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41.发明授权公开(公告)号：US07720120B2
公开(公告)日：2010-05-18
申请号：US12255367
申请日：2008-10-21
申请人： Robert N. Jacques
发明人： Robert N. Jacques
CPC分类号： H01S3/104 , G03F7/70025 , G03F7/70558 , H01S3/0057 , H01S3/034 , H01S3/2325
摘要： A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
摘要翻译： 激光控制系统包含振荡器气体室和放大器气体室。 第一电压输入被可操作地连接以将电脉冲传送到振荡器气体室内的第一对电极和放大器气体室内的第二对电极。 气室的输出是由梯形窗计算出的能量。 控制电路连接到第一电压输入端，用于修改第一电压输入。 反馈控制回路将气室的输出传送到控制电路，以修改第一电压输入。
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42.发明申请METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER 有权用于两台气体放电激光器激光控制的方法和装置公开(公告)号：US20100098123A1
公开(公告)日：2010-04-22
申请号：US12255367
申请日：2008-10-21
申请人： Robert N. Jacques
发明人： Robert N. Jacques
IPC分类号： H01S3/03
CPC分类号： H01S3/104 , G03F7/70025 , G03F7/70558 , H01S3/0057 , H01S3/034 , H01S3/2325
摘要： A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
摘要翻译： 激光控制系统包含振荡器气体室和放大器气体室。 第一电压输入被可操作地连接以将电脉冲传送到振荡器气体室内的第一对电极和放大器气体室内的第二对电极。 气室的输出是由梯形窗计算出的能量。 控制电路连接到第一电压输入端，用于修改第一电压输入。 反馈控制回路将气室的输出传送到控制电路，以修改第一电压输入。
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43.发明申请公开(公告)号：US20080232408A1
公开(公告)日：2008-09-25
申请号：US12082253
申请日：2008-04-09
CPC分类号： G03F7/70575 , H01S3/1055 , H01S3/225 , H01S3/2308
摘要： According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that ma y comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.
摘要翻译： 根据所公开的主题的实施例的方面，公开了一种方法和装置，其包括基于误差信号调整种子激光器中的气体放电与用于带宽控制的放大器激光器之间的差分定时，或用于控制另一个 除了带宽之外的激光操作参数，不利用任何光束放大控制，或者基于误差信号调整用于带宽控制的种子激光器和放大器激光器中的气体放电之间的差分定时，或用于除带宽以外的另一激光器操作参数的控制 同时利用除带宽控制之外的光束放大控制，并且基于误差信号调整种子激光器和放大器激光器中的气体放电之间的差分定时，或用于控制除带宽之外的另一个激光器操作参数，同时 利用基于误差信号的带宽控制的光束放大控制。
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公开(公告)号：US06872961B2
公开(公告)日：2005-03-29
申请号：US10112443
申请日：2002-03-29
IPC分类号： B23P19/033 , F16F15/00 , F16F15/02 , F16F15/027 , G03F7/20 , G05D19/02 , G01N21/86 , F16M13/00
CPC分类号： G03F7/709 , F16F15/005 , F16F15/02 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70833 , G05D19/02 , Y10T29/5313 , Y10T29/53174
摘要： A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration. A recursive least squares (RLS) method is used to identify the commanded motion from the laser interferometer signals. Vibration measurements are derived from the laser interferometer signals by removing the commanded motion portion of the signal.
