公开(公告)号：US06615871B2

公开(公告)日：2003-09-09

申请号：US10277147

申请日：2002-10-22

申请人： Tadahiro Ohmi ,  Hiroshi Morokoshi ,  Michio Yamaji ,  Shigeaki Tanaka ,  Keiji Hirao ,  Yuji Kawano ,  Takashi Hirose ,  Kosuke Yokoyama ,  Michio Kuramochi ,  Masayuki Hatano ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Hiroshi Morokoshi ,  Michio Yamaji ,  Shigeaki Tanaka ,  Keiji Hirao ,  Yuji Kawano ,  Takashi Hirose ,  Kosuke Yokoyama ,  Michio Kuramochi ,  Masayuki Hatano ,  Nobukazu Ikeda

IPC分类号： F16K1110

CPC分类号： F15B13/0817 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F15B2013/006 ,  Y10T137/87249 ,  Y10T137/87265 ,  Y10T137/87885

摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

摘要翻译： 设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开 - 关装置具有二通阀， 开口阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。 所有类型的开 - 关装置的双口阀的主体构造相同，并且每个在其底面具有入口和出口。 所有类型的开关装置的三通阀的主体的结构相同，并且在其底面中形成有入口，总是与入口连通的出口以及入口 - 出口开口。

公开(公告)号：US5983933A

公开(公告)日：1999-11-16

申请号：US974550

申请日：1997-11-19

申请人： Tadahiro Ohmi ,  Yuji Kawano ,  Keiji Hirao ,  Hisashi Tanaka ,  Naoya Masuda ,  Yukio Minami ,  Masayuki Hatano ,  Shigeaki Tanaka ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Michio Kuramochi ,  Nobukazu Ikeda ,  Shigeru Itoi ,  Michihiro Kashiwa

发明人： Tadahiro Ohmi ,  Yuji Kawano ,  Keiji Hirao ,  Hisashi Tanaka ,  Naoya Masuda ,  Yukio Minami ,  Masayuki Hatano ,  Shigeaki Tanaka ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Michio Kuramochi ,  Nobukazu Ikeda ,  Shigeru Itoi ,  Michihiro Kashiwa

IPC分类号： F16K27/00 ,  F15B13/00 ,  F15B13/08 ,  F17D1/02 ,  F16K3/00

CPC分类号： F15B13/0832 ,  F15B13/0817 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F16K27/003 ,  Y10T137/87249 ,  Y10T137/87684 ,  Y10T137/87917

摘要： A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

摘要翻译： 具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件，该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件，具有通道， 所述阀的端部的出口与与其相邻的另一阀的入口连通，具有与所述另一个阀的出口连通的通道的流出通道形成构件，以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。

公开(公告)号：US6035893A

公开(公告)日：2000-03-14

申请号：US882291

申请日：1997-06-25

申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Kosuke Yokoyama ,  Shigeaki Tanaka

发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Kosuke Yokoyama ,  Shigeaki Tanaka

IPC分类号： F16K1/52 ,  F15B13/00 ,  F15B13/08 ,  F15C3/00 ,  F16K27/00 ,  G05D7/00 ,  G05D7/06 ,  F16K11/10

CPC分类号： F15B13/0814 ,  F15B13/0825 ,  F15B13/0835 ,  F15B13/0871 ,  F15B13/0892 ,  F16K27/003 ,  Y10T137/87249 ,  Y10T137/87684 ,  Y10T137/87877 ,  Y10T137/87885

摘要： A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly downward and having the first valve actuator mounted thereon.

