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1.发明授权公开(公告)号：US08102889B2
公开(公告)日：2012-01-24
申请号：US12806308
申请日：2010-08-10
IPC分类号： H01S3/00
CPC分类号： H01S3/225 , H01S3/08022 , H01S3/09702 , H01S3/1301 , H01S3/134 , H01S3/2308 , H01S3/2366
摘要： A method and apparatus are disclosed for controlling bandwidth in a multi-portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset.
摘要翻译： 公开了一种用于控制多部分激光系统中的带宽的方法和装置，其包括向放大器激光系统部分提供线窄化种子脉冲的第一线窄化振荡器激光器系统部分，可以包括利用定时差分曲线来定义 第一激光系统操作参数而不是带宽和定时差，并且还在曲线上的期望点定义期望的时序差，其中曲线上的每个唯一操作点对应于相应的带宽值; 确定曲线上期望点处的定时差与曲线上的实际工作点的实际偏移; 确定实际偏移与对应于期望带宽的期望偏移之间的误差; 修改击发差分定时以消除实际偏移和所需偏移之间的误差。
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2.发明授权公开(公告)号：US07830934B2
公开(公告)日：2010-11-09
申请号：US11323604
申请日：2005-12-29
IPC分类号： H01S3/00
CPC分类号： H01S3/225 , H01S3/08022 , H01S3/09702 , H01S3/1301 , H01S3/134 , H01S3/2308 , H01S3/2366
摘要： A method and apparatus are disclosed for controlling bandwidth in a multi-portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset.
摘要翻译： 公开了一种用于控制多部分激光系统中的带宽的方法和装置，其包括向放大器激光系统部分提供线窄化种子脉冲的第一线窄化振荡器激光器系统部分，可以包括利用定时差分曲线来定义 第一激光系统操作参数而不是带宽和定时差，并且还在曲线上的期望点定义期望的时序差，其中曲线上的每个唯一操作点对应于相应的带宽值; 确定曲线上期望点处的定时差与曲线上的实际工作点的实际偏移; 确定实际偏移与对应于期望带宽的期望偏移之间的误差; 修改击发差分定时以消除实际偏移和所需偏移之间的误差。
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公开(公告)号：US20100074295A1
公开(公告)日：2010-03-25
申请号：US12592228
申请日：2009-11-20
申请人： William N. Partlo , Alexander I. Ershov , German Rylov , Igor V. Fomenkov , Daniel J.W. Brown , Christian J. Wittak , Rajasekhar M. Rao , Robert A. Bergstedt , John Fitzgerald , Richard L. Sandstrom , Vladimir B. Fleurov , Robert N. Jacques , Ed Danielewicz , Robin Swain , Edmond Arriola , Mike Wyatt , Walter Crosby
发明人： William N. Partlo , Alexander I. Ershov , German Rylov , Igor V. Fomenkov , Daniel J.W. Brown , Christian J. Wittak , Rajasekhar M. Rao , Robert A. Bergstedt , John Fitzgerald , Richard L. Sandstrom , Vladimir B. Fleurov , Robert N. Jacques , Ed Danielewicz , Robin Swain , Edmond Arriola , Mike Wyatt , Walter Crosby
IPC分类号： H01S3/22
CPC分类号： H01S3/0057 , G03F7/70341 , G03F7/70583
摘要： An apparatus and method are disclosed which may comprise a pulsed gas discharge laser lithography light source which may comprise a seed laser portion providing a seed laser output light beam of seed pulses; an amplifier portion receiving the seed laser output light beam and amplifying the optical intensity of each seed pulse to provide a high power laser system output light beam of output pulses; the amplifier portion may comprise a ring power amplifier comprising amplifier portion injection optics comprising at least one beam expanding prism, a beam reverser and an input/output coupler; the beam expansion optics and the output coupler may be mounted on an optics assembly with the beam expansion optics rigidly mounted with respect to the optics assembly and the input/output coupler mounted for relative movement with respect to the optics assembly for optical alignment purposes.
