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公开(公告)号：US20170153443A1
公开(公告)日：2017-06-01
申请号：US15162885
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati
CPC classification number: G02B26/0833 , B81B3/0083 , B81B2201/042 , G02B26/101 , G02B26/105 , G03B21/008
Abstract: A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.
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公开(公告)号：US12242051B2
公开(公告)日：2025-03-04
申请号：US17745186
申请日：2022-05-16
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Gianluca Mendicino , Enri Duqi , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region elastically suspended above the cavity; at least a first pair of driving arms coupled to the tiltable structure and carrying respective piezoelectric material regions which may be biased to cause a rotation thereof around at least one rotation axis; elastic suspension elements coupling the tiltable structure elastically to the fixed structure and which are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion; and a piezoresistive sensor configured to provide a detection signal indicative of the rotation of the tiltable structure. At least one test structure is integrated in the die to provide a calibration signal indicative of a sensitivity variation of the piezoresistive sensor in order to calibrate the detection signal.
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43.发明授权公开(公告)号：US12117608B2
公开(公告)日：2024-10-15
申请号：US17369145
申请日：2021-07-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli , Enri Duqi
CPC classification number: G02B26/101 , G02B1/002 , G02B26/0833 , G02B27/4233
Abstract: A MEMS micromirror device is formed in a package including a containment body and a lid transparent to a light radiation. The package forms a cavity housing a tiltable platform having a reflecting surface. A metastructure is formed on the lid and/or on the reflecting surface and includes a plurality of diffractive optical elements.
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公开(公告)号：US12066621B2
公开(公告)日：2024-08-20
申请号：US17720506
申请日：2022-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Andrea Barbieri , Marco Zamprogno , Luca Molinari
CPC classification number: G02B26/0858 , H02N2/028 , H02N2/062
Abstract: A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.
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公开(公告)号：US11620805B2
公开(公告)日：2023-04-04
申请号：US17750010
申请日：2022-05-20
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Fabio Bottinelli
IPC: G06V10/145 , G01S17/894 , G06V20/64 , G06V40/16
Abstract: A method of manufacturing an electronic module includes providing a base substrate having a first surface, providing a first supporting element having a first portion with an inclined top surface, and affixing the first supporting element to the first surface such that the inclined top surface is inclined with respect to the base substrate. A first reflector is coupled to the inclined top surface such that a rear surface of the first reflector is in physical contact with the inclined top surface of the first portion of the first supporting element, and a spacer structure is configured to form an interface for mounting lateral walls to the base substrate. A cap is positioned over and supported by the lateral walls to thereby define a chamber. The emitter, as well as a detector, are coupled to the first surface of the base substrate.
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Patent Agency Ranking
公开(公告)号：US11520138B2
公开(公告)日：2022-12-06
申请号：US16827282
申请日：2020-03-23
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.
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公开(公告)号：US11294168B2
公开(公告)日：2022-04-05
申请号：US16985818
申请日：2020-08-05
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the second main surface and including a suspended membrane of monocrystalline semiconductor material extending between the opening and the first main surface of the monolithic body. The suspended membrane includes a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, with the mobile mass having a width less than a width of the opening. A reflecting region extends over the mobile mass.
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48.发明申请公开(公告)号：US20220099960A1
公开(公告)日：2022-03-31
申请号：US17487166
申请日：2021-09-28
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.
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公开(公告)号：US10689251B2
公开(公告)日：2020-06-23
申请号：US16522301
申请日：2019-07-25
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati
Abstract: MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.
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公开(公告)号：US10649202B2
公开(公告)日：2020-05-12
申请号：US16225881
申请日：2018-12-19
Applicant: STMicroelectronics S.r.l.
Inventor： Sonia Costantini , Marta Carminati , Daniela Angela Luisa Gatti , Laura Maria Castoldi , Roberto Carminati
Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.
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