公开(公告)号：US6159291A

公开(公告)日：2000-12-12

申请号：US131558

申请日：1998-08-10

申请人： Akihiko Morita ,  Joichi Nishimura ,  Masami Ohtani

发明人： Akihiko Morita ,  Joichi Nishimura ,  Masami Ohtani

IPC分类号： B05B15/02 ,  B05B15/10 ,  B05C11/08 ,  B05B13/02

CPC分类号： B05B15/10 ,  B05C11/08 ,  B05B12/1472 ,  B05B15/02

摘要： A substrate treating apparatus for treating a substrate in a predetermined substrate treating region. Each holder arm is supported in a proximal end portion thereof by an arm support to be swingable about a pivotal axis. In time of substrate treatment, the arm support is raised by an air cylinder. With the ascent of the arm support, a cam follower attached to a proximal end of the holder arm is guided by a cam groove. The holder arm, while being raised, turns from a vertical standby posture to a horizontal posture for treating the substrate. As a result, a treating device attached to a distal end of the holder arm moves to a treating position. In the treating position, the treating device treats the substrate. The holder arms are maintained in the vertical standby posture when out of use in substrate treatment. Thus, the holder arms require a reduced standby space.

摘要翻译： 一种用于处理预定基板处理区域中的基板的基板处理装置。 每个保持臂通过臂支撑件在其近端部分中支撑以围绕枢转轴线摆动。 在基板处理的时候，臂支撑件被气缸升高。 随着臂支撑件的上升，附接到保持器臂的近端的凸轮从动件由凸轮槽引导。 保持臂同时被升起，从垂直待机姿态变为水平姿势，用于处理基板。 结果，附接到保持臂的远端的处理装置移动到处理位置。 在处理位置，处理装置处理基板。 当基板处理不用时，保持臂保持在垂直待机姿态。 因此，支架臂需要减少的待机空间。

公开(公告)号：US6151744A

公开(公告)日：2000-11-28

申请号：US839470

申请日：1997-04-14

申请人： Masami Ohtani ,  Masahide Ikeda ,  Mitsuhiro Fujita ,  Joichi Nishimura

发明人： Masami Ohtani ,  Masahide Ikeda ,  Mitsuhiro Fujita ,  Joichi Nishimura

IPC分类号： B08B1/04 ,  B08B3/12 ,  H01L21/00 ,  H01L21/304 ,  A46B13/02

CPC分类号： H01L21/67051 ,  H01L21/67046

摘要： A method of and apparatus for cleaning a substrate which require shorter processing time with high processing efficiency are disclosed. A cleaning brush pivots about a pivot axis between two positions. An ultrasonic cleaning nozzle pivots about a pivot axis between two positions. To perform a cleaning process, the cleaning brush and the ultrasonic cleaning nozzle are driven in accordance with a processing pattern previously produced by an operator. The processing pattern is produced so that the movement of the cleaning brush between two positions and the movement of the ultrasonic cleaning nozzle between two positions are not caused simultaneously. Any processing pattern desired by the operator may be produced if this requirement is satisfied. Execution of the cleaning process in accordance with the processing pattern allows cleaning of a substrate using the cleaning brush and the ultrasonic cleaning nozzle at the same time.

摘要翻译： 公开了一种用于清洗需要较短处理时间并具有高处理效率的基板的方法和设备。 清洁刷绕两个位置之间的枢转轴线枢转。 超声波清洗喷嘴绕两个位置之间的枢转轴线枢转。 为了执行清洁处理，清洁刷和超声波清洗喷嘴根据操作者先前生产的处理模式被驱动。 产生处理图案，使得清洁刷在两个位置之间的移动和超声波清洗喷嘴在两个位置之间的运动不会同时产生。 如果满足该要求，则可以产生操作者期望的任何处理模式。 根据处理模式执行清洁处理允许使用清洁刷和超声波清洗喷嘴同时清洗基板。

公开(公告)号：US5989342A

公开(公告)日：1999-11-23

申请号：US789764

申请日：1997-01-28

申请人： Masahide Ikeda ,  Masami Ohtani

发明人： Masahide Ikeda ,  Masami Ohtani

IPC分类号： H01L21/683 ,  B05C11/08 ,  G03F7/20 ,  H01L21/027 ,  H01L21/687 ,  B05C13/00

CPC分类号： H01L21/68728 ,  B05C11/08 ,  G03F7/70691 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/141