摘要翻译： 阀主体内部形成有从其后端面延伸到第一阀致动器的主通道，以及分别经由第二和第三阀致动器与主通道连通的两个子通道。 阀主体具有向前延伸并且安装有第一阀致动器的倾斜面。

公开(公告)号：US06014498A

公开(公告)日：2000-01-11

申请号：US35345

申请日：1998-03-05

申请人： Nobukazu Ikeda ,  Keiji Hirao ,  Yuji Kawano ,  Masayuki Hatano ,  Yukio Minami ,  Hiroshi Morokoshi

发明人： Nobukazu Ikeda ,  Keiji Hirao ,  Yuji Kawano ,  Masayuki Hatano ,  Yukio Minami ,  Hiroshi Morokoshi

IPC分类号： F16K27/00 ,  F16K49/00 ,  F24H1/10 ,  H05B3/06

CPC分类号： F16K49/00

摘要： A device for heating a fluid control apparatus comprises a tape heater disposed on at least one of opposite lateral sides of the fluid control apparatus, and a plurality of brackets each comprising a bottom wall fastened to a panel with a screw and at least one side wall for holding the tape heater in contact with a fluid controller. The bottom wall of each of the brackets is formed with a screw hole, and each bracket is attached to the panel and adjustable in position.

摘要翻译： 用于加热流体控制装置的装置包括设置在流体控制装置的相对侧面中的至少一个上的带式加热器，以及多个托架，每个托架包括用螺钉紧固到面板的底壁和至少一个侧壁 用于保持带式加热器与流体控制器接触。 每个托架的底壁形成有一个螺孔，并且每个支架附接到面板上并且可调整的位置。

公开(公告)号：US20090165534A1

公开(公告)日：2009-07-02

申请号：US12281564

申请日：2007-03-07

申请人： Gisuke Kohno ,  Teruo Hon'Iden ,  Akihiro Morimoto ,  Naofumi Yasumoto ,  Koji Kawada ,  Yutaka Ueji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Michio Kuramochi ,  Yoshiyuki Kindai ,  Kazuhiro Nagano ,  Toshiaki Wada

发明人： Gisuke Kohno ,  Teruo Hon'Iden ,  Akihiro Morimoto ,  Naofumi Yasumoto ,  Koji Kawada ,  Yutaka Ueji ,  Nobukazu Ikeda ,  Masayuki Hatano ,  Michio Kuramochi ,  Yoshiyuki Kindai ,  Kazuhiro Nagano ,  Toshiaki Wada

IPC分类号： G01M3/08

CPC分类号： G01M3/2815

摘要： A method for testing leakage of a pipe passage employs a flow rate of gas used in testing supplied to the inside of a pipe passage undergoing testing hermetically sealed on one side while detecting flow rate with a flow measuring device and pressure with a pressure detector, and detecting temperature of the gas used, and inputting the detected values of pressure, flow rate and temperature into a computation treatment apparatus, and internal capacity VL of the pipe passage is computed as VL=(supplied flow rate Q×pressure applied time Δt)/(pressure rise value ΔP2), and next, the volume QL leaked from the pipe passage is computed as QL=(pressure drop value ΔP2′×internal capacity VL)/(pressure drop time Δt′).

摘要翻译： 用于测试管道通道泄漏的方法采用供给到通过密封在一侧进行密封的管道内部的测试中使用的气体流量，同时利用流量测量装置和压力检测器检测流量，以及 检测所使用的气体的温度，并将检测出的压力，流量和温度的值输入计算处理装置，并且计算管道内部容量VL为VL =（供给流量Qx压力施加时间Deltat）/（压力 上升值DeltaP2），接下来，从管道泄漏的体积QL计算为QL =（压降值DeltaP2'内部容量VL）/（压降时间Deltat'）。

公开(公告)号：US06704696B1

公开(公告)日：2004-03-09

申请号：US09354099

申请日：1999-07-15

申请人： Michio Kuramochi ,  Masayuki Hatano ,  Hiroshi Ogawa

发明人： Michio Kuramochi ,  Masayuki Hatano ,  Hiroshi Ogawa

IPC分类号： G06G748

CPC分类号： F16K27/003

摘要： A designing apparatus comprises symbol mark memory for storing fluid controllers usable in fluid control devices in terms of symbol marks representing the functions, fluid channels and contours of the controllers, and a flowchart preparing device for preparing a flowchart of a fluid control device represented by symbol marks. The flowchart preparing device successively selects controllers, such as valves and massflow controllers, from a symbol mark file in the memory, arranges the selected controllers on a screen as suitably positioned, automatically selects a suitable coupling member for interconnecting adjacent two of the controllers from a coupling member data file and automatically arranges te controllers and the coupling members thus selected to prepare a flowchart.

