上。

    Method of crystallizing a semiconductor thin film
    43.
    发明授权
    Method of crystallizing a semiconductor thin film 失效
    使半导体薄膜结晶的方法

    公开(公告)号：US5145808A

    公开(公告)日：1992-09-08

    申请号：US747708

    申请日：1991-08-20

    申请人： Toshiyuki Sameshima ,  Masaki Hara ,  Naoki Sano ,  Setsuo Usui

    发明人： Toshiyuki Sameshima ,  Masaki Hara ,  Naoki Sano ,  Setsuo Usui

    IPC分类号： H01L21/20 ,  H01L21/268

    CPC分类号： H01L21/2026 ,  Y10S117/904 ,  Y10S148/093 ,  Y10S148/134

    摘要： A method of crystallizing a semiconductor thin film moves a laser beam emitted by a pulse laser in a first direction to irradiate the semiconductor tin film with the laser beam for scanning. The laser beam is split into a plurality of secondary laser beams of a width smaller than the pitch of step feed, respectively having different energy densities forming a stepped energy density distribution decreasing from the middle toward the opposite ends thereof with respect to the direction of step feed. The energy density of the first secondary laser beam corresponding to the middle of the energy distribution is higher than a threshold energy density, i.e., the minimum energy density that will melt the semiconductor thin film to make the same amorphous, and lower than a roughening energy density, i.e., the minimum energy density that will roughen the surface of the semiconductor thin film, the energy density of each of the secondary laser beams on the front side of the first secondary laser beam with respect to the direction of step feed is lower than a melting energy density, i.e., the minimum energy density of each of the secondary laser beams on the back side of the first secondary laser beam with respect to the direction of step feed is higher than the melting energy density and lower than and nearly equal to the threshold energy density.

    摘要翻译： 使半导体薄膜结晶的方法使由脉冲激光器发射的激光沿第一方向移动，以用激光束照射半导体锡膜进行扫描。 激光束被分成多个宽度小于阶梯进给节距的次级激光束，分别具有不同的能量密度，形成阶梯能量密度分布，相对于台阶方向从中间向相对端减小 饲料。 对应于能量分布中间的第一次级激光束的能量密度高于阈值能量密度，即将熔化半导体薄膜以使其成为相同无定形且低于粗糙能量的最小能量密度 密度，即将使粗糙化半导体薄膜的表面的最小能量密度，相对于步进进给方向，第一次级激光束正面上的每个次级激光束的能量密度低于 熔融能量密度，即第一次级激光束的背侧上的每个次级激光束相对于步进进给方向的最小能量密度高于熔融能量密度，并且低于并且几乎等于 阈值能量密度。

    Machining tool control system and control method
    47.
    发明授权
    Machining tool control system and control method 有权
    加工刀具控制系统及控制方法

    公开(公告)号：US08989891B2

    公开(公告)日：2015-03-24

    申请号：US13122327

    申请日：2009-09-16

    申请人： Hitoshi Matsumoto ,  Hisashi Saito ,  Masaki Hara

    发明人： Hitoshi Matsumoto ,  Hisashi Saito ,  Masaki Hara

    IPC分类号： G06F19/00 ,  G05B11/01 ,  G05B19/4068

    CPC分类号： G05B19/4068 ,  G05B2219/35259 ,  G05B2219/35293

    摘要： Provided are a control system and a control method by which a part of a continuously written machining program can be easily executed by a machine tool, and operation and the like of the machine tool can be checked. The control apparatus has an input device 102 which inputs a start instruction of a specific section of a machining program, and a partial executing device between the inputted start instruction of the specific section, and an end instruction that corresponds to the start instruction, to an operation executing device (101).

