公开(公告)号：US20180124521A1

公开(公告)日：2018-05-03

申请号：US15629518

申请日：2017-06-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Sebastiano CONTI

IPC: H04R17/02 ,  B81C1/00 ,  B81B3/00 ,  H01L41/113 ,  H01L41/312 ,  H01L41/04 ,  H04R31/00

CPC classification number: H04R17/02 ,  B81B3/0037 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2207/012 ,  B81C1/00158 ,  G01L9/0042 ,  G01L9/0073 ,  H01L41/042 ,  H01L41/1132 ,  H01L41/1138 ,  H01L41/312 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R2201/003

Abstract: A MEMS sensor, in particular a microphone, of a piezoelectric type, formed in a membrane of semiconductor material accommodating a compliant portion, which extends from a first surface to a second surface of the membrane. The compliant portion has a Young's modulus lower than the rest of the membrane. A sensitive region having piezoelectric material extends on the first surface, over the compliant portion and is fixed at its ends to the membrane on opposite sides of the compliant portion. A third area of the membrane, arranged between the compliant portion and the second surface, forms a hinge element.

公开(公告)号：US20240179475A1

公开(公告)日：2024-05-30

申请号：US18513248

申请日：2023-11-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Fabio QUAGLIA ,  Marco FERRERA ,  Carlo Luigi PRELINI ,  Alessandro Stuart SAVOIA

IPC: H04R17/02 ,  H04R31/00

CPC classification number: H04R17/02 ,  H04R31/006 ,  H04R2201/003 ,  H04R2400/01

Abstract: MEMS device comprising: a signal processing assembly; a transduction module comprising a plurality of transducer devices; a stiffening structure at least partially surrounding each transducer device; one or more coupling pillars for each transducer device, extending on the stiffening structure and configured to physically and electrically couple the transduction module to the signal processing assembly, to carry control signals of the transducer devices. Each conductive coupling element has a section having a shape such as to maximize the overlapping surface with the stiffening structure around the respective transducer device. This shape includes hypocycloid with a number of cusps equal to or greater than three; triangular; quadrangular.

公开(公告)号：US20240034618A1

公开(公告)日：2024-02-01

申请号：US18487561

申请日：2023-10-16

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Fabio QUAGLIA

IPC: B81B7/00 ,  B81C1/00 ,  F16F15/00

CPC classification number: B81B7/0016 ,  B81C1/00825 ,  F16F15/007 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2207/03 ,  B81C2203/032 ,  F16F2226/042

Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

公开(公告)号：US20230320222A1

公开(公告)日：2023-10-05

申请号：US18329975

申请日：2023-06-06

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Carlo Luigi PRELINI

IPC: H10N30/20 ,  B81B3/00

CPC classification number: H10N30/2042 ,  B81B3/0018 ,  B81B3/0072 ,  B81B2201/032

Abstract: A MEMS device having a body with a first and a second surface, a first portion and a second portion. The MEMS device further has a cavity extending in the body from the second surface; a deformable portion between the first surface and the cavity; and a piezoelectric actuator arranged on the first surface, on the deformable portion. The deformable portion has a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region is adjacent to the first region and to the first portion of the body.

公开(公告)号：US20220169497A1

公开(公告)日：2022-06-02

申请号：US17538845

申请日：2021-11-30

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Alessandro Stuart SAVOIA ,  Domenico GIUSTI ,  Marco FERRERA ,  Fabio QUAGLIA

IPC: B81B3/00 ,  H01L41/047 ,  H01L41/083

Abstract: A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.

公开(公告)号：US20210347634A1

公开(公告)日：2021-11-11

申请号：US17240782

申请日：2021-04-26

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Carlo Luigi PRELINI

IPC: B81B3/00 ,  B81C1/00 ,  H04R19/02 ,  H04R1/02 ,  H04R7/18 ,  H04R7/04 ,  H04R3/00 ,  F16K31/00

Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

公开(公告)号：US20210346906A1

公开(公告)日：2021-11-11

申请号：US17381079

申请日：2021-07-20

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Andrea Nicola COLECCHIA ,  Claudio CRIPPA

IPC: B05B17/00 ,  B41J2/14 ,  B05B1/14 ,  B05B9/00 ,  B05B9/03

Abstract: A microfluidic device provided in a body accommodating a fluid containment chamber. A fluidic access channel and a drop emission channel are formed in the body and are in fluidic connection with the fluid containment chamber to form a fluidic path towards the body outside through a nozzle having an outlet section. An actuator is operatively coupled to the fluid containment chamber and is configured to cause ejection of fluid drops through the drop emission channel in an operating condition of the microfluidic device. The drop emission channel comprises a portion of reduced section having a smaller area than the outlet section of the nozzle.

公开(公告)号：US20210293597A1

公开(公告)日：2021-09-23

申请号：US17204664

申请日：2021-03-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gabriele GATTERE ,  Francesco RIZZINI ,  Luca GUERINONI ,  Lorenzo CORSO ,  Domenico GIUSTI

IPC: G01F1/84

Abstract: Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.

公开(公告)号：US20210206625A1

公开(公告)日：2021-07-08

申请号：US17208918

申请日：2021-03-22

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Dario PACI ,  Domenico GIUSTI ,  Irene MARTINI

IPC: B81B3/00 ,  H04N5/232 ,  H04N5/225 ,  B81B7/02

Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.

公开(公告)号：US20200326530A1

公开(公告)日：2020-10-15

申请号：US16847514

申请日：2020-04-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Enri DUQI ,  Dario PACI ,  Lorenzo BALDO ,  Domenico GIUSTI

IPC: G02B26/08 ,  B81B3/00 ,  H01L27/146

Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.