公开(公告)号：US07005313B2

公开(公告)日：2006-02-28

申请号：US10771461

申请日：2004-02-05

申请人： Minoru Murata ,  Toshiya Ikezawa ,  Tetsuro Yano

发明人： Minoru Murata ,  Toshiya Ikezawa ,  Tetsuro Yano

IPC分类号： H01L21/58

CPC分类号： G01P15/125 ,  G01P2015/0814 ,  Y10S414/141

摘要： A semiconductor dynamic sensor has a displacement portion, which is composed of a movable electrode and first and second fixed electrodes, formed in a semiconductor substrate. The movable electrode is displaced in response to applied acceleration, so that capacitance between the movable electrode and each of the first and second fixed electrodes changes. Therefore, the applied acceleration can be detected based on the capacitance change. A plurality of rectangular-shaped suction portions is provided at four corners on the surface of the semiconductor substrate. By sucking the suction portions using a collet check, the semiconductor dynamic sensor such can be transported without damaging the displacement portion.

摘要翻译： 半导体动态传感器具有形成在半导体衬底中的由可动电极和第一和第二固定电极组成的位移部分。 可移动电极响应于所施加的加速度而移位，使得可动电极与第一和第二固定电极中的每一个之间的电容发生变化。 因此，可以基于电容变化来检测所施加的加速度。 在半导体基板的表面的四个角设置有多个矩形的吸引部。 通过使用夹头检查吸引吸引部，可以输送半导体动态传感器而不损害位移部。

公开(公告)号：US20050028324A1

公开(公告)日：2005-02-10

申请号：US10632791

申请日：2003-08-04

申请人： Seiya Yamada ,  Masayuki Takeuchi ,  Tsutomu Koizumi ,  Kazuo Kusaba ,  Minoru Murata

发明人： Seiya Yamada ,  Masayuki Takeuchi ,  Tsutomu Koizumi ,  Kazuo Kusaba ,  Minoru Murata

IPC分类号： G21F9/30 ,  C01D3/20 ,  C22B7/00 ,  G21F9/28

CPC分类号： G21F9/28 ,  C22B7/003 ,  C22B7/005 ,  Y02P10/212

摘要： A method for treatment of uranium-containing wastes, which realizes the decontamination of steel-based metallic wastes such as carbon steel or stainless steel containing nuclear fuel materials such as uranium or plutonium, produced from nuclear facilities, simultaneously with the reduction of volume thereof. Spent nuclear fuel (uranium) 6, which is mixed with hull 5 as stainless-based metal, is separated from the stainless-based metal, through the separation of uranium that constitutes the spent nuclear fuel 6 as oxides by melting the stainless-based metal wastes.

摘要翻译： 一种处理铀废物的方法，其实现了由核设施生产的含有核燃料物质如铀或钚的碳钢或不锈钢等钢基金属废物的去污，同时体积减小。 与作为不锈钢金属的船体5混合的废核燃料（铀）6通过将构成废核燃料6的废铀通过熔化不锈钢基金属分离而与不锈钢基金属分离 废物

公开(公告)号：US20050016273A1

公开(公告)日：2005-01-27

申请号：US10895978

申请日：2004-07-22

申请人： Minoru Murata ,  Takaaki Kawai

发明人： Minoru Murata ,  Takaaki Kawai

IPC分类号： G01P21/00 ,  B60R21/16 ,  G01P15/125 ,  G01P15/13 ,  G01P15/00

CPC分类号： G01P15/125 ,  G01P15/131

摘要： A physical quantity (e.g., acceleration) sensing unit is provided in this unit, a capacitive sensor has first and second fixed electrodes and a physical-quantity-sensitive movable electrode disposed between the first and second fixed electrodes. An adjusting circuit first adjusts a first bias voltage applied between the first fixed electrode and the movable electrode and a second voltage applied between the movable electrode and the second fixed electrode so that the movable electrode is brought into contact with either the first or second fixed electrode. The adjusting circuit then adjusts the first and second bias voltages to return the movable electrode to its original position. A detecting circuit detects an output on a capacitance relationship among the first and second fixed electrodes and the movable electrode. The output is subjected to determination of whether or not the output is out of order, when tested.