    摘要翻译： 提供了一种通过机床可以容易地执行连续写入的加工程序的一部分的控制系统和控制方法，并且可以检查机床的操作等。 控制装置具有：输入装置102，其将加工程序的特定部分的开始指令和特定部分的输入的开始指令与对应于开始指令的结束指令之间的部分执行装置输入到 操作执行装置（101）。

    Machining Tool Control System and Control Method
    49.
    发明申请
    Machining Tool Control System and Control Method 有权
    加工刀具控制系统及控制方法

    公开(公告)号：US20110184549A1

    公开(公告)日：2011-07-28

    申请号：US13122327

    申请日：2009-09-16

    申请人： Hitoshi Matsumoto ,  Hisashi Saito ,  Masaki Hara

    发明人： Hitoshi Matsumoto ,  Hisashi Saito ,  Masaki Hara

    IPC分类号： G05B19/4155

    CPC分类号： G05B19/4068 ,  G05B2219/35259 ,  G05B2219/35293

    摘要： Provided are a control system and a control method by which a part of a continuously written machining program can be easily executed by a machine tool, and operation and the like of the machine tool can be checked. The control apparatus has an input means 102 which inputs a start instruction of a specific section of a machining program, and a partial executing means 103 outputs the machining program between the inputted start instruction of the specific section, and an end instruction that corresponds to the start instruction, to an operation executing means (101).

    摘要翻译： 提供了一种通过机床可以容易地执行连续写入的加工程序的一部分的控制系统和控制方法，并且可以检查机床的操作等。 控制装置具有输入装置102，输入装置102输入加工程序的特定部分的开始指令，部分执行装置103输出加工程序在输入的特定部分的开始指令与对应于 开始指令发送到操作执行装置（101）。

    Terminal for displaying distributed picture content
    50.
    发明申请
    Terminal for displaying distributed picture content 审中-公开
    终端显示分布式图片内容

    公开(公告)号：US20070022379A1

    公开(公告)日：2007-01-25

    申请号：US11489216

    申请日：2006-07-19

    申请人： Masaki Hara ,  Tomohiro Kawaguchi

    发明人： Masaki Hara ,  Tomohiro Kawaguchi

    IPC分类号： G11B27/00

    CPC分类号： H04N21/2365 ,  H04N21/21805 ,  H04N21/4347 ,  H04N21/44016 ,  H04N21/472

    摘要： Terminals 10 operate under the control of a computer program. An instruction made by a reproduction/stop switch BL1 causes a data inputting portion BL2 to input streamed moving picture data in which a plurality of moving picture data sets respectively representative of moving picture items shot from respectively different viewpoints, are combined. The data inputting portion BL2 then writes the input moving picture data into a reproduction buffer BL3 successively. A rendering processing portion BL4 successively converts the moving picture data stored in the reproduction buffer BL3 to rendering data for rendering on a display unit 18, and then successively writes the converted data into a rendering buffer BL5. A display controlling portion BL7 successively retrieves, from the rendering buffer BL5, only rendering data corresponding to a viewpoint selected by a viewpoint switch BL6, and writes the retrieved data into a display buffer BL8 that controls display on the display unit 18. Viewpoints of streamed moving picture items shot from various viewpoints are smoothly switched, and continuity of the moving picture content streamed to the terminals 10 is ensured.

    摘要翻译： 终端10在计算机程序的控制下操作。 由再现/停止开关BL1进行的指令使得数据输入部分BL 2输入流分散的运动图像数据，其中分别代表从分别不同的视点拍摄的运动图像项目的多个运动图像数据集合。 然后，数据输入部分BL2依次将输入的运动图像数据写入再现缓冲器BL3。 渲染处理部分BL 4将存储在再现缓冲器BL3中的运动图像数据连续地转换成在显示单元18上渲染的渲染数据，然后将转换的数据连续地写入到渲染缓冲器BL5中。 显示控制部分BL7从再现缓冲器BL 5连续地检索与由视点开关BL 6选择的视点对应的数据，并将检索的数据写入显示单元18上显示的显示缓冲器BL8中 。 从各种视点拍摄的流式运动图像项目的观点平滑地切换，并且确保流向终端10的运动图像内容的连续性。