摘要翻译： 设计装置包括符号标记存储器，用于存储可用于流体控制装置中的流体控制器，该符号标记表示控制器的功能，流体通道和轮廓，以及用于制备由符号表示的流体控制装置的流程图的流程图准备装置 分数。 流程图制备装置从存储器中的符号标记文件连续地选择诸如阀和质量流量控制器的控制器，将所选择的控制器布置在适当定位的屏幕上，自动选择合适的联接构件，用于将相邻的两个控制器从 耦合构件数据文件，并自动布置te控制器和如此选择的耦合构件以制备流程图。

公开(公告)号：US08901012B2

公开(公告)日：2014-12-02

申请号：US13599358

申请日：2012-08-30

申请人： Masayuki Hatano ,  Hiroshi Tokue

发明人： Masayuki Hatano ,  Hiroshi Tokue

IPC分类号： C23C16/52 ,  H01L21/67 ,  C23C16/44

CPC分类号： C23C16/52 ,  B82Y10/00 ,  B82Y40/00 ,  C23C16/4401 ,  G03F7/0002 ,  H01L21/6715

摘要： According to one embodiment, a semiconductor manufacturing apparatus includes a substrate stage, a transfer unit, and a control unit. A substrate is settable on the substrate stage. The transfer unit is configured to transfer a pattern having an uneven configuration onto a major surface of the substrate by attachably and removably holding a template. The pattern is provided in the transfer surface. The control unit is configured to acquire information relating to a number of foreign objects on the major surface prior to the transferring of the pattern. The control unit adds the number for a plurality of the substrates including the pattern transferred by the transfer unit. The control unit causes the transfer unit not to implement the transferring of the pattern in the case where the sum has reached the upper limit.

摘要翻译： 根据一个实施例，半导体制造装置包括基板台，转印单元和控制单元。 衬底可在衬底台上设置。 转印单元被配置为通过可附接地和可移除地保持模板将具有不均匀构造的图案转印到基板的主表面上。 转印面上设有图案。 控制单元被配置为在传送图案之前获取与主表面上的多个异物相关的信息。 控制单元添加包括由传送单元传送的图案的多个基板的数量。 在总和达到上限的情况下，控制单元使得传送单元不执行图案的传送。

公开(公告)号：US5737162A

公开(公告)日：1998-04-07

申请号：US693351

申请日：1996-08-06

申请人： Hiroki Ito ,  Takashi Moriyama ,  Kenji Kamei ,  Suenobu Hamano ,  Etsuo Nitta ,  Kazuhiko Arai ,  Naoaki Takeji ,  Koji Takahata ,  Masayuki Hatano

发明人： Hiroki Ito ,  Takashi Moriyama ,  Kenji Kamei ,  Suenobu Hamano ,  Etsuo Nitta ,  Kazuhiko Arai ,  Naoaki Takeji ,  Koji Takahata ,  Masayuki Hatano

IPC分类号： H01H33/14 ,  H01H33/59 ,  H02H3/00

CPC分类号： H01H33/596 ,  H01H33/143

摘要： An objective of this invention is to provide a DC circuit breaking device having functions for transmitting direct currents to an electric power system and interrupting direct currents to the electric power system under abnormal conditions such as grounding and short-circuits, where the DC circuit breaking device can minimize the capacity of a condenser for the commuting circuit while rapidly changing the arc voltage to cause arc currents to be quickly extended and vibrated in order to interrupt direct currents in a short arc time. This DC circuit breaking device includes a main DC circuit breaker for interrupting the transmission of direct currents to an electric power system and a DC circuit breaker that is connected in series to the main DC circuit breaker and which is smaller than the main DC circuit breaker. The circuit breaking device also includes a commutation circuit that is connected in parallel to the DC circuit breaker and the small DC circuit breaker which are connected together in series and which is constituted by a reactor and a condenser. The circuit breaking device also includes a surge absorber for absorbing a surged voltage applied to for the condenser.