摘要翻译： 在该单元中提供物理量（例如加速度）感测单元，电容传感器具有第一和第二固定电极以及设置在第一和第二固定电极之间的物理量敏感可动电极。 调整电路首先调整施加在第一固定电极与可动电极之间的第一偏置电压和施加在可动电极与第二固定电极之间的第二电压，使得可动电极与第一或第二固定电极 。 然后调整电路调节第一和第二偏置电压，以将可动电极返回到其初始位置。 检测电路检测第一和第二固定电极与可动电极之间的电容关系的输出。 当测试时，输出将确定输出是否失效。

公开(公告)号：US06448624B1

公开(公告)日：2002-09-10

申请号：US08908939

申请日：1997-08-08

申请人： Seiichiro Ishio ,  Kenichi Ao ,  Minoru Murata ,  Yasuki Shimoyama ,  Tomohito Kunda ,  Norio Kitao

发明人： Seiichiro Ishio ,  Kenichi Ao ,  Minoru Murata ,  Yasuki Shimoyama ,  Tomohito Kunda ,  Norio Kitao

IPC分类号： H01L2982

CPC分类号： G01P15/123 ,  G01P1/006 ,  G01P15/0802 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/73265 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00

摘要： A semiconductor sensor chip is provided with a weight portion supported in a frame via beams whereby acceleration up to substantially ±1 G can be detected by utilizing piezoresistance effect of resistor elements formed on the beams. The semiconductor sensor chip is supported by a seat having a thermal expansion coefficient equivalent to that of the semiconductor sensor chip via the frame. The frame and the seat are adhered to each other by a flexible adhesive agent mixed with a plurality of resin beads functioning as spacers and under an adhesion state, air damping of the weight portion is carried out by setting a dimension of an air gap between the weight portion and the seat to a range of 7 through 15 &mgr;m.

摘要翻译： 半导体传感器芯片具有通过光束支撑在框架中的重量部分，由此通过利用形成在梁上的电阻元件的压阻效应可以检测到大致±1G的加速度。 半导体传感器芯片由具有与半导体传感器芯片的热膨胀系数相当的热膨胀系数经由框架支撑。 框架和座椅通过与作为间隔件起作用的多个树脂珠混合的柔性粘合剂彼此粘合，并且在粘合状态下，通过将重量部分的空气阻力设定在 重量部分和座椅到7到15毫米的范围。

公开(公告)号：US06208283B1

公开(公告)日：2001-03-27

申请号：US09340425

申请日：1999-06-28

申请人： Minoru Murata ,  Masanori Miyawaki

发明人： Minoru Murata ,  Masanori Miyawaki

IPC分类号： G01S1390

CPC分类号： G01S13/90 ,  G01S5/14

摘要： A synthetic aperture radar system fluctuation compensating apparatus includes a synthetic aperture radar mounted on a flying unit, a data acquiring unit, a position measuring unit and a position determining unit. The data acquiring unit receives a reception data by the synthetic aperture radar. The position measuring unit measures a position of the flying unit to generate a position data. The position determining unit determines a correct position of the flying unit based on the reception data and the position data to generate a compensated position data.

摘要翻译： 合成孔径雷达系统波动补偿装置包括安装在飞行单元上的合成孔径雷达，数据获取单元，位置测量单元和位置确定单元。 数据获取单元通过合成孔径雷达接收接收数据。 位置测量单元测量飞行单元的位置以产生位置数据。 位置确定单元基于接收数据和位置数据确定飞行单元的正确位置，以生成补偿位置数据。

公开(公告)号：US06172739B2

公开(公告)日：2001-01-09

申请号：US09195902

申请日：1998-11-19

申请人： Minoru Murata

发明人： Minoru Murata

IPC分类号： G03B2742

CPC分类号： G03F7/70358 ,  G03B27/42 ,  G03F7/70725

摘要： In order to improve the throughput of a scanning type of exposure system while maintaining the positioning precision, the positioning error range &egr;S at the scan start position is set to be less strict than the positioning error range &egr;E at the start of exposure. This reduces the settling time TS before acceleration from the scan start position toward the exposure start position can commence. Thus, upon finishing exposure of a current shot area, the substrate stage moves toward a target position, which is to be the scan start position. The velocity of the substrate stage reaches substantially zero at the scan start position. The substrate stage 17 slightly oscillates at the scan start position during positioning. When the differences between a target position and a detected position remain within an acceptable positioning error range &egr;S (or tolerance) at the scan start position for a predetermined number of sampling values, acceleration toward the exposure area commences. The large positioning error that results from loosening of the positioning precision (or tolerance) is corrected between the scan start time and the exposure start time.

摘要翻译： 为了在保持定位精度的同时提高扫描型曝光系统的吞吐量，将扫描开始位置处的定位误差范围εiS设定为比曝光开始时的定位误差范围εiE更严格。 这可以在从扫描开始位置朝向曝光开始位置开始加速之前降低建立时间TS。 因此，当完成曝光的当前照射区域时，基板台朝向作为扫描开始位置的目标位置移动。 衬底台的速度在扫描开始位置达到基本为零。 衬底台17在定位期间在扫描开始位置稍微振荡。 当目标位置和检测位置之间的差异对于预定数量的采样值在扫描开始位置处保持在可接受的定位误差范围εiS（或公差）内时，朝向曝光区域的加速度开始。 在扫描开始时间和曝光开始时间之间校正由定位精度（或公差）松动导致的较大定位误差。

