公开(公告)号：US20090139265A1

公开(公告)日：2009-06-04

申请号：US12315131

申请日：2008-11-28

申请人： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Masaki Andou

发明人： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Masaki Andou

IPC分类号： C03B19/06

CPC分类号： C03B19/01 ,  C03B19/09

摘要： ProblemTo provide a method for manufacturing silica glass and device for manufacturing silica glass that facilitates the simple manufacture of a highly pure, bubble-free large flat-plate silica glass ingot in a short time.Solving MeansIn a method for manufacturing silica glass in which a silica glass powder is dropped from a powder supply device above a rotating furnace and layered in a centre portion of a furnace bottom, and then heat-fused and expanded in an outer circumferential direction of the furnace to form an ingot, the drop position and a fusion position of the silica glass powder is dispersed in the bottom portion of the furnace. The drop position of the silica glass powder is displaced from the centre portion of the bottom portion of the furnace, and the silica glass powder is preferably dispersed in the bottom portion of the furnace by the rotational movement of one or both of the powder supply device and the bottom portion of the furnace.

摘要翻译： 问题提供二氧化硅玻璃的制造方法和二氧化硅玻璃的制造装置，能够在短时间内简单地制造高纯度，无气泡的大平板状硅石玻璃锭。 解决方法在一种制造石英玻璃的方法中，其中将二氧化硅玻璃粉末从旋转炉上方的粉末供应装置落下并层叠在炉底的中心部分，然后在外圆周方向上热熔和膨胀 形成锭的炉子，石英玻璃粉末的落下位置和熔融位置分散在炉底部。 二氧化硅玻璃粉末的下落位置从炉底部的中心部分位移，石英玻璃粉末优选通过粉末供给装置中的一个或两个的旋转运动分散在炉底部 和炉底部分。

公开(公告)号：US20080216513A1

公开(公告)日：2008-09-11

申请号：US11919457

申请日：2006-04-27

申请人： Tatsuhiro Sato ,  Akira Fujinoki ,  Itsuo Araki

发明人： Tatsuhiro Sato ,  Akira Fujinoki ,  Itsuo Araki

IPC分类号： C03B19/00 ,  C03C3/06

CPC分类号： C03B32/00 ,  C03B23/20 ,  C03C3/06 ,  C03C23/007 ,  C03C23/0075 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/54

摘要： To provide a technique with which a quartz glass jig and a doped quartz glass jig are regenerated by completely removing the impurities which are attached to the surface and the impurities which have diffused into the interior from quartz glass jigs which have been used in semiconductor production processes and then carrying out working repair and removing the contamination from the working processes as well. After use, the impurities are removed from the aforementioned quartz glass jigs in the said purification treatment process which includes a purification treatment process in which the quartz glass jigs are subjected to a purification treatment in a gaseous atmosphere which includes a halogen element at a temperature within the region above a prescribed temperature.

摘要翻译： 为了提供通过完全去除已经用于半导体制造工艺中的石英玻璃夹具将附着在表面上的杂质和已经扩散到内部的杂质完全除去石英玻璃夹具和掺杂石英玻璃夹具的技术 然后进行工作维修和清除工作过程中的污染物。 使用后，在上述纯化处理工序中，从上述石英玻璃夹具中除去杂质，其中包括净化处理工艺，其中石英玻璃夹具在包含卤素元素的气氛中在温度范围内进行纯化处理 该区域高于规定温度。

公开(公告)号：US07015163B2

公开(公告)日：2006-03-21

申请号：US10399097

申请日：2001-10-11

申请人： Tatsuhiro Sato ,  Kazuo Koya

发明人： Tatsuhiro Sato ,  Kazuo Koya

IPC分类号： C03C3/078 ,  C03C3/085

CPC分类号： C03C3/062 ,  C03C3/076

摘要： It is an object of the present invention to provide a glass member resistant against plasma corrosion suitably used as a jig material in producing semiconductors, which exhibits excellent resistance against plasma corrosion, and which is free from the generation of particles. The above problem is solved by a glass member resistant to plasma corrosion, comprising a portion to be exposed to plasma gas, which is made of a glass material containing, as the essential component, one compound component selected from the group consisting of compounds expressed by one of the chemical formulae SiO2—Al2O3—CaO, SiO2—Al2O3—MgO, SiO2—BaO—CaO, SiO2—ZrO2—CaO, SiO2—TiO2—BaO, provided that the constitution ratio of the compound components is within the vitrification range.