摘要： A substrate holding apparatus holds a rotating substrate without idly rotating the substrate and keeps the substrate in proper balance while the substrate is rotated. In a revolvable holding member, a column-shaped holding part is disposed on a top surface of a column-shaped supporting part, at an eccentric position with respect to a rotation axis of the supporting part. The revolvable holding member is supported by a rotation base for free rotation, and linked to a magnet holding part which incorporates a permanent magnet. On the other hand, a ring-shaped magnet which is disposed in a processing liquid collecting cup is freely driven by an air cylinder in a vertical direction. As the ring-shaped magnet is moved upward or downward and crosses a predetermined line as viewed in a positional relationship relative to the permanent magnet, which is at a height where the permanent magnet is disposed, the direction of a magnetic line of flux of the ring-shaped magnet is reversed. As a result, the direction of the revolving force which acts upon the permanent magnet is reversed, whereby the revolvable holding member holds or releases a substrate.

摘要翻译： 基板保持装置保持旋转基板，而不会使基板旋转，同时基板旋转时使基板保持适当的平衡。 在可旋转的保持构件中，在相对于支撑部的旋转轴线的偏心位置处，在柱状支撑部的顶面上配置有柱状保持部。 可旋转的保持构件由旋转基座支撑，用于自由旋转，并且连接到结合永磁体的磁体保持部分。 另一方面，设置在处理液收集杯中的环状磁体由气缸在垂直方向上自由地驱动。 当环形磁体相对于设置有永久磁铁的高度的永磁体的位置关系观察时，向上或向下移动并穿过预定的线，所述永久磁铁的磁通线的方向为 环形磁铁相反。 结果，作用于永久磁铁的旋转力的方向相反，由此可旋转的保持构件保持或释放基板。

公开(公告)号：US5322079A

公开(公告)日：1994-06-21

申请号：US952281

申请日：1992-09-28

申请人： Yoshiteru Fukutomi ,  Masami Ohtani ,  Yasushi Nakamura

发明人： Yoshiteru Fukutomi ,  Masami Ohtani ,  Yasushi Nakamura

IPC分类号： H01L21/304 ,  B08B11/02 ,  G03F7/16 ,  H01L21/306 ,  H01L21/683 ,  H01L21/687 ,  B08B3/02

CPC分类号： H01L21/68728 ,  B08B11/02 ,  G03F7/162 ,  H01L21/67225

摘要： A substrate holding apparatus includes a rotary table rotatable about a vertical center axis for supporting a substrate in a horizontal plane, and substrate travel regulating pins fixed to the rotary table and arranged at positions in contact with the outer edge of the substrate so that the center of gravity of the substrate supported on the rotary table is spaced from the center axis for regulating the travel of the substrate in a horizontal direction. Centrifugal force generated with respect to the substrate when the rotary table rotates about the center axis, urges the periphery of the substrate towards the travel regulating pins so that the resulting frictional force prevents rotary slippage between the substrate and the rotary table as rotation of the latter relates to the latter. The structure of this apparatus is simple because the substrate holding portion does not include a movable portion. It is easy to mount a substrate onto this apparatus because it is not necessary to align the orientation flat and the like at a predetermined position.

摘要翻译： 基板保持装置包括：旋转台，其可绕垂直中心轴线旋转，用于支撑水平面中的基板;以及基板行进限制销，固定到旋转台并且布置在与基板的外边缘接触的位置，使得中心 支撑在旋转台上的基板的重力与中心轴线间隔开，用于调节基板在水平方向上的移动。 当旋转台围绕中心轴线旋转时，相对于基板产生的离心力将基板的周边推向行进调节销，使得所产生的摩擦力防止基板和旋转台之间的旋转滑动， 涉及后者。 该装置的结构简单，因为基板保持部不包括可动部。 由于不需要将定向平面等对准在预定位置，因此将基板安装在该装置上是容易的。

公开(公告)号：US5023302A

公开(公告)日：1991-06-11

申请号：US398976

申请日：1989-08-28

申请人： Hisao Anzai ,  Isao Sasaki ,  Kozi Nishida ,  Hideaki Makino ,  Masami Ohtani ,  Katsuhiko Shimada