公开(公告)号：US6143584A

公开(公告)日：2000-11-07

申请号：US121893

申请日：1998-07-24

申请人： Tsuyoshi Fukada ,  Masakazu Kanosue ,  Kenichi Ao ,  Minoru Murata ,  Seiichiro Ishio

发明人： Tsuyoshi Fukada ,  Masakazu Kanosue ,  Kenichi Ao ,  Minoru Murata ,  Seiichiro Ishio

IPC分类号： G01P15/12 ,  H01L21/00

CPC分类号： G01P15/123 ,  G01P15/124

摘要： A semiconductor sensor has gauge resistors. The gauge resistors connect with aluminum electrodes through contact holes, and form a bridge circuit. The gauge resistors are formed on each chip area of a semiconductor substrate before dicing the chip areas. Then, the resistances of the gauge resistors or the output of the bridge circuit are measured. Contact positions of the gauge resistors or the size and/or shape of the contact holes are adjusted based on the result of the measurement in order to adjust the offset voltage of the bridge circuit formed on each chip area.

摘要翻译： 半导体传感器具有量规电阻。 量规电阻器通过接触孔与铝电极连接，形成桥接电路。 在切割芯片区域之前，在半导体衬底的每个芯片区域上形成量规电阻器。 然后，测量电阻的电阻或桥接电路的输出。 基于测量结果调整量规电阻器的接触位置或接触孔的尺寸和/或形状，以调整在每个芯片区域上形成的桥接电路的偏移电压。

公开(公告)号：US5618738A

公开(公告)日：1997-04-08

申请号：US404147

申请日：1995-03-14

申请人： Kenichi Ao ,  Minoru Murata ,  Hiroki Noguchi ,  Yoshimi Yoshino ,  Hirofumi Uenoyama

发明人： Kenichi Ao ,  Minoru Murata ,  Hiroki Noguchi ,  Yoshimi Yoshino ,  Hirofumi Uenoyama

IPC分类号： G01R33/09 ,  H01F10/06 ,  H01F41/02 ,  H01F41/30 ,  H01F41/34 ,  H01L21/66 ,  H01L21/8222 ,  H01L27/06 ,  H01L43/08 ,  H01L43/12

CPC分类号： B82Y25/00 ,  B82Y40/00 ,  G01R33/09 ,  H01F10/06 ,  H01F41/302 ,  H01F41/34 ,  H01L43/12

摘要： A method of manufacturing a magnetoresistance element that can accurately sort out truely defective products from apparently defective products due to the manufacturing processes. Manufacturing processes for MR elements includes a MR element formation process, a magnetic field application process and an electric inspection process. In the magnetic field process, the magnetic field application is limited to a range within 75.degree. to the longitudinal direction of a MR element pattern. By performing the magnetic field application process before the electric inspection process, the anisotropic magnetic field due to a shape magnetic anisotropy of the MR element can be aligned almost in a fixed direction, defective products due to the manufacturing processes can exactly be sorted out from the apparently defective products in the electric inspection process, so that the yield rate can be improved.

摘要翻译： 一种制造磁阻元件的方法，其可以由于制造工艺而精确地排除来自明显缺陷的产品的真实缺陷产品。 MR元件的制造过程包括MR元件形成处理，磁场施加处理和电检查过程。 在磁场处理中，磁场施加被限制在与MR元件图案的纵向方向成75°的范围内。 通过在电检测过程之前执行磁场施加处理，由于MR元件的形状磁各向异性而产生的各向异性磁场可以几乎在固定方向上排列，由于制造过程而导致的缺陷产物可以从 在电气检查过程中显然有缺陷的产品，从而可以提高产量。

公开(公告)号：US4042090A

公开(公告)日：1977-08-16

申请号：US506871

申请日：1974-09-17

申请人： Sadao Hasebe ,  Hiromitsu Ono ,  Minoru Murata ,  Yuji Harada

发明人： Sadao Hasebe ,  Hiromitsu Ono ,  Minoru Murata ,  Yuji Harada

IPC分类号： G06F3/02 ,  B41F16/00 ,  B41J5/12 ,  H01H11/00 ,  H01H13/02 ,  H01H13/14

CPC分类号： B41J5/12 ,  H01H13/14 ,  H01H2209/016 ,  H01H2219/034

摘要： A key top comprises a key top base comprising a side portion and a top portion having a specified color, a colored portion provided at a part of the top portion and having a color different from the specified color of the top portion, and, a protective layer composed of a transparent material having an abrasion resistance and covering at least the colored portion.

摘要翻译： 键顶包括键顶部，其包括侧部和具有指定颜色的顶部，着色部分设置在顶部的一部分处并且具有与顶部的指定颜色不同的颜色，以及保护性 由具有耐磨性的透明材料构成的层，至少覆盖着色部分。