摘要翻译： 本发明的目的是提供一种耐等离子体腐蚀的玻璃构件，其适用于制造半导体中的夹具材料，其具有优异的耐等离子体腐蚀性，并且不产生颗粒。 上述问题是通过耐等离子体腐蚀的玻璃构件来解决的，该玻璃构件包括暴露于等离子体气体的部分，该部分由玻璃材料制成，该玻璃材料含有一种选自由 其中一种化学式为SiO 2 -Al 2 O 3 -CaO，SiO 2 -Al 2 O 3， 2 O 3 -MgO，SiO 2 -BaO-CaO，SiO 2 -ZrO 2， -CaO，SiO 2 -TiO 2 -BaO，条件是化合物组分的构成比在玻璃化范围内。

公开(公告)号：US06887576B2

公开(公告)日：2005-05-03

申请号：US09935334

申请日：2001-08-22

申请人： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Akira Fujinoki ,  Kyoichi Inaki ,  Tomoyuki Shirai

发明人： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Akira Fujinoki ,  Kyoichi Inaki ,  Tomoyuki Shirai

IPC分类号： C03B19/01 ,  C03B19/06 ,  C03B19/14 ,  C03B32/00 ,  C03C1/00 ,  C03C3/06 ,  C03C21/00 ,  C03C23/00 ,  C30B25/12 ,  C30B31/14 ,  B32B17/06 ,  B32B9/00

CPC分类号： C30B31/14 ,  C03B19/01 ,  C03B19/066 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/30 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/32 ,  C30B25/12 ,  C30B35/00 ,  Y10T428/24496 ,  Y10T428/26 ,  Y10T428/315

摘要： An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.

摘要翻译： 本发明的目的是提供一种石英玻璃体，特别是用于制造具有优异的耐等离子体腐蚀性的半导体的等离子体反应用石英玻璃夹具，特别是对F系气态等离子体的优异的耐腐蚀性; 及其制造方法。 提供了由含有金属元素并且具有改善的等离子体腐蚀性的石英玻璃制成的体，其含有以每100cm 2小于100mm 2的投影面积表示的量的气泡和结晶相， SUP> 3 。

公开(公告)号：US06694297B2

公开(公告)日：2004-02-17

申请号：US09737486

申请日：2000-12-18

申请人： Tatsuhiro Sato

发明人： Tatsuhiro Sato

IPC分类号： G10L1300

CPC分类号： G10H1/0008 ,  G10H2240/091 ,  G10L13/00 ,  G11B27/105 ,  G11B27/34

摘要： The present invention has as its object to provide text information to a listener with voice when music is reproduced from a medium on which the text information is stored together with music data and to provide easily and smoothly use of the text information. The present invention is a text information read-out device for reading out text information from a medium on which text information is stored together with music data, including a text information extraction unit for extracting text information, a voice synthesizer obtaining voice data from the extracted text information, and a controller for controlling a read-out timing of the voice data in synchronism with reproduction of music data.

摘要翻译： 本发明的目的在于，当音乐从与音乐数据一起存储文本信息的介质再现时提供具有语音的收听者的文本信息，并且提供文本信息的容易且平滑的使用。 本发明是一种文本信息读出装置，用于从包含用于提取文本信息的文本信息提取单元的音乐数据中存储文本信息的介质读出文本信息，语音合成器从所提取的文本信息中获取语音数据 文本信息，以及用于与音乐数据的再现同步地控制语音数据的读出定时的控制器。

公开(公告)号：US06280522B1

公开(公告)日：2001-08-28

申请号：US09508695

申请日：2000-03-29

申请人： Hiroyuki Watanabe ,  Hiroyuki Miyazawa ,  Tatsuhiro Sato ,  Satoshi Soeta ,  Tetsuya Igarashi

发明人： Hiroyuki Watanabe ,  Hiroyuki Miyazawa ,  Tatsuhiro Sato ,  Satoshi Soeta ,  Tetsuya Igarashi

IPC分类号： C30B1322

CPC分类号： C03B19/095 ,  C03B2201/23 ,  C03B2201/24 ,  C30B15/10 ,  C30B35/002 ,  Y10S65/08

摘要： There is provided a quartz glass crucible for pulling a silicon single crystal and a production process for the crucible, wherein an inner surface of the crucible is crystallized without addition of impurities during pulling a silicon single crystal, thereby impurities serving as causes of crystal defects being not incorporated into the silicon single crystal, so that deterioration of its inner surface is suppressed to improve a crystallization ratio, and accordingly productivity of the quartz glass crucible as well as a quality of the silicon single crystal is improved, and the quartz glass crucible for pulling a silicon single crystal comprises a crucible base body (3) made of a translucent quartz glass layer and a synthetic quartz glass layer (4) formed on an inner wall surface of the crucible base body (3), wherein a portion encircled by a brown ring on an inner surface of the quartz glass crucible is uniformly crystallized during pulling the silicon single crystal.