发明人： Hisao Anzai ,  Isao Sasaki ,  Kozi Nishida ,  Hideaki Makino ,  Masami Ohtani ,  Katsuhiko Shimada

IPC分类号： G02B6/00 ,  B29C47/00 ,  C08F8/32 ,  C08F8/48

CPC分类号： C08F8/48 ,  B29C47/00 ,  B29C47/0009 ,  C08F2800/20

摘要： A methacrylimide group-containing polymer having good optical characteristics, especially a resistance to coloration under heating and above to retain good light-transmitting characteristics for a long time even at a high temperature, is prepared by polymerizing methacrylic acid, a methacrylic acid ester, or a monomer mixture predominantly comprised of methacrylic acid or an ester thereof in the absence of a mercaptan chain transfer agent, and then imidizing the thus-prepared polymer. The resulting polymer is useful as the core component of a light-transmitting fiber having a core-sheath structure.

公开(公告)号：US4262738A

公开(公告)日：1981-04-21

申请号：US19637

申请日：1979-03-12

申请人： Nobuhiro Kato ,  Masami Ohtani

发明人： Nobuhiro Kato ,  Masami Ohtani

IPC分类号： B60H1/00 ,  F24F11/08 ,  G05D23/24 ,  F25B29/00

CPC分类号： B60H1/00964 ,  F24F11/08 ,  G05D23/1925 ,  G05D23/24

摘要： A plurality of movable dampers (23), (26), (31) are provided in an air flow duct (12) to control the temperature and air flow therethrough. A heater core (19) and/or air conditioner evaporator (18) are disposed in the duct (12). The dampers (23), (26), (31) are positioned by vacuum actuators (28), (29), (33) in accordance with applied vacuum. Sensors (47), (48), (49) sense the temperature in the duct (12), an automobile passenger compartment into which the duct (12) leads and the like. A control means unit (44) modulates vacuum from a source (34) in accordance with sensed temperature so as to maintain the temperature at a desired value. In case of failure of the automatic control unit (44), a manual valve unit (51), (53), (56) may be operated to connect the actuators (28), (29), (31) either to the vacuum source (34) or to the atmosphere so as to position the dampers (23), (26), (31) minimum or maximum temperature operation respectively.

摘要翻译： 多个可移动阻尼器（23），（26），（31）设置在空气流动管道（12）中，以控制通过其中的温度和空气流动。 加热器芯（19）和/或空调蒸发器（18）设置在管道（12）中。 减振器（23），（26），（31）根据所施加的真空由真空致动器（28），（29），（33）定位。 传感器（47），（48），（49）感测管道（12）中的管道（12）引导的汽车乘客舱等的温度。 控制装置单元（44）根据感测的温度调制来自源（34）的真空，以将温度保持在期望的值。 在自动控制单元（44）发生故障的情况下，手动阀单元（51），（53），（56）可以被操作以将致动器（28），（29），（31）连接到真空 源（34）或大气，以便分别定位风门（23），（26），（31）最低或最高温度运行。

公开(公告)号：US4260343A

公开(公告)日：1981-04-07

申请号：US7257

申请日：1979-01-29

申请人： Risaburo Watanabe ,  Masami Ohtani ,  Naoki Hashizume

发明人： Risaburo Watanabe ,  Masami Ohtani ,  Naoki Hashizume

IPC分类号： F01C21/08 ,  F04C2/00

CPC分类号： F01C21/0863

摘要： A vane compressor includes a hollow stator, and a rotor which is received in the stator for rotation about an axis. The rotor is provided with a plurality of throughgoing passages which extend radially and outwardly relative to the axis. Each passage receives a vane which has an outer end face directed towards an inner circumference of the stator and an inner end face directed away from the inner circumference of the stator. The vanes are shiftable radially in the respective passages relative to the axis. A pressure medium is supplied under a first pressure to the inner end faces of the vanes to urge the same radially outwardly for engagement of the outer end faces with the inner circumference of the stator. When the rotor is rotated, the vanes are subjected to an additional second pressure resulting from centrifugal force. The second pressure additionally urges the vanes against the inner circumference of the stator. The first and second pressures together constitute a cumulative force which above a predetermined level causes undesired frictional losses at the interfaces between the outer end faces of the vanes and the inner circumference of the stator. An arrangement is provided to decrease the cumulative pressure to the predetermined level to thereby eliminate the undesired frictional losses.

