公开(公告)号：US6035893A

公开(公告)日：2000-03-14

申请号：US882291

申请日：1997-06-25

申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Kosuke Yokoyama ,  Shigeaki Tanaka

发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Kosuke Yokoyama ,  Shigeaki Tanaka

IPC分类号： F16K1/52 ,  F15B13/00 ,  F15B13/08 ,  F15C3/00 ,  F16K27/00 ,  G05D7/00 ,  G05D7/06 ,  F16K11/10

CPC分类号： F15B13/0814 ,  F15B13/0825 ,  F15B13/0835 ,  F15B13/0871 ,  F15B13/0892 ,  F16K27/003 ,  Y10T137/87249 ,  Y10T137/87684 ,  Y10T137/87877 ,  Y10T137/87885

摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.

摘要翻译： 阀主体内部形成有从其后端面延伸到第一阀致动器的主通道，以及分别经由第二和第三阀致动器与主通道连通的两个子通道。 阀主体具有向前延伸并且安装有第一阀致动器的倾斜面。

公开(公告)号：US5850853A

公开(公告)日：1998-12-22

申请号：US630081

申请日：1996-04-09

申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

IPC分类号： B01J4/00 ,  C30B25/14 ,  C30B31/16 ,  F16K31/122 ,  F16K31/42

CPC分类号： C23C16/45561 ,  B01J4/008 ,  C30B25/14 ,  C30B31/16 ,  F16K31/1226 ,  F16K31/42 ,  Y10T137/87684

摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

摘要翻译： 流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和多个分支控制线（L1，L2 ...），用于将多种类型的流体（G1，G2 ...）馈送到耦合到 主控制线和并入分支控制线（L1，L2 ...）中的多个阀组件（V），用于切换供给到处理装置（C）中的流体（G1，G2 ...）。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀（V“） 阀（V'）将工作流体（A）输送到流体压力致动器（1）中。

公开(公告)号：US08662471B2

公开(公告)日：2014-03-04

申请号：US12935119

申请日：2009-03-26

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

IPC分类号： F16K31/02

CPC分类号： F16K31/0658 ,  F16K31/0675 ,  H01F7/1816 ,  H01F2007/1822

摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.

摘要翻译： 提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。 提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。 双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

公开(公告)号：US20110121217A1

公开(公告)日：2011-05-26

申请号：US12935119

申请日：2009-03-26

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Tsuyoshi Tanigawa ,  Michio Yamaji ,  Nobukazu Ikeda ,  Ryousuke Dohi

IPC分类号： F16K31/02

CPC分类号： F16K31/0658 ,  F16K31/0675 ,  H01F7/1816 ,  H01F2007/1822

摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.

摘要翻译： 提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。 提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。 双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

公开(公告)号：US07416165B2

公开(公告)日：2008-08-26

申请号：US10546032

申请日：2004-02-09

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Michio Yamaji ,  Masafumi Kitano ,  Akihiro Morimoto

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Michio Yamaji ,  Masafumi Kitano ,  Akihiro Morimoto

IPC分类号： F16K31/122 ,  F16K7/17

CPC分类号： F16K7/16 ,  F16K51/02

摘要： A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.

摘要翻译： 隔膜阀1设置有主体2，主体2具有形成在通道之间的流入通道6，流出通道7和阀座8; 隔膜3安装在主体2中并允许搁置在阀座8上并远离阀座8; 以及安装在主体2上的驱动装置4，以允许隔膜3搁置在阀座8上并远离阀座8，其中预定厚度的合成树脂膜5涂覆在上述主体2的流体接触部分25上 和隔膜3.根据本发明的隔膜阀防止由热分解产生的物质的积聚和粘附引起的阀构件的腐蚀，并且防止由所产生的物质引起的堵塞，并且当应用于真空排气系统时防止阀座泄漏 的半导体制造设施。

公开(公告)号：US20050109967A1

公开(公告)日：2005-05-26

申请号：US11011379

申请日：2004-12-15

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Eiji Ideta ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Eiji Ideta ,  Takashi Hirose

IPC分类号： F04F1/08 ,  F16K7/14 ,  F16K7/16 ,  F16K25/00 ,  F16K27/00 ,  F16K31/02 ,  F16K47/00 ,  H04B17/00 ,  H04W4/22 ,  H04W48/12 ,  H04W74/08

CPC分类号： F16K25/005 ,  F16K7/14 ,  F16K7/16 ,  F16K27/00 ,  H04W4/90 ,  H04W48/12 ,  H04W74/006 ,  H04W74/0833 ,  H04W76/50

摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

公开(公告)号：US06615871B2

公开(公告)日：2003-09-09

申请号：US10277147

申请日：2002-10-22

申请人： Tadahiro Ohmi ,  Hiroshi Morokoshi ,  Michio Yamaji ,  Shigeaki Tanaka ,  Keiji Hirao ,  Yuji Kawano ,  Takashi Hirose ,  Kosuke Yokoyama ,  Michio Kuramochi ,  Masayuki Hatano ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Hiroshi Morokoshi ,  Michio Yamaji ,  Shigeaki Tanaka ,  Keiji Hirao ,  Yuji Kawano ,  Takashi Hirose ,  Kosuke Yokoyama ,  Michio Kuramochi ,  Masayuki Hatano ,  Nobukazu Ikeda

IPC分类号： F16K1110

CPC分类号： F15B13/0817 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F15B2013/006 ,  Y10T137/87249 ,  Y10T137/87265 ,  Y10T137/87885

摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

摘要翻译： 设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开 - 关装置具有二通阀， 开口阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。 所有类型的开 - 关装置的双口阀的主体构造相同，并且每个在其底面具有入口和出口。 所有类型的开关装置的三通阀的主体的结构相同，并且在其底面中形成有入口，总是与入口连通的出口以及入口 - 出口开口。

公开(公告)号：US06289923B1

公开(公告)日：2001-09-18

申请号：US09463514

申请日：2000-06-02

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

IPC分类号： G05D706

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.

摘要翻译： 公开了一种改进的，尺寸较小的低成本的气体供应系统，其配备有例如半导体制造设备中使用的压力式流量控制单元。 提高瞬态流量特性，防止气体开始时气体过冲，提高设备的流量控制精度和可靠性。 这消除了产品或半导体的不均匀性并提高了生产效率。 配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体，气体流量被控制以供应气体 通过孔口相关阀进行气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置在控制阀之间的压力检测器 所述控制阀和所述节流孔相关阀，设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中，基于由所述压力检测器检测到的压力P1，流量Qc 用公式Qc = KP1（K：常数）计算，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

公开(公告)号：US06158679A

公开(公告)日：2000-12-12

申请号：US284372

申请日：1999-06-16

申请人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Osamu Fukada ,  Susumu Ozawa ,  Yoshihiro Satou ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

发明人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Osamu Fukada ,  Susumu Ozawa ,  Yoshihiro Satou ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

IPC分类号： G01F1/40 ,  G05D7/01 ,  A62C31/02

CPC分类号： G01F1/40 ,  G05D7/0186

摘要： An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the downstream side of the orifice to the upstream pressure P1 and that permits adjustment with ease of flow characteristics among a plurality of orifices. The orifice comprises an inlet taper 1 in the shape of a bugle and a short narrowed straight section 2 adjoining the inlet taper 1, both formed by cutting one opening end of a preliminary hole 6 made in an orifice plate D, and further comprises a short inner taper 3 and an enlarged straight section 4 connecting with the taper 3 which are formed by enlarging the preliminary hole 6 at the other opening end, the short inner taper 3 adjoining the narrowed straight section 2 on one side and neighboring the enlarged straight section 4 on the other side.

摘要翻译： PCT No.PCT / JP98 / 03621 Sec。 371日期1999年6月16日第 102（e）1999年6月16日PCT PCT 1998年8月13日PCT公布。 出版物WO99 /​​ 09324 日期1999年2月25日，一种用于压力式流量控制器的孔口，其可以通过简单的方法以低成本生产，其在孔口上游侧的压力P1和流量 - 在孔的下游侧的压力P2的压力比P2 / P1的宽范围到上游压力P1，并且允许在多个孔中容易地调节流动特性。 孔口包括一个具有插针形状的入口锥形1和邻近入口锥形1的短缩窄直线部分2，两者都是通过切割在孔板D中制成的预备孔6的一个开口端而形成的，还包括一个短 内圆锥体3和与锥体3连接的扩大的直线部分4，其通过在另一个开口端扩大预备孔6而形成，短内锥形件3在一侧邻接变窄的直线部分2并且与扩大的直线部分4相邻 另一方面。

公开(公告)号：US06618922B2

公开(公告)日：2003-09-16

申请号：US10097872

申请日：2002-03-15

申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara

发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara

IPC分类号： B25B2714

CPC分类号： F16K27/003 ,  Y10T29/49895 ,  Y10T29/49899 ,  Y10T29/49902 ,  Y10T29/53913 ,  Y10T29/53978

摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.

摘要翻译： 使用第一和第二两个间隔夹具81，每个具有在其底表面上形成有长方体的平行六面体81a，突出部82以等于参考孔106之间的预定间隔的间隔并排布置。首先， 第一夹具81装配在下部构件31,32,33的前参考孔106中，第二夹具82的突起82装配在下部构件的后部参考孔106中。 具有矩形框架形式的直角保持夹具84，其内侧面可分别与第一夹具81的前侧面，第二夹具81的后侧面和第二夹具81的左右侧面接触 两个夹具81围绕两个夹具81的主体81a配合，以将孔106的布置调整成直角。 在这种状态下，下部构件通过拧紧螺钉构件110而固定到支撑构件。