摘要翻译： 一种用于减少运动部件振动的运动控制系统。 该系统包括位置控制驱动和振动控制驱动。 使用至少一个位置传感器来提供反馈信号，反馈信号又用于为位置控制驱动器和振动控制驱动器提供控制信号。 在优选实施例中，运动控制系统被应用于集成电路光刻步骤和扫描机的阶段。 位置控制驱动器是线性磁致动器，振动控制驱动器是电陶瓷致动器。 激光干涉仪位置监测系统用于测量舞台系统的位置，速度和加速度。 执行器将受控力（基于位置监控系统的测量）施加到每个阶段以控制舞台的运动。 来自干涉仪位置系统的信号也用于控制振动。 使用递归最小二乘法（RLS）方法来识别来自激光干涉仪信号的命令运动。 通过去除信号的指令运动部分，从激光干涉仪信号得到振动测量值。
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公开(公告)号：US6102426A
公开(公告)日：2000-08-15
申请号：US797004
申请日：1997-02-07
摘要： A sports implement includes an electroactive element such as a piezoceramic sheet attached to the implement and a shunt circuit attached to the electroactive element to counteract strain or alter stiffness of the implement to affect its performance. In a ski, one shunt circuit is neither a linear nor a highly tuned shunt, but is a low Q resonant inductive shunt tuned to a performance band of the ski to enhance dissipation of energy from of the electroactive element. The performance band includes at least one structural mode of the ski and a neighborhood of that mode. The neighborhood may include variations in the frequency of a first or higher free structural resonance which arise from production variations or size variations of the ski or its components. The neighborhood may also be selected to cover the range of frequencies that mode takes when driven by actual disturbances in use, such as the vibrations excited when skiing at a particular range of speeds, or with a particular set of conditions or combination of conditions of temperature, speed, snow and terrain. In other embodiments, the tuned band shunt control may be switched to remove a resonance, adapt performance to different situations, or enhance handling or comfort of the implement. Other embodiments include striking implements intended to hit a ball or object in play, such as golf clubs and tennis racquets, wherein the strain elements may alter the performance, feel or comfort of the implement.
摘要翻译： 运动器具包括电活性元件，例如附接到器具的压电陶瓷片，以及附接到电活性元件的分流电路，以抵消器具的应变或改变器件的刚度以影响其性能。 在滑雪板中，一个分流电路既不是线性的，也不是高度调谐的分流器，而是一个低Q谐振感应分流器，调谐到滑雪板的性能带，以增强电活性元件的能量耗散。 表演乐队包括滑雪板的至少一种结构模式和该模式的邻域。 该邻域可以包括由滑雪板或其部件的生产变化或尺寸变化引起的第一或更高自由结构共振频率的变化。 也可以选择该邻域来覆盖由使用中的实际扰动驱动的模式所采用的频率范围，例如在特定速度范围内滑雪时激发的振动，或者特定的一组条件或温度条件的组合 ，速度，雪地和地形。 在其他实施例中，可以切换调谐带分流控制以去除谐振，适应不同情况的性能，或增强器具的处理或舒适度。 其他实施例包括旨在击中游戏中的球或物体的打击工具，例如高尔夫球杆和网球拍，其中应变元件可改变工具的性能，感觉或舒适性。
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公开(公告)号：US5857694A
公开(公告)日：1999-01-12
申请号：US536067
申请日：1995-09-29
CPC分类号： A63C5/075 , A63B60/54 , A63B2208/12 , A63B53/00
摘要： A sports implement including an electroactive element, such as a piezoceramic sheet attached to the implement and a circuit attached to the electroactive element. The circuit may be a shunt, or may include processing such as amplification and phase control to apply a driving signal which may compensate for strain sensed in the implement, or may simply alter the stiffness to affect performance. In a ski, the electroactive element is located near to the root in a region of high strain to apply damping, and the element captures between about one and five percent of the strain energy of the ski. The region of high strain may be found by modeling mechanics of the sports implement, or may be located by empirically mapping the strain distribution which occurs during use of the implement. In other embodiments, the electroactive elements may remove resonances, adapt performance to different situations, or enhance handling or comfort of the implement. Other embodiments include striking implements intended to hit a ball or object in play, such as golf clubs and tennis racquets, wherein the strain elements may alter the performance, feel or comfort of the implement.
摘要翻译： 一种运动器具，其包括电活性元件，例如附接到所述器具的压电陶瓷片和附接到所述电活性元件的电路。 该电路可以是分流器，或者可以包括诸如放大和相位控制的处理以施加可以补偿在工具中感测到的应变的驱动信号，或者可以简单地改变刚度以影响性能。 在滑雪板中，电活性元件位于高应变区域的根部附近以施加阻尼，并且该元件捕获滑雪板的约百分之一至百分之五的应变能量。 高应变区域可以通过运动器具的建模力学来发现，或者可以通过经验地绘制在使用中发生的应变分布来定位。 在其它实施例中，电活性元件可以去除谐振，适应不同情况的性能，或增强器具的处理或舒适度。 其他实施例包括旨在击中游戏中的球或物体的打击工具，例如高尔夫球杆和网球拍，其中应变元件可改变工具的性能，感觉或舒适性。
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