摘要翻译： 叶片式压缩机包括中空定子和转子，该转子容纳在定子中以围绕轴线旋转。 转子设置有多个相对于轴径向和向外延伸的通过通道。 每个通道接收叶片，该叶片具有指向定子的内圆周的外端面和远离定子的内圆周的内端面。 叶片相对于轴线在相应的通道中径向移动。 在第一压力下将压力介质供给到叶片的内端面，以将径向向外推动以使外端面与定子的内圆周接合。 当转子旋转时，叶片受到由离心力产生的额外的第二压力。 第二压力另外迫使叶片抵靠定子的内圆周。 第一和第二压力一起构成累积力，其高于预定水平，在叶片的外端面和定子的内圆周之间的界面处引起不期望的摩擦损失。 提供了将累积压力降低到预定水平从而消除不期望的摩擦损失的装置。

公开(公告)号：US4256398A

公开(公告)日：1981-03-17

申请号：US25403

申请日：1979-03-30

申请人： Masami Ohtani

发明人： Masami Ohtani

IPC分类号： G03D3/00 ,  G03D3/08 ,  G03D3/13

CPC分类号： G03D3/132

摘要： A developing tank wherein means is provided to divide the surface of the developer charged into the tank into two separate portions, into one of which the film enters as it enters the developer, and out of the other of which the film leaves as it leaves the developer. Thus the contaminants and exhausted developer accumulating at the point where the film leaves the developer are prevented from directly moving along the surface of the developer to the point where the film enters the developer, and thereby streaking and uneven development are substantially reduced. The dividing means may be combined with a film entry guide plate.

摘要翻译： 一种显影罐，其中提供了装置，用于将装入罐中的显影剂的表面分成两个分开的部分，当薄膜进入显影剂时，其进入其中一个，并且当薄膜离开时，薄膜离开 开发者 因此，防止在膜离开显影剂的点积聚的污染物和排出的显影剂直接沿着显影剂的表面移动到膜进入显影剂的位置，从而显着减少了条纹和不均匀的显影。 分割装置可以与胶片进入导板组合。

公开(公告)号：US4248575A

公开(公告)日：1981-02-03

申请号：US7409

申请日：1979-01-29

申请人： Risaburo Watanabe ,  Masami Ohtani ,  Naoki Hashizume

发明人： Risaburo Watanabe ,  Masami Ohtani ,  Naoki Hashizume

IPC分类号： F01C21/08 ,  F04C18/00 ,  F04C29/02 ,  F04C29/10

CPC分类号： F01C21/0863

摘要： A vane compressor includes a hollow stator, and a rotor which is received in the stator for rotation about an axis. The rotor is provided with a plurality of throughgoing passages which extend radially and outwardly relative to the axis. Each passage receives a vane which has an outer end face directed towards an inner circumference of the stator and an inner end face directed away from the inner circumference of the stator. The vanes are shiftable radially in the respective passages relative to the axis. A pressure medium is supplied under a first pressure to the inner end faces of the vanes to urge the same radially outwardly for engagement of the outer end faces with the inner circumference of the stator. When the rotor is rotated, the vanes are subjected to an additional second pressure resulting from centrifugal force. The second pressure additionally urges the vanes against the inner circumference of the stator. The first and second pressures together constitute a cumulative force which above a predetermined level causes undesired frictional losses at the interfaces between the outer end faces of the vanes and the inner circumference of the stator. An arrangement is provided to decrease the cumulative pressure to the predetermined level to thereby eliminate the undesired frictional losses.

摘要翻译： 叶片式压缩机包括中空定子和转子，该转子容纳在定子中以围绕轴线旋转。 转子设置有多个相对于轴径向和向外延伸的通过通道。 每个通道接收叶片，该叶片具有指向定子的内圆周的外端面和远离定子的内圆周的内端面。 叶片相对于轴线在相应的通道中径向移动。 在第一压力下将压力介质供给到叶片的内端面，以将径向向外推动以使外端面与定子的内圆周接合。 当转子旋转时，叶片受到由离心力产生的额外的第二压力。 第二压力另外迫使叶片抵靠定子的内圆周。 第一和第二压力一起构成累积力，其高于预定水平，在叶片的外端面和定子的内圆周之间的界面处引起不期望的摩擦损失。 提供了将累积压力降低到预定水平从而消除不期望的摩擦损失的装置。