Method for preventing tungsten contact/via plug loss after a backside pressure fault
    44.
    发明授权
    Method for preventing tungsten contact/via plug loss after a backside pressure fault 有权
    背面压力故障后防止钨接触/堵头损失的方法

    公开(公告)号:US06245654B1

    公开(公告)日:2001-06-12

    申请号:US09283063

    申请日:1999-03-31

    IPC分类号: H01L2144

    摘要: A method for preventing tungsten contact/via plug loss after a backside pressure fault defect in a deposition chamber is provided. In the method, first deposited by a silane soak step and a tungsten nucleation layer is subsequently deposited, a plasma treating step by a H2 plasma is carried out at a temperature of not higher than 480° C. for a time period of at least 15 seconds. The plasma treating step significantly improves the uniform distribution of the silicon prenucleation layer and substantially prevents the formation of any tungsten silicide layers such that during an etchback process, the dry etchant utilized does not remove a tungsten silicide layer at a much faster rate and leads to a plug loss defect.

    摘要翻译: 提供了一种用于在沉积室中的背面压力故障缺陷之后防止钨接触/经由插塞损失的方法。 在该方法中,首先通过硅烷浸渍步骤和钨成核层沉积,通过H 2等离子体的等离子体处理步骤在不高于480℃的温度下进行至少15 秒。 等离子体处理步骤显着地改善了硅预核层的均匀分布,并且基本上防止了任何硅化钨层的形成,使得在回蚀工艺期间,所用的干蚀刻剂不会以更快的速率除去硅化钨层,并导致 插头损失缺陷。

    Method for preventing tungsten contact plug loss after a backside pressure fault
    45.
    发明授权
    Method for preventing tungsten contact plug loss after a backside pressure fault 有权
    背面压力故障后防止钨触头堵塞的方法

    公开(公告)号:US06174795B1

    公开(公告)日:2001-01-16

    申请号:US09282993

    申请日:1999-03-31

    IPC分类号: H01L2144

    摘要: A method for preventing tungsten contact plug loss problem after a backside pressure fault problem in a deposition chamber is provided. In the method, first deposited by a silane soak step and a tungsten nucleation layer is subsequently deposited, a heat treating step by a rapid thermal process is carried out at a temperature of at least 600° C. for a time period of at least 10 seconds. The heat treating step significantly improves the uniform distribution of the silicon prenucleation layer and substantially prevents the formation of any tungsten silicide layers such that during an etchback process, the dry etchant utilized does not remove a tungsten silicide layer at a much faster rate and thereby does not result in a plug loss problem.

    摘要翻译: 提供了一种用于在沉积室中的背面压力故障问题之后防止钨接触塞损耗问题的方法。 在该方法中,首先通过硅烷浸渍步骤和钨成核层沉积,通过快速热处理的热处理步骤在至少600℃的温度下进行至少10 秒。 热处理步骤显着地改善了硅预核层的均匀分布,并且基本上防止了任何硅化钨层的形成,使得在回蚀工艺期间,所用的干蚀刻剂不会以更快的速度除去硅化钨层,从而 不会导致插头丢失问题。

    Combination mouse and touch input device
    46.
    发明授权
    Combination mouse and touch input device 有权
    组合鼠标和触摸输入设备

    公开(公告)号:US08599136B2

    公开(公告)日:2013-12-03

    申请号:US12871319

    申请日:2010-08-30

    IPC分类号: G09G5/08 G06F3/041

    摘要: A computer input device, capable of operating in a mouse mode and in a touch mode, includes a body, a control unit and a switch. The body includes a first housing, a second housing and a hinge interconnecting the first and second housings. The body is movable between a flat position where the first and second housings are positioned side by side in a line, and an inverted-V position where the first and second housings co-define an included angle. The control unit provides a first input function which enables the input device to operate in the mouse mode and a second input function which enables the input device to operate in the touch mode. The switch is configured to have the control unit perform the first input function when the body is in the flat position and perform the second input function when the body is in the inverted-V position.

    摘要翻译: 能够以鼠标模式和触摸模式操作的计算机输入装置包括主体,控制单元和开关。 主体包括第一壳体,第二壳体和互连第一和第二壳体的铰链。 主体可以在第一和第二壳体以一条直线并排定位的平坦位置和第一和第二壳体共同限定夹角的倒V形位置之间移动。 控制单元提供第一输入功能,其使得输入设备能够以鼠标模式操作,以及使得输入设备能够在触摸模式下操作的第二输入功能。 该开关被配置为当身体处于平坦位置时使控制单元执行第一输入功能,并且当身体处于倒V位置时执行第二输入功能。

    Self-aligned stylus with high-sphericity and method of manufacturing the same
    47.
    发明授权
    Self-aligned stylus with high-sphericity and method of manufacturing the same 有权
    具有高球形度的自对准触针及其制造方法

    公开(公告)号:US08240057B2

    公开(公告)日:2012-08-14

    申请号:US12107495

    申请日:2008-04-22

    IPC分类号: G01B5/008

    CPC分类号: G01B1/00 G01B5/012

    摘要: A method of manufacturing a self-aligned stylus with high sphericity includes the steps of: forming a polymeric layer on a substrate; placing a sphere on the polymeric layer; softening the polymeric layer to make a portion of the sphere sink into the polymeric layer; forming a specific light absorbing layer on the polymeric layer; illuminating the sphere and the specific light absorbing layer with specific light such that the specific light is focused by the sphere to expose the polymeric layer to form an exposed portion and an unexposed portion; removing the specific light absorbing layer; and baking the polymeric layer and then removing the unexposed portion. A self-aligned stylus with high sphericity is also disclosed.