摘要翻译： 提供了一种用于拉制硅单晶的石英玻璃坩埚和用于坩埚的制造方法，其中在拉取硅单晶时坩埚的内表面结晶而不添加杂质，从而导致晶体缺陷的原因是 不掺入到硅单晶中，从而抑制其内表面的劣化以提高结晶化率，从而提高了石英玻璃坩埚的生产率以及硅单晶的质量，并且提高了石英玻璃坩埚 拉硅单晶包括由半透明石英玻璃层制成的坩埚基体（3）和形成在坩埚基体（3）的内壁表面上的合成石英玻璃层（4），其中包围由 石英玻璃坩埚的内表面上的棕色环在拉制硅单晶时均匀结晶。

公开(公告)号：US5917103A

公开(公告)日：1999-06-29

申请号：US653131

申请日：1996-05-24

申请人： Hiroyuki Watanabe ,  Tatsuhiro Sato ,  Hiroshi Matsui

发明人： Hiroyuki Watanabe ,  Tatsuhiro Sato ,  Hiroshi Matsui

IPC分类号： C03B23/20 ,  C03B19/04 ,  C03B19/09 ,  C03B20/00 ,  C30B15/12

CPC分类号： C03B19/095 ,  C03B23/20 ,  C30B15/12 ,  Y10S65/08 ,  Y10T117/1052

摘要： Quartz powder is fed into a rotating mold to form a crucible-like quartz powder layer body with the help of centrifugal force in the mold. The layer is melted by heating through the inner surface with an arc discharge to manufacture an outer crucible member. A hollow cylindrical inner crucible member having a beveled lower edge is welded to the outer crucible member while a temperature of the inner surface portion of the outer crucible member remains at 1400.degree. C. or higher by a remaining heat.

摘要翻译： 在模具中借助于离心力将石英粉进料到旋转模具中以形成坩埚状石英粉体层体。 该层通过电弧放电通过内表面加热熔化，以制造外坩埚构件。 将外坩埚部件的内表面部分的温度通过余热保持在1400℃以上的状态下，将具有倾斜下边缘的中空圆柱形内坩埚部件焊接到外坩埚部件。

公开(公告)号：US5637284A

公开(公告)日：1997-06-10

申请号：US620447

申请日：1996-03-22

申请人： Tatsuhiro Sato ,  Hiroyuki Watanabe ,  Werner Ponto

发明人： Tatsuhiro Sato ,  Hiroyuki Watanabe ,  Werner Ponto

IPC分类号： C02F1/28 ,  C01F7/00 ,  C01G9/00 ,  C01G51/00 ,  C01G53/00 ,  C03B19/10 ,  C03B32/00 ,  C03C1/02 ,  C08K3/00 ,  C08K3/10 ,  C08K9/04 ,  C09C1/40 ,  C01B33/18

CPC分类号： C03B19/1095 ,  C01G3/006 ,  C01G51/006 ,  C01G53/006 ,  C01G9/006 ,  C03B32/00 ,  C03C1/022 ,  C01P2002/72 ,  C01P2002/74 ,  C01P2004/80 ,  C01P2006/40

摘要： A rotating cylindrical quartz glass tube is partitioned into at least 3 chambers comprising a pre-heating chamber, a reaction chamber, and a gas desorption chamber. The process comprises pre-heating the starting quartz powder by continuously supplying it into the pre-heating chamber, refining the powder by transferring it into the reaction chamber in which the powder is brought into contact with a chlorine-containing gas atmosphere, and transferring the powder into the gas desorption chamber; the chambers may be partitioned using a sectioning plate having an opening. Alkali metal elements such as sodium and potassium, as well as transition metal elements such as iron, copper, chromium, and nickel are removed from a powder of naturally occurring quartz. The process also removes alkaline earth metal elements such as magnesium and calcium. Furthermore, it is of high productivity because it can be operated continuously to yield high purity quartz powder at a low cost.

摘要翻译： 旋转的圆柱形石英玻璃管被分隔成至少3个腔室，包括预热室，反应室和气体解吸室。 该方法包括通过将起始石英粉连续地供应到预热室中来预热起始石英粉末，通过将粉末转移到其中与含氯气体气氛接触的反应室中来精炼粉末，并将 粉末进入气体解吸室; 可以使用具有开口的分段板来分隔室。 碱性金属元素如钠和钾，以及过渡金属元素如铁，铜，铬和镍从天然存在的石英粉中去除。 该方法还除去碱土金属元素如镁和钙。 此外，由于可以连续运转以低成本生产高纯度石英粉，所以生产率高。