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公开(公告)号:US20170317660A1
公开(公告)日:2017-11-02
申请号:US15385448
申请日:2016-12-20
发明人: Tae Yoon KIM , Tae Kyung LEE , Moon Chul LEE , Sung Min CHO , Sang Kee YOON
CPC分类号: H03H9/17 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H9/54
摘要: A bulk acoustic wave resonator may include: an air cavity; an etching stop layer and an etching stop part, which define a lower boundary surface and a side boundary surface of the air cavity; and a resonating part formed on an approximately planar surface, which is formed by a upper boundary surface of the air cavity and a top surface of the etching stop part. A width of a top surface of the etching stop part may be greater than a width of a bottom surface of the etching stop part. A side surface of the etching stop part connecting the top surface of the etching stop part to the bottom surface of the etching stop part may be inclined.
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公开(公告)号:US20160231114A1
公开(公告)日:2016-08-11
申请号:US15010770
申请日:2016-01-29
发明人: Jong Woon KIM , Won HAN , Tae Yoon KIM
IPC分类号: G01C19/5705 , G01C19/5783
CPC分类号: G01C19/5712
摘要: An angular velocity sensor includes a mass body; a first frame provided outside of the mass body; a first flexible part connecting the mass body and the first frame to each other; a second flexible part connecting the mass body and the first frame to each other; a second frame provided outside of the first frame; a third flexible part connecting the first frame and the second frame to each other; and a fourth flexible part connecting the first frame and the second frame to each other, wherein the mass body is fixed to the first frame by the second flexible part so as to be rotation-displaceable and translation-displaceable, and the first frame is connected to the second frame by the fourth flexible part so as to be rotation-displaceable.
摘要翻译: 角速度传感器包括质量体; 设置在质量体外部的第一框架; 连接质量体和第一框架的第一柔性部件; 将所述质量体和所述第一框架彼此连接的第二挠性部件; 设置在所述第一框架外部的第二框架; 将第一框架和第二框架彼此连接的第三柔性部件; 以及将所述第一框架和所述第二框架彼此连接的第四柔性部件,其中,所述质量体通过所述第二柔性部件固定到所述第一框架,以便能够旋转移位和平移 - 可移位,并且所述第一框架连接 通过第四柔性部分到第二框架,以便可旋转移位。
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公开(公告)号:US20160069926A1
公开(公告)日:2016-03-10
申请号:US14698329
申请日:2015-04-28
发明人: Tae Yoon KIM , Seung Hoon HAN , Chang Hyun LIM
CPC分类号: G01P15/123 , B81B7/0029 , B81B2201/0235 , B81B2203/0109 , B81B2203/0118 , B81C1/00698 , G01P2015/0842
摘要: There is provided an acceleration sensor in which outer surfaces of a plurality of beams in which piezo-resistive elements are provided and upper portions of a mass body and a support body connected to the plurality of beams may be enclosed by a protective layer to prevent electrical disturbances from being transferred from an external environment to the piezo-resistive elements.
摘要翻译: 提供一种加速度传感器,其中设置有压阻元件的多个梁的外表面,连接到多个梁的质量体和支撑体的上部可以被保护层包围以防止电气 干扰从外部环境转移到压阻元件。
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公开(公告)号:US20150198626A1
公开(公告)日:2015-07-16
申请号:US14465390
申请日:2014-08-21
发明人: Tae Yoon KIM , Chang Hyun LIM , Jong Woon KIM
IPC分类号: G01P15/12
CPC分类号: G01P15/123 , G01P2015/0842 , G01P2015/0871
摘要: Embodiments of the invention provide an acceleration sensor, including a sensor part comprising a mass body part including a first mass body, a second mass body, and a connecting layer connecting the first mass body and the second mass body to each other, a flexible beam having the mass body part connected thereto to be displaceable, and a supporting part having the flexible beam connected thereto and supporting the mass body part to be floatable. The acceleration sensor further includes a cover coupled to the supporting part to cover the sensor part, being opposite to the first mass body to thereby form a cavity, and being opposite to the second mass body to thereby form a protrusion part.
摘要翻译: 本发明的实施例提供了一种加速度传感器,包括传感器部分,包括质量体部分,其包括第一质量体,第二质量体和将第一质量体和第二质量体彼此连接的连接层,柔性梁 具有连接到其上的质量体部分可移动,以及具有连接到其上的柔性梁并支撑质量体部分以可浮动的支撑部。 所述加速度传感器还包括与所述支撑部连接以覆盖所述传感器部分的盖,所述盖与所述第一质量体相对,从而形成空腔,并且与所述第二质量体相对,从而形成突出部。
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公开(公告)号:US20140118881A1
公开(公告)日:2014-05-01
申请号:US13740717
申请日:2013-01-14
发明人: Tae Yoon KIM , Young-Sik KANG , Sung Min CHO , Yeong Gyu LEE
摘要: There is provided a capacitor, including: a first substrate: a first capacitance generation part formed on the first substrate; a protective layer formed on the first capacitance generation part; a second capacitance generation part formed on the protective layer; and a second substrate formed on the second capacitance generation part.
摘要翻译: 提供一种电容器,包括:第一基板:形成在第一基板上的第一电容产生部; 形成在所述第一电容产生部上的保护层; 形成在所述保护层上的第二电容产生部; 以及形成在第二电容产生部上的第二基板。
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