摘要翻译： 公开了一种可以包括脉冲气体放电激光光刻光源的装置和方法，脉冲气体放电激光光刻光源可以包括提供种子脉冲的种子激光输出光束的种子激光部分; 接收种子激光输出光束并放大每个种子脉冲的光强度的放大器部分，以提供输出脉冲的大功率激光系统输出光束; 放大器部分可以包括环形功率放大器，其包括放大器部分注入光学器件，其包括至少一个光束扩展棱镜，光束反向器和输入/输出耦合器; 光束扩展光学器件和输出耦合器可以安装在光学组件上，其中光束扩展光学器件相对于光学组件刚性地安装，并且输入/输出耦合器被安装成相对于用于光学对准目的的光学组件的相对运动。
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公开(公告)号：US20090067457A1
公开(公告)日：2009-03-12
申请号：US11900527
申请日：2007-09-11
IPC分类号： H01S3/10
CPC分类号： H01S3/225 , H01S3/1305 , H01S3/134
摘要： A method and apparatus is disclosed which may comprise: a gas discharge laser system energy controller which may comprise: a laser system energy controller providing a first laser operating parameter control signal based on an error signal related to a value of the output energy of the laser system compared to a target value for output energy and an energy controller model of the value of the first laser operating parameter necessary to change the value of the laser system output energy to the target value; a first laser system operating parameter control signal modifier providing a modification to the first laser system operating parameter control signal based upon a controller signal modification model of the impact of a second laser system operating parameter on the value of the first laser system operating parameter necessary to change the value of the output energy to the target value.
摘要翻译： 公开了一种方法和装置，其可以包括：气体放电激光系统能量控制器，其可以包括：激光系统能量控制器，其基于与激光器的输出能量的值相关的误差信号提供第一激光器操作参数控制信号 系统与输出能量的目标值相比，以及将激光系统输出能量的值改变为目标值所需的第一激光器操作参数的值的能量控制器模型; 第一激光系统操作参数控制信号修改器，其基于第二激光系统操作参数对第一激光系统操作参数的值的控制器信号修改模型，提供对第一激光系统操作参数控制信号的修改， 将输出能量的值更改为目标值。
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公开(公告)号：US06853653B2
公开(公告)日：2005-02-08
申请号：US10036925
申请日：2001-12-21
申请人： Ronald L. Spangler , Jacob P. Lipcon , John A. Rule , Robert N. Jacques , Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , John M. Algots
发明人： Ronald L. Spangler , Jacob P. Lipcon , John A. Rule , Robert N. Jacques , Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , John M. Algots
IPC分类号： B41C20060101 , B41C1/00 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01J3/10
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.
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公开(公告)号：US06598322B2
公开(公告)日：2003-07-29
申请号：US10042851
申请日：2002-01-09
IPC分类号： A43C1100
CPC分类号： A43B5/001 , A43B3/0005 , A43B11/00 , A43C11/00
摘要： A shoe having at least one elongated shape memory alloy element and an electric circuit which when energized will produce a tightening of the shoe upper around the foot of a wearer. In a preferred embodiment, the shoe in one of a pair of golf shoes and the circuit in the shoe is energized by a switch in the heel that is turned on by the golfer clicking his heels together. Typically the golfer does this prior to each important swing of a golf club. A battery contained in the shoe provides a power source to produce a current in the circuit that heats the shape memory alloy causing it to reduce its length providing the tightening of the shoe uppers.