    摘要翻译: 制造具有高球形度的自对准触控笔的方法包括以下步骤:在基底上形成聚合物层; 将球体放置在聚合物层上; 软化聚合物层以使球体的一部分沉入聚合物层中; 在聚合物层上形成特定的光吸收层; 用特定光照射球体和特定光吸收层,使得特定的光被球体聚焦以暴露聚合物层以形成暴露部分和未曝光部分; 去除特定光吸收层; 并烘烤聚合物层,然后除去未曝光部分。 还公开了具有高球形度的自对准手写笔。

    FUSER MEMBER WITH FLUOROPOLYMER OUTER LAYER
    48.
    发明申请
    FUSER MEMBER WITH FLUOROPOLYMER OUTER LAYER 审中-公开
    具有氟聚合物外层的熔融部件

    公开(公告)号:US20110159276A1

    公开(公告)日:2011-06-30

    申请号:US12647573

    申请日:2009-12-28

    IPC分类号: B32B27/00 B32B5/00

    摘要: A fuser member comprising: a substrate comprising an outer substrate surface; and an outer layer comprising compatible first and second fluorothermoplastics disposed over the outer substrate surface, wherein the first fluorothermoplastic is a crosslinked polymer and the second fluorothermoplastic is a linear polymer and wherein the compatible first and second fluorothermoplastics form a semi-interpenetrating polymer network (SIPN). The SIPN provides a relatively compliant layer in comparison to use of the crosslinked polymer alone, and avoids the need for sintering of a layer formed from the linear polymer alone. The SIPN may be formed from an aqueous coated composition of polyperfluoroalkoxy-tetrafluoroethylene (PFA) and THV Fluoroplastics (FLC) polymers along with a soluble organic primary amine for crosslinking the THV Fluoroplastics (FLC).

    摘要翻译: 一种定影器构件,包括:衬底,其包括外部衬底表面; 以及外层,其包含设置在所述外基材表面上的相容的第一和第二含氟热塑性塑料,其中所述第一含氟热塑性材料为交联聚合物,所述第二氟热塑性塑料为线性聚合物,并且其中所述相容的第一和第二含氟热塑性塑料形成半互穿聚合物网络 )。 与单独使用交联聚合物相比,SIPN提供了相对顺应性的层,并且避免了单独由线性聚合物形成的层的烧结的需要。 SIPN可以由聚氟全氟烷氧基四氟乙烯(PFA)和THV氟塑料(FLC)聚合物的水性涂料组合物以及用于交联THV氟塑料(FLC)的可溶性有机伯胺形成。

    COMPOSITIONS AND METHODS FOR LABELING OF NUCLEIC ACID MOLECULES
    49.
    发明申请
    COMPOSITIONS AND METHODS FOR LABELING OF NUCLEIC ACID MOLECULES 审中-公开
    用于标记核酸分子的组合物和方法

    公开(公告)号:US20100168408A1

    公开(公告)日:2010-07-01

    申请号:US12649662

    申请日:2009-12-30

    IPC分类号: C07H21/02 C12P19/34

    摘要: The present invention is generally related to compositions, kits and methods for labeling nucleic acid molecules using reverse transcriptases, preferably multi-subunit reverse transcriptases such as ASLV reverse transcriptases. Specifically, the invention relates to methods, kits and compositions for to fluorescently labeling nucleic acid molecules during nucleic acid synthesis. The labeled nucleic acid molecules produced in accordance with the invention are particularly suited as labeled probes for nucleic acid detection and diagnostics.

    摘要翻译: 本发明通常涉及使用逆转录酶,优选多亚基逆转录酶(例如ASLV逆转录酶)来标记核酸分子的组合物,试剂盒和方法。 具体而言,本发明涉及用于在核酸合成期间荧光标记核酸分子的方法,试剂盒和组合物。 根据本发明产生的标记的核酸分子特别适用于用于核酸检测和诊断的标记探针。

    COMPOSITIONS AND METHODS FOR LABELING OF NUCLEIC ACID MOLECULES
    50.
    发明申请
    COMPOSITIONS AND METHODS FOR LABELING OF NUCLEIC ACID MOLECULES 审中-公开
    用于标记核酸分子的组合物和方法

    公开(公告)号:US20090176242A1

    公开(公告)日:2009-07-09

    申请号:US12405127

    申请日:2009-03-16

    IPC分类号: C12Q1/68 C12N9/00 C07H21/04

    摘要: The present invention is generally related to compositions, kits and methods for labeling nucleic acid molecules using reverse transcriptases, preferably multi-subunit reverse transcriptases such as ASLV reverse transcriptases. Specifically, the invention relates to methods, kits and compositions for fluorescently labeling nucleic acid molecules during nucleic acid synthesis. The labeled nucleic acid molecules produced in accordance with the invention are particularly suited as labeled probes for nucleic acid detection and diagnostics.

    摘要翻译: 本发明通常涉及使用逆转录酶,优选多亚基逆转录酶(例如ASLV逆转录酶)来标记核酸分子的组合物,试剂盒和方法。 具体地,本发明涉及在核酸合成期间荧光标记核酸分子的方法,试剂盒和组合物。 根据本发明产生的标记的核酸分子特别适用于用于核酸检测和诊断的标记探针。