摘要翻译： 本发明的目的是提供一种直流断路装置，其具有在直流断路装置等异常条件下向电力系统发送直流电流和中断到电力系统的直流的功能。 可以最小化通勤电路的电容器的容量，同时快速改变电弧电压，使电弧电流迅速延伸和振动，以便在短时间内中断直流电流。 该DC断路装置包括用于中断与电力系统的直流的传输的主DC断路器和与主DC断路器串联连接并且小于主DC断路器的DC断路器。 断路装置还包括与DC断路器和小型DC断路器并联连接的换向电路，它们串联连接在一起并且由反应器和冷凝器构成。 断路装置还包括用于吸收施加到冷凝器的浪涌电压的浪涌吸收器。

公开(公告)号：US08550801B2

公开(公告)日：2013-10-08

申请号：US13230554

申请日：2011-09-12

申请人： Yohko Furutono ,  Shinji Mikami ,  Masayuki Hatano ,  Tetsuro Nakasugi

发明人： Yohko Furutono ,  Shinji Mikami ,  Masayuki Hatano ,  Tetsuro Nakasugi

IPC分类号： B29C59/02

CPC分类号： B29C59/022 ,  B29C35/0888 ,  B29C2035/0827 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： In one embodiment, an imprint apparatus includes a template holding part configured to hold a template for imprint. The apparatus further includes a template moving part configured to move the template to press the template onto a light curing resin on a transfer target substrate or to demold the template from the light curing resin. The apparatus further includes a light source configured to irradiate the light curing resin with light to cure the light curing resin. The apparatus further includes a demold control part configured to control a demold speed or a demold angle of the template, based on a position of a shot region from which the template is to be demolded, when demolding the template from the light curing resin.

摘要翻译： 在一个实施例中，压印装置包括被配置为保持用于印记的模板的模板保持部分。 该装置还包括模板移动部件，其构造成移动模板以将模板按压在转印目标基板上的光固化树脂上，或者从光固化树脂脱模模板。 该装置还包括配置成用光照射光固化树脂以固化光固化树脂的光源。 该设备还包括脱模控制部件，当脱模模板从光固化树脂脱模时，该脱模控制部件被配置为基于模板从其脱模的喷射区域的位置来控制模板的脱模速度或脱模角度。

公开(公告)号：US08420422B2

公开(公告)日：2013-04-16

申请号：US13041917

申请日：2011-03-07

申请人： Masafumi Asano ,  Ryoichi Inanami ,  Masayuki Hatano

发明人： Masafumi Asano ,  Ryoichi Inanami ,  Masayuki Hatano

IPC分类号： H01L21/00

CPC分类号： H01L22/20 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L22/12

摘要： According to the embodiments, a distribution of a recess portion shape is calculated based on a result obtained by measuring the recess portion shape of a first projection and recess pattern formed on a surface of a template. Next, a distribution of an application amount of a curing agent to a processing target layer is calculated based on the distribution of the recess portion shape, and the curing agent is applied to the processing target layer based on this distribution of the application amount of the curing agent. Next, a second projection and recess pattern is formed by transferring the first projection and recess pattern onto the curing agent by causing the curing agent to cure in a state where the first projection and recess pattern is in contact with the curing agent.

摘要翻译： 根据实施例，基于通过测量形成在模板的表面上的第一突起和凹部图案的凹部形状获得的结果来计算凹部形状的分布。 接下来，基于凹部形状的分布计算固化剂的涂布量到处理对象层的分布，并且基于该涂布量的分布将固化剂施加到处理对象层 固化剂。 接下来，通过使固化剂在第一突起和凹部图案与固化剂接触的状态下固化而将第一突起和凹陷图案转印到固化剂上形成第二突起和凹陷图案。