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公开(公告)号：US20100098124A1
公开(公告)日：2010-04-22
申请号：US12255385
申请日：2008-10-21
申请人： Robert N. Jacques
发明人： Robert N. Jacques
IPC分类号： H01S3/03
CPC分类号： H01S3/104 , H01S3/0057 , H01S3/034 , H01S3/2325
摘要： A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
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8.发明申请公开(公告)号：US20100098122A1
公开(公告)日：2010-04-22
申请号：US12255347
申请日：2008-10-21
申请人： Robert N. Jacques
发明人： Robert N. Jacques
IPC分类号： H01S3/104
CPC分类号： H01S3/104 , G03F7/70025 , G03F7/70558 , H01S3/0057 , H01S3/034 , H01S3/2325
摘要： A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
摘要翻译： 激光控制系统包含振荡器气体室和放大器气体室。 第一电压输入被可操作地连接以将电脉冲传送到振荡器气体室内的第一对电极和放大器气体室内的第二对电极。 气室的输出是由梯形窗计算出的能量。 控制电路连接到第一电压输入端，用于修改第一电压输入。 反馈控制回路将气室的输出传送到控制电路，以修改第一电压输入。
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9.发明授权Method and apparatus for gas discharge laser bandwidth and center wavelength control 有权气体放电激光带宽和中心波长控制的方法和装置公开(公告)号：US07643522B2
公开(公告)日：2010-01-05
申请号：US11254282
申请日：2005-10-20
CPC分类号： H01S3/1055 , B82Y10/00 , G03F7/70033 , G03F7/70041 , H01S3/08072 , H01S3/097 , H01S3/10069 , H01S3/225
摘要： A gas discharge laser system bandwidth control mechanism and method of operation for controlling bandwidth in a laser output light pulse generated in the gas discharge laser system is disclosed which may comprise a bandwidth controller which may comprise an active bandwidth adjustment mechanism; a controller actively controlling the active bandwidth adjustment mechanism utilizing an algorithm implementing bandwidth thermal transient correction based upon a model of the impact of laser system operation on the wavefront of the laser light pulse being generated and line narrowed in the laser system as it is incident on the bandwidth adjustment mechanism. The controller algorithm may comprises a function of the power deposition history in at least a portion of an optical train of the gas discharge laser system, e.g., a linear function, e.g., a combination of a plurality of decay functions each comprising a respective decay time constant and a respective coefficient.
摘要翻译： 公开了一种气体放电激光器系统带宽控制机构和用于控制在气体放电激光器系统中产生的激光输出光脉冲中的带宽的操作方法，其可以包括带宽控制器，其可以包括有源带宽调整机构; 控制器主动地控制有源带宽调整机制，利用实现带宽热瞬变校正的算法，该算法基于激光系统操作对激光系统中产生的激光光脉冲的波前的影响的模型，并且在激光系统中入射时产生线窄 带宽调整机制。 控制器算法可以包括在气体放电激光系统的光学系列的至少一部分中的功率沉积历史的功能，例如线性函数，例如多个衰减函数的组合，每个衰减函数包括相应的衰减时间 常数和相应的系数。
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公开(公告)号：US07596164B2
公开(公告)日：2009-09-29
申请号：US11376364
申请日：2006-03-15
申请人： John P. Fallon , John A. Rule , Robert N. Jacques , Jacob P. Lipcon , William N. Partlo , Alexander I. Ershov , Toshihiko Ishihara , John Meisner , Richard M. Ness , Paul C. Melcher
发明人： John P. Fallon , John A. Rule , Robert N. Jacques , Jacob P. Lipcon , William N. Partlo , Alexander I. Ershov , Toshihiko Ishihara , John Meisner , Richard M. Ness , Paul C. Melcher
IPC分类号： H01S3/223
CPC分类号： H01S3/097 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/09702 , H01S3/0971 , H01S3/0975 , H01S3/10038 , H01S3/1055 , H01S3/225 , H01S3/2251 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
摘要翻译： 本发明提供了一种用于模块化高重复率两放电室紫外线气体放电激光器的控制系统。 在优选实施例中，激光器是具有主振荡器的生产线机器，该主振荡器产生在第二放电室中放大的非常窄的带状晶体束。 特别适用于双室气体放电激光系统的新型控制特征包括：（1）脉冲能量控制，具有纳秒定时精度（2）精确脉冲到脉冲波长控制，具有高速和极速波长调谐（3）快速响应气体 温度控制和（4）F2注入控制与新的学习算法。
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